US3357633A - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
US3357633A
US3357633A US474052A US47405265A US3357633A US 3357633 A US3357633 A US 3357633A US 474052 A US474052 A US 474052A US 47405265 A US47405265 A US 47405265A US 3357633 A US3357633 A US 3357633A
Authority
US
United States
Prior art keywords
pump
anode
vacuum
cathode plates
cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US474052A
Other languages
English (en)
Inventor
Petersilka Franz Karl
Schittenhelm Rudolf Paul
Weiss Robert Georg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Reiniger Werke AG
Original Assignee
Siemens Reiniger Werke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Reiniger Werke AG filed Critical Siemens Reiniger Werke AG
Application granted granted Critical
Publication of US3357633A publication Critical patent/US3357633A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Definitions

  • the invention concerns a vacuum pump in which the electric ionization of the gas to be pumped away is used to create the vacuum and to regulate the pumping mechanism. Pumps of this nature are used in systems, for example in metal vapourizing units, where processes have to take place in a defined vacuum.
  • vapourization of getter material as well as the ionization of the gas is used for the creation of the vacuum.
  • the regulating of the pump mechanism is eliected by the size of the electric current which flows through the ionized particles. Since the flow of ions depends upon the presence of ionizable gas particles as well as on the pressure, it is therefore possible to effect a pump control that is dependent on the pressure.
  • the disadvantage here is that a special vapourizing apparatus, which means a part that is subject to wear, must be used.
  • the whole pump is so designed that it is capable of the pumping speed necessary for the purposes required of it. With the separation of the larger pump section there remains the smaller section whose pumping speed is no longer great enough to create the necessary vacuum.
  • the ratio of the pumping capacity of the smaller section to the larger section of the anode is 1:9.
  • the selection of this ratio de pends upon the dilierence between the two pressure limits. Indeed it is an advantage to use several pump sections, if this enables the suction power of the pump to be altered when, for example, there are various sized volumes of gas to be pumped away.
  • the transmission of the signal for the switching on and oil of the larger pump section is picked from the circuit of the smaller section, either by means of a contact galvanometer, or by some other known switching device.
  • the pump housing 2 which can be connected via the con necting pipe 1 to a vacuum apparatus, is made of metal.
  • the anode 5 lies between the two cathode plates 3 and 4.
  • the horseshoe magnet 6 is arranged with its two poles opposite the plates 3 and 4, so that the lines of the magnetic field run vertical to the plates 3 and 4, and parallel to the axes of the cells of the anode which are separated by the partitions 7, 8, and 9.
  • the electrical supply to the pump comes from the DC. source 10, which can be connected via the leads 11 and 12 with the cathode plates 3 and 4, and via lead 13 with the anode 5.
  • the current flowing between the cathode plates 3 and 4 and part 5b of the anode 5 is led via the lead 14 to the switching device 15.
  • the switching device 15 there is a contact galvanometer which, when the current strength set with knob 16 is reached, which flows through the arrangement via the anode part 5b, closes the switch 18 in the circuit 13 by means of the relay 17 and switches on the anode part 5a.
  • the anode part 5a is switched off again via the relay 17 by the opening of the switch 18.
  • a vacuum pump arrangement in which the elec tric ionization of the gas to be pumped away is employed to create a vacuum and to regulate the pumping mechanism, comprising (a) a pump including (1) a vacuum sealed casing, (2) a pair of cathode plates mounted within said casing, (3) an anode formed of a plurality of cells and mounted between said cathode plates, and (4) means for producing a magnetic field orthogonally to said cathode plates and parallel to the axes of the anode cells, said pump being divided into electrically separated sections of ditterent sizes, and
  • control means responsive to a predetermined pressure in a smaller one of said sections for deenergizing the larger of said sections and further responsive to a pressure higher than the predetermined pressure in the smaller section for activating said larger section.

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US474052A 1964-07-24 1965-07-22 Vacuum pump Expired - Lifetime US3357633A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0092249 1964-07-24

Publications (1)

Publication Number Publication Date
US3357633A true US3357633A (en) 1967-12-12

Family

ID=7517101

Family Applications (1)

Application Number Title Priority Date Filing Date
US474052A Expired - Lifetime US3357633A (en) 1964-07-24 1965-07-22 Vacuum pump

Country Status (3)

Country Link
US (1) US3357633A (de)
CH (1) CH447458A (de)
DE (1) DE1489232A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2656147C1 (ru) * 2017-03-06 2018-05-31 Акционерное общество "Научно-производственное предприятие "Исток" имени А.И. Шокина" Способ высоковольтной тренировки отпаянного электровакуумного прибора с металлопористыми катодами

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2656147C1 (ru) * 2017-03-06 2018-05-31 Акционерное общество "Научно-производственное предприятие "Исток" имени А.И. Шокина" Способ высоковольтной тренировки отпаянного электровакуумного прибора с металлопористыми катодами

Also Published As

Publication number Publication date
CH447458A (de) 1967-11-30
DE1489232A1 (de) 1969-11-20

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