US2883802A - Method of and apparatus for lapping shoulders - Google Patents

Method of and apparatus for lapping shoulders Download PDF

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Publication number
US2883802A
US2883802A US611495A US61149556A US2883802A US 2883802 A US2883802 A US 2883802A US 611495 A US611495 A US 611495A US 61149556 A US61149556 A US 61149556A US 2883802 A US2883802 A US 2883802A
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United States
Prior art keywords
lap
plate
lapping
article
primary
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Expired - Lifetime
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US611495A
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English (en)
Inventor
Ernest F Katzke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Crane Packing Co
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Crane Packing Co
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Priority to US611495A priority Critical patent/US2883802A/en
Priority to CH5088957A priority patent/CH365967A/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Definitions

  • the present invention relates to lapping machines and methods and more particularly to apparatus for lapping a flat annular shoulder on an object where .the shoulder is spaced from the opposite ends of the object, as well as to a method which, when carried .out on the object undergoing lapping, will result in the maintenance of 'a properly and accurately dressed lap surface on the machlne which performs the lapping operation.
  • the automatic lapping of such shoulders has been carried out by means of a fiat rotating lap surface, utilizing one or the other of two more or less basic lapping methods.
  • the lap surface is provided with a central axial opening which receives the protruding end of the object undergoing lapping so that the shoulder which is to be lapped rests on the lap surface at the rim of the opening, or the lap surface is formed with an annular groove therein of sufficient depth to completely receive the protruding end of the object with the shoulder to be lapped resting on the lap surface in the edge regions of the groove and straddling the latter.
  • the latter method is disclosed in US. Patent No. 2,597,382, issued to Raymond G.
  • a further object of this invention is the provision of apparatus for carrying out the foregoing methods and specifically, the provision of an annular lap surface associated with a single lap plate which continuously dresses one side of an annular lap while the opposite side thereof is lapping a shouldered article.
  • Such condition- .ing operation taking place and being elfected on one annular lap surface associated with a single lap plate simultaneously with the use o'fanother annular lap surface on the same lap plate for actual lapping operations on the shoulder undergoing lapping.
  • a relatively small diameter lap plate may be employed for shoulder lapping operations while additionally no time is lost in the partial dismantling operations which are attendant upon lap plate removal and refinishing operations.
  • Fig. 1 is a fragmentary perspective view of a lapping machine constructed in accordance with the principles .of the present invention and, .for illustrative purposes, shown lapping of the bolting flange associated with the cylinder assembly of an aircraft engine.
  • Fig. 2 is a plan view of a reversible annular lap plate employed in-connection with the invention.
  • Fig. .3 is a plan view of the portion of the machine shown in Fig. 1. p
  • Fig. 4 is an enlarged sectional view taken substantial- .ly along the vertical plane indicated by the line 4-4 of Fig. 1, and
  • Fig. 5 is a fragmentary sectional view similar to Fig. 4 showing a slightly modified form of reversible lap plate operatively applied to the aircraft cylinder bolting flange.
  • .portion of a lapping machine framework 10 is shown, the portion illustrated being in the form of a generally rectangular casing providing a table top 12 and depending sides .14 within which all of the operative lap plate driving tinstrumentalities including the motor, reduction gearing, etc. ,(not shown) are enclosed.
  • the table top 12 As a more specific obje'ct inventionhaswit'h in its is formed with an opening 16 in which there is mounted .for rotation about .a vertical axis a lap plate 18 having an annular flat lap surface 20 defined by inner and outer peripheral edges 22 .and 24, respectively.
  • the lap plate 18 projects slightly above the level of the table top 12 so that the annular lap surface 20 is disposed slightly above the plane of the table top 12.
  • the lapping region immediately above the lap plate 18 may be divided into three sectors and in one of these sectors there is disposed a wear ring 26 which rests loosely by gravity on the lap surface 20 and overhangs both the inner and outer peripheral edges 22 and 24 thereof, respectively.
  • the wear ring 26 is provided with a flat annular abrading surface 28 on its underneath side which has an abrading effect on the lap surface 20, and means are provided whereby the radial position of the ring 26 may be adjusted to bring the surface. 20 to the desired degree of flatness from a condition of concavity or a condition of convexitytin a manner which has been made clear in the above menaesaeoa tinned reissue patent to Bullard.
  • the ring 26 also serves to remove from the lap surface 20 any surface irregularities or scratches which may be present therein.
  • the means whereby the radial position of the wear ring 26 may be varied is similar to that shown in the above mentioned patent to Roshong and comprises a so-called roller bar construction including a yoke member 30 adjustably located relative to frame by a pin-and-slot connection 32 and clamped by a bolt assembly 34 to a horizontally disposed generally arcuate face plate 36, the latter being held above the table top 12 by anchoring studs 38 and spacer rings 40.
  • the free ends of the yoke arms carry antifriction rollers 42 which engage the outer cylindrical surface of wear ring 26 and restrain the ring against revolution about the axis of the rotating lap surface 20 while at the same time permitting the ring to rotate freely about its own axis due to its frictional contact with the lap plate, all in a manner clearly set forth in the Roshong patent.
  • the lap surface 20 which hereinafter will be referred to as the primary lap surface, is adapted to receive thereon one or more annular lap plates 44, two such plates being shown in Fig. 4, each of which is in the form of a ring having annular secondary lap surfaces 46 formed on opposite sides thereof.
  • Surfaces 46 are designed for use in lapping the annular shoulder of an object when the shoulder is offset from an end of the object in such a manner that the protruding end requires a clearance space before the shoulder may be positioned against the lap surface.
  • each secondary lap plate 44 is shown as being in the form of a cylinder as sembly for aircraft engines wherein the cylinder body 50 is formed with a radially extending continuous annular bolting flange 52 providing the shoulder 53 which it is desired to lap and having a series of bolt holes 54 extending therethrough and arranged in spaced relation therearound.
  • the lower part 55 of cylinder 50 extends downwardly from the inner regions of the bolting flange 52 and precludes accommodation of the shoulder 53 on conventional flat lap plates having continuous or uninterrupted flat circular lap surfaces.
  • Each secondary lap plate 44 is formed with a cylindrical outer surface 56 around which there extends a ring gear 57 having radially disposed teeth 58 thereon.
  • the gear 57 may be press-fitted, shrunk, welded or otherwise secured to cylindrical surface 56 approximately midway between the respective planes of the two flat secondary lapping surfaces.
  • the lap plate 44 is [formed with a central axial opening 60 therethrough defining a cylindrical bore or wall 62 the diameter of which is slightly larger than the external diameter of the lower part 55 on the cylinder body 50 so that when the plate 44 is resting on the upwardly facing lap surface 20 of the primary lap plate, with either secondary lap surface 46 in lapping engagement with the surface 20, the part 55 may be re ceived in the bore 62 which provides a clearance for it so that the annular shoulder 53 on the bolting flange 52 may seat on the other or upwardly presented secondary lap surface and make intimate lapping contact in the immediate vicinity of the inner peripheral region thereof.
  • the central region of the primary lap plate 20 is formed with a shallow circular well 64 which defines the inner periphery 22 of the lap surface 20.
  • the drive shaft 66 for lap plate 18 projects upwardly through said plate and well above the level of the lap surface 20 and has affixed thereto a central hub gear 63 hav ing a series of radial teeth 70 thereon designed for meshing engagement with the teeth 58 provided on the ring gears 57 associated with the secondary lap plates 44.
  • the mean height of the hub gear 68 above the plane of the primary lap surface 20 is substantially equal to the mean height of the ring gear 57 of each lap plate 44 regardless of which lap surface 46 thereof is resting upon the primary lap surface 20.
  • the secondary lap plates'44 t are symmetrical with respect to a plane extending transversely and centrally through the same and they are therefore reversible on the primary lap surface so that whichever lap surface is presented upwardly, that surface is positioned for lapping operations on the cylinder shoulder 53 while the opposite lap surface is presented downwardly and in contact with the primary lap surface so that it may he abraded by the latter and brought to a condition of flatness, all in a manner and for a purpose that will be made clear presently.
  • the various secondary lap plates 44 when operatively resting on the rotating primary lap surface 20, are held against revolution about the axis of the latter surface, as well as being held in such positions that their respective ring gears 57 mesh with the central hub gear 68, by means of roller bar assemblies similar to that already described in connection with the wear ring 26 and similarly designated in the drawings. It is to be noted that the overall height of the various roller bar assemblies including the yokes 30 and rollers 42 is less than the mean height of the ring gears 57 above the primary lap surface 20 so that there will be no interference with the operation of the rollers 42 which bear against the outside cylindrical surface 56 of the secondary lap plates 44 when the machine is in operation.
  • a rod 72 has one end thereof pivotally secured to a standard 74 mounted on the upper face of the plate 36, the said one end of rod '72 being vertically slidable on and rotatable about a stud 75 which projects upwardly from the standard.
  • the elevation of the rod 72 above plate 36 is determined by a series of spacer collars 76 telescopically received over stud 75.
  • a compression spring 78 encircles the stud and bears downwardly at one end on the rod, the other end reacting against a tension-adjusting nut 80 threadedly received on the upper end of the stud.
  • the free end of the rod 72 carries a pin 82, the lower end of which is adapted to extend into one of the bolt holes 54 provided in the bolting flange 52 so that the rod extends approximately tangential ly of the bolting flange 52 and supplies the countertorque or reaction force necessary to hold the bolting flange 52 against rotation with the secondary lap plate 44 on which it is supported.
  • the machine is provided with a storage and agitator tank assembly for the grit and the vehicle in which it is suspended the grit and vehicle comprising the abrading compound for the lapping operation.
  • This abrading compound is fed through an aperture under the control of a solenoid-actuated valve mechanism designated in its entirety at 92 and travels by gravity along a thin rod or wire 94, the free end of which may make contact with a surface of the wear ring 26 to deposit the compound thereon whence it flows onto the lap surface 20 and become distributed thereover in the manner set forth in the abovementioned patent to Bullard.
  • each Secondary lap plate 44 may be resorted to several times during each lapping cycle, that is, during the lapping of a single shoulder, the frequency of reversal depending, of course, upon the character and hardness of the surface undergoing lapping as well as upon the character of the lapping compound employed on the secondary lap surface 46.
  • the lapping compound used upon the secondary lap surfaces 46 is spread evenly over the upper surface of each lap plate 44 utilizing either a brush or a spatula for the purpose.
  • a paste type of compound is preferred and, each time a reversal of the lap plate is made as described above, a fresh application of the abrasive compound is resorted to.
  • Reversal of secondary lap plates 44 is accomplished preferably by shutting down the machine to stop all rotation of the primary and secondary laps, and then removing cylinders 50 after raising rods 72 against the action of springs and then rotating the raised rods clear of the plates 44.
  • Said plates 44 may then be raised from lap surface 20, turned over, and then replaced on surface 20 with the teeth of gear 57 meshing with the teeth of gear 68.
  • Cylinders 50 are then replaced on plates 44, pins 82 'of rods 72 are placed in the bolt holes 54 and the machine is restarted.
  • the annular configuration of secondary laps 44 may result, in the event of the need of a large opening 62 therein for the reception of a correspondingly large diameter protruding portion of a shouldered article, in the secondary laps approximating in size and shape the wear ring 26, and hence the secondary laps 44 may, under such circumstances, serve to condition primary lap surface'20 as to contour even while lap surface 20 is removing the groove formed in the secondary lap surface by the shouldered article.
  • the wear ring 26 may be dispensed with and the capacity of primary lap 18 may be increased by substituting for wear ring 26 an additional secondary lap 44.
  • the various lap surfaces 20 and 46 may be radially grooved as indicated at 100 tofac'ilitate distribution and drainage of the 'ab'rading compound as well as to improve the lapping characteristics of the lap plates.
  • Fig. 5 a slightly modified form of secondary lap plate 144 which is capable of use in connection with "the primary lap plate 18 and in substantially the same manner in which the lap plate 44 is used. Because of the similarities between the lap plates 44 and 144, corresponding parts have been given similar reference numerals but of a higher order. Thus the ring gear is given the numeral 157, the central opening in lap plate 144 is numbered 160 and the wall defining the opening 160 is.
  • shoulders such as the shoulder 53 having bolt holes or other voids formed therein have a tendency for excess lapping to take place in the annular regions of both laps occupied by the bolt holes or other voids, and it is believed that such a condition is the result of abrasive particles building up within the bolt holes themselves and exerting an undue abrading effect on the rimportions of these holes while comparatively starving the remaining portions of the lap surfaces.
  • Another and perhaps additional cause for such excessive wear may, it is believed, be caused by oversize particles of abrasive making minute chips on the edge of the bolt hole rims as they slide under the shoulder initially and before they are reduced in size by their abrasive action.
  • the method of lapping a surface on an article while simultaneously dressing a lap surface which comprises forming a lap plate with oppositely directed lap surfaces, effecting rotation of the lap plate about an axis passing through both surfaces, applying the article to one of said rotating lap surfaces and creating relative motion between the article and surface to perform lapping operations on the article while simultaneously applying a dressing tool to the other rotating lap surface and creating relative motion between the tool and latter surface to dress the latter surface, and thereafter inverting the lap plate relative to the article and dressing tool and rotating the inverted lap plate relative to the article and tool so that the article is applied to the previously dressed lap surface and the dressing tool is applied to the lap surface which, by virtue of its previous contact with the article has itself become abraded.
  • the method of lapping a surface on an article while simultaneously dressing a lap surface which comprises forming a lap plate with oppositely directed lap surfaces, effecting rotation of the lap plate about an axis passing through both surfaces, applying the article to one of said rotating lap surfaces and creating relative motion between the article and surface to perform lapping operations on the article while simultaneously applying a dressing lap to the other rotating lap plate surface and creating relative motion between the dressing lap and latter surface to dress the said latter surface, continuously dressing the said dressing lap, and periodically inverting the lap plate relative to the article and dressing lap and rotating the inverted lap plate relative to the article and dressing lap so that the article is applied to the previously dressed lap plate surface and the dressing lap is applied to the lap plate surface which, by virtue of its previous contact with the article has itself become abraded.
  • the method of lapping an annular shoulder on an article while simultaneously dressing a lap surface which comprises forming a lap plate with oppositely directed lap surfaces and an opening inwardly of each said lap surface into which the portion of the article below the shoulder may extend, mounting the article on said plate with the shoulder contacting one of the lap surfaces, effecting rotation of the lap plate about an axis passing through both surfaces while restraining the article against rotation with the plate to effect an abrading action between the article and plate, simultaneously abrading the opposite side of the plate with a rotating lap having an annular lap surface the center of rotation of which is eccentric with respect to the axis of rotation of the plate to expose a portion of the annular lap surface, and continuously dressing the annular lap by a dressing ring disposed upon the exposed portion of the annular lap surface.
  • a primary lap plate mounted for rotation about a vertical axis and having a horizontal primary lap surface
  • means for rotating said lap plate a secondary lap plate having two oppositely directed parallel secondary lap surfaces, one on each side thereof, said secondary lap plate being adapted to be loosely received on the primary lap surface with either secondary lap surface in contact therewith
  • the combination set forth in claim including, additionally, means operable when said secondary lap plate is in position on said primary lap plate in either position thereof for positively rotating the same in a direction opposite to the direction of rotation of said primary lap plate.
  • the combination set forth in claim 5 including, additionally, means operable when said secondary lap plate is in position on said primary lap plate in either position thereof for positively rotating the same in the same direction as viewed from a fixed point.
  • the combination set forth in claim 5 including additionally, means on the primary lap for conditioning the primary lap while said primary lap is operating upon the secondary lap resting thereon.
  • said rotating means comprises a central hub gear on said primary lap plate in axial alignment therewith, and a ring gear on said secondary lap plate in constant mesh with said hub gear, said hub and ring gears being formed with elongated teeth capable of varying degrees of radial meshing engagement with each other, said restraining means including means for radially shifting the position of the secondary lap plate relative to the primary lap surface.
  • said restraining means comprises antifriction elements positioned to engage the outer surface of said secondary lap plate in either position thereof at spaced points therearound and subtend an arcuate increment of the plate therebetween so that the vectorial forces exerted upon the ring during rotation of the primary lap plate tending to move the secondary lap plate outwardly and radially away from said hub gear are directed against said antifriction elements.
  • a primary lap plate mounted for rotation about a vertical axis and having a horizontal primary lap surface, means for rotating said lap plate, a secondary lap plate having two oppositely directed parallel secondary lap surfaces, one on each side thereof, said primary lap plate beingadapted to loosely receive thereon the secondary lap plate with either secondary lap surface in contact therewith, a hub gear mounted on said primary lap plate in axial alignment therewith and slightly above the level of said primary lap surface, a ring gear mounted on said secondary lap plate and encircling the latter in the medial region thereof, the distance between said ring gear and either secondary lap surface being equal to the distance between said hub gear and the primary lap surface whereby said ring gear is engageable with the hub gear in either position of the secondary lap plate, a support positioned adjacent the edge of said primary lap plate and above the level of said primary lap surface, and means mounted on said support and operable when said secondary lap plate is positioned on said primary lap surface in either position thereof for restraining the
  • said secondary lap plate being adapted to be loosely received on the primary lap surface with either secondary lap surface in contact therewith, the opening in said secondary lap plate being adapted to receive therein the protruding end of the article in either position of the plate with the shoulder thereof resting upon the adjacent secondary lap surface in lapping relationship, means operable when said secondary lap plate is received on said primary lap plate in either position for restraining said latter lap plate against revolution about the axis of the primary lap plate, and means for establishing relative movement between the article, when received on the secondary lap plate, and the latter lap plate whereby relative motion is created between the article and secondary lap plate.
  • a primary lap plate mounted for rotation about a vertical axis and having a horizontal primary lap surface, means for rotating said lap plate, a secondary lap plate in the form of a flat ring having a central opening therein and two oppositely directed parallel annular secondary lap surfaces, one on each side of the plate and surrounding the opening therein, said secondary lap plate being adapted to be loosely received on the primary lap surface with either secondary lap surface in contact therewith, the opening in said secondary lap plate being adapted to receive therein the protruding portion of the article in either position of the plate with the sealing surface of the bolting flange resting upon the adjacent secondary lap surface in lap-ping relationship, said secondary lap plate being formed with a circular series of holes
  • said combination set forth in claim 13 wherein said latter restraining means comprises a stationary support positioned adjacent said primary lap plate, a thrust rod pivoted to said stationary support, and an anchoring pin carried at the free end of said thrust rod and receivable in a selected opening in said bolting flange of the article when the latter is in position on said secondary lap plate.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
US611495A 1956-09-24 1956-09-24 Method of and apparatus for lapping shoulders Expired - Lifetime US2883802A (en)

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Application Number Priority Date Filing Date Title
US611495A US2883802A (en) 1956-09-24 1956-09-24 Method of and apparatus for lapping shoulders
CH5088957A CH365967A (de) 1956-09-24 1957-09-24 Vorrichtung zum Läppen von ringförmigen Flanschflächen an Werkstücken

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US611495A US2883802A (en) 1956-09-24 1956-09-24 Method of and apparatus for lapping shoulders

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US2883802A true US2883802A (en) 1959-04-28

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2992519A (en) * 1960-02-18 1961-07-18 Internat Optical Company Inc Apparatus for surfacing and polishing optical glass and other articles
US3031806A (en) * 1960-04-12 1962-05-01 Crane Packing Co Automatic lap plate contour control
US3101575A (en) * 1961-03-06 1963-08-27 Crane Packing Co Automatic lap sensing and correcting device
US3662498A (en) * 1968-08-29 1972-05-16 Peter Wolters Kratzenfabrik Un Redressing of laps in lapping or honing machines
US5597346A (en) * 1995-03-09 1997-01-28 Texas Instruments Incorporated Method and apparatus for holding a semiconductor wafer during a chemical mechanical polish (CMP) process
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
NL1010252C2 (nl) * 1997-09-01 2000-05-01 United Microelectronics Corp Borgring voor gebruik in een chemisch-mechanische polijstmachine en fabricageproces met gebruikmaking hiervan.
US6089961A (en) * 1998-12-07 2000-07-18 Speedfam-Ipec Corporation Wafer polishing carrier and ring extension therefor
US6234876B1 (en) 1997-09-01 2001-05-22 United Microelectronics Corp Chemical-mechanical polish machines and fabrication process using the same
US20080182493A1 (en) * 2007-01-31 2008-07-31 Muldowney Gregory P Polishing pad with grooves to reduce slurry consumption
US20080182489A1 (en) * 2007-01-31 2008-07-31 Muldowney Gregory P Polishing pad with grooves to reduce slurry consumption
US20100314078A1 (en) * 2009-06-02 2010-12-16 Kuo-Len Lin Cooler with ground heated plane and grinding method and apparatus thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2597382A (en) * 1949-11-01 1952-05-20 Crane Packing Co Apparatus for lapping shoulders

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2597382A (en) * 1949-11-01 1952-05-20 Crane Packing Co Apparatus for lapping shoulders

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2992519A (en) * 1960-02-18 1961-07-18 Internat Optical Company Inc Apparatus for surfacing and polishing optical glass and other articles
US3031806A (en) * 1960-04-12 1962-05-01 Crane Packing Co Automatic lap plate contour control
US3101575A (en) * 1961-03-06 1963-08-27 Crane Packing Co Automatic lap sensing and correcting device
US3662498A (en) * 1968-08-29 1972-05-16 Peter Wolters Kratzenfabrik Un Redressing of laps in lapping or honing machines
US5597346A (en) * 1995-03-09 1997-01-28 Texas Instruments Incorporated Method and apparatus for holding a semiconductor wafer during a chemical mechanical polish (CMP) process
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
US6234876B1 (en) 1997-09-01 2001-05-22 United Microelectronics Corp Chemical-mechanical polish machines and fabrication process using the same
NL1010252C2 (nl) * 1997-09-01 2000-05-01 United Microelectronics Corp Borgring voor gebruik in een chemisch-mechanische polijstmachine en fabricageproces met gebruikmaking hiervan.
US6241582B1 (en) 1997-09-01 2001-06-05 United Microelectronics Corp. Chemical mechanical polish machines and fabrication process using the same
US6293850B1 (en) 1997-09-01 2001-09-25 United Microelectronics Corp. Chemical-mechanical polish machines and fabrication process using the same
US6089961A (en) * 1998-12-07 2000-07-18 Speedfam-Ipec Corporation Wafer polishing carrier and ring extension therefor
US20080182493A1 (en) * 2007-01-31 2008-07-31 Muldowney Gregory P Polishing pad with grooves to reduce slurry consumption
US20080182489A1 (en) * 2007-01-31 2008-07-31 Muldowney Gregory P Polishing pad with grooves to reduce slurry consumption
US7520796B2 (en) * 2007-01-31 2009-04-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with grooves to reduce slurry consumption
US7520798B2 (en) * 2007-01-31 2009-04-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with grooves to reduce slurry consumption
US20100314078A1 (en) * 2009-06-02 2010-12-16 Kuo-Len Lin Cooler with ground heated plane and grinding method and apparatus thereof
US20120160458A1 (en) * 2009-06-02 2012-06-28 Kuo-Len Lin Cooler having ground heated plane for cooling heating electronic component
US8235768B2 (en) * 2009-06-02 2012-08-07 Golden Sun News Techniques Co., Ltd. Cooler with ground heated plane and grinding method and apparatus thereof
US8328601B2 (en) * 2009-06-02 2012-12-11 Golden Sun News Techniques Co., Ltd. Apparatus for grinding heated plane of cooler

Also Published As

Publication number Publication date
CH365967A (de) 1962-11-30

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