US3625015A - Rotary-valved cryogenic apparatus - Google Patents

Rotary-valved cryogenic apparatus Download PDF

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Publication number
US3625015A
US3625015A US25152A US3625015DA US3625015A US 3625015 A US3625015 A US 3625015A US 25152 A US25152 A US 25152A US 3625015D A US3625015D A US 3625015DA US 3625015 A US3625015 A US 3625015A
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US
United States
Prior art keywords
fluid
displacer
refrigerator
passage
rotary
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US25152A
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English (en)
Inventor
Fred F Chellis
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Cryogenic Technology Inc
Azenta Inc
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Cryogenic Technology Inc
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Assigned to FIRST NATIONAL BANK OF BOSTON, AS AGENT reassignment FIRST NATIONAL BANK OF BOSTON, AS AGENT CONDITIONAL ASSIGNMENT (SEE DOCUMENT FOR DETAILS). Assignors: HELIX TECHNOLOGY CORPORATION
Assigned to HELIX TECHNOLOGY CORPORATION, A CORP OF DE reassignment HELIX TECHNOLOGY CORPORATION, A CORP OF DE ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: FIRST NATIONAL BANK OF BOSTON THE, AS AGENT
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Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/003—Gas cycle refrigeration machines characterised by construction or composition of the regenerator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/006—Gas cycle refrigeration machines using a distributing valve of the rotary type

Definitions

  • This invention relates to cryogenic apparatus and more particularly to apparatus suitable for performing the refrigeration cycle described in United States Pat. 2,996,035.
  • valves have been used in connection with various displacer driving means for apparatus designed to operate on the so-called no-work cycle of United States Pat. 2,966,035. These valves include those of the poppet types as well as those designed for pneumatically driven apparatus (see for example U.S. Pat. 3,119,237, 3,188,821). Those valves designed for operation of a mechanically-driven apparatus require expensive machining operations to make them, as well as long and tedious timing adjustments once they are installed. Moreover, once installed and adjusted it is impractical to change their timing sequence and the apparatus in which they are installed must normally continue to operate on a fixed timing.
  • the valving of pneumatically-driven apparatus is complicated, expensive to construct, adjust and time, and it is generally impractical to change the valving system to accommodate a desired change in timing sequence.
  • the apparatus of this invention is, however, not concerned with a pneumatically-driven device; but is concerned with a mechanically-driven no-work refrigeration apparatus which overcomes some of the difficulties associated with valve design, construction and adjustment associated with previous no-work apparatus no matter how driven, and provides more flexible equipment with respect to the timing of the cycle operation.
  • a primary object of this invention to provide a rotary-valved, mechanically-driven cryogenic apparatus which uses a relatively simple valve mechanism, inexpensive to manufacture and requiring no adjustments 3,625,015 Patented Dec. 7, 1971 after assembly. It is another object to provide cryogenic apparatus of the character described in which the valving mechanism is readily interchangeable, the interchangeable parts being of a character which permits the ready altering of the timing sequence of the cycle. It is therefore another primary object of this invention to provide a more flexible cryogenic apparatus than has heretofore been available. Other objects of the invention will in part be obvious and will in part be apparent hereinafter.
  • FIG. 1 is a detailed longitudinal cross section through the refrigerator, the driving mechanism and the valving mechanism;
  • FIG. 2 is a cross section of the end of the motor housmg which is an extension of FIG. 1 and which shows the completion of the low-pressure fluid flow path;
  • FIG. 3 is a side view of the mechanical driving means associated with the displacer shaft
  • FIG. 4 is a plan view of the reverse surface of the crank shaft housing which mates with the rotary valve means
  • FIG. 5 is a plan view of the obverse surface of the rotary valve member which is positioned within the crank case;
  • FIG. 6 is a plan view of the reverse surface of the rotary valve member which defines the fluid passages and seals with the valve plate;
  • FIG. 7 is the plan view of the obverse surface of the valve plate member which forms the fluid passages and seals with the reverse valve surface of FIG. 6;
  • FIG. 8 is a plan view of the obverse surface of the main shaft support ring which forms fluid passages with the valve plate member.
  • FIGS. 1 and 2 being a continuation of FIG. 1.
  • the refrigerator assembly 10 the mechanical driving means 11, the rotary valve assembly 12 and the motor and associated housing means 13.
  • the term refrigerator is used hereinafter in a generic sense and is meant to also include a liquefier.
  • the refrigerator assembly 10 comprises an enclosure housing 15 which is integral with an upper flanged member 16 which in turn provides the means by which the refrigerator assembly 10 is joined to the mechanical driving means as described later.
  • the refrigerator housing is closed on the lower colder end by a relatively thick end plate 19.
  • a heat station in the form of a flanged tubular member 20 is bonded to the housing wall and is in heat exchange relationship with the cold fluid within the refrigerator.
  • the end plate 19 and heat station 20 are formed of a metal, e.g., copper, which exhibits good thermal conductivity at the cryogenic temperatures encountered.
  • a displacer 22 moves within the housing to define an upper warm chamber 23 of variable volume and a lower cold expansion chamber 24 of variable volume.
  • the displacer is affixed to a displacer shaft 25 and a fluid sealing means is provided to form a fluid-tight seal around shaft 25 to isolate chamber 23 from the fluid volumes within the crankcase housing.
  • This sealing means located within the lower portion of the crankcase, comprises concentric elastomeric O-rings 26 and 27, ring retaining members 28 and 29 and a snap ring 30.
  • a fluid seal is formed between the upper section 35 of the displacer and the inner surface of the refrigerator housing 15 by an -O-ring 37, and a split annular ring 36 is used as a guiding means.
  • regenerator 40 which contains a suitable heat storage means, such for example as lead balls 41.
  • the upper end of the regenerator 40 is defined by a foraminous plate 42 and the lower end by a,
  • displacer end plug 43 Communication between the warm chamber 23 and cold chamber 24 is through fluid passages 45 in the upper section of the displacer, the regenerator 40, a series of radial passages 46 and an annular passage 47 defined between the lower displacer wall and the inner housing wall.
  • the mechanical driving means to impart reciprocal motion to the displacer is a scotch yoke (FIGS. 1 and 3) and it is housed within a fluid-tight crankcase generally indicated by the reference numeral 50.
  • This main crankcase housing has an upper extended section 51, which defines volume 52 therein, and a face member 53 which for convenience of referencing may be divided into an upper portion 54 and a lower portion 55. These portions are, of course, one integral member as shown in FIG. 4.
  • a crankcase cover 58 is sealed to the main crankcase housing by an elastomeric O-ring seal 59, and internal wall 60 of the crankcase cover is a hardcoated surface.
  • the crankcase is sealed to the upper flanged member 16 of the refrigerator by Q-ring seal 61 and it defines an internal volume 62 in which the scotch yoke mechanism 63 for driving displacer 22 is located.
  • This scotch yoke mechanism 63 comprises a scotch yoke 64 affixed to shaft 25 through yoke pin 65 and a yoke guide 66 which slips onto yoke 64 to retain yoke pin 65 in place and to act as an antirotation element by rubbing against the hard-coated internal surface 60 of the crankcase cover. Extending through the central opening 70 of the crankcase (FIG.
  • scotch yoke driving means which comprises a scotch yoke overhand crank 71, crank pin 72 and bearing 73.
  • This scotch yoke .driving means is mechanically linked to main drive shaft 75 through pin 76.
  • the scotch yoke overhand crank 71 is configured to define on its reverse surface an outer annular ring extension 80 and an inner ring extension 81. (In describing the various components which are assembled to form the driving and valving means, that surface of the component which faces toward the crankcase will, for
  • Inner annular ring extension 81 has an internal recess adapted to contain an O-ring 82 to provide a fluid seal with the surface of main drive shaft 75.
  • the rotary valve 85 in the form of a ring molded from a synthetic resin such as a filled polytetrafiuorethylene, is linked to the scotch yoke crank 71 through a pin 86 and thus it is connected for rotation by main drive shaft 75.
  • the obverse surface of the rotary valve is shown in plan view in FIG. 5. It will be seen to be molded to have an inner raised annular ring section 87 and an outer, lower 4 annular ring section 88, the former forming with outer annular extension of the overhang crank a recess in which is positioned an O-ring seal 89 and the latter being spaced from the overhang crank member by a wavy spring 90.
  • a pin hole 91 extends into ring and is adapted to receive pin 86.
  • the reverse side of the rotary valve is shown in plan view in FIG. 6. It will be seen that this reverse surface is molded to define a high-pressure fluid passage 95, having fluid connections 96 and 97 with the periphery of the valve which is continuously exposed to high-pressure fluid as explained below; low-pressure passage 100, having fluid connections 101 and 102 with the central ring opening 103; lands 104 and 106; and a sealing surface which forms a fluid-tight seal with the obverse surface of valve plate 110 to isolate the high-pressure and low-pressure passages.
  • valve plate 110 which makes sealing contact with the sealing surface of the reverse surface of the rotary valve, is shown in plan view in FIG. 7. It will be seen from FIGS. 1 and 7 that the valve plate is configured in a manner to complement and fit the reverse surface of crankcase face 53 and that the fluid sealing of these parts :is accomplished by O-rings 112 and 113.
  • the central opening in the valve plate is of sufficient diameter to define an annular passage 114 around the periphery of the main drive shaft 75; and the peripheries of the overhang crank 71 and rotary valve 85 form an annular fluid channel 115 with the internal wall of central opening 70 of the crankcase face.
  • a right-angled fluid passage 116 is drilled in the valve plate to terminate in an opening 117 which is aligned and in fluid communication with an angled passage 118 drilled through the bottom portion 55 of the crankcase face. Passage 118 opens into the warm chamber 23 of the refrigerator.
  • the combination of right angled passage 116, opening 117 and angled passage 118 provide fluid communication alternatively with highpressure and low-pressure passages of the rotary valve as it is rotated.
  • the reverse side of the valve plate is seen in FIG. 1 to take the form of a series of integral stepped annular rings.
  • the valve plate is sealed, through O-ring 120 to a main shaft support member 121 which contains shaft bearings 122 and 123 and which is held to the shaft by a snap ring and washer system generally indicated at 124.
  • the main shaft support member has an obverse face which generally conforms to the reverse face of the valve plate and which is spaced apart from it to define a low-pressure fluid passage 128 which communicates with a plurality of passages 130 drilled through the main shaft support which in turn is affixed to a motor extension ring 132 through a plurality of screws 133.
  • the motor extension ring 132 has a plurality of fluid passages 134 which are aligned with passages 130 and flared outwardly to open into a fluid passage 135 defined between the outer casing wall 136 of the motor and the internal wall of motor housing 137.
  • This flow path for the cold exhaust fluid is designed to conduct the discharged low-pressure fluid around the motor as a coolant.
  • the motor housing 137 is sealed to the shaft support member 121 through O-ring 138 and is closed at the end with a sealing plate 140 and O-ring seal 141 (FIG. 2).
  • the low-pressure fluid is withdrawn from motor housing through a conduit 142 which is connected to a low-pressure reservoir, e.g., the inlet of a compressor (not shown).
  • High-pressure fluid from a suitable source e.g., a compressor is brought into the apparatus through the high-pressure fluid inlet passage 145 which is located partly in the upper section 54 of the crankcase face section and partly in a fluid conduit block 146 fastened to the crankcase through screws 147 and sealed by an O- ring 148.
  • An external fluid conduit 149 connects pas;
  • a sage 145 with the high-pressure fluid source e.g., a
  • the high-pressure volumes are isolated from the low-pressure volumes primarily by O- ring seal 89. It will be seen that volumes 52 and 62 are open to the high-pressure side and thus they contain high-pressure fluid throughout the operation of the apparatus.
  • a rotary-valved, mechanically driven cryogenic apparatus comprising in combination:
  • displacer means movable within said refrigerator thereby to define a warm. chamber of variable volume and at least one cold expansion chamber of variable volume;
  • fluid control means adapted to control the sequential delivery of high-pressure fluid into and the exhausting of fluid from said refrigerator, said fluid control means comprising (1) a stationary valve plate having a fluid passage therein, said fluid passage being in fluid communication with the warm chamber of said refrigerator;
  • first fluid passage means adapted to deliver highpressure fluid to said high-pressure fluid passage in said fluid control means
  • said mechanical driving means comprises:
  • a cryogenic apparatus in accordance with claim 4 including fluid-tight enclosure means in which said mechanical driving means are located.
  • a cryogenic apparatus in accordance with claim 4 wherein said means to convert rotary motion to reciprocal motion comprises an overhang crank linked to said main drive shaft and scotch yoke means rotatably aflixed to said crank and linked to said displacer shaft.
  • a rotary-valved, mechanically driven cryogenic apparatus comprising in combination:
  • displacer means movable Within said refrigerator thereby to define a warm chamber of variable volume and at least one cold expansion chamber of variable volume;
  • fluid control means adapted to control the sequential delivery of high-pressure fluid into and the exhausting of fluid from said refrigerator, said fluid control means comprising (1) a stationary valve plate having a fluid passage therein, said fluid passage being in fluid communication with the warm chamber of said refrigerator,
  • first fluid passage means adapted to deliver highpressure fluid to said high-pressure fluid passage in said fluid control means comprising a high-pressure fluid inlet conduit and an annular fluid passage defined around the periphery of said rotary valve;
  • second fluid passage means adapted to receive expanded fluid from said low-pressure fluid passage in said fluid control means and conduct said expanded fluid to a low-pressure reservoir, said second fluid passage means including an annular fluid passage surrounding said motor, whereby said fluid exhausted from said refrigerator serves as a coolant for said motor.
  • a cryogenic apparatus in accordance with claim 8 wherein said means to convert rotary motion to reciprocal motion comprises an overhang crank linked to said main drive shaft and scotch yoke means rotatably affixed to said crank and linked to said displacer shaft.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Multiple-Way Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US25152A 1970-04-02 1970-04-02 Rotary-valved cryogenic apparatus Expired - Lifetime US3625015A (en)

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Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180984A (en) * 1977-12-30 1980-01-01 Helix Technology Corporation Cryogenic apparatus having means to coordinate displacer motion with fluid control means regardless of the direction of rotation of the drive shaft
FR2502761A1 (fr) * 1981-03-30 1982-10-01 Oerlikon Buehrle Inc Refrigerateur cryogenique
US4430863A (en) * 1982-06-07 1984-02-14 Air Products And Chemicals, Inc. Apparatus and method for increasing the speed of a displacer-expander refrigerator
US4434622A (en) 1981-06-05 1984-03-06 Balzers Aktiengesellschaft Regenerative cyclic process for refrigerating machines
US4438631A (en) * 1982-07-15 1984-03-27 Cvi Incorporated Cryogenic refrigerator
US4446701A (en) * 1981-09-14 1984-05-08 Sumitomo Heavy Industries, Ltd. Fluid-operated refrigerating machine
US4471626A (en) * 1982-07-15 1984-09-18 Cvi Incorporated Cryogenic refrigerator
FR2557276A1 (fr) * 1983-12-26 1985-06-28 Seiko Seiki Kk Dispositif de refrigeration de gaz
US4987743A (en) * 1988-07-07 1991-01-29 The Boc Group Plc Cryogenic refrigerators
US5361588A (en) * 1991-11-18 1994-11-08 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
WO1996029552A1 (de) * 1995-03-23 1996-09-26 Leybold Vakuum Gmbh Refrigerator
US5901737A (en) * 1996-06-24 1999-05-11 Yaron; Ran Rotary valve having a fluid bearing
EP0862030A4 (en) * 1996-09-13 1999-09-29 Daikin Ind Ltd CRYOGENIC REFRIGERATOR AND CONTROL METHOD THEREOF
US6378312B1 (en) * 2000-05-25 2002-04-30 Cryomech Inc. Pulse-tube cryorefrigeration apparatus using an integrated buffer volume
US6694749B2 (en) * 2001-10-19 2004-02-24 Oxford Magnet Technology Ltd. Rotary valve
US20070107442A1 (en) * 2004-03-08 2007-05-17 Eric Seitz Wearless valve for cryorefrigerator
US20070119189A1 (en) * 2004-02-11 2007-05-31 Gao Jin L Three track valve for cryogenic refrigerator
US20070119188A1 (en) * 2004-01-20 2007-05-31 Mingyao Xu Reduced torque valve for cryogenic refrigerator
US20080245077A1 (en) * 2005-06-10 2008-10-09 Sumitomo Heavy Industries, Ltd. Multiple Rotary Valve For Pulse Tube Refrigerator
US20120047913A1 (en) * 2010-08-31 2012-03-01 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
US20120317994A1 (en) * 2011-06-14 2012-12-20 Sumitomo Heavy Industries, Ltd. Regenerative type refrigerator
CN102844634A (zh) * 2010-04-19 2012-12-26 住友重机械工业株式会社 回转阀及使用该回转阀的超低温制冷机
US20150068221A1 (en) * 2013-09-10 2015-03-12 Sumitomo Heavy Industries, Ltd Cryogenic refrigerator
US10345013B2 (en) 2016-03-16 2019-07-09 Sumitomo Heavy Industries, Ltd. Cryocooler and rotary valve mechanism
WO2019199591A1 (en) 2018-04-09 2019-10-17 Brooks Automation, Inc. Pneumatic drive cryocooler
US10551093B2 (en) 2016-03-16 2020-02-04 Sumitomo Heavy Industries, Ltd. Cryocooler and rotary valve mechanism

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4389850A (en) * 1982-04-19 1983-06-28 Cvi Incorporated Hybrid cryogenic refrigerator
US4388809A (en) * 1982-04-19 1983-06-21 Cvi Incorporated Cryogenic refrigerator
JP6117090B2 (ja) * 2013-12-18 2017-04-19 住友重機械工業株式会社 極低温冷凍機
JP6781651B2 (ja) * 2017-03-13 2020-11-04 住友重機械工業株式会社 極低温冷凍機、極低温冷凍機用のロータリーバルブユニット及びロータリーバルブ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL252718A (da) * 1957-11-14
US3205668A (en) * 1964-01-27 1965-09-14 William E Gifford Fluid control apparatus

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180984A (en) * 1977-12-30 1980-01-01 Helix Technology Corporation Cryogenic apparatus having means to coordinate displacer motion with fluid control means regardless of the direction of rotation of the drive shaft
FR2502761A1 (fr) * 1981-03-30 1982-10-01 Oerlikon Buehrle Inc Refrigerateur cryogenique
US4434622A (en) 1981-06-05 1984-03-06 Balzers Aktiengesellschaft Regenerative cyclic process for refrigerating machines
US4446701A (en) * 1981-09-14 1984-05-08 Sumitomo Heavy Industries, Ltd. Fluid-operated refrigerating machine
US4430863A (en) * 1982-06-07 1984-02-14 Air Products And Chemicals, Inc. Apparatus and method for increasing the speed of a displacer-expander refrigerator
US4438631A (en) * 1982-07-15 1984-03-27 Cvi Incorporated Cryogenic refrigerator
US4471626A (en) * 1982-07-15 1984-09-18 Cvi Incorporated Cryogenic refrigerator
US4622823A (en) * 1983-12-26 1986-11-18 Seiko Seiki Kabushiki Kaisha Gas refrigerator
FR2557276A1 (fr) * 1983-12-26 1985-06-28 Seiko Seiki Kk Dispositif de refrigeration de gaz
US4987743A (en) * 1988-07-07 1991-01-29 The Boc Group Plc Cryogenic refrigerators
US5361588A (en) * 1991-11-18 1994-11-08 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
WO1996029552A1 (de) * 1995-03-23 1996-09-26 Leybold Vakuum Gmbh Refrigerator
US5906099A (en) * 1995-03-23 1999-05-25 Leybold Vakuum Gmbh Refrigerator
US5901737A (en) * 1996-06-24 1999-05-11 Yaron; Ran Rotary valve having a fluid bearing
EP0862030A4 (en) * 1996-09-13 1999-09-29 Daikin Ind Ltd CRYOGENIC REFRIGERATOR AND CONTROL METHOD THEREOF
US6038866A (en) * 1996-09-13 2000-03-21 Daikin Industries, Ltd. Cryogenic refrigerating machine and control method therefor
US6378312B1 (en) * 2000-05-25 2002-04-30 Cryomech Inc. Pulse-tube cryorefrigeration apparatus using an integrated buffer volume
US6694749B2 (en) * 2001-10-19 2004-02-24 Oxford Magnet Technology Ltd. Rotary valve
US20070119188A1 (en) * 2004-01-20 2007-05-31 Mingyao Xu Reduced torque valve for cryogenic refrigerator
US7654096B2 (en) 2004-01-20 2010-02-02 Sumitomo Heavy Industries, Ltd. Reduced torque valve for cryogenic refrigerator
JP2007522431A (ja) * 2004-02-11 2007-08-09 住友重機械工業株式会社 極低温冷凍機用３トラック式バルブ
JP4884986B2 (ja) * 2004-02-11 2012-02-29 住友重機械工業株式会社 極低温冷凍機用３トラック式バルブ
US20070119189A1 (en) * 2004-02-11 2007-05-31 Gao Jin L Three track valve for cryogenic refrigerator
US7549295B2 (en) 2004-02-11 2009-06-23 Sumitomo Heavy Industries, Ltd. Three track valve for cryogenic refrigerator
US7631505B2 (en) 2004-03-08 2009-12-15 Sumitomo Heavy Industries, Ltd. Wearless valve for cryorefrigerator
US20070107442A1 (en) * 2004-03-08 2007-05-17 Eric Seitz Wearless valve for cryorefrigerator
JP2007527985A (ja) * 2004-03-08 2007-10-04 住友重機械工業株式会社 極低温冷凍機用磨耗のないバルブ
US20080295525A1 (en) * 2005-06-10 2008-12-04 Mingyao Xu Multiple rotary valve for pulse tube refrigerator
US20080245077A1 (en) * 2005-06-10 2008-10-09 Sumitomo Heavy Industries, Ltd. Multiple Rotary Valve For Pulse Tube Refrigerator
JP2008544199A (ja) * 2005-06-10 2008-12-04 住友重機械工業株式会社 パルスチューブ冷凍機用マルチプルロータリバルブ
CN102844634B (zh) * 2010-04-19 2015-08-26 住友重机械工业株式会社 回转阀及使用该回转阀的超低温制冷机
CN102844634A (zh) * 2010-04-19 2012-12-26 住友重机械工业株式会社 回转阀及使用该回转阀的超低温制冷机
US20130025297A1 (en) * 2010-04-19 2013-01-31 Sumitomo Heavy Industries, Ltd Rotary valve and cryogenic refrigerator using same
US20120047913A1 (en) * 2010-08-31 2012-03-01 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
US20120317994A1 (en) * 2011-06-14 2012-12-20 Sumitomo Heavy Industries, Ltd. Regenerative type refrigerator
US20150068221A1 (en) * 2013-09-10 2015-03-12 Sumitomo Heavy Industries, Ltd Cryogenic refrigerator
US9791178B2 (en) * 2013-09-10 2017-10-17 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
US10345013B2 (en) 2016-03-16 2019-07-09 Sumitomo Heavy Industries, Ltd. Cryocooler and rotary valve mechanism
US10551093B2 (en) 2016-03-16 2020-02-04 Sumitomo Heavy Industries, Ltd. Cryocooler and rotary valve mechanism
WO2019199591A1 (en) 2018-04-09 2019-10-17 Brooks Automation, Inc. Pneumatic drive cryocooler
US11209193B2 (en) 2018-04-09 2021-12-28 Edwards Vacuum Llc Pneumatic drive cryocooler
US11732931B2 (en) 2018-04-09 2023-08-22 Edwards Vacuum Llc Pneumatic drive cryocooler

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Publication number Publication date
DE2110160A1 (de) 1971-10-21
JPS5428623B1 (da) 1979-09-18
GB1334625A (en) 1973-10-24

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