M355269 八、新型說明： 【新型所屬之技術領域】 本創作是有關於一種高架地板(raised floor)，且特別是 有關於一種裝設在無塵室的高架地板。 【先前技術】 隨著科技的進步，在高製造品質的需求下，無塵室(dean room)的要求標準越來越高。無塵室更是半導體製造業不可 或缺的4要⑤施’且與產品的品質、可靠性及良率息息相關。 、，承上所述’目前亂流型側回風式無塵室的地板多是先於 =水泥地板塗佈-層具防水功能之環氧(ep㈣材料層，若 2動行走車(AGV)行走之需求則再於環氧材料層上舖設 f度^厚之鐵板’並藉由螺絲將鐵板螺接於無塵室地面。宜 者半導體製程越來越精密，半導體設備亦隨之精密 提升。大型化之趨勢’無塵室地板的負荷重量大幅 車會约w ί廠的自動行走車為例，Α型面板廠之自動行走 上，自動行走車在鐵板上之運行容易對鐵ί 度，，更換鐵板: 氧材ί:，產地移除塗佈於地板之環 塵室之作業環境，亦;ί=，。如此，不僅影響無 由於鐵板盥環氧材粗爲1…、塵至之生產政率。另一方面， 層之組裝i度不佳，且日鐵^1的材料特性’鐵板與環氧材料 隙存在，更容易導致叙塵材料層之接觸面容易有間 .、、、塵至地板在自動行走車運行之後產生 5 M355269 平整度不佳的情況 【新型内容】 本創作提供一種高架地板，其有較佳之組裝精度。 本創作提供一種高架地板，其後續維護時有較佳之擴充 ί1 生較低之把工成本及較短之施工時間。 本創作提出一種高架地板，其適於裝設在無塵室，此高 架也板匕括夕個適於架設於無塵室地面的地板支撐架、一第 支撐板件及-第二支撐板件。其中，第一支撐板件配置於 這舰板支撐紅，以與地面轉—就高度。第二支撐板 件則配置於第—支標板件上，且第二支撐板件的厚度小 一支撐板件的厚度。 、 a在本創作之-實施例中，每—個地板支撐架包括一支撐 =與-承載部’讀部固定於無塵室地面， 固定於承麵。 力文存敬仵 在本創作之-實關巾，高架地板更包括至少—調整塾 ，配置於每一個地板支撐架與無塵室地面之間。 螺於在^作之一實施例中，高架地板更包括多個第一固定 累裎，螺接於地板支撐架與無塵室地面之間。 螺於在^作之一實施例中’高架地板更包括多個第二固定 '、栓’螺接於第-支撐板件與第二支撐板件之間。 在本創作之一實施例中，高架地板更包 :，接科-支魏件、第二切板件^地“ 在本創作之-實施例中，第一支撑 在本創作之一實施例中，第二切板Γ的材質質為為鋼不錄 6 M355269 基於上述’糊歧在地板支#架上做 以及一厚度小於該第-支撐板件厚度的第=支撐ί件 由於第-支撐板件與第二支撐板件的材f相同，因此第2支# ，與第-支魏件間有良好的接觸_，進而使得 ： ，架=有較佳的平整性。此外，在進行無塵室地板之後續維 j工程僅需更換厚度輯之第二支撐板件。^效 地縮短駐_ ’且不易造成大量的粉塵污染。 為讓本創作之上述特徵和優點能更_雜，下文特 么只施例，並配合所附圖式，作詳細說明如下。 乂 【實施方式】 由於無塵室内之機台有大型化之趨勢，因此本創作提 二種高架地板’其可提供較高的承載力、穩定性以及後 護之擴充性以滿足無塵室之需求。 圖1繪不本創作一實施例之高架地板的示意圖。請參考 圖1，本實施例之高架地板100適於裝設在亂流型側回風式 無塵至。尚架地板1〇〇主要包括多個適於架設於無塵室地面 G的地板支撐架110、一第一支撐板件12〇及一第二支撐板 件130。其中，地板支撐架n〇、第一支撐板件12〇及第二 支撐板件130的材質例如是鋼或是其他硬度較高之剛性材 質此外，母一個地板支標架HQ例如是由一承载部Η]與 一支撐部114所組成’支撐部114是固定於無塵室地面G: 第一支撐板件120則是固定於承载部〗12，而第二支撐板件 ^0則是配置於第一支撐板件12〇上。 承上所述，本創作例如是先藉由多個第一固定螺栓14〇 7 M355269 來將地板支撐架110固定於無塵室地面G。 螺栓140是穿過地板支撐架i 1〇之 二第一固定 塵室地面G。此外，第一支禮板件12〇 支 於無 ，是預先藉由多個第二固定螺栓15〇來 第一支撐板件120與第二支撐板件13 二，:’ 支撐架110上，並藉由多個第三 、也板 架110之承載部112。 口疋螺栓⑽來固定於支樓 . 在本實施射，第二讀板件130的厚度小Μ ά p 板件m的厚度。第—支撐板 一支撐 板_咖），而第二支擇板件m例的鋼 鋼板。此外，配置於這些地板支;予度為2t的不錢 120與地面距離—預定高度Ή 支撐板件 間可作為機台之佈線空間S。預120下方之空 設計而定，本創作在此並錢HH =低視無塵室之 僅限制第二支掉板件130的厚度（ 度’至於第-支撐板件12G *第弟Τ板件120的厚 度，本創作在此林_何限^。―請祕13G的實際厚 -的值材得質—均提為：=:板件-與第二支撐板件 120與第二支稽板件二觸關係’即第—支撐板件 架地板100之承载力及籍2良好的组裝精度’進而提升高 承载機台或其㈣量較^^^得高架地板⑽在長時間 另-方面，如具後仍有足釣的平整度。 提升高架地板ωο的板維護作業，以更進一步 之第二支撐板件m，並更=平敕=人員僅需移除厚度較薄 更換千整度更為良好之另-第二支 8 M355269 =件m㈣。墟於習知技術在每切行地板維護作業 ，均需將整個環氧材料層収舖設於環氧#料層上厚度較 ^之鐵板移除，而導致大量粉塵，本創作之維護作業並不备 k成大量的粉塵污染。因此，應用本創作高架地板⑽之二 塵室在進行地板維護作業時仍能維持適當 产:、 此外’上述地板維護作業能有效地縮短施卫時間 提升無塵室之生產效率。M355269 VIII. New description: [New technical field] This creation is about a raised floor, and especially related to a raised floor installed in a clean room. [Prior Art] With the advancement of technology, the demand for clean room (dean room) is getting higher and higher under the demand of high manufacturing quality. The clean room is an indispensable part of the semiconductor manufacturing industry and is closely related to the quality, reliability and yield of the product. The floor of the current turbulent type side return type clean room is mostly preceded by = cement floor coating - layer of waterproof epoxy (ep (four) material layer, if 2 moving vehicle (AGV) The need for walking is to lay a thick iron plate on the epoxy layer and screw the iron plate to the clean room floor by screws. The semiconductor process is more and more precise, and the semiconductor equipment is also precision. Improvement. The trend of large-scale 'the load of the clean room floor is large. The car will take the example of the auto-driving car of the factory. The automatic walking of the slab-type panel factory is easy to run on the iron plate. Degree, replacement of iron plate: Oxygen material ί:, the production site to remove the working environment applied to the dust chamber of the floor, also; ί =,. So, not only affects the iron plate 盥 epoxy material is 1... Dust to the production rate. On the other hand, the assembly of the layer is not good, and the material properties of the Nippon Steel ^1 are present in the gap between the iron plate and the epoxy material, which makes it easier for the contact surface of the dust material layer to be easily interposed. ., ,, dust to the floor after the automatic running vehicle runs 5 M355269 poor flatness New content] This creation provides a raised floor with better assembly accuracy. This creation provides a raised floor with better expansion for subsequent maintenance. 较低1 lower cost of labor and shorter construction time. An elevated floor, which is adapted to be installed in a clean room, the elevated plate also includes a floor support frame suitable for being mounted on the clean room floor, a first support plate member and a second support plate member. The first supporting plate member is disposed on the shipboard supporting red to rotate with the ground--the height. The second supporting plate member is disposed on the first-supporting plate member, and the second supporting plate member has a small thickness and a supporting plate member. The thickness of the present invention, in the embodiment of the present invention, each of the floor support frames includes a support = and - bearing portion 'reading portion is fixed to the clean room floor, fixed to the bearing surface. Li Wencun is in this The creation-real-cut towel, the raised floor further includes at least an adjustment 塾, disposed between each floor support frame and the clean room floor. In one embodiment, the raised floor further includes a plurality of first Fixed and sturdy, screwed to the floor Between the support frame and the clean room floor. In one embodiment, the "overhead floor further includes a plurality of second fixings", and the bolts are screwed between the first support plate member and the second support plate member. In an embodiment of the present invention, the raised floor is further packaged: a joint-supporting piece and a second cutting piece. In the present invention, the first support is in one embodiment of the present creation. In the middle, the material quality of the second cutting board is not recorded in the steel. M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M The plate member is the same as the material f of the second support plate member, so that the second branch # has a good contact with the first support member, so that: the frame = has better flatness. The follow-up of the dust chamber floor only needs to replace the thickness of the second support plate. ^ Effectively shorten the station _ ' and it is not easy to cause a lot of dust pollution. In order to make the above-mentioned features and advantages of the present invention more complicated, the following are only examples, and the drawings are described in detail below.乂[Embodiment] Due to the large-scale trend of the machine in the clean room, this creation proposes two kinds of raised floor' which can provide high bearing capacity, stability and expansion of the rear protection to meet the clean room. demand. 1 is a schematic view of an elevated floor of an embodiment of the present invention. Referring to Fig. 1, the raised floor 100 of the present embodiment is adapted to be installed in a turbulent type side return type dust-free. The floor panel 1a mainly includes a plurality of floor support frames 110 adapted to be mounted on the clean room floor G, a first support plate member 12A and a second support plate member 130. The material of the floor support frame n〇, the first support plate member 12〇 and the second support plate member 130 is, for example, steel or other rigid material having higher hardness. In addition, the parent floor support frame HQ is carried by, for example, a load. The support portion 114 is fixed to the clean room floor G: the first support plate member 120 is fixed to the load-bearing portion 12, and the second support plate member is disposed at The first support plate member 12 is on the top. As described above, the present invention is, for example, that the floor support frame 110 is first fixed to the clean room floor G by a plurality of first fixing bolts 14 〇 7 M355269. The bolt 140 is the first fixed dust chamber floor G passing through the floor support i 1〇. In addition, the first support plate member 12 is supported by the first support plate member 120 and the second support plate member 13 by a plurality of second fixing bolts 15: on the support frame 110, and By means of a plurality of third, also bearer portions 112 of the pallet 110. The port bolt (10) is fixed to the branch. In the present embodiment, the thickness of the second plate member 130 is less than the thickness of the plate m. The first support plate is a support plate (coffee), and the second is a steel plate of the m type. In addition, it is disposed on these floor supports; the amount of money is 2t and the ground distance is - the predetermined height Ή between the support plates can be used as the wiring space S of the machine. Depending on the design of the space below the pre-120, this creation only limits the thickness of the second off-plate member 130 to the HH = low-vision clean room (degrees as for the first-support plate member 12G * the first member of the plate) The thickness of 120, this creation in this forest _ how to ^ ^ - the actual thick thickness of the 13G - the quality of the quality - are mentioned as: =: plate - and the second support plate 120 and the second board The two-touch relationship 'that is, the bearing capacity of the first-supporting plate frame floor 100 and the good assembly precision of the 2', and then the high-loading machine or its (four) amount of the raised floor (10) in the long-term other aspects If there is still the flatness of the foot fishing, the maintenance of the raised floor ωο board, to further the second support plate m, and more = flat = personnel only need to remove the thinner thickness to replace the thousand degrees More good - the second 8 M355269 = piece m (4). In the conventional technology, in the maintenance of the floor, the entire layer of epoxy material should be laid on the epoxy layer. The board is removed, resulting in a large amount of dust. The maintenance work of this creation is not prepared for a large amount of dust pollution. Therefore, the application of this creative raised floor Bis dust chamber can be maintained when carrying out maintenance work floor appropriate yield: addition 'above the floor maintenance operation can be effectively administered to shorten the time to increase production efficiency guard clean room.
再者’相較於習知技術在每次進行地板維護作業時需將 舖設於環氧材料層上之整個鐵板移除，本創作在進一步提升 高^板100的平整麟’由於賴人s僅需移除厚度較薄 之弟二J撐J件13G，第二支撐板件13。之厚度較習知技術 之鐵板薄，第二支標板件130之成本即較低廉，因此本創作 即有較低之施工成本。此外，本創作之高架地板亦可方便無 塵室之地板進行任何擴充作業。 圖2繪示在本創作另一實施例之高架地板的示意圖。請 參考圖2 ’本實闕之高架地板與上述實施例之高架地 板100相似’惟一者差異在於本實施例之高架地板2⑻更包 括多個調整墊片210’每一調整塾片21G分別配置於所對應 之地板支撐架110與無塵室地面G之間。除此之外，並無 任何差異。詳細地說，高架地板2〇〇可藉由調整墊片21〇來 调整預;^度H，之大小，以使高架地板能符合各家廉 商之無塵至s又计。當然，本實施例之其他優點與上述實施例 之優點相同，故在此並不做任何贅述。 雖然本創作已以較佳實施例揭露如上，然其並非用以限 定本創作，任何所屬技術領域中具有通常知識者，在不脫離 本創作之精神和範圍内，當可作些許之更動與潤飾，因此本 9 M355269 創作之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡单說明】 圖1繪示本創作一實施例之高架地板的示意圖。 圖2繪示在本創作另一實施例之高架地板的示意圖。 【主要元件符號說明】 100 .兩架地板 φ 110:地板支撐架 112 :承載部 114 :支撐部 120 :第一支撐板件 130 :第二支撐板件 140 :第一固定螺栓 150 :第二固定螺栓 160 :第三固定螺栓 200:高架地板 • 210:調整墊片 G:無塵室地面 H、H’ ：預定高度 S :佈線空間 10In addition, compared with the conventional technology, the entire iron plate laid on the epoxy material layer needs to be removed every time the floor maintenance work is performed, and the creation further improves the flatness of the high plate 100. It is only necessary to remove the thinner brother J J piece 13G and the second support plate piece 13. The thickness of the second standard plate member 130 is lower than that of the prior art, so that the creation has a lower construction cost. In addition, the created raised floor also facilitates any expansion of the floor of the clean room. 2 is a schematic view of a raised floor in another embodiment of the present creation. Referring to FIG. 2, the elevated floor of the present embodiment is similar to the raised floor 100 of the above embodiment. The only difference is that the raised floor 2 (8) of the present embodiment further includes a plurality of adjusting spacers 210'. Corresponding floor support frame 110 and clean room floor G. Other than that, there is no difference. In detail, the raised floor 2〇〇 can be adjusted by adjusting the gasket 21〇, and the size of the height, so that the raised floor can meet the dust-free s of each of the low-cost businesses. Of course, other advantages of the embodiment are the same as those of the above embodiment, and thus no further description is made herein. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and any person skilled in the art can make some changes and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this 9 M355269 creation is subject to the definition of the patent application scope attached. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a raised floor of an embodiment of the present invention. 2 is a schematic view of a raised floor in another embodiment of the present creation. [Main component symbol description] 100. Two floors φ 110: floor support frame 112: bearing portion 114: support portion 120: first support plate member 130: second support plate member 140: first fixing bolt 150: second fixing Bolt 160: third fixing bolt 200: raised floor • 210: adjusting gasket G: clean room floor H, H': predetermined height S: wiring space 10