US3374582A - Lapping machine - Google Patents

Lapping machine Download PDF

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Publication number
US3374582A
US3374582A US416825A US41682564A US3374582A US 3374582 A US3374582 A US 3374582A US 416825 A US416825 A US 416825A US 41682564 A US41682564 A US 41682564A US 3374582 A US3374582 A US 3374582A
Authority
US
United States
Prior art keywords
lapping
disc
contour control
control member
framework
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US416825A
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English (en)
Inventor
Stephen A Boettcher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Priority to US416825A priority Critical patent/US3374582A/en
Priority to GB49693/65A priority patent/GB1067807A/en
Priority to FR40706A priority patent/FR1455729A/fr
Priority to CH1669765A priority patent/CH446097A/de
Priority to DE1965S0100834 priority patent/DE1502592A1/de
Application granted granted Critical
Publication of US3374582A publication Critical patent/US3374582A/en
Assigned to SPEEDFAM CORPORATION, AN IL CORP. reassignment SPEEDFAM CORPORATION, AN IL CORP. RELEASED BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: BOETTCHER, STEPHEN A.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces

Definitions

  • the general type of lapping machine with which the principles of my present invention may be incorporated includes a lapping disc rotatably driven about a vertical axis. Resting on the horizontal annular lapping surface of the lapping disc are retaining and truing rings which are normally rotatable about their own axes freely by frictional contact with the lapping surface. These rings are provided for holding pieces within them against movement with the rotating lapping disc, and for wearing the lapping surface to tend to keep it planar. However, even with the provision of the described truing rings, more wear of the lapping surface occurs in the inner annular portion than in the outer annular portion.
  • I provide at least one contour control member having a diameter substantially less than the diameter of each of the truing and retaining rings and having a lower surface engageable with the lapping surface.
  • Suitable means are secured to the framework of the lapping machine for rotatably mounting the contour control member about a vertical axis and for positioning the contour control member adjacent the outer periphery of the lapping disc circumferentially intermediate of two of the truing rings.
  • the means for rotatably mounting the contour control member includes power means for raising and lowering the contour control member and for selectively urging the latter into frictional engagement with the lapping disc.
  • the contour control member is urged into engagement with the lapping surface under a constant pressure at intervals and for varyingperiods of time, as may be necessary, to dress the lapping surface adjacent the outer periphery thereof.
  • the contour control member serves to wear the lapping surface in the outer annular portion therof whereby to quickly and controllably restore the lapping surface to a planar condi- 3,374,582 Patented Mar. 26, 1968 tion.
  • the contour control member could be urged into engagement with the lapping surface under a continuous but variable pressure.
  • FIGURE 1 is a perspective view of a typical lapping machine with which the apparatus of my present invention has been incorporated;
  • FIGURE 2 is an enlarged view, partly in section and partly in elevation, of the contour control device of my present invention
  • FIGURE 3 is a bottom view of the contour control device of FIGURE 2.
  • FIGURE 4 is a schematic plan view of the geometrical arrangement of tie truing rings and the contour control members relative to the lapping disc of the lapping machine of FIGURE 1.
  • the lapping machine comprises a framework including a tubular base or housing 12 which provides support for a horizontal lapping disc 14 and a staging table 16 surrounding the lapping disc.
  • the lapping disc 14 is formed with a central recess 17 (FIG- URE 4) whereby to define a horizontal annular lapping surface.
  • Selective rotation of the lapping disc 14 about a vertical axis is effected by drive means (not shown) mounted within the housing 12.
  • drive means (not shown) mounted within the housing 12.
  • Suitably secured to the opposite sides of the housing 12 are the lower ends of vertical columns 18.
  • each of the transverse arms 22 Extending between the upper ends of the columns 18, above the lapping disc 14, is a horizontal bridge member 29 provided with transverse arms 22 which number four in the particular lapping machine herein disclosed.
  • a vertical pneumatic piston and cylinder assembly indicated generally by the reference numeral 24.
  • Each of the pneumatic assemblies 24 includes a cylinder 26 and a piston rod 23.
  • the lower ends of the piston rods 28 are secured to horizontal pressure plates (not shown) which fit, with slight clearance, within truing and retaining rings 3% resting on the horizontal lapping surface of the lapping disc 14.
  • the rings 30 slightly overlap the inner and outer peripheries of the annular lapping surface.
  • the truing rings 33 rotate relative to the pressure plates about the axes defined by the piston rods 28 whereby to serve to dress the lapping surface of the lapping disc 14 for substantial maintenance of its planar condition.
  • Work pieces (not shown) to be lapped are adapted to be confined Within the truing rings 30 below the pressure plates therein.
  • a freely flowing mixture of abrasive particles and an oil carrier is fed to the lapping disc 14 in a known manner.
  • each contour control device 32 includes a supporting bracket 34 extending laterally from the column 18 in the direction of the lapping disc 14. As best shown in FIG- URES 2 and 3, the bracket 34 has suitably secured thereto the lower end of the cylinder 36 of a vertically extending pneumatic piston and cylinder assembly 38.
  • the piston rod 40 of the pneumatic assembly 38 projects downwardly through the bracket 34, and threaded into the lower end of the piston rod 40 is a bolt 42.
  • an inverted cup-shaped casing 44, a bushing 46, and a split collar member 48 having a lower conical face.
  • a central circular recess 60 and a concentric annular recess 62 in which is secured, as by epoxy cement or the like, an annular wear ring 64.
  • the wear ring 64 must be fabricated of a material having a greater abrasion resistance than the material of the lapping disc 14 and is preferably of a high wear resistant material such as boron carbide.
  • a central axial opening 66 is also formed in the holder 58 to permit insertion therethrough of an instrument such as a screw driver whereby threading and unthreading of the screw 42 relative to the piston rod 40 may be effected.
  • the holder 58 and wear ring 64 define a contour control member 68.
  • each contour control member 68 has a maximum horizontal dimension or diameter substantially less than the radial distance between the inner and outer peripheries of the lapping surface of the lapping disc 14, and substantially less than the diameter of each of the retaining rings 30.'Also, the radial distance between the axis of rotation of the lapping disc 14 and the axis of rotation of each of the contour control members 68 is greater than the radial distance between the axis of rotation of the lapping disc 14 and the axis of rotation of each of the truing rings 30.
  • the power operated pneumatic piston and cylinder assemblies 38 which are supported by the brackets 34, are operable to raise and lower the contour control members 68 and to selectively urge the annular lower surfaces of the latter into frictional engagement with the lapping surface of the lapping disc 14 circumferentially intermediate of the adjacent truing and retaining rings 30.
  • the ball bearing assembly 50 and related structure of each device 32 serve to rotatably mount the contour control member 68 about a vertical axis.
  • the pneumatic assemblies 38 and supporting brackets 34 serve to position the contour control members 68 adjacent to the outer periphery of the lapping disc 14 and in slightly overlapping relation with respect to the outer periphery thereof.
  • the pneumatic assemblies 38 are actuated so as to lower the contour control members 68 and thereby urge the wear rings 60 under pressure into frictional engagement with the lapping surface. I have found that a constant contact pressure of pounds per square inch is satisfactory.
  • the pneumatic assemblies 38 are actuated so as to raise the contour control members 68 away from the lapping disc 14. The contour control members 68 are maintained in an elevated position until such time as corrective treatment of the lapping surface is again necessary.
  • the apparatus of my present invention is adapted to be used at intervals and for varying periods of time, as may be necessary, to dress the outer annular portion of the lapping surface of the lapping' disc 14.
  • this apparatus which may be used without interrupting the normal operation of the lapping machine, serves to complement the truing rings in controlling the contour of the lapping surface of the lapping disc 14.
  • the contour control devices 32 are arranged at the sides of the lapping machine, interference with loading and unloading of the machine is avoided.
  • a contour control member having a diameter substantially less than the radial distance between the inner and outer peripheries of the lapping surface and having an annular lower horizontal surface selectively engageable with the lapping surface, and means secured to the framework for positioning said contour control member adjacent the outer periphery of the lapping surface.
  • a contour control member having a diameter substantially less than the radius of the lapping disc and having a lower annular surface engageable exclusively with the outer annular zone of the lapping surface, and power means secured to the framework for selectively urging said contour control member under pressure into frictional engagement with the lapping surface.
  • a contour control member having a diameter substantially less than the radial distance between the inner and outer peripheries of the lapping surface and having an annular surface e'ngageable with the lapping surface
  • means secured to the framework for rotatably mounting said contour control member about a vertical axis and for positioning the latter so as to slightly overlap the outer periphery, of the lapping surface and said lastnamed means including. power means for raising and lowering said contour control member and for selectively urging the latter under pressure into frictional engagement with the lapping surface.
  • a contour control member having an annular wear ring secured within a holder, the overall diameter of said contour control member being substantially less than the radial distance between the inner and outer peripheries of the lapping surface, and means secured to the framework for rotatably mounting said contour control member about a vertical axis and for selectively positioning said wear ring in engagement with the outer annular zone of the lapping surface.
  • a lapping disc For use with a lapping machine having a framework, a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface, the combination of a contour control member having a maximum horizontal dimension substantially less than the diameter of each of the retaining rings and having a lower horizontal surface selectively engageable with the lapping surface, and means secured to the framework for positioning said contour control member circumferentially intermediate of two of the retaining rings.
  • a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface, the combination of a contour control member having a diameter substantially less than the diameter of each of the retaining rings and having a lower horizontal surface selectively engageable with the lapping surface, and means secured to the framework for positioning said contour control member adjacent the outer periphery of the lapping disc circumferentially intermediate of two retaining rings.
  • a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface, the combination of a contour control member having a diameter substantially less than the diameter of each of the retaining rings and having an annular lower horizontal surface selectively engageable with the lapping surface, and means secured to the framework for positioning said contour control member so as to slightly overlap the outer periphery of the lapping disc circumferentially intermediate of two of the retaining rings.
  • a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface and normally rotatable about their own axes
  • a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface, the combination of a contour control member having an annular wear ring secured within a holder, the overall diameter of said contour control memher being substantially less than the diameter of each of the retaining rings, and means secured to the framework for rotatably mounting said contour control memher about a vertical axis and for selectively positioning said wear ring in engagement with the lapping disc.
  • a lapping disc For use with a lapping machine having a framework, a lapping disc rotatably mounted about :a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface, the combination of a contour control member having a diameter substantially less than the diameter of each of the retaining rings and having a lower horizontal surface engageable with the lapping surface, means secured to the framework for positioning said contour control member adjacent the outer periphery of the lapping disc circumferentially intermediate of two of the retaining rings, and said last-named means including power means for selectively urging said contour control member under pressure into frictional engagement with the lapping surface.
  • a lapping disc rotatably mounted about a vertical axis on the framework, means for rotating the lapping disc, the lapping disc having a horizontal planar lapping surface, and retaining and truing rings resting on the lapping surface and normally rotatable about their own axes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
US416825A 1964-12-08 1964-12-08 Lapping machine Expired - Lifetime US3374582A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US416825A US3374582A (en) 1964-12-08 1964-12-08 Lapping machine
GB49693/65A GB1067807A (en) 1964-12-08 1965-11-23 Improvements in or relating to lapping machines
FR40706A FR1455729A (fr) 1964-12-08 1965-12-02 Machine à roder
CH1669765A CH446097A (de) 1964-12-08 1965-12-03 Kontrollgerät für Läppmaschine, zur Formkontrolle der Läppfläche
DE1965S0100834 DE1502592A1 (de) 1964-12-08 1965-12-07 Laeppmaschine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US416825A US3374582A (en) 1964-12-08 1964-12-08 Lapping machine

Publications (1)

Publication Number Publication Date
US3374582A true US3374582A (en) 1968-03-26

Family

ID=23651464

Family Applications (1)

Application Number Title Priority Date Filing Date
US416825A Expired - Lifetime US3374582A (en) 1964-12-08 1964-12-08 Lapping machine

Country Status (5)

Country Link
US (1) US3374582A (fr)
CH (1) CH446097A (fr)
DE (1) DE1502592A1 (fr)
FR (1) FR1455729A (fr)
GB (1) GB1067807A (fr)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500589A (en) * 1967-07-25 1970-03-17 Fmc Corp Disc brake grinder
US4216629A (en) * 1978-09-15 1980-08-12 Degaeta Albert M Method and apparatus for producing balls
US5003728A (en) * 1987-03-10 1991-04-02 Vsesojuzny Naucho-Issledovatelsky I Proektno-Konstruktorsky Institut Atomnogo Energeticheskogo Machinostroenia Ussr Machine for abrasive treatment
US5123218A (en) * 1990-02-02 1992-06-23 Speedfam Corporation Circumferential pattern finishing method
US5187901A (en) * 1990-02-02 1993-02-23 Speedfam Corporation Circumferential pattern finishing machine
US5224304A (en) * 1991-11-07 1993-07-06 Speedfam Corporation Automated free abrasive machine for one side piece part machining
US5398459A (en) * 1992-11-27 1995-03-21 Kabushiki Kaisha Toshiba Method and apparatus for polishing a workpiece
US5533924A (en) * 1994-09-01 1996-07-09 Micron Technology, Inc. Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5733175A (en) * 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5749771A (en) * 1994-02-22 1998-05-12 Nec Corporation Polishing apparatus for finishing semiconductor wafer at high polishing rate under economical running cost
US5899798A (en) * 1997-07-25 1999-05-04 Obsidian Inc. Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US5951382A (en) * 1997-12-01 1999-09-14 Lucent Technologies Inc. Chemical mechanical polishing carrier fixture and system
US5967885A (en) * 1997-12-01 1999-10-19 Lucent Technologies Inc. Method of manufacturing an integrated circuit using chemical mechanical polishing
US6083089A (en) * 1993-08-06 2000-07-04 Intel Corporation Method and apparatus for chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US7399217B1 (en) 2007-02-05 2008-07-15 P.R. Hoffman Machine Products Lapping machine
US8702473B1 (en) 2013-03-04 2014-04-22 Gordon Lyons Rock polishing systems and methods
CN112706052A (zh) * 2020-12-29 2021-04-27 江苏法尔胜光电科技有限公司 一种集束头自动去头胶装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4270314A (en) * 1979-09-17 1981-06-02 Speedfam Corporation Bearing mount for lapping machine pressure plate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2079076A (en) * 1931-04-03 1937-05-04 Libbey Owens Ford Glass Co Truing apparatus for grinding wheels
FR913570A (fr) * 1945-08-24 1946-09-13 Appareillage automatique de piquage des meules de défibreurs pour la fabrication de la pàte â papier
US2687603A (en) * 1951-06-26 1954-08-31 Crane Packing Co Method of lapping quartz crystals
DE1093251B (de) * 1956-01-05 1960-11-17 Karl Hack Abrichtvorrichtung fuer die Stirnseiten der Schleifscheiben an Federendenschleifmaschinen
US2968135A (en) * 1958-04-07 1961-01-17 Abrading Systems Company Lapping machine
US2979868A (en) * 1957-11-29 1961-04-18 Siemens Ag Lapping device for semiconductor wafers

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2079076A (en) * 1931-04-03 1937-05-04 Libbey Owens Ford Glass Co Truing apparatus for grinding wheels
FR913570A (fr) * 1945-08-24 1946-09-13 Appareillage automatique de piquage des meules de défibreurs pour la fabrication de la pàte â papier
US2687603A (en) * 1951-06-26 1954-08-31 Crane Packing Co Method of lapping quartz crystals
DE1093251B (de) * 1956-01-05 1960-11-17 Karl Hack Abrichtvorrichtung fuer die Stirnseiten der Schleifscheiben an Federendenschleifmaschinen
US2979868A (en) * 1957-11-29 1961-04-18 Siemens Ag Lapping device for semiconductor wafers
US2968135A (en) * 1958-04-07 1961-01-17 Abrading Systems Company Lapping machine

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500589A (en) * 1967-07-25 1970-03-17 Fmc Corp Disc brake grinder
US4216629A (en) * 1978-09-15 1980-08-12 Degaeta Albert M Method and apparatus for producing balls
US5003728A (en) * 1987-03-10 1991-04-02 Vsesojuzny Naucho-Issledovatelsky I Proektno-Konstruktorsky Institut Atomnogo Energeticheskogo Machinostroenia Ussr Machine for abrasive treatment
US5123218A (en) * 1990-02-02 1992-06-23 Speedfam Corporation Circumferential pattern finishing method
US5187901A (en) * 1990-02-02 1993-02-23 Speedfam Corporation Circumferential pattern finishing machine
US5224304A (en) * 1991-11-07 1993-07-06 Speedfam Corporation Automated free abrasive machine for one side piece part machining
US5398459A (en) * 1992-11-27 1995-03-21 Kabushiki Kaisha Toshiba Method and apparatus for polishing a workpiece
US6083089A (en) * 1993-08-06 2000-07-04 Intel Corporation Method and apparatus for chemical mechanical polishing
US5749771A (en) * 1994-02-22 1998-05-12 Nec Corporation Polishing apparatus for finishing semiconductor wafer at high polishing rate under economical running cost
US5733175A (en) * 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5702290A (en) * 1994-08-08 1997-12-30 Leach; Michael A. Block for polishing a wafer during manufacture of integrated circuits
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5836807A (en) * 1994-08-08 1998-11-17 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5664988A (en) * 1994-09-01 1997-09-09 Micron Technology, Inc. Process of polishing a semiconductor wafer having an orientation edge discontinuity shape
US5533924A (en) * 1994-09-01 1996-07-09 Micron Technology, Inc. Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers
US5899798A (en) * 1997-07-25 1999-05-04 Obsidian Inc. Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US5951382A (en) * 1997-12-01 1999-09-14 Lucent Technologies Inc. Chemical mechanical polishing carrier fixture and system
US5967885A (en) * 1997-12-01 1999-10-19 Lucent Technologies Inc. Method of manufacturing an integrated circuit using chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US7399217B1 (en) 2007-02-05 2008-07-15 P.R. Hoffman Machine Products Lapping machine
US20080188166A1 (en) * 2007-02-05 2008-08-07 Godshall Mark A Lapping machine
US8702473B1 (en) 2013-03-04 2014-04-22 Gordon Lyons Rock polishing systems and methods
CN112706052A (zh) * 2020-12-29 2021-04-27 江苏法尔胜光电科技有限公司 一种集束头自动去头胶装置

Also Published As

Publication number Publication date
FR1455729A (fr) 1966-10-14
CH446097A (de) 1967-10-31
DE1502592A1 (de) 1969-08-07
GB1067807A (en) 1967-05-03

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Legal Events

Date Code Title Description
AS Assignment

Owner name: SPEEDFAM CORPORATION, 509 NORTH THIRD AVE., DES PL

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:BOETTCHER, STEPHEN A.;REEL/FRAME:003932/0923

Effective date: 19811105