US3214086A - Vacuum pumps - Google Patents

Vacuum pumps Download PDF

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Publication number
US3214086A
US3214086A US244504A US24450462A US3214086A US 3214086 A US3214086 A US 3214086A US 244504 A US244504 A US 244504A US 24450462 A US24450462 A US 24450462A US 3214086 A US3214086 A US 3214086A
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United States
Prior art keywords
wall
enclosure
grid
poles
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US244504A
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English (en)
Inventor
Matricon Marcel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnei Francaise Thomson Ho
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Publication date
Application filed by Compagnei Francaise Thomson Ho filed Critical Compagnei Francaise Thomson Ho
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Definitions

  • the present invention relates to improvements to vacuum pumps of the evaporation and ionization type, and is a continuation-in-part application of my prior application Serial No. 155,656 entitled Vacuum Pumps, and filed Nov. 29, 1961.
  • the present invention has for an object the construction of an improved pump implementing the above-mentioned phenomena.
  • Another object is to provide an arrangement whereby the distribution of the lines of force of the magnetic field excited in the pump according to my said prior application, is improved.
  • FIGURE 1 shows a cross-section of a first embodiment of a ump according to the invention
  • FIGUR 2 shows an elevation thereof
  • FIGURES 3 and 4 respectively show cross-sections of two further embodiments
  • FIGURE 5 shows the distribution of the line of force around the poles of one of the magnets according to these embodiments.
  • FIGURE 6 shows the distribution of the line of force with the improvement of the present application incorporated.
  • the pump is constituted by a gas-tight cylindrical enclosure 1, made of non-magnetic material having an internal conductive coating 2 having good gas absorption properties.
  • a grid 3 On the inside of this enclosure is a grid 3, arranged coaxial to the whole.
  • a potential source indicated by the battery so that the grid 3 becomes an anode and the cylinder 2 a cathode.
  • Magnets 4 provided, for example, with polepieces 5, are arranged outside enclosure 1 in such a way that a magnetic field, the lines of force of which are shown in 6, are created on the inside of the device.
  • a suitable electrical voltage is applied between the cathode and the anode an electrical discharge results.
  • the electrons abstracted from the oathode by the impact of the positive ions are accelerated by the electrical field which exists between the cathode 2 and the grid-formed anode 3 but they are guided by the magnetic field and can generally only attain the anode after having effected a large number of oscillations between the anode and the cathode. During this long trajectory they ionize the residual gases and the positive ions formed accelerate towards the cathode, causing the emission of new electrons.
  • the positive ions which strike the cathode can be absorbed into the metal constituting the cathode if this nited States Patent 0 3,214,036 Patented Oct. 26, 1965 metal is appropriately chosen.
  • the shock of the positive ions tears away particles of cathodic metal which fix themselves onto the walls of the enclosure. During this process the gaseous molecules are imprisoned beneath the cathodic metal layer.
  • surfaces such as 7 (not shown on FIGURE 2 can be arranged in the system, to receive the evaporated cathodic metal. These surfaces should be placed in such a way that they do not hinder the electrical discharge, i.e. parallel to the magnetic field. For the same reason they can be carried to the potential of anode 3, or a somewhat less positive potential, in order that they do not absorb the distribution of the electrical field in the system.
  • the grid-formed anode 3 can be supported by members 8 (FIGURE 2) which form both the electrical connection and the insulating support.
  • members 8 FIG. 2
  • This arrangement is convenient if it is intended to heat the anode by the Joule effect in order to degasify it and to provoke evaporation of the fixing body of the gas.
  • the anode can be wholly or partly made of the body it is wished to evaporate.
  • the anode can also be positioned by insulating supports which are suitably placed and arranged independent of the electrical connection.
  • FIGURES 3 and 4 show arrangements according to the invention wherein the reference numerals similar to those of FIGURES 1 and 2 designate like parts.
  • the magnetic masses 4 are prismatic and the magnetic field is closed by a yoke 9.
  • Surfaces 7 can be held at negative voltage in relation to anode 3 in such a way that these surfaces 7 function as ion collectors, thus favoring the fixing of the gases.
  • the voltage to which these surfaces 7 is carried should be such that the ion collection be efiicient but that the speed of these ions be too low to cause the atomization of the metal constituting these surfaces 7 or which is deposited on them.
  • This method of operation can be accompanied by Joule heating of anode 3 and by its evaporation if said anode has been made of a metal able to fix the gases.
  • FIGURE 5 shows the distribution of the lines of force around one of the magnets of a magnet system used in the embodiments above referred to.
  • the lines of force indicated at 6, follow the line of least resistance and therefore as shown in this figure they flatten out inside the insulating enclosure 1 and a small part of the flux actually passes directly between the poles N and S and outside the enclosure 1 as shown at 6a.
  • This leakage flux reduces the operational efficiency of the pump. It will be appreciate that in order to keep the drawing simple, so as the more efficiently to show the lines of force, the conductive coating 2 and all the other parts of the pump, have been omitted.
  • FIGURE 6 shows an arrangement which is adapted to increase the penetration of the magnetic field in the enclosure 1.
  • an additional magnetic bar 8 is arranged between the adjacent dissimilar poles 5 of the magnet system of any one of the embodiments referred to above.
  • the drawing shows a single magnet 4 of a system as used in FIG- URE 1, 2 or 4, but it can also be used between the dissimilar poles of a system as shown in FIGURE 3.
  • the pole N of the magnet 8 is arranged in the vicinity of a pole N and likewise therefore the pole S of the magnet 8 is close to the next adjacent S pole of the main magnet system.
  • FIGURES 5 and 6 show only two adjacent poles of a magnet system, exemplified as a single magnet only, but it will be apparent that an additional magnet 8 may be arranged between any or all or the co-adjacent dissimilar poles of the magnet system S referred to in the preceding embodiments of FIG- URES 1 to 4.
  • FIGURE 6 has been given by way of example and that other variants may be designed Within the scope of the invention.
  • a vacuum pump of the evaporation and ionisation type comprising a hermetically sealed enclosure defined by a wall of non-magnetic material, a gas-absorbing coating on the inner face of said wall, a grid-form electrode located axially within said enclosure, means for connecting said enclosure and said grid-form electrode to a voltage source whereby the inner face of said, wall and said gas-absorbing coating can act as a cathode, the grid-form electrode then having a potential which is highly positive with respect, to said cathode,
  • a sealed enclosure for a vacuum pump said enclosure including a cylindrical wall, a first permanent magnet located on the outside of said wall, the poles of said first magnet being located next adjacent said wall, and a second permanent magnet located on the outside of said wall and wholly between the poles of said first magnet, the like of said two magnets being co-adjacently arranged.

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  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US244504A 1961-12-15 1962-12-13 Vacuum pumps Expired - Lifetime US3214086A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR882061A FR80795E (fr) 1961-12-15 1961-12-15 Système perfectionné de pompe à vide du type à évaporation et à ionisation

Publications (1)

Publication Number Publication Date
US3214086A true US3214086A (en) 1965-10-26

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ID=8768790

Family Applications (1)

Application Number Title Priority Date Filing Date
US244504A Expired - Lifetime US3214086A (en) 1961-12-15 1962-12-13 Vacuum pumps

Country Status (4)

Country Link
US (1) US3214086A (fr)
DE (1) DE1273118B (fr)
FR (1) FR80795E (fr)
GB (1) GB1014386A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5269916A (en) * 1992-09-11 1993-12-14 Colonel Clair Pipe protector/fluid ionizer employing magnetic condenser for producing concentrated force lines perpendicular to fluid flow
US5378988A (en) * 1993-01-22 1995-01-03 Pulyer; Yuly M. MRI system having high field strength open access magnet

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
US2925214A (en) * 1953-04-24 1960-02-16 Gen Electric Ionic vacuum pump
US2936408A (en) * 1954-11-18 1960-05-10 Csf Permanent magnets
US2974981A (en) * 1956-07-14 1961-03-14 Philips Corp Arrester for iron particles
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925214A (en) * 1953-04-24 1960-02-16 Gen Electric Ionic vacuum pump
US2936408A (en) * 1954-11-18 1960-05-10 Csf Permanent magnets
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
US2974981A (en) * 1956-07-14 1961-03-14 Philips Corp Arrester for iron particles
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5269916A (en) * 1992-09-11 1993-12-14 Colonel Clair Pipe protector/fluid ionizer employing magnetic condenser for producing concentrated force lines perpendicular to fluid flow
US5378988A (en) * 1993-01-22 1995-01-03 Pulyer; Yuly M. MRI system having high field strength open access magnet

Also Published As

Publication number Publication date
GB1014386A (en) 1965-12-22
DE1273118B (de) 1968-07-18
FR80795E (fr) 1963-06-14

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