US2403692A - Piezoelectric device - Google Patents
Piezoelectric device Download PDFInfo
- Publication number
- US2403692A US2403692A US570361A US57036144A US2403692A US 2403692 A US2403692 A US 2403692A US 570361 A US570361 A US 570361A US 57036144 A US57036144 A US 57036144A US 2403692 A US2403692 A US 2403692A
- Authority
- US
- United States
- Prior art keywords
- slab
- diaphragm
- diaphragms
- edge
- directions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Definitions
- This invention relates to piezo-electric devices for converting electrical energy into mechanical vibrations or converting mechanical energy into electrical impulses. and more particularly to devices of the type disclosed in the patent of Raymond W. Tibbets, No. 2,386,279, granted October 9, 1945, comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic forces, a flexible member or toggle extending along one side of the device from edge to edge in one of the directions, another flexible member or toggle extending along the other side of the device from edge to edge in the other direction, and means interconnecting the slab and members at the aforesaid edges, the members being arched in said directions respectively so that each member tends to straighten when the slab expands in the direction in which it is arched.
- Objects of the present invention are to provide a piezoelectric device which will faithfully detect and reproduce acoustic vibrations, which is capable of a very high order of straight-line response to audio-frequencies, which reduces harmonic distortions to a minimum, which has relatively high sensitivity, which is relatively insensitive to shock pick-up, which is smple in construction, which has a high order of mechanical strength, which is capable of being used either as a transmitter or a receiver, which requires a minimum amount of crystalline piezoelectric material in its construction, which can be manufactured at low cost, which can be readily sealed to exclude moisture, in which the sound Waves impinge substantially in phase on all its actuating surfaces and in which the lead extensions are held securely in position.
- the toggles of the aforesaid application are in the form of diaphragms extending throughout substantially the entire area of the piezo-electric slab, instead of ribbons covering only parts of the sides of the slab.
- each diaphragm is arched away from the slab in one of the aforesaid directions and toward the slab in the other of the directions.
- each diaphragm may be arched away from the slab in the direction in which the other diaphragm is arched toward the slab, with means interconnecting the central portions of the two diaphragms through an opening in the slab, preferably the diaphragms are arched away from the slab in the same one of said directions and toward the slab in the other of the directions so that the central portions of the diaphragms move toward the slab at the same time.
- the device comprises means for mounting two units with corresponding dimensions of the two units disposed in planes approximately at right angles to each other so that the voltages produced in the two units by shock, tend to cancel each other, together with means electrically interconnecting the two units so that the voltages produced in the two units by sound waves are cumulative.
- Fig. 1 is a perspective view of a crystal from which one or more piezo-electric slabs may be cut;
- Fig. 2 is a perspective View of a slab cut from the crystal
- Fig. 3 is a similar view with electrodes and leads mounted on the slab;
- Fig. 4 is a perspective view of a complete unit
- Fig. 5 is a diagonal section of the unit, taken on the line 5-5 of Fig. 4;
- Fig. 6 is a similar section taken on line 6-6 of Fig 4;
- Fig. 7 is a section taken on line 'l-J of Fig. 4;
- Fig. 8 is aperspective view of one of the diaphragms viewed from the inside;
- Figs. 9 and 10 are sections like Figs. 5 and 6, showing a modification
- Fig. 11 is a section showing the unit of Figs. 4 to '7 mounted in a double diaphragm device;
- Fig. 12 is a similar View showing a unit mounted in a single diaphragm device
- Fig. 13 is a similar view showing the unit mounted in a case of the type used in a hearing aid receiver
- Fig. 14 is a perspective view like 4 except in that the unit is circular instead of square;
- Fig. 15 is a perspective view like Fig. 3 showing the slab of the circular unit
- Fig. 16 is a front view of a shock-proof device
- Fig. 17 is a section on line l7l'
- any piezo-electric material may be used in the present invention, Rochelle salt crystals are preferred, such a crystal being shown in Fig. 1 in which a-a is the electrical axis, 12-12 the transverse axis and 0-0 the longitudinal axis.
- the crystal is so cut so that the diagonal lines mm and 11-72 bisect the angles between the axes b-b and cc.
- the crystalline slab may have any desired shape, it is preferably square as shown in Fig. 3 or circular as shown in Fig. 15.
- the slab may be formed in one layer or in a plurality of layers, and each layer may comprise a single piece or a plurality of pieces disposed in edgewise alignment.
- the piezo-electric slab I has electrodes 2 mounted on its opposite faces and leads 3 connected to the electrodes respectively.
- the electrodes are preferably formed of gold-leaf as described and claimed in Patent 2,287,950 and leads 3. which are preferably formed of metal foil, may be anchored to the electrodes in any suitable way as for example the manner disclosed in copending application Sr. No. 559,522.
- a toggle diaphragm 4 which may be formed of Bakelite, Bakelite-metal powder mixtures, molded natural amber, special metallic alloys or other material having a good modulus of elasticity and a coefficient of expansion approximating that of Rochelle salt crystals.
- each diaphragm is arched away from the slab along the diagonal n--n and towards the slab along the diagonal 77t-7)l,
- the thickness of the diaphragm varies around its periphery from a minimum at the corners on the diagonal mm to a maximum at the corners on the diagonal 11-41.
- each diaphragm On the inside each diaphragm is provided with a peripheral flange or shoulder 6 which varies in depth so that its exposed face lies in the same plane throughout the entire periphery of the dia-- phragm.
- each diaphragm seats fiatwise against the slab. as shown in Figs. 5, 6 and 7, without distortion.
- the abutting faces of the slab and diaphragm shoulders, are secured together with Duco or other suitable cement.
- the central portion of each diaphragm inside the shoulder 6 may vary for structural and functional reasons it is preferably uniform in thickness throughout its entire area. While the optimum thickness depends on the character of the material employed and the function of the unit. when using Bakelite the thickness is preferably of the order of four thousandths inch to fifteen thousandths inch.
- Figs. 9 and 10 The modification shown in Figs. 9 and 10 is like that shown in the preceding figures except in that the central portions of the diaphragms are interconnected by means of a pin 1 extending through an opening in the slab, as in the aforesaid Patent No. 2,386,279. and in that one diaphragm is turned 90 degrees with respect to the other, so that along one diagonal both diaphragms arch downwardly and on the other diagonal both diaphragms arch upwardly.
- the rod 1 may be connected to a phonograph stylus, a microphone diaphragm or a sound-reproducing diaphragm.
- the device may be mounted on rubber feet I0.
- Figs. 11, 12 and 13 illustrate various ways of utilizing the unit shown in Figs. 3 to 8.
- the device of Fig. 11 comprises an annular frame 8 upon each side of which is mounted an arched diaphragm 9.
- Interposed between the central points of the diaphragms 4 and the diaphragins 9 are posts II which may merely seat in recesses in the diaphragms or may be secured at the ends by means of cement.
- the sound waves impinging upon the diaphragms 9 move the diaphragms 4 back and forth toward and from each other.
- the diaphragms 4 move toward the slab from their normal positions shown in Figs.
- each diaphragm exerts a force on the slab along each diagonal as the diaphragm moves back and forth.
- the sound waves impinging upon the diaphragms 9 produce corresponding electrical waves in the circuit connected to leads 3 by virtue of the alternate compression and stretching of the slab along its diagonal; and when using the device to convert electrical impulses into sound waves the action is reversed, the electrical impulses causing the slab alternately to expand and contract along each diagonal, thereby actuating the diaphragms 9 through the medium of the posts H.
- the device shown in Fig. 12 is similar to that shown in Fig, 11 except in that it has only one diaphragm l5, and instead of the other diaphragm it has a case 14 secured to the periphery of the diaphragm I3.
- the pieZo-electric unit is mounted between a lug 16 on the casing and a post IT engaging the diaphragm.
- the diaphragm 13 moves inwardly it compresses the piezo-electric unit between the abutment l6 and post ll, thereby moving both diaphragms 4 inwardly toward the intermediate slab I, and when the diaphragm [3 moves outwardly beyond its normal position it causes both diaphragms 4 to move outwardly away from the slab.
- the device shown in Fig. 13 is like that shown in Fig. 12 except in that the casing 18 has a cover l9 and the diaphragm 2
- the cover l9 has an outlet 22 for the sound waves produced by diaphragm 2!, this device being particularly suited for use as a hearing aid.
- may be normally biased toward the unit sufiiciently to keep the intermediate post H or H under compression throughout the entire range of vibration, in which case the post and abutment l6 may merely seat in recesses in the diaphragms without being cemeneted.
- the large dia' phragms are preferably not normally biased and the parts are cemented together so that the large diaphragms can pull on the small diaphragms when sound waves cause the large diaphragms to flex outwardly from their normal positions. and the small diaphragms can pull inwardly on the large diaphragms when actuated by electrical impulses through the slab l.
- the device illustrated in Figs. 14 and 15 is like that shown in Figs. 3 and 4 except in that it is round instead of square.
- the device of Figs. 14 and 15 comprises a central piezo-electric slab 23 carrying electrodes 24 and leads 25, and diaphragms 27 having peripheral shoulders cemented to the slab throughout the periphery of the device.
- each diaphragm arches away from the slab along the diameter 28 and towards the slab along the diameter 29.
- the device shown in Figs. 16 and 17 comprises a base 3
- the units 34 are identical with each other but one is turned degrees about its vertical axis with respect to the other so that, along one vertical plane extending along one diagonal of the units, the diaphragnis of one unit are arched toward the associated slab and the diaphragms of the other unit are arched away from their slab.
- the units are connected in circuit, either in series or parallel, so that the voltages or currents produced in the two units by sound waves are cumulative, the voltages produced in the two units by mechanical shock tend to cancel each other.
- piezo-elcctric crystalline plates are Water soluble, it is desirable to protect the crystalline portion of the units from moisture. Therefore, after cementing the various elements, such as the diaphragms, the slab and the electrodes and leads, I propose to coat the exposed surfaces of the crystalline plate or plates and the electroded portions first with a suitable liquid plastic such as, for example, cellulose nitrate in a suitable solvent. Then I apply a final coat of a solution of polystyrene in a suitable solvent. Polystyrene has very little water absorbing properties and a very thin coat provides exceptional moisture-proofing for a device of this type. However it is difficult to cement surfaces coated with polystyrene.
- a suitable liquid plastic such as, for example, cellulose nitrate
- a piezo-electric device comprising a slab which expands in one edgewise direction when subjected to electrostatic forces, a diaphragm extending along one side of the device from edge to edge in said direction, and means interconnecting the slab and diaphragm at said edges, the dia phragm being arched in said direction so that it tends to straighten when the slab expands as aforesaid.
- a piezo-electric device comprising a slab which expands in one edgewise direction when subjected to electrostatic forces and a diaphragm extending along one side of the device from edge to edge in said direction, the diaphragm being cemented to the slab at said edges and being arched in said direction so that it tends to straighten when the slab expands as aforesaid.
- a pieZo-electric device comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic forces, a diaphragm extending along each side of the device from edge to edge in one of said directions, and means interconnecting the slab and diaphragm at said edges, each diaphragm being arched in one of said directions so that it tends to straighten when the slab expands in that direction.
- a piezo-electric device comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic forces, a diaphragm extending along one side of the device from edge to edge in each of said directions, and means interconnecting the slab and diaphragm at said edges, the diaphragm being arched away from the slab in one of said directions and toward the slab in the other of said directions.
- a piezo-electric device comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic forces, a diaphragm extending along each side of the device from edge to edge in each of said directions, and means interconnecting the slab and diaphragms at said edges, each diaphragm being arched away from the slab in one of said directions and toward the slab in the other of said directions.
- a piezo-electric device comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic forces, a diaphragm extending along each side of the device from edge to edge in each of said directions, and mean interconnecting the slab and diaphragms at said edges, the diaphragms being arched away from the slab in the same one of said directions and toward the slab in the other of said directions.
- a piezo-electric device comprising a slab which expands in one edgewise direction when subjected to electrostatic forces and a diaphragm extending along one side of the device from edge to edge in said direction, one of said parts having a peripheral shoulder mounted on the edge of the other part and the diaphragm being arched in said direction so that it tends to straighten when the slab expands as aforesaid.
- a piezo-electric device comprising a slab which expands in one edgewise direction when subjected to electrostatic forces and a diaphragm extending along one side of the device from edge to edge in said direction, the diaphragm having a peripheral shoulder mounted on the edge of the slab and the diaphragm being arched in said direction so that it tends to straighten when the slab expands as aforesaid.
- a piezo-electric device comprising a slab which expands in one edgewise direction and contracts in another edgewise direction when subjected to electrostatic force, a diaphragm extending along each side of the device from edge to edge in each of said directions, means interconnecting the slab and diaphragms at said edges, each diaphragm being arched away from the slab in one of said directions and toward the slab in the other of said directions, and each diaphragm being arched away from the slab in the direction in which the other diaphragm is arched toward the slab, and means interconnecting the central portions of the two diaphragms through an opening in the slab.
- a piezo-electric device including two units each comprising a slab which expands in one edgewise direction and contracts in another edgewise didection when subjected to electrostatic forces, a diaphragm extending along each side of each slab from edge to edge in each of said directions, and means interconnecting the slab and diaphragm of each unit at said edges, each diaphragm of each unit being arched away from the slab in one of said directions and toward the slab in the other of said directions, means for, mounting said units with correspunding directions of the two units disposed in planes approximately at right angles to each other so that the voltage produced in the two units by shock tend to cancel each other, and means electrically interconnecting the two units so that the voltages produced in the two units by sound waves are cumulative.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US570361A US2403692A (en) | 1944-12-29 | 1944-12-29 | Piezoelectric device |
| GB27372/45A GB603354A (en) | 1944-12-29 | 1945-10-18 | Piezo-electric devices |
| CH272165D CH272165A (fr) | 1944-12-29 | 1947-05-21 | Dispositif piézoélectrique. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US570361A US2403692A (en) | 1944-12-29 | 1944-12-29 | Piezoelectric device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US2403692A true US2403692A (en) | 1946-07-09 |
Family
ID=24279351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US570361A Expired - Lifetime US2403692A (en) | 1944-12-29 | 1944-12-29 | Piezoelectric device |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US2403692A (fr) |
| CH (1) | CH272165A (fr) |
| GB (1) | GB603354A (fr) |
Cited By (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2810082A (en) * | 1954-10-29 | 1957-10-15 | Tibbetts Lab Inc | Transducer damping |
| US2836738A (en) * | 1956-05-02 | 1958-05-27 | Joseph W Crownover | Prestressed piezo crystal |
| US2877362A (en) * | 1954-10-29 | 1959-03-10 | Tibbetts Lab Inc | Transducer sealing |
| US2895062A (en) * | 1955-12-22 | 1959-07-14 | Frank R Abbott | Broad band electroacoustic transducer |
| US2912605A (en) * | 1955-12-05 | 1959-11-10 | Tibbetts Lab Inc | Electromechanical transducer |
| US3414689A (en) * | 1965-06-28 | 1968-12-03 | Bell Telephone Labor Inc | Shock-mounting for electromechanical transducer |
| US3558936A (en) * | 1967-07-19 | 1971-01-26 | John J Horan | Resonant energy-conversion system |
| US3585416A (en) * | 1969-10-07 | 1971-06-15 | Howard G Mellen | Photopiezoelectric transducer |
| US3697790A (en) * | 1970-12-02 | 1972-10-10 | William T Flint | Transducers having piezoelectric struts |
| WO1997022154A1 (fr) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Transducteurs composites en ceramique electroactive/metal |
| US6215221B1 (en) * | 1998-12-29 | 2001-04-10 | Honeywell International Inc. | Electrostatic/pneumatic actuators for active surfaces |
| US6232702B1 (en) | 1998-08-18 | 2001-05-15 | The Penn State Research Foundation | Flextensional metal-ceramic composite transducer |
| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6729856B2 (en) | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
| WO2004057911A1 (fr) * | 2002-12-19 | 2004-07-08 | Abb Ab | Procede et dispositif pour convertir de l'energie entre des membranes |
| US20040211077A1 (en) * | 2002-08-21 | 2004-10-28 | Honeywell International Inc. | Method and apparatus for receiving a removable media member |
| US6837476B2 (en) | 2002-06-19 | 2005-01-04 | Honeywell International Inc. | Electrostatically actuated valve |
| US20060134510A1 (en) * | 2004-12-21 | 2006-06-22 | Cleopatra Cabuz | Air cell air flow control system and method |
| US20060137749A1 (en) * | 2004-12-29 | 2006-06-29 | Ulrich Bonne | Electrostatically actuated gas valve |
| US20060145110A1 (en) * | 2005-01-06 | 2006-07-06 | Tzu-Yu Wang | Microfluidic modulating valve |
| US20060169326A1 (en) * | 2005-01-28 | 2006-08-03 | Honyewll International Inc. | Mesovalve modulator |
| US20060272718A1 (en) * | 2005-06-03 | 2006-12-07 | Honeywell International Inc. | Microvalve package assembly |
| US20070014676A1 (en) * | 2005-07-14 | 2007-01-18 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
| US20070051415A1 (en) * | 2005-09-07 | 2007-03-08 | Honeywell International Inc. | Microvalve switching array |
| US20070131286A1 (en) * | 2005-12-09 | 2007-06-14 | Honeywell International Inc. | Gas valve with overtravel |
| US20070221276A1 (en) * | 2006-03-22 | 2007-09-27 | Honeywell International Inc. | Modulating gas valves and systems |
| US20080029207A1 (en) * | 2006-07-20 | 2008-02-07 | Smith Timothy J | Insert Molded Actuator Components |
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| US20080128037A1 (en) * | 2006-11-30 | 2008-06-05 | Honeywell International Inc. | Gas valve with resilient seat |
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| US20090026396A1 (en) * | 2007-07-25 | 2009-01-29 | Honeywell International, Inc. | Adjustable shutoff valve |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2894276B2 (ja) * | 1996-05-02 | 1999-05-24 | 日本電気株式会社 | 圧電音響変換器 |
| CN117890050B (zh) * | 2024-03-15 | 2024-06-21 | 中北大学 | 一种适用于飞行器的自驱动复合式多源振动传感器 |
-
1944
- 1944-12-29 US US570361A patent/US2403692A/en not_active Expired - Lifetime
-
1945
- 1945-10-18 GB GB27372/45A patent/GB603354A/en not_active Expired
-
1947
- 1947-05-21 CH CH272165D patent/CH272165A/fr unknown
Cited By (81)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2810082A (en) * | 1954-10-29 | 1957-10-15 | Tibbetts Lab Inc | Transducer damping |
| US2877362A (en) * | 1954-10-29 | 1959-03-10 | Tibbetts Lab Inc | Transducer sealing |
| US2912605A (en) * | 1955-12-05 | 1959-11-10 | Tibbetts Lab Inc | Electromechanical transducer |
| US2895062A (en) * | 1955-12-22 | 1959-07-14 | Frank R Abbott | Broad band electroacoustic transducer |
| US2836738A (en) * | 1956-05-02 | 1958-05-27 | Joseph W Crownover | Prestressed piezo crystal |
| US3414689A (en) * | 1965-06-28 | 1968-12-03 | Bell Telephone Labor Inc | Shock-mounting for electromechanical transducer |
| US3558936A (en) * | 1967-07-19 | 1971-01-26 | John J Horan | Resonant energy-conversion system |
| US3585416A (en) * | 1969-10-07 | 1971-06-15 | Howard G Mellen | Photopiezoelectric transducer |
| US3697790A (en) * | 1970-12-02 | 1972-10-10 | William T Flint | Transducers having piezoelectric struts |
| WO1997022154A1 (fr) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Transducteurs composites en ceramique electroactive/metal |
| US5729077A (en) * | 1995-12-15 | 1998-03-17 | The Penn State Research Foundation | Metal-electroactive ceramic composite transducer |
| US6232702B1 (en) | 1998-08-18 | 2001-05-15 | The Penn State Research Foundation | Flextensional metal-ceramic composite transducer |
| US6215221B1 (en) * | 1998-12-29 | 2001-04-10 | Honeywell International Inc. | Electrostatic/pneumatic actuators for active surfaces |
| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6758107B2 (en) | 2000-06-02 | 2004-07-06 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US7420659B1 (en) | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
| US6889567B2 (en) | 2000-06-02 | 2005-05-10 | Honeywell International Inc. | 3D array integrated cells for the sampling and detection of air bound chemical and biological species |
| US6729856B2 (en) | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
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Also Published As
| Publication number | Publication date |
|---|---|
| CH272165A (fr) | 1950-11-30 |
| GB603354A (en) | 1948-06-15 |
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