US3458347A - Generation of liquid-free metal vapor - Google Patents

Generation of liquid-free metal vapor Download PDF

Info

Publication number
US3458347A
US3458347A US596678A US3458347DA US3458347A US 3458347 A US3458347 A US 3458347A US 596678 A US596678 A US 596678A US 3458347D A US3458347D A US 3458347DA US 3458347 A US3458347 A US 3458347A
Authority
US
United States
Prior art keywords
liquid
metal
projections
vapor
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US596678A
Other languages
English (en)
Inventor
Joseph P Gimigliano
John Francis Butler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jones and Laughlin Steel Corp
Original Assignee
Jones and Laughlin Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jones and Laughlin Steel Corp filed Critical Jones and Laughlin Steel Corp
Application granted granted Critical
Publication of US3458347A publication Critical patent/US3458347A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Definitions

  • the method of the invention comprises the spatter-free evaporation of a coating metal by heating it in a crucible having upstanding heat conducting projections of a material not wetted by the coating metal extending from its bottom to the molten metal surface.
  • This invention is concerned with the surface coating of a substrate by condensation thereon of a metal vapor in a vacuum. It is more particularly concerned with a method of generating a vapor of a coating metal substantially free from entrained particles of liquid coating metal.
  • FIGURE 1 is a vertical cross-section, partly schematic, of apparatus adapted to practice our invention, taken on the plane 1-1 of FIGURE 2.
  • FIGURE 2 is a horizontal section taken on the plane 2-2 of FIGURE 1.
  • An evacuated chamber 1 is provided with entrance and exit openings 10 and 11 respectively, through which substrate 2 in the form of fiat strip is continuously passed.
  • Beneath substrate 2 is positioned crucible 12 comprising side walls 99, end walls 33 and bottom 4.
  • Beneath bottom 4 is an electrical resistance heating ele ment 5.
  • Projections 6- 6 are made of a material which is not wetted by the molten coating metal and which conducts heat.
  • the bubbles expand as they rise and burst at the metal surface, allowing the vapor to escape and throwing off particles of metal from the metal film above the bubble immediately before it bursts or from the liquid jet produced by the molten metal filling the cavity left by the escaping bubble.
  • the heat conducting projections 66 provide heated surfaces near the upper surface of the molten metal for vapor generation. As the metal does not wet projections 6-6 there is a thin annular gap or space around each projection 6 through which vapor so generated can escape. Those spaces are indicated at 8-8 in FIGURE 2. Consequently, vapor generated at the projections 66 is substantially free from entrained particles of liquid. Vapor pockets formed on the bottom 4 have a considerable probability of coming into contact with the surfaces of projections 66 on the bath bottom before these pockets can detach themselves from the bottom and form bubbles. The vapor generated at the bottom therefore escapes through the spaces 88 in the Way described, as though it had originally formed on projections 66.
  • the walls of the crucible used in our process be of the same characteristics as those specified herein for the projections 66.
  • the tops of those projections may be flush with the metal surface or project above it. If, however, the projections terminate short of the metal surface, vapor escaping along the surfaces of the projections will reach the surface as bubbles, the bursting of which tends to throw out liquid metal.
  • cylindrical projections are the simplest form to employ, those of other sections are also satisfactory. In general, the more numerous these projections and the closer together they are spaced, the more effective they are to suppress liquid throw-out and entrainment.
  • the method of evaporating the coating metal so as to minimize entrainment of liquid in the metal vapor comprising heating a pool of molten coating metal in contact with a plurality of upstanding projections extending from the bottom to the upper surface of the pool, the projections being of a material which conducts heat but which is not Wetted by the molten coating metal, and continuing the heating to bring about vaporization of the coating metal below the surfaces of the pool and escape of that vapor along the surfaces of the projections.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
US596678A 1966-11-23 1966-11-23 Generation of liquid-free metal vapor Expired - Lifetime US3458347A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59667866A 1966-11-23 1966-11-23

Publications (1)

Publication Number Publication Date
US3458347A true US3458347A (en) 1969-07-29

Family

ID=24388246

Family Applications (1)

Application Number Title Priority Date Filing Date
US596678A Expired - Lifetime US3458347A (en) 1966-11-23 1966-11-23 Generation of liquid-free metal vapor

Country Status (4)

Country Link
US (1) US3458347A (fr)
DE (1) DE1621271B2 (fr)
GB (1) GB1162410A (fr)
NL (2) NL144992B (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3640762A (en) * 1970-05-26 1972-02-08 Republic Steel Corp Method for vaporizing molten metal
US3740043A (en) * 1970-05-26 1973-06-19 Republic Steel Corp Apparatus for vaporizing molten metal
US6830626B1 (en) * 1999-10-22 2004-12-14 Kurt J. Lesker Company Method and apparatus for coating a substrate in a vacuum
US20050147753A1 (en) * 1999-10-22 2005-07-07 Kurt J. Lesker Company Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum
WO2016096377A1 (fr) 2014-12-19 2016-06-23 Tata Steel Nederland Technology B.V. Dispositif de filtrage permettant d'éliminer les particules de courant de vapeur

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009019146B4 (de) * 2009-04-29 2014-07-24 THEVA DüNNSCHICHTTECHNIK GMBH Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665225A (en) * 1950-04-27 1954-01-05 Nat Res Corp Apparatus and process for coating by vapor deposition
US3330647A (en) * 1963-06-18 1967-07-11 Temescal Metallurgical Corp Prevention of splattering during vaporization processing
US3386853A (en) * 1965-12-28 1968-06-04 Paul E. Oberg Spiral vacuum deposition apparatus and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665225A (en) * 1950-04-27 1954-01-05 Nat Res Corp Apparatus and process for coating by vapor deposition
US3330647A (en) * 1963-06-18 1967-07-11 Temescal Metallurgical Corp Prevention of splattering during vaporization processing
US3386853A (en) * 1965-12-28 1968-06-04 Paul E. Oberg Spiral vacuum deposition apparatus and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3640762A (en) * 1970-05-26 1972-02-08 Republic Steel Corp Method for vaporizing molten metal
US3740043A (en) * 1970-05-26 1973-06-19 Republic Steel Corp Apparatus for vaporizing molten metal
US6830626B1 (en) * 1999-10-22 2004-12-14 Kurt J. Lesker Company Method and apparatus for coating a substrate in a vacuum
US20050147753A1 (en) * 1999-10-22 2005-07-07 Kurt J. Lesker Company Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum
WO2016096377A1 (fr) 2014-12-19 2016-06-23 Tata Steel Nederland Technology B.V. Dispositif de filtrage permettant d'éliminer les particules de courant de vapeur
US10941482B2 (en) 2014-12-19 2021-03-09 Tata Steel Nederland Technology B.V. Filter device to remove particles from a vapour stream

Also Published As

Publication number Publication date
DE1621271A1 (de) 1971-04-29
NL6715868A (fr) 1968-05-24
NL144992B (nl) 1975-02-17
NL144992C (fr)
DE1621271B2 (de) 1972-05-10
GB1162410A (en) 1969-08-27

Similar Documents

Publication Publication Date Title
US2772318A (en) Apparatus for vaporization of metals and metalloids
EP1130129B1 (fr) Source pour depôt thermique physique en phase vapeur de couches organiques électroluminescentes
JP2004507617A (ja) 金属被膜を連続冷プラズマ蒸着するための方法および装置
JPH089772B2 (ja) 気相付着装置
US2665225A (en) Apparatus and process for coating by vapor deposition
US3216710A (en) Aluminum vaporizer
US2665320A (en) Metal vaporizing crucible
KR101846692B1 (ko) 스피팅 방지 구조체를 구비한 증착장치용 증발원
US3690638A (en) Apparatus and method for vaporizing molten metal
US3244857A (en) Vapor deposition source
US2239371A (en) Separation of metals by distillation
US3740043A (en) Apparatus for vaporizing molten metal
US3373050A (en) Deflecting particles in vacuum coating process
US2643201A (en) Coating method and apparatus therefor
US2343666A (en) Vacuum distillation procedure
US3373260A (en) Vaporization of metals and metalloids
GB1103211A (en) Improvements in and relating to vapour deposition and evaporation sources
US3260235A (en) Apparatus for coating material with metal
US4140438A (en) Diffusion pump
US3386853A (en) Spiral vacuum deposition apparatus and method
US3640762A (en) Method for vaporizing molten metal
US3725045A (en) Apparatus and method for vaporizing molten metal
US3672327A (en) Vaporization of metal for vacuum metalizing
US3024761A (en) Vacuum evaporation apparatus
US2261235A (en) Antibumping device