US3253945A - Method and apparatus for coating strip material by vapor deposition - Google Patents

Method and apparatus for coating strip material by vapor deposition Download PDF

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Publication number
US3253945A
US3253945A US331840A US33184063A US3253945A US 3253945 A US3253945 A US 3253945A US 331840 A US331840 A US 331840A US 33184063 A US33184063 A US 33184063A US 3253945 A US3253945 A US 3253945A
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US
United States
Prior art keywords
strip
coating
crucible
vapors
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US331840A
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English (en)
Inventor
Thomas K Cauley
James I Maher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Priority to US331840A priority Critical patent/US3253945A/en
Priority to BE657043A priority patent/BE657043A/xx
Priority to NL6414665A priority patent/NL6414665A/xx
Priority to DE19641521557 priority patent/DE1521557A1/de
Priority to GB51633/64A priority patent/GB1079050A/en
Priority to FR999122A priority patent/FR1420737A/fr
Application granted granted Critical
Publication of US3253945A publication Critical patent/US3253945A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Definitions

  • This invention relates to an improved method and apparatus for coating strip material by vapor-deposition, and more particularly to controlling the thickness and profile of the coating.
  • the strip passes over a crucible which is housed in 'a vacuum chamber.
  • the crucible contains coating material, which is heated to a sufficient temperature to vaporize it.
  • the vapors condense on the strip surface and form a continuous coating thereon.
  • Such processes can be used, for example, to coat steel strip with aluminum.
  • One problem encountered in these processes is in controlling the coating thickness, particularly in depositing a coating of uniform thickness across the width of a strip.
  • the portion of the strip which passes over the central portion of the crucible tends to acquire a thicker coating than the portions which pass over each side edge.
  • An object of our invention is to provide an improved method and apparatus for coating a strip by vapor deposition in which we closely control the coating thickness.
  • a further object is to provide a method and apparatus of the foregoing type in which the undersurface of the strip lies approximately on a band where the vapor density is uniform; as it passes over the crucible; that is, the strip is closer to the crucible at each .side thereof than at the central portion.
  • FIGURE 1 is a diagrammatic top plan view of a portion of a vapor-deposition coating apparatus equipped with one form of our device for controlling the coating thickness;
  • FIGURE 2 is a diagrammatic side-elevational View of the apparatus shown in FIGURE 1;
  • FIGURE -3 is a vertical section on line IIIIII of FIGURE 1;.and
  • FIGURE 4 is a section similar to FIGURE 3, but showing a modification.
  • the drawing shows an open-topped crucible which forms part of a conventional coating apparatus.
  • the crucible is equipped with heating means, such as electrical resistance coils 11, and it contains a supply of coating material which vaporizes on heating.
  • the crucible is housed within a vacuum chamber, not shown.
  • a strip S passes continuously over the crucible, whereby vapors V from the material in the crucible condense on the strip surface and form a coating thereon.
  • the front and back edges of the crucible carry upstanding baflles 12, which keep the angle of incidence between the vapors and the strip surface closer to 90", thereby improving the quality of coating.
  • the foregoing apparatus is well known and hence is not shown in further detail. Nevertheless reference can be made to McManus et al. Patent No. 2,382,432 or Stoll Patent No. 2,384,500 for more complete showings of apparatus of this type.
  • FIGURES l, 2 and 3 we mount series of opposed upper and lower shaping rolls 13 and 14 ahead of crucible 10 and other series of opposed upper and lower shaping rolls 15 and 16 following the crucible. As the strip approaches the crucible, it passes between rolls 13 and '14 which bend it to a downwardly concave are best shown in FIGURE 3. As it leaves the crucible,
  • FIGURE 4 shows a modification in which individual strips S and S pass over the same crucible.
  • Upper and lower shaping rolls 17 and 18 position strip S so that it slopes downwardly from a line above the central portion of the crucible toward the left.
  • upper and lower shaping rolls 17a and 18a position strip S so that it slopes downwardly toward the right.
  • One of the strips S or S may be the return pass of the other after the strip has been inverted.
  • the density of the vapors V of coating material of course becomes lower the greater the distance above the crucible. At any given distance the vapors have their greatest density above the central portion of the crucible. As FIGURES 3 and 4 show, the undersur-face of the strip lies closer to the supply of coating material in the crucible at the edges of the crucible than at the central portion.
  • the A strip To deposit a coating of uniform thickness, we position the A strip so that its full width lies approximately on a band where the vapors are of the same density. By positioning the strip in other ways, we can also deposit coatings whose thickness varies according to predetermined patterns. Another benefit which results from our invention is that the strip acts to confine the vapors adjacent the edges of the crucible. Since the strip lies closer to the crucible at the edges, less vapor can escape.
  • a method of controlling the thickness of coating deposited on the strip comprising positioning the strip as it approaches the supply so that it is closer to the supply at the edges thereof than at the central portion, whereby the under-surface of the strip lies approximately on a band where the vapor density is uniform across its width as the strip passes over the supply.
  • an apparatus for coating strip material which apparatus includes a crucible adapted to contain a supply of coating material, means for heating the crucible to vaporize the coating material, and means for moving a continuous strip over the crucible to enable the vapors to condense on the strip surface and form a coating thereon, the density of the vapors being greatest near the central portion of the crucible at any given distance thereabove, the combination therewith of a device for controlling the thickness of coating deposited on the strip, said device comprising means mounted ahead of said crucible and engaging the strip to position it so that it is closer to the crucible above the edges of the crucible than at the central portion, whereby the undersurface of the strip lies approximately on a band where the vapor density is uniform across its width as the strip passes over the crucible.
  • a combination as defined in claim 4 including means for bending the strip to a downwardly concave are as it approaches said crucible and means [for restoring the strip to flatness after it passes the crucible.
  • a combination as defined in claim 5 in which the means for bending and restoring the strip include a series of upper and lower shaping ro'lls between which the strip passes, the outer rolls of each series [being journaled on axes inclined to the horizontal, the angle of inclination becoming greater the closer to the crucible.
  • a combination as defined in claim 4 including means for guiding individual strips across the same crucible and positioning said strips so that each slopes downwardly from a line above the central vportion of the crucible to- Ward the edges.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
US331840A 1963-12-19 1963-12-19 Method and apparatus for coating strip material by vapor deposition Expired - Lifetime US3253945A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US331840A US3253945A (en) 1963-12-19 1963-12-19 Method and apparatus for coating strip material by vapor deposition
BE657043A BE657043A (fr) 1963-12-19 1964-12-11
NL6414665A NL6414665A (fr) 1963-12-19 1964-12-16
DE19641521557 DE1521557A1 (de) 1963-12-19 1964-12-16 Verfahren und Vorrichtung zum UEberziehen von Bandmaterial durch Niederschlagen von Dampf
GB51633/64A GB1079050A (en) 1963-12-19 1964-12-18 Method and apparatus for coating strip material by vapour deposition
FR999122A FR1420737A (fr) 1963-12-19 1964-12-18 Procédé et appareil pour revêtir un feuillard par dépôt de vapeurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US331840A US3253945A (en) 1963-12-19 1963-12-19 Method and apparatus for coating strip material by vapor deposition

Publications (1)

Publication Number Publication Date
US3253945A true US3253945A (en) 1966-05-31

Family

ID=23295589

Family Applications (1)

Application Number Title Priority Date Filing Date
US331840A Expired - Lifetime US3253945A (en) 1963-12-19 1963-12-19 Method and apparatus for coating strip material by vapor deposition

Country Status (6)

Country Link
US (1) US3253945A (fr)
BE (1) BE657043A (fr)
DE (1) DE1521557A1 (fr)
FR (1) FR1420737A (fr)
GB (1) GB1079050A (fr)
NL (1) NL6414665A (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3362848A (en) * 1964-03-03 1968-01-09 Mc Donnell Douglas Corp Apparatus and method for evaporative coating
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3455730A (en) * 1966-08-17 1969-07-15 Jones & Laughlin Steel Corp Vacuum vapor deposition-control of coating profile
US4344988A (en) * 1978-08-01 1982-08-17 Nippon Sheet Glass Co., Ltd. Method for forming patterned coating
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
US5738729A (en) * 1995-11-13 1998-04-14 Balzers Aktiengesellschaft Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1521511B1 (de) * 1966-10-10 1969-12-11 Siemens Ag Verdampfereinrichtung zum Aufdampfen gleichmaessig dicker Schichten auf einen Traeger

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3362848A (en) * 1964-03-03 1968-01-09 Mc Donnell Douglas Corp Apparatus and method for evaporative coating
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3455730A (en) * 1966-08-17 1969-07-15 Jones & Laughlin Steel Corp Vacuum vapor deposition-control of coating profile
US4344988A (en) * 1978-08-01 1982-08-17 Nippon Sheet Glass Co., Ltd. Method for forming patterned coating
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
US5738729A (en) * 1995-11-13 1998-04-14 Balzers Aktiengesellschaft Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method

Also Published As

Publication number Publication date
FR1420737A (fr) 1965-12-10
BE657043A (fr) 1965-06-11
NL6414665A (fr) 1965-06-21
DE1521557A1 (de) 1969-09-11
GB1079050A (en) 1967-08-09

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