UA98314C2 - Сапфирные подложки и процессы их изготовления - Google Patents

Сапфирные подложки и процессы их изготовления

Info

Publication number
UA98314C2
UA98314C2 UAA200906859A UAA200906859A UA98314C2 UA 98314 C2 UA98314 C2 UA 98314C2 UA A200906859 A UAA200906859 A UA A200906859A UA A200906859 A UAA200906859 A UA A200906859A UA 98314 C2 UA98314 C2 UA 98314C2
Authority
UA
Ukraine
Prior art keywords
plane
methods
making same
sapphire substrates
nttv
Prior art date
Application number
UAA200906859A
Other languages
English (en)
Ukrainian (uk)
Inventor
Брахманандам В. Таникелла
Мэтью А. Симпсон
Паланиаппан ЧИННАКАРУППАН
Роберт А. Риццуто
Рамануджам Ведантхам
Original Assignee
Сейнт-Гобейн Серамикс Энд Пластик, Инк.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сейнт-Гобейн Серамикс Энд Пластик, Инк. filed Critical Сейнт-Гобейн Серамикс Энд Пластик, Инк.
Publication of UA98314C2 publication Critical patent/UA98314C2/ru

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof
    • Y10T428/257—Iron oxide or aluminum oxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

Описана сапфирная подложка, которая имеет в целом плоскую поверхность с кристаллографической ориентацией, выбранной из группы, состоящей из а-плоскостной, r-плоскостной, m-плоскостной и с-плоскостной ориентаций, и величиной nTTV не более чем приблизительно 0,037 мкм/см, где nTTV является общей вариацией толщины, нормированной к площади поверхности указанной в целом плоской поверхности, где указанная подложка имеет диаметр не менее примерно .
UAA200906859A 2006-12-28 2007-12-21 Сапфирные подложки и процессы их изготовления UA98314C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US88234806P 2006-12-28 2006-12-28
PCT/US2007/088576 WO2008083081A2 (en) 2006-12-28 2007-12-21 Sapphire substrates and methods of making same

Publications (1)

Publication Number Publication Date
UA98314C2 true UA98314C2 (ru) 2012-05-10

Family

ID=39561886

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200906859A UA98314C2 (ru) 2006-12-28 2007-12-21 Сапфирные подложки и процессы их изготовления

Country Status (10)

Country Link
US (1) US8455879B2 (ru)
EP (1) EP2094439A2 (ru)
JP (2) JP5226695B2 (ru)
KR (2) KR101230941B1 (ru)
CN (1) CN101616772B (ru)
CA (1) CA2673662C (ru)
RU (1) RU2412037C1 (ru)
TW (1) TWI350784B (ru)
UA (1) UA98314C2 (ru)
WO (1) WO2008083081A2 (ru)

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Also Published As

Publication number Publication date
CN101616772B (zh) 2012-03-21
JP2010515270A (ja) 2010-05-06
JP5513647B2 (ja) 2014-06-04
KR20110124355A (ko) 2011-11-16
JP2013128147A (ja) 2013-06-27
JP5226695B2 (ja) 2013-07-03
US20080164458A1 (en) 2008-07-10
WO2008083081A3 (en) 2008-11-06
WO2008083081A2 (en) 2008-07-10
RU2412037C1 (ru) 2011-02-20
TWI350784B (en) 2011-10-21
CN101616772A (zh) 2009-12-30
TW200848204A (en) 2008-12-16
KR101230941B1 (ko) 2013-02-07
CA2673662C (en) 2012-07-24
CA2673662A1 (en) 2008-07-10
US8455879B2 (en) 2013-06-04
EP2094439A2 (en) 2009-09-02
KR20090094300A (ko) 2009-09-04

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