US20030103852A1 - Dispensing apparatus for a fluid - Google Patents

Dispensing apparatus for a fluid Download PDF

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Publication number
US20030103852A1
US20030103852A1 US10/309,941 US30994102A US2003103852A1 US 20030103852 A1 US20030103852 A1 US 20030103852A1 US 30994102 A US30994102 A US 30994102A US 2003103852 A1 US2003103852 A1 US 2003103852A1
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US
United States
Prior art keywords
rotor
fluid
dispensing apparatus
accordance
supply tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/309,941
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English (en)
Inventor
Reto Schob
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thoratec Delaware LLC
Original Assignee
Levitronix LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Levitronix LLC filed Critical Levitronix LLC
Assigned to LEVITRONIX, LLC reassignment LEVITRONIX, LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SCHOEB, RETO
Publication of US20030103852A1 publication Critical patent/US20030103852A1/en
Priority to US11/148,468 priority Critical patent/US20050226746A1/en
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/16—Pumping installations or systems with storage reservoirs

Definitions

  • the invention relates to a dispensing apparatus for a fluid in accordance with the preamble of independent claim 1 and to the use of such a dispensing apparatus.
  • CMP chemical-mechanical polishing processes
  • a suspension usually known as a slurry and typically made of very fine solid particles and a liquid is applied to a rotating wafer and there serves for the polishing or lapping of the very fine semi-conductor structures.
  • Another example is the application of photo-resist to the wafer.
  • the dispensing apparatus 1 ′ includes a supply tank 2 ′ which is filled with the fluid, for example slurry.
  • the supply tank 2 ′ has an outlet 4 ′ to which a pressure line 5 ′ is connected which extends via a recirculation pump R′ up to an inlet 6 ′ at the supply tank 2 ′.
  • a plurality of discharge points 7 ′ are provided in the pressure line 5 ′ which lead to nozzles or other apparatuses—usually known as tools—with which the fluid is applied to the wafers.
  • Each discharge point 7 ′ is provided with a valve 8 ′ in order to open the flow connection to the respective apparatus. If all discharge points 7 ′ are closed, the recirculation pump R′ effects only a circulation of the fluid.
  • the desired pressure at which the fluid is transported to the tools through the pressure line 5 ′ and the open discharge points 7 ′ can be generated by applying pressure to the fluid in the supply tank 2 ′.
  • an inlet 10 ′ is provided at the supply tank 2 ′ through which a pressure medium can be introduced into the supply tank via a pressure control valve 11 ′, as is symbolically represented by the arrow G.
  • a gas e.g. nitrogen
  • an overpressure of, for example 0.5 bar is maintained in the supply tank 2 ′.
  • a further problem can occur in suspensions such as slurries or in fluids which tend to separation or clumping, because the circulation caused by the recirculation pump R′ is as a rule too low to ensure a fluid movement in the supply tank 2 ′ which is sufficient for a constant mixing. Additional measures are therefore frequently necessary to permanently ensure a sufficient movement or mixing of the fluid in the supply tank 2 ′.
  • a dispensing apparatus for a fluid having a supply tank for the fluid which has an outlet which can be connected to a pressure line for the fluid and having a rotary pump which has a rotor to convey the fluid into the pressure line, with the rotor being arranged directly in the outlet of the supply tank for the mixing of the fluid.
  • the rotary pump thus satisfies two functions: on the one hand, it conveys the fluid into the pressure line (pump function) and, on the other hand, the arrangement of the rotor directly in the outlet of the supply tank ensures a good and constant mixing of the fluid in the supply tank (stirring function). A precipitation or deposition of particles in suspensions, a clumping or a phase separation in the fluid can thus be effectively prevented.
  • the rotary pump It is advantageous for the best possible mixing for the rotary pump to have an inlet whose opening amounts to at least thirty percent, in particular at least fifty percent, of the diameter of the rotor.
  • a control unit for the rotary pump is preferably provided which sets the forwarding pressure of the rotary pump via the speed of the rotor. If the rotary pump is operated in an operating range with a low efficiency, there is a clear relationship between the speed of the rotor and the pressure at the outlet of the pump for a given fluid. This has the big advantage that the pressure at which the fluid is made available can be set or adjusted easily and in a very short time. A complex application of pressure to the fluid in the supply tank is thus no longer necessary.
  • the rotor With respect to a design which is as simple as possible in an apparatus aspect, it is advantageous for the rotor to be provided in a rotor housing which forms part of the wall of the supply tank.
  • the stirring function of the rotor can be positively influenced when the rotor is designed and arranged such that it projects at least partly into the supply tank.
  • the rotor preferably includes a plurality of vanes which extend into the supply tank. This can in particular be realised in that the vanes are oversized, that is much larger, in comparison with known rotary pumps. The vanes thus also serve, in addition to generating pressure, as stirring elements which keep the fluid in the dispensing tank in motion.
  • the rotary pump it is also advantageous for the rotary pump to have a stator for driving the rotor, wherein the rotor is mounted magnetically in a contact-free manner with respect to the stator. Due to this measure, no seals are necessary at shaft bearings and the risk of damage to such seals, for example, by abrasive particles, is avoided.
  • the rotary pump is particularly preferably designed as a bearing-free motor and the rotor as an integral rotor, because this represents a very compact and space-saving design.
  • the dispensing apparatus in accordance with the invention serves for the dispensing of suspensions, in particular of slurry, especially in a CMP process, or for the dispensing of photo-resist.
  • Further preferred applications of the dispensing apparatus in accordance with the invention are the determining of the viscosity of a liquid and the checking of properties of a fluid, in particular the checking of the mixing ratio in a fluid which is composed of a plurality of components.
  • FIG. 1 a schematic representation of a known dispensing apparatus (prior art).
  • FIG. 2 a schematic representation of an embodiment of a dispensing apparatus in accordance with the invention
  • FIG. 3 a variant for a dispensing tank
  • FIG. 4 a schematic representation of a further embodiment of a dispensing apparatus in accordance with the invention.
  • FIG. 1 shows a dispensing apparatus 1 ′, which represents prior art and was already explained at the start.
  • FIG. 2 shows in a schematic representation an embodiment of a dispensing apparatus in accordance with the invention which is designated as a whole with the reference numeral 1 .
  • the dispensing apparatus 1 includes a supply tank 2 for a fluid F which has an outlet 4 .
  • a rotary pump 3 having a rotor 31 is provided in the outlet 4 and is designed as a centrifugal pump here.
  • the outlet 41 of the rotary pump 3 is connected to a pressure line 5 which extends from this outlet 41 of the rotary pump 3 via a pressure-reducing valve 9 up to an inlet 6 of the dispensing tank 2 .
  • the pressure line 5 has at least one—here for example three—discharge points 7 upstream of the pressure line 5 of which each is connected via a line 71 to an apparatus T for dispensing the fluid F, for example to a nozzle, or to a tool.
  • a valve 8 is provided in each line 71 with which the flow connection between the removal point 7 and the too T can be separately opened or closed.
  • the outlet 4 is arranged at the base of the dispensing tank 2 .
  • the opening of the outlet 4 is identical to the opening B of the inlet 30 of the rotary pump 3 .
  • This opening B is larger than half the diameter of the rotor 31 .
  • the dispensing apparatus 1 in accordance with the invention is used in a CMP process (CMP: chemical-mechanical polishing) in the semi-conductor industry.
  • CMP chemical-mechanical polishing
  • a suspension known as a slurry of fine solid particles in a liquid is applied to a rotating wafer and there serves for the lapping or polishing of the very fine semi-conductor structures.
  • the fluid F in this example is the suspension known as a slurry.
  • the apparatuses or tools T each include a nozzle or another means with which the fluid F can be applied to the wafer.
  • rotary pumps which are also known as centrifugal pumps, there are meant all those pump apparatuses which have a rotor 31 or an impeller by whose rotation an impulse amount is carried out on the fluid to be conveyed.
  • the term rotary pump includes in particular centrifugal pumps, axial pumps and side-passage pumps.
  • the inlet and the outlet are typically in constant flow connection in a rotary pump. There are therefore, for example, no valves provided between the pump inlet and outlet 41 .
  • the rotor 31 for mixing the fluid F is arranged directly in the outlet of the supply tank 2 .
  • the rotor 31 for mixing the fluid F projects at least partly into the supply tank 2 .
  • the rotary pump 3 thus does not only serve for the pumping of the fluid F, but also as an agitator which mixes the fluid F in the supply tank 2 .
  • the rotor 31 has a plurality of vanes 311 which are designed much larger than with known rotary pumps of comparable dimensioning. As FIG. 2 and FIG. 3 also show, the vanes 311 extend into the supply tank 2 and here (when the rotor 3 is rotating) provide for a circulation of the fluid as is indicated by the arrows Z.
  • vanes 311 in FIG. 2 and FIG. 3 is naturally only to be understood as an example.
  • the vanes can have still further necks or larger surfaces or other suitable means in order to positively influence the stirring function.
  • the rotor 31 is arranged in a rotor housing 312 which forms a part of the wall of the supply tank 2 .
  • the rotor housing 312 can be an integral component of the supply tank 2 or be secured to this as a separate part.
  • the rotary pump 3 further includes a stator 32 having a stator winding 322 in order to electrically drive the rotor 31 . Furthermore, a control unit 12 is provided which controls and regulates the rotary pump 3 .
  • the stator 32 surrounds the rotor housing 312 .
  • the stator 32 is preferably designed as the stator of a so-called temple motor. This means (see FIG. 2 and FIG. 3) that the stator 32 has a plurality of stator teeth connected by a return yoke, with each stator tooth being formed in an L shape with a shorter and a longer limb.
  • the longer limb in each case extends parallel to the axis of rotation of the rotor and the shorter limb extends radially inwardly towards the axis of rotation.
  • the longer limbs carry the stator winding 322 .
  • the rotary pump 3 preferably has a completely magnetically mounted rotor 31 , that is the rotor 31 is magnetically mounted in a contact-free manner with respect to the stator 32 .
  • the absence of mechanical bearings for the rotor 31 has a plurality of advantages. For instance, the problem is avoided that abrasive particles can damage mechanical bearings. There is furthermore no risk of contamination of the fluid by lubricants or bearing abrasion. Sealing problems are also avoided.
  • the rotor 31 includes a permanent magnet, for example a permanently magnetic ring 313 .
  • This ring 313 is arranged around a central bore 314 which extends along the desired axis of rotation of the rotor 31 and through said rotor.
  • the magnetisation of the ring 313 is indicated by the arrows (without reference numerals) at its interior.
  • a particularly preferred rotary pump is disclosed, for example, in EP-A-0 819 330 or U.S. Pat. No. 6,100,618.
  • This rotary pump has a so-called integral rotor and is designed as a bearing-free motor.
  • integral motor is to be understood such that the pump rotor and the rotor of the motor driving the pump are identical.
  • the rotor 31 operates both as a rotor of the motor drive and as a rotor of the pump.
  • bearing-free motor is to be understood such that the rotor is mounted in a completely magnetic manner, with no separate magnetic bearings being provided.
  • the stator 32 is both the stator of the electrical drive and the stator of the magnetic bearing.
  • the stator winding 322 includes a drive winding of the polar pair number p+ 1 . It is thus possible both to drive the rotor 31 and to mount it magnetically in the stator in a completely contact-free manner. Reference is made to the documents already cited with respect to further details of such a rotary pump.
  • stator winding 322 controlled by the control unit 12 generates a drive rotary field which applies a torque onto the rotor 31 and sets this into motion. Furthermore, the control winding of the stator winding 322 generates a magnetic control field with which the position of the rotor 31 can be regulated with respect to the stator 32 .
  • the fluid F is sucked through the inlet 30 of the rotary pump 3 and conveyed through the outlet 41 into the pressure line 5 by the rotation of the rotor 31 and the fluid is available there under the forwarding pressure, for example 0.5 bar up to 1 bar.
  • a small part of the fluid F flows through the bore 314 (as the double arrow at the lower end of the bore 314 in accordance with the illustration indicates in FIGS. 2 and 3) and thus ensures that the rotor 31 is relieved with respect to the axial thrust.
  • the fluid F reaches the individual tools T through the lines 71 from the pressure line 5 .
  • the rest of the fluid F which is not dispensed to the tools T, enters back into the supply tank 2 via the pressure reducing valve 9 and the inlet 6 , whereby a recirculation of the fluid F and thus a mixing in the supply tank 2 is realised.
  • the rotary pump 3 also directly produces a mixing of the fluid F in the supply tank 2 , because the vanes 311 projecting into the supply tank 2 act as stirring tools and mix the fluid 2 in the supply tank 2 .
  • the control unit 12 quite particularly preferably adjusts the forwarding pressure of the rotary pump 3 via the speed of the rotor 31 , which will be explained in the following.
  • efficiency is to be understood as the hydraulic efficiency of the rotary pump, that is the ratio of hydraulic performance (conveying performance) of the pump and mechanical performance for the drive of the rotor (without any friction losses which may be present in bearings or similar).
  • the determination of the viscosity of the fluid F takes place by means of the motor current with which the rotation of the rotor 31 is driven.
  • the motor current is directly a measure of the torque with which the rotor 31 is driven.
  • no mechanical bearing friction is present due to the magnetic mounting of the rotor so that the torque with which the rotor is driven coincides in very good approximation with the torque transmitted to the fluid.
  • the torque which the rotor transmits onto the liquid substantially corresponds to the drive torque with which the rotor is driven.
  • the drive torque is again given by the motor current which drives the rotor.
  • the motor current is understood to be the torque-forming portion of the current, also known as the armature current, in the electrical drive.
  • the armature current is in particular a very good measure for the torque with which the rotor is driven in field-oriented three-phase motors.
  • a temperature sensor 315 (see FIG. 3) to be provided, for example at the outside of the rotor housing 312 , with which the temperature of the fluid F can be detected.
  • the forwarding pressure at which the fluid F is made available in the pressure line 5 can therefore be set and regulated directly by the control unit 12 via the speed of the rotor 31 .
  • An extremely fast electrical or electronic adjustment of the forwarding pressure can thus be realised.
  • the forwarding pressure can be regulated, for example, in time intervals of less than 100 milliseconds.
  • FIG. 4 illustrates a further embodiment which is in particular suitable for such applications in which the viscosity of the fluid or other of its properties are to be determined.
  • the reference numerals have the meaning already introduced.
  • means are provided to regulate the level of the dispensing tank 2 .
  • These means include a tank 13 , a connection line 14 , which connects the tank 13 to the dispensing tank 2 , and a constant gas volume 15 , which is provided in the dispensing tank 2 .
  • This gas volume 15 can naturally also be zero.
  • the purpose of these means 13 , 14 , 15 is to keep the level in the dispensing tank 2 constant.
  • the tank 13 has a variable level; it can also be refilled. If now fluid F is taken out of the dispensing tank 2 by means of the rotary pump 3 , then fluid flows after it from the tank 13 through the connection line 14 . In this way, a constant level FS can be regulated in the dispensing tank 2 .
  • the level regulation in the dispensing tank 2 is in particular advantageous when the viscosity or other properties of the fluid F are to be determined or monitored with the dispensing apparatus 1 of the invention. It is namely ensured by the constant level FS in the supply tank 2 that always just as much fluid F or liquid (that is the same amount) is subjected to stirring power in the dispensing tank 2 . This stirring power is therefore particularly a good measure for the specific liquid friction and thus represents an exact measure for the viscosity. A much more precise determination of the viscosity or other properties of the fluid is thus made possible.
  • the supply tank 2 is fed with two—for example, different—components such as liquids and/or gases, namely with a first component which flows from the tank 13 through the connection line 14 into the supply tank, and with a second component which flows through a further line 16 from a further tank (not shown).
  • two—for example, different—components such as liquids and/or gases, namely with a first component which flows from the tank 13 through the connection line 14 into the supply tank, and with a second component which flows through a further line 16 from a further tank (not shown).
  • the supply tank 2 then serves as a mixing tank in which the two components are mixed to form the fluid.
  • the mixing ratio of the two components can be monitored or checked by the dispensing apparatus 1 of the invention.
  • FIG. 4 shows another variant for the aspect and the arrangement of the rotor 31 .
  • the rotor 31 is designed and arranged such that its vanes 311 do not extend into the dispensing tank 2 .
  • the opening B or the diameter B of the inlet 30 here also amounts to more than fifty percent of the diameter of the rotor 31 in order to achieve a good mixing.
  • FIG. 3 shows another variant for the supply tank 2 .
  • the reference symbols have the same meaning which was explained with respect to FIG. 2.
  • the rotor housing 312 at the base of the supply tank 2 and the vanes 311 have been somewhat modified.
  • static guide elements 21 are provided in the supply tank 2 . These have the effect of guiding the fluid currents generated by the rotary pump 3 further upwards (in accordance with the illustration with respect to FIG. 3), as is indicated by the arrows with the reference symbol Z.
  • the dispensing apparatus 1 in accordance with the invention is advantageous in particular for such fluids F which incline to clumping, phase separation, precipitation or deposition of particles, for example for suspensions, especially for slurry solutions.
  • the fluid F located in the supply tank 2 remains in movement due to the recirculation and the stirring effect produced directly by the rotor 31 so that a constant mixing takes place.
  • the dispensing apparatus 1 in accordance with the invention is naturally not limited to the application described here, namely to the conveying of a slurry suspension or to CMP processes. It is also generally suitable, among other things, for the conveying of suspensions, emulsions, paints, foodstuffs (e.g. juices or concentrates).
  • a particular advantage is the combination of pump function and stirring function, with the forwarding pressure being able to be adjusted and regulated in a very simple manner and extremely rapidly in an electronic manner.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)
  • Reciprocating Pumps (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
US10/309,941 2001-12-04 2002-12-03 Dispensing apparatus for a fluid Abandoned US20030103852A1 (en)

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Applications Claiming Priority (2)

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EP01811180 2001-12-04
EP01811180.7 2001-12-04

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* Cited by examiner, † Cited by third party
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US20060275155A1 (en) * 2005-01-28 2006-12-07 Robert Thibodeau Rotational apparatus
US20070181156A1 (en) * 2004-03-16 2007-08-09 Atilla Uz Dishwasher and control method thereof
US7344298B2 (en) 2002-07-19 2008-03-18 Celerity, Inc. Method and apparatus for blending process materials
US20090217740A1 (en) * 2008-02-28 2009-09-03 Honda Motor Co., Ltd. Oil-degradation determination apparatus
US20130164161A1 (en) * 2010-09-01 2013-06-27 Levitronix Gmbh Rotary pump
US20130225395A1 (en) * 2012-02-23 2013-08-29 Kellogg Brown & Root Llc Surge Drum Mixing System
US20170050285A1 (en) * 2015-08-18 2017-02-23 Kunshan Nano New Material Technology Co.,Ltd Polishing system based on the non-newton fluid and polishing method thereof
US20200266738A1 (en) * 2019-02-18 2020-08-20 Baier & Koeppel Gmbh & Co. Kg Control method and control unit for a dc pump motor
CN114147628A (zh) * 2022-02-08 2022-03-08 江苏捷威特工程机械有限公司 一种用于载货车厢接缝抛光的组合加工装置
US11421694B2 (en) 2019-02-01 2022-08-23 White Knight Fluid Handling Inc. Pump having magnets for journaling and magnetically axially positioning rotor thereof, and related methods
TWI860539B (zh) * 2021-10-21 2024-11-01 美商應用材料股份有限公司 拋光漿分配噴嘴與輸送系統及拋光基板的方法
US20240377806A1 (en) * 2023-05-10 2024-11-14 Assurant, Inc. Methods, systems, and apparatuses for user device repair and conditioning

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EP3115616B1 (de) * 2015-07-06 2022-09-07 Levitronix GmbH Elektromagnetischer drehantrieb
CN107009255B (zh) * 2017-05-27 2018-09-14 正安县欧尚电器有限公司 一种路灯外壳的抛光装置

Citations (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2583997A (en) * 1946-10-23 1952-01-29 Frank R Chester Garbage disposal apparatus
US2692124A (en) * 1952-09-05 1954-10-19 Mendoza Fausto Celorio Machine for kneading dough
US2912343A (en) * 1957-11-18 1959-11-10 Ilford Ltd Production of photographic material
US3085756A (en) * 1960-04-04 1963-04-16 Bolton John W & Sons Inc Apparatus and method for pulping
US3141656A (en) * 1960-02-17 1964-07-21 American Enka Corp Viscose dissolver
US3481586A (en) * 1967-10-11 1969-12-02 Tfh Publications Inc Magnetic aquarium pump
US3503846A (en) * 1965-10-25 1970-03-31 I C L Soc Agricola Ind Per La Apparatus for bleaching wood pulp
US3704865A (en) * 1970-01-05 1972-12-05 Usesojuzny Nii Str Magistralny Plant for applying solidifying plastic masses
US4002325A (en) * 1976-03-22 1977-01-11 Herfeld Friedrich W Apparatus for mixing powdery or granulated materials
US4030707A (en) * 1975-09-15 1977-06-21 Electronic Data Controls Corporation Blender
US4408891A (en) * 1980-07-31 1983-10-11 Agfa-Gevaert Ag Arrangement for developing photographic layer carriers
US4410337A (en) * 1980-04-07 1983-10-18 A. Ahlstrom Osakeyhtio Method and an apparatus for separating a gas from a fibre suspension
US4435193A (en) * 1980-04-07 1984-03-06 Kamyr Ab Controlling operation of a centrifugal pump
US4496244A (en) * 1983-01-17 1985-01-29 General Signal Corporation Small volume mixing and recirculating apparatus
US4675033A (en) * 1984-07-17 1987-06-23 A. Ahlstrom Corporation Apparatus for separating gas from a fibre suspension
US4834547A (en) * 1985-07-18 1989-05-30 A. Ahlstrom Corporation Apparatus for mixing chemicals in fibre suspensions
US4869657A (en) * 1986-09-05 1989-09-26 Fuji Photo Film Co., Ltd. Magnetic pump of a photographic processing bath
US4877368A (en) * 1988-11-08 1989-10-31 A. Ahlstrom Corporation Fluidizing centrifugal pump
US5039320A (en) * 1989-03-29 1991-08-13 Kamyr Ab Apparatus for fluidizing, degassing and pumping a suspension of fibrous cellulose material
US5405251A (en) * 1992-09-11 1995-04-11 Sipin; Anatole J. Oscillating centrifugal pump
US5439288A (en) * 1994-02-01 1995-08-08 General Signal Corporation Automated small volume recirculator for particle analysis
US5501582A (en) * 1994-01-26 1996-03-26 Le Carbone Lorraine Magnetically driven centrifugal pump
US5615997A (en) * 1995-09-07 1997-04-01 Kvaerner Pulping Technologies Aktiebolag Pump for pumping fibrous pulp suspension
US5795062A (en) * 1996-10-03 1998-08-18 Hamilton Beach/Proctor-Silex, Inc. Milkshake machine
US6100618A (en) * 1995-04-03 2000-08-08 Sulzer Electronics Ag Rotary machine with an electromagnetic rotary drive
US6109778A (en) * 1997-09-22 2000-08-29 United States Filter Corporation Apparatus for homogeneous mixing of a solution with tangential jet outlets
US6125876A (en) * 1998-08-18 2000-10-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Apparatus and process for delivering an abrasive suspension for the mechanical polishing of a substrate
US6171078B1 (en) * 1997-09-04 2001-01-09 Sulzer Electronics Ag Centrifugal pump
US6302661B1 (en) * 1996-05-03 2001-10-16 Pratap S. Khanwilkar Electromagnetically suspended and rotated centrifugal pumping apparatus and method
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
US6619910B1 (en) * 1998-12-04 2003-09-16 Warman International Limited Froth pumps

Patent Citations (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2583997A (en) * 1946-10-23 1952-01-29 Frank R Chester Garbage disposal apparatus
US2692124A (en) * 1952-09-05 1954-10-19 Mendoza Fausto Celorio Machine for kneading dough
US2912343A (en) * 1957-11-18 1959-11-10 Ilford Ltd Production of photographic material
US3141656A (en) * 1960-02-17 1964-07-21 American Enka Corp Viscose dissolver
US3085756A (en) * 1960-04-04 1963-04-16 Bolton John W & Sons Inc Apparatus and method for pulping
US3503846A (en) * 1965-10-25 1970-03-31 I C L Soc Agricola Ind Per La Apparatus for bleaching wood pulp
US3481586A (en) * 1967-10-11 1969-12-02 Tfh Publications Inc Magnetic aquarium pump
US3704865A (en) * 1970-01-05 1972-12-05 Usesojuzny Nii Str Magistralny Plant for applying solidifying plastic masses
US4030707A (en) * 1975-09-15 1977-06-21 Electronic Data Controls Corporation Blender
US4002325A (en) * 1976-03-22 1977-01-11 Herfeld Friedrich W Apparatus for mixing powdery or granulated materials
US4410337A (en) * 1980-04-07 1983-10-18 A. Ahlstrom Osakeyhtio Method and an apparatus for separating a gas from a fibre suspension
US4435193A (en) * 1980-04-07 1984-03-06 Kamyr Ab Controlling operation of a centrifugal pump
US4408891A (en) * 1980-07-31 1983-10-11 Agfa-Gevaert Ag Arrangement for developing photographic layer carriers
US4496244A (en) * 1983-01-17 1985-01-29 General Signal Corporation Small volume mixing and recirculating apparatus
US4675033A (en) * 1984-07-17 1987-06-23 A. Ahlstrom Corporation Apparatus for separating gas from a fibre suspension
US4834547A (en) * 1985-07-18 1989-05-30 A. Ahlstrom Corporation Apparatus for mixing chemicals in fibre suspensions
US4869657A (en) * 1986-09-05 1989-09-26 Fuji Photo Film Co., Ltd. Magnetic pump of a photographic processing bath
US4877368A (en) * 1988-11-08 1989-10-31 A. Ahlstrom Corporation Fluidizing centrifugal pump
US5039320A (en) * 1989-03-29 1991-08-13 Kamyr Ab Apparatus for fluidizing, degassing and pumping a suspension of fibrous cellulose material
US5405251A (en) * 1992-09-11 1995-04-11 Sipin; Anatole J. Oscillating centrifugal pump
US5501582A (en) * 1994-01-26 1996-03-26 Le Carbone Lorraine Magnetically driven centrifugal pump
US5439288A (en) * 1994-02-01 1995-08-08 General Signal Corporation Automated small volume recirculator for particle analysis
US6100618A (en) * 1995-04-03 2000-08-08 Sulzer Electronics Ag Rotary machine with an electromagnetic rotary drive
US5615997A (en) * 1995-09-07 1997-04-01 Kvaerner Pulping Technologies Aktiebolag Pump for pumping fibrous pulp suspension
US6302661B1 (en) * 1996-05-03 2001-10-16 Pratap S. Khanwilkar Electromagnetically suspended and rotated centrifugal pumping apparatus and method
US5795062A (en) * 1996-10-03 1998-08-18 Hamilton Beach/Proctor-Silex, Inc. Milkshake machine
US6171078B1 (en) * 1997-09-04 2001-01-09 Sulzer Electronics Ag Centrifugal pump
US6109778A (en) * 1997-09-22 2000-08-29 United States Filter Corporation Apparatus for homogeneous mixing of a solution with tangential jet outlets
US6125876A (en) * 1998-08-18 2000-10-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Apparatus and process for delivering an abrasive suspension for the mechanical polishing of a substrate
US6619910B1 (en) * 1998-12-04 2003-09-16 Warman International Limited Froth pumps
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7344298B2 (en) 2002-07-19 2008-03-18 Celerity, Inc. Method and apparatus for blending process materials
US8852354B2 (en) * 2004-03-16 2014-10-07 Atilla Uz Dishwasher and control method thereof
US20070181156A1 (en) * 2004-03-16 2007-08-09 Atilla Uz Dishwasher and control method thereof
US20090010785A1 (en) * 2005-01-28 2009-01-08 Maglev Technologies, Llc Rotational apparatus
US20060275155A1 (en) * 2005-01-28 2006-12-07 Robert Thibodeau Rotational apparatus
US20090217740A1 (en) * 2008-02-28 2009-09-03 Honda Motor Co., Ltd. Oil-degradation determination apparatus
US8342013B2 (en) * 2008-02-28 2013-01-01 Honda Motor Co., Ltd. Oil-degradation determination apparatus
US20130164161A1 (en) * 2010-09-01 2013-06-27 Levitronix Gmbh Rotary pump
US10920781B2 (en) * 2010-09-01 2021-02-16 Levitronix Gmbh Rotary pump
US9835158B2 (en) * 2010-09-01 2017-12-05 Levitronix Gmbh Rotary pump
US20180051699A1 (en) * 2010-09-01 2018-02-22 Levitronix Gmbh Rotary pump
US20130225395A1 (en) * 2012-02-23 2013-08-29 Kellogg Brown & Root Llc Surge Drum Mixing System
CN104519999A (zh) * 2012-02-23 2015-04-15 凯洛格·布朗及鲁特有限公司 平衡筒混合系统
US9446364B2 (en) * 2012-02-23 2016-09-20 Kellogg Brown & Root Llc Surge drum mixing system
CN104519999B (zh) * 2012-02-23 2017-01-18 凯洛格·布朗及鲁特有限公司 平衡筒混合系统
US20170050285A1 (en) * 2015-08-18 2017-02-23 Kunshan Nano New Material Technology Co.,Ltd Polishing system based on the non-newton fluid and polishing method thereof
US11421694B2 (en) 2019-02-01 2022-08-23 White Knight Fluid Handling Inc. Pump having magnets for journaling and magnetically axially positioning rotor thereof, and related methods
US12012965B2 (en) 2019-02-01 2024-06-18 White Knight Fluid Handling Inc. Pump having opposing magnets between a rotor and stator, and related assemblies, systems, and methods
CN111654215A (zh) * 2019-02-18 2020-09-11 贝尔&科佩GmbH公司 用于dc泵电机的控制方法和控制单元
US20200266738A1 (en) * 2019-02-18 2020-08-20 Baier & Koeppel Gmbh & Co. Kg Control method and control unit for a dc pump motor
US11522476B2 (en) * 2019-02-18 2022-12-06 Baier & Koeppel Gmbh & Co. Kg Control method and control unit for a DC pump motor
TWI860539B (zh) * 2021-10-21 2024-11-01 美商應用材料股份有限公司 拋光漿分配噴嘴與輸送系統及拋光基板的方法
US12533771B2 (en) 2021-10-21 2026-01-27 Applied Materials, Inc. Polishing slurry dispense nozzle
CN114147628A (zh) * 2022-02-08 2022-03-08 江苏捷威特工程机械有限公司 一种用于载货车厢接缝抛光的组合加工装置
US20240377806A1 (en) * 2023-05-10 2024-11-14 Assurant, Inc. Methods, systems, and apparatuses for user device repair and conditioning

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US20050226746A1 (en) 2005-10-13

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