US3334982A - Manufacture of silica glass - Google Patents
Manufacture of silica glass Download PDFInfo
- Publication number
- US3334982A US3334982A US169763A US16976362A US3334982A US 3334982 A US3334982 A US 3334982A US 169763 A US169763 A US 169763A US 16976362 A US16976362 A US 16976362A US 3334982 A US3334982 A US 3334982A
- Authority
- US
- United States
- Prior art keywords
- hydrogen
- chlorine
- oxygen
- silica glass
- vapors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 239000000460 chlorine Substances 0.000 claims description 15
- 229910052801 chlorine Inorganic materials 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- -1 SILICON HALIDE Chemical class 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 5
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 13
- 239000011521 glass Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 7
- 229910052736 halogen Inorganic materials 0.000 description 7
- 150000002367 halogens Chemical class 0.000 description 7
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 6
- 239000000203 mixture Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 230000035508 accumulation Effects 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000001340 alkali metals Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/50—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with alkali metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/26—Multiple ports for glass precursor
- C03B2207/28—Multiple ports for glass precursor for different glass precursors, reactants or modifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/87—Controlling the temperature
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/90—Feeding the burner or the burner-heated deposition site with vapour generated from solid glass precursors, i.e. by sublimation
Definitions
- This invention relates to the manufacture of silica glass by the decomposition of the vapors of a silicon hallde, such as silicon tetrachloride, in the flame of an oxyhydrogen blowpipe and the vitrification of the silica collected on a support.
- a silicon hallde such as silicon tetrachloride
- the silicon halide is entrained in the oxygen which supplies the blowpipe, but this is imperfect in that amorphous silica forms on and restricts the discharge orifice of the burner.
- an inert gas for instance nitrogen or argon
- the oxygen loaded with vapors of silicon halide and the hydrogen so as to produce a gaseous screen preventing the oxhydric reaction at the output of the burner and to transport the flame beyond the burner and prevent the accumulation on the burner, but the inert gas chills the flame and reduces the yield.
- oxygen has also been suggested to interpose between the oxygen loaded with halide vapors and the hydrogen, oxygen free from halide vapors in place of the inert gas.
- the flame is in this case not separated from the burner but the decomposition of the silicon halide vapors is slightly retarded sufficiently to avoid the collection of amorphous silica on the burner and therefore prevent the restriction of the discharge orifice.
- the apparatus must however provide an additional oxygen input and becomes complex. Moreover if oxygen will entrain SiCl this is not the case for several other silicon halides.
- the objects of the invention are to improve the manufacture of silica glass by vapor phase reactions utilizing the blowpipe process, to prevent accumulations on the burner orifice, and ameliorate the operation of the blowpipe.
- the objects are accomplished, generally speaking, by a method of preparing silica glass that comprises entraining a silicon halide in a current of halogen gas, bringing the current together with a current of hydrogen and a current of oxygen, igniting them, and condensing the glass formed on a cold surface.
- a major feature of this invention' is the use of a halogen gas to entrain the silicon halide vapors.
- a major advantage is the complete elimination of the difficulties that plagued the prior art. The operation of the blowpipe is improved and the formation of accumulations is ended.
- the most advantageous halogen for the entrainment of the silicon halide is chlorine.
- the chlorine stabilizes the silicon halide vapors, which do not decompose even as they enter the flame.
- the chlorine reacts with hydrogen exothermically and the flame suffers no cooling.
- chips of metals can be introduced directly into the evaporation container instead of handling silicon halides several of which, being hydrolyzable and generating fumes, decompose in air.
- the blowpipe is shown in vertical section in the drawing and may conveniently be comprised of three concentric tubes, of which the central receives silicon halide in a stream of halogen gas, particularly chlorine, the intermediate tube receives oxygen, and the outer receives hydrogen.
- the silica or glass formed in the flameblown from the blowpipe is directed upon a cold support, which may be a refractory rod moving endwise through the flame as it is rotated about its axis and is separated from said support after cooling by means of a millstone.
- the invention may produce pure silica glass containing United States Patent 0 3,334,982 Patented Aug. 8, 1967 to Si0 or it may produce silica glass containing otheringredients such as germanium oxide, alumina, titatnium dioxide, ferric oxide, either separately or simultaneously for several of them, with various concentrations.
- These ingredients may be entrained either by one of the gases or by both the halogen and the hydrogen. For instance, sodium and other alkali metals may be entrained in the hydrogen, and aluminum chloride may be entrained with the silicon chloride in the halogen gas stream. These added ingredients are most frequently present in about 5 weight percent of the glass. This simultaneouse entrainment of different ingredients by the hydrogen and the halogen streams is advantageous in making the more complex glasses.
- the decomposition products are heated to a temperature at which the vapor tension is suflicicnt to produce an adequate entrainment.
- SiCl need only be brought to room temperature and chlorine is allowed to bubble in the SiCL, vapors.
- Aluminum chloride may be heated to 90 C. and the vapors are leached by a chlorine stream.
- the pipings conducting the vapors are heated only if necessary to obviate condensation. Accordingly no heating is necessary with SiCl
- the pipings may be heated up to about 200 C.
- Oxygen may be heated at the same temperatures as those of the vapors utilized.
- the drawing is a schematic view of the invention in operation, the blowpipe being comprised of three concentric tubes 10, 11, 12.
- a stream of chlorine gas which has been bubbled through liquid SiCl at room temperature and contacted with solid AlCl heated to approximately 90 C. to entrain both SiCL, and AlCl
- a stream of oxygen flows to the intermediate tube 11. This oxygen can be preheated in heater 2.
- a stream of hydrogen entraining sodium vapors flows into the outer tube 12.
- the gaseous mixture is ignited and burns at 4.
- the products of reaction are collected on a cold rod 3 which is rotated in and moved endwise through the flame 4.
- glasses may be obtained, for example, an ingot of transparent silica containing GeO with the following composition:
- the GeCl is heated to about 100 C.
- the GeCl is heated to about C.
- the sodium metal vapors are entrained lay an hydrogen preheated stream.
- the support must be chosen according to the glass to be obtained.
- the support is a silica rod.
- a method of preparing silica glass that corn-prises entraining a silicon halide in a current of chlorine, bringing the current together with currents of oxygen and hydrogen and igniting them, and condensing the glass formed on a cold surface.
- the gas phase method of making glass which comprises forming concentric streams of chlorine, oxygen, and hydrogen with chlorine at the center and hydrogen as an exterior envelope, entraining silicon tetrachloride in the chlorine, igniting the concentricstreams, and collecting the glass formed thereby.
- the gas phase method of making glass which comprises forming concentric streams of chlorine, oxygen, and hydrogen with chlorine at the center and hydrogen as an exterior envelope, entraining silicon tetrachloride in the chlorine, entraining an alkali metal in the hydrogen, igniting the concentric streams, and collecting the glass formed thereby.
- a method of preparing a silica glass that comprises entraining a silicon halide in a current of chlorine gas, entraining an alkali metal in a current of hydrogen, bringing the currents together with a current of oxygen, igniting them and condensing the glass formed on a cold surface.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR851475A FR1287541A (fr) | 1961-02-02 | 1961-02-02 | Perfectionnement à la fabrication de verres siliciques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3334982A true US3334982A (en) | 1967-08-08 |
Family
ID=8747982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US169763A Expired - Lifetime US3334982A (en) | 1961-02-02 | 1962-01-30 | Manufacture of silica glass |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3334982A (fr) |
| FR (1) | FR1287541A (fr) |
| GB (1) | GB989467A (fr) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3460926A (en) * | 1967-07-17 | 1969-08-12 | Owens Illinois Inc | High silica content glasses |
| JPS4826208A (fr) * | 1971-08-09 | 1973-04-06 | ||
| JPS4873522A (fr) * | 1972-01-03 | 1973-10-04 | ||
| DE2364782A1 (de) * | 1973-01-04 | 1974-07-11 | Corning Glass Works | Optischer wellenleiter |
| JPS4999709A (fr) * | 1973-01-04 | 1974-09-20 | ||
| JPS5430853A (en) * | 1977-08-11 | 1979-03-07 | Nippon Telegr & Teleph Corp <Ntt> | Production of soot form glass rod |
| US20090211301A1 (en) * | 2008-02-27 | 2009-08-27 | Shin-Etsu Chemical Co., Ltd. | Method of fabricating an optical fiber preform and a burner therefor |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5429263B2 (fr) * | 1974-01-14 | 1979-09-21 | ||
| JPS6026055B2 (ja) * | 1980-12-23 | 1985-06-21 | 東芝セラミツツクス株式会社 | 石英ガラスおよびその製造方法 |
| DE3327484A1 (de) * | 1983-07-29 | 1985-02-14 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von glas durch abscheidung aus der gasphase |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2272342A (en) * | 1934-08-27 | 1942-02-10 | Corning Glass Works | Method of making a transparent article of silica |
| US2798792A (en) * | 1949-07-20 | 1957-07-09 | Helsingborgs Gummifabriks | Method for the production of finely divided silicon dioxide |
| US2967113A (en) * | 1957-11-18 | 1961-01-03 | Gen Electric | Coating method |
| US3043660A (en) * | 1958-03-10 | 1962-07-10 | British Titan Products | Production of silicon dioxide |
| US3128166A (en) * | 1953-11-25 | 1964-04-07 | Heraeus Schott Quarzschmelze | Process for producing quartz glass |
-
1961
- 1961-02-02 FR FR851475A patent/FR1287541A/fr not_active Expired
-
1962
- 1962-01-30 US US169763A patent/US3334982A/en not_active Expired - Lifetime
- 1962-02-02 GB GB4151/62A patent/GB989467A/en not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2272342A (en) * | 1934-08-27 | 1942-02-10 | Corning Glass Works | Method of making a transparent article of silica |
| US2798792A (en) * | 1949-07-20 | 1957-07-09 | Helsingborgs Gummifabriks | Method for the production of finely divided silicon dioxide |
| US3128166A (en) * | 1953-11-25 | 1964-04-07 | Heraeus Schott Quarzschmelze | Process for producing quartz glass |
| US2967113A (en) * | 1957-11-18 | 1961-01-03 | Gen Electric | Coating method |
| US3043660A (en) * | 1958-03-10 | 1962-07-10 | British Titan Products | Production of silicon dioxide |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3460926A (en) * | 1967-07-17 | 1969-08-12 | Owens Illinois Inc | High silica content glasses |
| JPS4826208A (fr) * | 1971-08-09 | 1973-04-06 | ||
| JPS4873522A (fr) * | 1972-01-03 | 1973-10-04 | ||
| DE2364782A1 (de) * | 1973-01-04 | 1974-07-11 | Corning Glass Works | Optischer wellenleiter |
| JPS4999709A (fr) * | 1973-01-04 | 1974-09-20 | ||
| JPS5430853A (en) * | 1977-08-11 | 1979-03-07 | Nippon Telegr & Teleph Corp <Ntt> | Production of soot form glass rod |
| US20090211301A1 (en) * | 2008-02-27 | 2009-08-27 | Shin-Etsu Chemical Co., Ltd. | Method of fabricating an optical fiber preform and a burner therefor |
| US9260339B2 (en) | 2008-02-27 | 2016-02-16 | Shin-Etsu Chemical Co., Ltd. | Method of fabricating an optical fiber preform and a burner therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| GB989467A (en) | 1965-04-22 |
| FR1287541A (fr) | 1962-03-16 |
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