US3365119A - High vacuum pump - Google Patents

High vacuum pump Download PDF

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Publication number
US3365119A
US3365119A US545042A US54504266A US3365119A US 3365119 A US3365119 A US 3365119A US 545042 A US545042 A US 545042A US 54504266 A US54504266 A US 54504266A US 3365119 A US3365119 A US 3365119A
Authority
US
United States
Prior art keywords
chamber
pump
condensing
vapor
molecules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US545042A
Other languages
English (en)
Inventor
Kainer Selig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
ITT Inc
Original Assignee
Deutsche ITT Industries GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche ITT Industries GmbH filed Critical Deutsche ITT Industries GmbH
Priority to US545042A priority Critical patent/US3365119A/en
Priority to GB08478/67A priority patent/GB1169595A/en
Priority to NL6705766A priority patent/NL6705766A/xx
Priority to CH582367A priority patent/CH475482A/de
Priority to FR104058A priority patent/FR1520958A/fr
Application granted granted Critical
Publication of US3365119A publication Critical patent/US3365119A/en
Anticipated expiration legal-status Critical
Assigned to ITT CORPORATION reassignment ITT CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: INTERNATIONAL TELEPHONE AND TELEGRAPH CORPORATION
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances

Definitions

  • This invention relates generally to apparatus for a high vacuum pump, and more particularly to a combination of an ion pump and diffusion pump.
  • the same physical apparatus may simultaneously perform the two pumping actions described above, namely, entrapment by condensing vapors and embedment in a target.
  • This permits certain advantages over using either a diffusion pump or an ion pump alone, because the affective pumping of the diffusion pump part as used in combination is increased, and the back-streaming of the pumping fluid molecules will produce controllable conditions in the discharge space thru cold trapping.
  • the target presented to the ionized molecules according to this combination pump is constantly cleaned as the embedded gases are pumped out by a fore-pump.
  • ion pumps there is no special problem in using this combination apparatus in connection with rare gases.
  • Another object of the apparatus according to this invention is to produce a vacuum as an ionic pump where no use is made of the condensing vapor, but a film of pumping fluid captures the molecules by embedrnent.
  • a principal object of the apparatus according to the present invention is to produce a vacuum by the combinations and simultaneous operation of two pumping actions, entrapment and embedrnent, where the optimum operating point is selected according to the needs of the system to be evacuated.
  • Entrapment by condensing pumpmg fluid vapor and returning pumping fluid vapor from the discharged space also increases the pumping speed of the system.
  • the optimum operating point of the apparatus may be selected by experimentation with the particular gas can be evacuated, so that the particular advantage otfered by this invention may best fit the need of the user.
  • selective cooling means adapted to said connecting means for selectively condensing said vapor in order to form a film of said pumping fluid on one wall of said condensing chamber;
  • an ionic chamber connected to a system to be evacuated to ionize the gas molecules from said system, and said ionic chamber further connected to said condensing chamber to transfer said ionized molecules into said condensing chamber, whereby some of said ionized gas molecules from said ionizing chamber are entrapped by said vapor and other of said molecules are embedded in said film on said one wall.
  • Vacuum pump apparatus comprising:
  • container means for holding a reservoir of pumping fluids
  • a first cooling means connected to said connecting means for selectively condensing said vapor in said connecting means in order to form a film of said pumping fluid on one wall of said condensing chamber;
  • an ionic chamber connected to a system to be evacuated to ionize the gas molecules from said system, and to be further connected to said condensing chamber to transfer said ionized molecules into said condensing chamber;
  • a second cooling means connected to said condensing chamber, whereby some of said ionized gas molecules from said ionizing chamber are entrapped by said vapor and said vapor is condensed by said second cooling means, and other of said molecules being embedded in said film on said one wall;
  • outlet means in said condensing chamber adapted to be connected to a forepump to pump out said entrapped and embedded gas molecules.
  • Apparatus according to claim 2 including additional connecting means, connecting the condensed fluid in said condensing chamber to said reservoir in said container means for recirculating in said apparatus.
  • an auxiliary cathode being positioned to focus and accelerate said ionized gas molecules into said condensing chamber.
  • Apparatus according to claim 4 in which a magnet is positioned at said ionic chamber to cause said ions to move in a circular pattern to facilitate the ionization of said gas molecules prior to acceleration into said condensing chamber.
  • a primary cathode is located on said one wall of said condensing chamber, said primary cathode being positioned to receive the focussed ionized gas molecules, such that said molecules become embedded in said film flowing over said primary cathode.
  • Method according to claim 7 including the steps of removing the collected pumping fluid from said condensing chamber, and returning said fluid to a heating container to be recirculated.
  • Method according to claim 7 further including the step of passing a cooling fluid in indirect heat exchange to partially condense said vapor during transfer to said condensing chamber.
  • Method according to claim 7 further including the step of passing a cooling fluid in indirect heat exchange to condense said entrapping vapor in said condensing chamber.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
US545042A 1966-04-25 1966-04-25 High vacuum pump Expired - Lifetime US3365119A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US545042A US3365119A (en) 1966-04-25 1966-04-25 High vacuum pump
GB08478/67A GB1169595A (en) 1966-04-25 1967-04-21 High Vacuum Pump
NL6705766A NL6705766A (de) 1966-04-25 1967-04-24
CH582367A CH475482A (de) 1966-04-25 1967-04-24 Vakuumpumpe
FR104058A FR1520958A (fr) 1966-04-25 1967-04-25 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US545042A US3365119A (en) 1966-04-25 1966-04-25 High vacuum pump

Publications (1)

Publication Number Publication Date
US3365119A true US3365119A (en) 1968-01-23

Family

ID=24174650

Family Applications (1)

Application Number Title Priority Date Filing Date
US545042A Expired - Lifetime US3365119A (en) 1966-04-25 1966-04-25 High vacuum pump

Country Status (4)

Country Link
US (1) US3365119A (de)
CH (1) CH475482A (de)
GB (1) GB1169595A (de)
NL (1) NL6705766A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497134A (en) * 1968-02-02 1970-02-24 Middlesex General Ind Inc Vapor vacuum pump
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246327A (en) * 1939-09-15 1941-06-17 Westinghouse Electric & Mfg Co Vapor electric device
US3053436A (en) * 1958-10-02 1962-09-11 Interplanetary Res Dev Corp Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246327A (en) * 1939-09-15 1941-06-17 Westinghouse Electric & Mfg Co Vapor electric device
US3053436A (en) * 1958-10-02 1962-09-11 Interplanetary Res Dev Corp Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497134A (en) * 1968-02-02 1970-02-24 Middlesex General Ind Inc Vapor vacuum pump
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode

Also Published As

Publication number Publication date
CH475482A (de) 1969-07-15
NL6705766A (de) 1967-10-26
GB1169595A (en) 1969-11-05

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Legal Events

Date Code Title Description
AS Assignment

Owner name: ITT CORPORATION

Free format text: CHANGE OF NAME;ASSIGNOR:INTERNATIONAL TELEPHONE AND TELEGRAPH CORPORATION;REEL/FRAME:004389/0606

Effective date: 19831122