US3476152A - Multiple outlet valve - Google Patents

Multiple outlet valve Download PDF

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Publication number
US3476152A
US3476152A US585542A US3476152DA US3476152A US 3476152 A US3476152 A US 3476152A US 585542 A US585542 A US 585542A US 3476152D A US3476152D A US 3476152DA US 3476152 A US3476152 A US 3476152A
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US
United States
Prior art keywords
valve
manifold
multiple outlet
pads
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US585542A
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English (en)
Inventor
Charles H Looke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
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International Business Machines Corp
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Filing date
Publication date
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B37/00—Supplying or feeding fluent-solid, plastic, or liquid material, or loose masses of small articles, to be packaged
    • B65B37/16—Separating measured quantities from supply
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B39/00—Nozzles, funnels or guides for introducing articles or materials into containers or wrappers
    • B65B39/001—Nozzles, funnels or guides for introducing articles or materials into containers or wrappers with flow cut-off means, e.g. valves
    • B65B39/004—Nozzles, funnels or guides for introducing articles or materials into containers or wrappers with flow cut-off means, e.g. valves moving linearly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86389—Programmer or timer
    • Y10T137/86445—Plural, sequential, valve actuations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86879—Reciprocating valve unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Definitions

  • the multiple outlet valve of the invention consists of a gate having a plurality of ports, a manifold having a plurality of openings arranged to correspond with the ports and resilient valve pads each having a passage and an end rigidly secured to one of the openings with the other end engaging the gate surface.
  • the manifold and gate are supported in slidable relationship with the surface of the gate slidably and sealingly engaging the surfaces of the valve pads.
  • Dispense systems with a plurality of outlets for simultaneously dispensing fluids are known. Such systems may include a plurality of individual rotary or other type valves having a common actuating means. The amount of fluid dispensed is controlled by the length of time the valve is held open, usually by some mechanical timing device.
  • Such dispense systems have a number of shortcomings.
  • the overall valve, consisting of a number of individual valves, is intricate, expensive, and vulnerable to wear, and frequently diflicult to remain in balance so that equal amounts are dispensed through all openings.
  • the valves are normally too hard to clean and service. Further, the dispensing of various materials that are injuries to seals etc. presents daunting servicing problems, and frequently such dispensing is not practical.
  • valves are normally not adapted for handling different fluids having widely different viscosities and other related physical characteristics.
  • known valve control mechanisms are not adapted to activate the valve to control the length of time that the valve is in open position to the percision required to dispense fluids in uniform and precise amounts.
  • Slide valves more particularly slide valves having a plurality of openings, are known.
  • the known slide valves have not proven entirely satisfactory in the dispense systems utilizing a plurality of outlet openings.
  • Such valves 'ice necessarily are provided with a relatively long slidable gate element having apertures that can be put into and out of registration with an associated set of apertures, in turn communicating with a reservoir or pressurized source of fluid.
  • Providing and maintaining a seal between the contacting surfaces of the respective set of apertures is very diflicult and presents major maintenance problems. A large force must be applied to maintain the contacting surfaces in sealing engagement, which causes rapid wear and requires a large force to operate the valve. Further, adjusting the relative rates of fluid flow through the individual openings or apertures is not normally possible.
  • the multiple outlet valves known to the prior art have not proven satisfactory in dispense systems for simultaneously dispensing fluid through a number of openings because they present serious maintenance problems, are not adapted to handle fluids of varying physical characteristics, and do not provide a suitable means to vary the relative flow through the individual openings.
  • An object of this invention is to provide improved fluid dispensing apparatus.
  • Another object of this invention is to provide an improved valve and valve actuator combination adapted to dispense fluid in precise measured amounts and in hazardous locations.
  • Yet another object of this invention is to provide an improved dispensing valve actuator adapted to manipulate a valve in precisely timed cycles.
  • Another object of the invention is providing a valve actuator in which the time interval is initiated while the timing element is in motion.
  • An object of this invention is to provide a valve having a plurality of openings that is inexpensive to manufacture and relatively easy and inexpensive to maintain.
  • Another object of this invention is to provide a valve having a plurality of openings that is capable of handling a variety of fluids which vary in viscosity.
  • Another object of this invention is to provide multiple outlet valves in which the parts thereof, particularly the seals, are not prone to degradation by the fluid being dispensed.
  • Yet another object of this invention is to provide a multiple outlet valve that has a simple yet dependable mode of operation.
  • Still another object of this invention is to provide multiple outlet dispensing valves in which the relative rates of flow of fluid through the outlets can be adjusted.
  • the dispensing system of the invention has a dispensing valve in combination with a control for the valve.
  • the control has a power means for opening and closing the dispensing valve, a timing cylinder and piston, and a source of dilferential gas pressure operatively communicating with the cylinder and piston.
  • Valve means are provided for establishing active fluid communication between the cylinder and piston and the source of diflerential pressure to thereby initiate a timing stroke.
  • the timing interval is measured by a first sensing means which is responsive to a first position of the piston during the timing stroke, and a second sensing means responsive to a later position of the piston during the timing stroke.
  • the first sensing means causes the power means to open the dispensing valve and the second sensing means causes the power means to close the valve.
  • a means to control the rate of flow of gas to the timing cylinder and piston from the source of differential gas pressure which is adapted to vary the timing stroke interval.
  • the multiple outlet valve of the invention has a gate means with a plurality of ports and a plurality of valve pads, with each pad passage adapted to communicate with a source of fluid. Means are provided for supporting the valve pads and gate means in relatively slidable relation .A means is provided for biasing the valve pads into sealing contact with the gate means.
  • the dispensing system of the invention makes possible precise dispensing of fluid, and in particular dispensing of precise amounts of fluid through a plurality of ports. Accurate dispensing of the fluid is made possible by the valve actuator which measures the time interval of a timing stroke of a cylinder and piston after the piston is set in motion. The length of the time interval can be adjusted by adjusting the rate of gas flow to and/ or from the cylinder, or by positioning the sensing means at different locations to sense a smaller or larger portion of the timing stroke of the cylinder and piston. With this arrangement, the length of the timing interval is maintained uniform. Sense variations of the stroke due to static friction, variation in the forces necessary to overcome the inertia of the piston and the associated apparatus are eliminated. Further, the pneumatically controlled dispensing valve actuator eliminates hazards due to fire, explosion, etc. when the fluid being dispensed is flammable.
  • the multiple outlet valve of the invention solves all of the prevailing problems associated with multiple outlet valves known to the prior art.
  • the valve of the invention is relatively inexpensive to manufacture, and maintain in operation. Further, the valve is adapted to handle a variety of fluids of different viscosities.
  • the valve, particularly the seals, are not susceptible to degradation by the fluid be ing dispensed.
  • the flow through the outlet openings of the valve can be adjusted individually.
  • the valve has a simple yet dependable mode of operation.
  • FIG. 1 is a front elevational view of the multiple outlet valve of the invention in combination with an actuating means, shown with parts of the valve removed for simplicity of illustration.
  • FIG. 2 is a perspective view in partially broken section of the multiple valve of the invention shown with some of the parts in exploded relation, and a number of parts removed to facilitate illustration thereof
  • FIG. 3 is a sectional view taken on line 3--3 of FIG. 2.
  • FIG. 4 is a schematic view of the multiple valve of the invention in combination with example of a suitable actuating means.
  • FIGS. 1-3 there is depicted in FIGS. 1-3 a preferred specific embodiment of the multiple outlet valve of the invention.
  • the valve 10 has a manifold 12 provided with a longitudinally extending cavity 14 which communicates with a source of fluid to be dispensed.
  • the source of fluid (not shown) is conveyed to the passage 14 through a suitable conduit 15, which is preferably provided with a flexible portion to allow longitudinal movement of the manifold.
  • a plurality of threaded openings 16 are provided in manifold 12 and which communicate with cavity 14, as most clearly shown in FIG. 3.
  • Each of pads 18 has a threaded portion 19, a bellows portion 20, a shank 21, and annular planar end surface 22 which is centered about the outlet of passage 23.
  • the valve pads 18 are made of a resilient material, preferably a plastic, still more preferably polytetrafiuoroethylene. The material of the valve pads should he resilient and also be inert to the fluid to be dispensed. Diaphragm portion of the pad allows a limited longitudinal compression of the pad.
  • Pad 18 is also provided with an annular abutment 24 and a compression spring 26 as most clearly shown in FIG. 3. Spring 26 biases the end of the valve pad 18 outwardly.
  • the pads are mounted in a housing 28, which is mounted on manifold 12. As most clearly illustrated in FIG. 3, the housing 28 is provided with a plurality of apertures which receive shank portion 21. The housing maintains the valve pads in a predetermined arrangement and allows limited longitudinal movement of the end of the pad.
  • a valve gate 30 consists of an elongated plate with a flat planar surface 31, and a plurality of valve ports 32 adapted to be placed in registration with the outlet openings of pads 18.
  • Tubular spouts 34 are provided which communicate with the valve port 32.
  • the spouts 34 are useful for conveying material to be dispensed to the precise area desired, as for example the top surface of a module 36. If desired, a plurality of spouts 32 can be provided which communicate with a single valve port.
  • a throttle mechanism is provided. The.
  • throttle mechanism is most clearly illustrated in FIG. 3 and consists of a throttle valve 40 having a threaded portion 41, a conical valve surface 42 and a shank 44 with a slot 45.
  • the conical valve surface 42 is ar' ranged in close proximity to the upper end of the passage in valve pad 18.
  • the passage opening in the individual pads can thus be varied by shifting the valve element 40. to compensate for structural variations of the pad, fluid friction losses within passage 14 etc.
  • a locknut 46 is threadedly mounted in manifold 12 and an annular seal, which combination prevents fluid from leaking out of the manifold and also serves as a lock for maintaining the adjusted position of valve 40.
  • the manifold 12 and its associated elements and-valve gate 30 are supported for relative movement to allow passages 23 of valve pads 18 to be moved into and out of registration with valve ports 32 on gate 30.
  • the support providing such mode of operation has a base 50 having mounted thereon a valve gate clamp 52. As most clearly indicated in FIG. 3, clamp 52 engages an abutment 54 on gate 30. Abutments 67 are mounted on the inside of clamp 52 to aid in the centering of housing 28 and the associated manifold and pad assembly.
  • a plurality of bolts 56 ar-, ranged in pairs, with each bolt provided with a longitudinal slot 58.
  • Flexible transverse bars 60 are mounted in the slots 58 in bolts 56 and secured therein by nuts 61.
  • the bars 60 are mounted in slots 62 in manifold 30 as most clearly illustrated in FIG. 2.
  • Pins 66 mounted in the bottom of slots 62 that are sealed in detents in bars 60 are provided to center the manifold relative to base 50.
  • the pins 66 in combination with the planar surfaces 22 of the pads 18 provide a triangular support configuration for the manifold and pad assembly.
  • the bars 60 when in an unstressed position locate the manifold 12 in an intermediate position relative to gate 30.
  • FIG. 1 shows the combination of the valve 10 of the invention and a suitable actuating means.
  • the actuating means can be pneumatically operated by cylinder 65, an electrical solenoid, or any other apparatus which will move the manifold and its associated elements into and out of registration with the valve ports in valve plate 30 for a precise time interval.
  • the actuating means is coupled to the valve manifold 12 with a slotted element 69 which receives a head 69a. This coupling arrangement allows limited movement of the manifold in the direction of the longitudinal axis of passages 23 of pads 18.
  • FIG. 4 A preferred valve actuating control for valve 10 is illustrated in FIG. 4.
  • the control 70 is pneumatically operated.
  • An operative cycle of control 70 is induced by an air pulse introduced through conduit 72.
  • Control 70 has a double acting air cylinder 65 operatively connected to the manifold of multiple valve 10. Actuation of cylinder 65 is controlled by a four-way double pilot pressure operated valve 76, in turn controlled pilot actuation cam operated spring return valves 78 and 80. Valves 78 and 80 are actuated by the double acting air cylinder 82, which serves as the timing element for determining the precise time interval that multiple outlet valve is maintained in the open position. Cylinder 82 is actuated by four-way pilot pressure operated spring return valve 84, in turn actuated by a timing pulse introduced into conduit 72 by the overall control system in which the control 70 is embodied. The control 70 is operated by a secondary pilot air system wherein air is introduced into conduit 86.
  • the air introduced into conduit 86 is regulated by pressure regulator 89 to a constant value of 60 pounds per square inch in conduits 88 and 90.
  • the pressure in conduit 88 enters pressure regulator 91 where it is regulated to 45 pounds per square inch in conduits 92 and 93.
  • Pressure regulator 94 controls the air pressure in conduit 95 which is connected to a fluid reservoir 96 communicating with the interior of multiple outlet valve 10. Fluid being dispensed is stored in resevoir 96 under a constant pressure controlled by pressure regulator 94.
  • valve 84 In the operation of control 70, in absence of an air pulse in conduit 72, valve 84 is biased by spring 84A so that air under pressure is introduced into cylinder 82 to urge the piston 82A in the position illustrated in the drawing.
  • a charge pulse of air introduced into conduit 72 shifts the valve 84 overcoming spring 84A to introduce air under pressure to the opposite side of piston 82A and drive same to the left as viewed in the drawing.
  • This portion of the cylinder cycle is termed the charge stroke.
  • spring 84A Upon termination of the charge pulse spring 84A returns valve 84 to its initial position beginning the timing stroke of cylinder 82.
  • the cam actuator 82B releases pressure on valve 80 allowing the spring 80A to shift the valve.
  • Cam actuator 82 passes the cam 100 on this portion of the cycle Without actuating same since the cam is a one-way cam.
  • the shifting of valve 80 disconnects pilot 76A from the source of air. However the valve 76 is not shifted since there is no pressure on the opposite pilot 76B.
  • cam follower 100- by cam actuator 82 actuates valve 78 in opposition to spring 78A.
  • Air pressure is then introduced to pilot 76B which shifts valve 76 and applying air under pressure from conduit 90 to the left side of piston 65A in turn forcing manifold of multiple outlet valve 10 to the right as viewed in FIG. 4 and opening the valve ports.
  • Multiple outlet valve 10 is maintained in the open position until the cam actuator 82B opens valve 80 and compressing spring 80A to introduce air to pilot 76A forcing valve 76 to the left and reversing air cylinder 65 and closing multiple outlet valve 10.
  • a multiple outlet valve comprising,
  • a gate means having a surface, and a plurality of ports arranged in a predetermined configuration
  • each pad having a passage therethrough, an engaging surface complimentary to said surface of said gate means and including an outlet aperture at one end thereof, and a mounting means at the opposite end,
  • each of said pads having said opposite end rigidly secured to one of said openings by said mounting means
  • each of said valve pads is provided with a diaphragm portion which allows a limited longitudinal compression of said pads.
  • valve pads are formed of polytetrafluoroethylene.
  • each of said valve pads is provided with an abutment surface, and a compression spring is disposed about each of said valve pads and in engagement with said abutment means and said manifold.
  • each of said valve pads are provided with a planar annular shaped surface surrounding the outlet aperture of said pad.
  • each of said valve pads is provided with shank portions adjacent the ends thereof, and said means for supporting said valve pads and gate means in relatively slidable relation includes a housing provided with a plurality of apertures which slidably receive said shank portions.
  • At least one transverse resilient elongated member having its ends joined to said frame
  • a throttle means is provided to adjust the relative flow rates through said valve ports comprising, throttle valves mounted on said manifold opposite each valve pad adapted to vary the valve pad passage opening.
  • said means for supporting said manifold and said gate means in relatively slidable relation includes a frame having said gate means attached thereto, at least one support member maintaining said frame and said manifold in slidable relation and including a pivotal connection between said member and said manifold.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Multiple-Way Valves (AREA)
  • Filling Of Jars Or Cans And Processes For Cleaning And Sealing Jars (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Sliding Valves (AREA)
US585542A 1966-10-10 1966-10-10 Multiple outlet valve Expired - Lifetime US3476152A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US58554266A 1966-10-10 1966-10-10

Publications (1)

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US3476152A true US3476152A (en) 1969-11-04

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ID=24341899

Family Applications (1)

Application Number Title Priority Date Filing Date
US585542A Expired - Lifetime US3476152A (en) 1966-10-10 1966-10-10 Multiple outlet valve

Country Status (9)

Country Link
US (1) US3476152A (de)
JP (1) JPS5028875B1 (de)
BE (1) BE702588A (de)
CH (1) CH463218A (de)
DE (1) DE1650431B2 (de)
FR (1) FR1603336A (de)
GB (1) GB1184669A (de)
NL (1) NL158902B (de)
SE (1) SE316057B (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090205563A1 (en) * 2006-11-22 2009-08-20 S.O.I.Tec Silicon On Insulator Technologies Temperature-controlled purge gate valve for chemical vapor deposition chamber
US20090223441A1 (en) * 2006-11-22 2009-09-10 Chantal Arena High volume delivery system for gallium trichloride
US20100242835A1 (en) * 2006-06-09 2010-09-30 S.O.I.T.E.C. Silicon On Insulator Technologies High volume delivery system for gallium trichloride
US8197597B2 (en) 2006-11-22 2012-06-12 Soitec Gallium trichloride injection scheme
US8382898B2 (en) 2006-11-22 2013-02-26 Soitec Methods for high volume manufacture of group III-V semiconductor materials
US9481943B2 (en) 2006-11-22 2016-11-01 Soitec Gallium trichloride injection scheme
US9481944B2 (en) 2006-11-22 2016-11-01 Soitec Gas injectors including a funnel- or wedge-shaped channel for chemical vapor deposition (CVD) systems and CVD systems with the same
US9580836B2 (en) 2006-11-22 2017-02-28 Soitec Equipment for high volume manufacture of group III-V semiconductor materials
US20230235825A1 (en) * 2022-01-26 2023-07-27 Maag Germany Gmbh 3-port valve

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110655024B (zh) * 2019-11-19 2021-06-18 广州黛莱美化妆品有限公司 一种洗发水及其制备方法与制备系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE503511A (de) *
US2471941A (en) * 1944-05-29 1949-05-31 Aero Supply Mfg Co Inc Valve and liner therefor
US2605994A (en) * 1945-10-31 1952-08-05 Thompson Prod Inc Seal assembly
US3089515A (en) * 1961-11-13 1963-05-14 Gen Electric Three-way valve
US3314575A (en) * 1965-02-23 1967-04-18 Clayton Specialties Inc Seed dispensing apparatus
US3332580A (en) * 1965-09-20 1967-07-25 Lockwood Tech Fluid applicator valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE503511A (de) *
US2471941A (en) * 1944-05-29 1949-05-31 Aero Supply Mfg Co Inc Valve and liner therefor
US2605994A (en) * 1945-10-31 1952-08-05 Thompson Prod Inc Seal assembly
US3089515A (en) * 1961-11-13 1963-05-14 Gen Electric Three-way valve
US3314575A (en) * 1965-02-23 1967-04-18 Clayton Specialties Inc Seed dispensing apparatus
US3332580A (en) * 1965-09-20 1967-07-25 Lockwood Tech Fluid applicator valve

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100242835A1 (en) * 2006-06-09 2010-09-30 S.O.I.T.E.C. Silicon On Insulator Technologies High volume delivery system for gallium trichloride
US8545628B2 (en) * 2006-11-22 2013-10-01 Soitec Temperature-controlled purge gate valve for chemical vapor deposition chamber
US20090223441A1 (en) * 2006-11-22 2009-09-10 Chantal Arena High volume delivery system for gallium trichloride
US8197597B2 (en) 2006-11-22 2012-06-12 Soitec Gallium trichloride injection scheme
US8323407B2 (en) 2006-11-22 2012-12-04 Soitec Gallium trichloride injection scheme
US8382898B2 (en) 2006-11-22 2013-02-26 Soitec Methods for high volume manufacture of group III-V semiconductor materials
US20090205563A1 (en) * 2006-11-22 2009-08-20 S.O.I.Tec Silicon On Insulator Technologies Temperature-controlled purge gate valve for chemical vapor deposition chamber
US8887650B2 (en) 2006-11-22 2014-11-18 Soitec Temperature-controlled purge gate valve for chemical vapor deposition chamber
US9481943B2 (en) 2006-11-22 2016-11-01 Soitec Gallium trichloride injection scheme
US9481944B2 (en) 2006-11-22 2016-11-01 Soitec Gas injectors including a funnel- or wedge-shaped channel for chemical vapor deposition (CVD) systems and CVD systems with the same
US9580836B2 (en) 2006-11-22 2017-02-28 Soitec Equipment for high volume manufacture of group III-V semiconductor materials
US20230235825A1 (en) * 2022-01-26 2023-07-27 Maag Germany Gmbh 3-port valve
US11815187B2 (en) * 2022-01-26 2023-11-14 Maag Germany Gmbh 3-port valve

Also Published As

Publication number Publication date
NL6713716A (de) 1968-04-11
BE702588A (de) 1968-01-15
FR1603336A (de) 1971-04-05
DE1650431C3 (de) 1975-04-03
CH463218A (de) 1968-09-30
NL158902B (nl) 1978-12-15
SE316057B (de) 1969-10-13
GB1184669A (en) 1970-03-18
JPS5028875B1 (de) 1975-09-18
DE1650431B2 (de) 1974-08-22
DE1650431A1 (de) 1972-10-26

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