US3748055A - Rotor and stator wheel construction for a turbo molecular pump - Google Patents

Rotor and stator wheel construction for a turbo molecular pump Download PDF

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Publication number
US3748055A
US3748055A US00161662A US3748055DA US3748055A US 3748055 A US3748055 A US 3748055A US 00161662 A US00161662 A US 00161662A US 3748055D A US3748055D A US 3748055DA US 3748055 A US3748055 A US 3748055A
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United States
Prior art keywords
wheel
blades
wheels
molecular pump
carrier body
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Expired - Lifetime
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US00161662A
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English (en)
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W Becker
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Definitions

  • ABSTRACT v V A turbo molecular pump is provided with rotor and sta- 521 U.S. c1. 415 90, 415 199 R, 416/237 M wheels containing thin'iwalled blades e having 51 1111.01. F0ld 1/26 the Same thickness with the blades extending radially 5s Fieldol search...;.....;....; 415/90, 199; outwardly from a carrier y which can be either n 416/237, 223 or disc shaped.
  • Each blade is shaped so that the .acute 1 angle formed between the tangential plane at any given 5 References Cited point on its surface spaced from the axis of the wheel UNITED STATES PATENTS and the plane of the wheel decreases as the distance of 1-767 786 6/1930 Engmand 416/237 the point increases from the axis of the wheel. 2,011,672 8/1935 I Barker 416/237 11 Claims, 7 Drawing Figures Patented July 24, 1973 2 Sheets-Sheet l Patented July 24, 1973 3,748,055
  • the inclined channels are formed by milling the blades in a solid disc.
  • the channels and the vanes or blades which bound the channels have substantially the same dimensions, that is only half of the area of the ring of blades is passable in the axial direction.
  • the wheels are formed from thin planar sheet metal sections by punching out the blades and turning the blades out of the plane of the sheet metal section. In this arrangement the ring of blades is passable over almost its full area due to the narrow thickness of the sheet metal section.
  • the ring of blades is formed of individual blades or vanes inserted into and fixed in rings.
  • turbo molecular pump The characteristics of a turbo molecular pump are determined by its pumping speed and pressure ratio, that is the ratio of the pressures at its inlet and outlet. Both of these characteristics depend largely on the circumferential velocity of the ring of blades and, accordingly, on the velocity of the rotors, Consequently, the circumferential velocity and the rotational speed of the pump shaft are chosen as high as possible based on the strength properties-of the rotor wheels.
  • a turbo molecular pump having rotor and stator wheels formed of a carrier body with thin-walled blades of uniform thickness, and the acute angle included between the tangential plane at any given point on the surfaces of the blades spaced from the wheel axis and the plane of the wheel decreases as the distance of the given point increases from the wheel axis.
  • a/tan a d/sin a 2 1r r/z wherein a is the dimension of the blades forming the ring in the axial direction of the wheel, d is the thickness dimension of the blades, r is the distance from the axis of the wheel to the given point on the surface of the blade, 2 is the number of blades in the ring of blades, and a is the acute angle formed between the tangential plane at the given point and the plane of the wheel-
  • the centrifrugal forces for the thin sheet metal blade type of wheels as described above is about 150 percent while for the rotor wheels formed in accordance with the present invention the centrifugal force amounts to only about -60 percent.
  • the stresses increase by the square of the circumferential velocity.
  • the pumping speed is similarly increased proportionately to the circumferential velocity, and, further, the pressure ratio increases in accordance with exponential function of the circumferential velocity. For achieving a certain pressure ratio of a turbo molecular pump it is possible to do so with a relatively lower number of pressure stages each of which consists of a rotor wheel and a stator wheel.
  • FIG 1 is a plan view of one embodiment of armor wheel or a stator wheel formed in accordance with the present invention
  • FIG. 2a is a developed portion of the ring of blades in FIG. 1 taken along the line B-B;
  • FIG. 2b is a developed portion of the ring of blades shown in FIG. 1 taken along a line at a distance r from the axis of the wheel; 1
  • FIG. 2c is a developed portion of the ring of blades in'FlG. 1 taken along the line AA;
  • FIG. 3 is another embodiment of the rotor wheel in accordance with the present invention with the upper part of the view looking downwardly at the top of the wheel and the lower part showing the wheel in section;
  • FIG. 4 is a partial axially extending view of a turbo molecular pump embodying rotor wheels formed in accordance with the present invention, which wheels volved.
  • the carrier body of the stator wheels has the same dimension in the axial direction as the blades forming the ring of blades about 7 the carrier body.
  • the rotor wheels constructed in acwith a plurality of blades 2 extending generally radially outwardly from the carrier body.
  • the blades have a thickness dimension d and the ring of blades has an axial dimension a.
  • the tangential plane T formed at this point or any given point on the blades includes an acute angle a with the plane of the wheel.
  • the angle a is dependent on the distance r of the given point from the wheel axis M.
  • z is the number of blades in the ring of blades on the wheel.
  • FIG. 3 another embodiment of a rotor wheel is shown formed in accordance with the present invention having an annularcarrier body 12 with a T-Shaped cross-section with the head of the T-Shaped crosssection located radially inwardly so that the radially inner portion of the carrier body has a greater thickness or dimension in the axial direction than the blades forming the wheel in combination with the carrier body.
  • FIG. 4 In FIG. 4a portion of the axial length of a turbo molecularpump is shown containing both the stator and rotor wheels located within an annular shaped housing 6.
  • the stator ,wheels areformed in accordance with the arrangement shown in FIG. 1 and the rotor wheels are formed in accordance with the arrangement as shown in FIG. 3.
  • the annular carrier bodies 12 of the rotor 'wheels are fixed on a shaft 3 extending centrally through the housing 6.
  • the rotorwheels and the shaft 3' combine to form the rotor of the turbo molecular pump.
  • One stator wheel is located between each pair of rotor wheels and each' stator wheel is held at its radi- In FIG.
  • FIG. 5 another arrangement of aturbo molecular pump is illustrated containing stator wheels formedin accordance with FIG. 1 and rotor wheels having a different form of carrier body.
  • the carrier body of the rotor wheels is a solid disc 7.'On one of the surfaces of the disc-shaped carrier body 7 which extends transversely of the axis of the pump a recess 8 is formed and on the opposite transverse surface a projection 9 is formed.
  • the recesses 8 and projections 9 are shaped so that the projection of one carrier body fits into the recess on the adjacent carrier body so that the rotor wheels are aligned in a group.
  • Each of the carrier bodies 7 contains a number of boi'es which are aligned with the bores in the other carrier bodies so that tension rods 10 extend through them for securing the individual rotor wheels together.
  • the stator wheels are constructed in substantially the same manner as the rotor wheels, however, the carrier body 1 for the stator wheels does not have to be as strongly constructed as v in the'rotor wheels since no centrifugal forces are incordance with the invention, as shown in FIGS. 1, 3 or 5, can be assembled with stator wheels also formed in accordance with the invention, as shown in FIG. 1, or the rotor wheels may be combined with conventional stator wheels in the assembly of a turbo molecular pump.
  • a is the'dirnension of said blade in the axial direction of said wheel
  • d is the thickness dimension of said blades
  • r is the distance from the axis of said wheel to the given point on the surface of said blade
  • z is the number of said blades on said wheel
  • a is the acute angle formed between the tangential plane at the given point and the plane of the wheel.
  • Turbo molecular pump asset forth in claim 1, characterized in that said carrier body has an annular shape.
  • Turbo molecular pump as set forth in claim 2, characterized in that at least a portion of said carrier body in the axial direction of said wheel has a larger dimension than said blades in the same axial direction:
  • Turbo molecular pump as set forth in claim 3, characterized in that said carrier body is T-shaped in radial cross section andthe head of its T-shaped sectio is located radially inwardly from the stem.
  • Turbo molecular pump as set forth in claim 3, characterized in that said blades extend outwardly from the radially outer surface of said carrier body at a position thereon spaced axially from its axial end surfaces.
  • Turbo molecular pump as set forth in claim 1, characterized in that carrier body has a solid discshape.
  • Turbo molecular pump as set forth in claim 6, characterized in that at least a portion of said carrier body in the axial directionofsaid wheel has a larger dimension than said blades in the same axial direction.
  • Turbo molecular pump as set forth in claim 3, characterized in that an annular shaped housing extends in the axial direction of and encloses said wheels, an axially extending shaft positioned centrally within said housing, a plurality of said rotor wheels having carrier bodies which in the axial direction of said wheel have a larger dimension for at least a portion thereof than the axial dimension'of said blades and said rotor wheels mounted on said shaft, one said stator wheel positioned between each adjacent pair of said rotor wheels, and means for'securing said stator wheels in cess on one surface transverse to the axial direction and a projection shaped to fit into the recess in another said carrier body in the oppositely disposed transverse surface so that said rotor wheels can be nested together within said housing, each said disc-shaped carrier body having bores formed therethrough with the bores in said carrier bodies being disposed in axial alignment, and rods extending through said bores for securing said rotor wheels together.
  • Turbo molecular pump as set forth in claim 10, characterized in that one said stator wheel being positioned between each pair of said rotor wheels in said housing, and said stator wheels being secured within said housing with the radially inner surfaces thereof being in' spaced relationship from said rotor wheels.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US00161662A 1970-07-15 1971-07-12 Rotor and stator wheel construction for a turbo molecular pump Expired - Lifetime US3748055A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2035063A DE2035063C3 (de) 1970-07-15 1970-07-15 Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
US3748055A true US3748055A (en) 1973-07-24

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ID=5776829

Family Applications (1)

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US00161662A Expired - Lifetime US3748055A (en) 1970-07-15 1971-07-12 Rotor and stator wheel construction for a turbo molecular pump

Country Status (10)

Country Link
US (1) US3748055A (fr)
JP (1) JPS5224683B1 (fr)
BE (1) BE769932A (fr)
CA (1) CA950872A (fr)
CH (1) CH529927A (fr)
DE (1) DE2035063C3 (fr)
FR (1) FR2097945A5 (fr)
GB (1) GB1308263A (fr)
NL (1) NL157387B (fr)
SE (1) SE371867B (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3826588A (en) * 1972-06-19 1974-07-30 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
US4111595A (en) * 1975-12-06 1978-09-05 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Turbomolecular pump with magnetic mounting
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
EP1201928A3 (fr) * 2000-10-24 2003-04-16 Pfeiffer Vacuum GmbH Disques pour pompe turbomoléculaire
US6676368B2 (en) * 2001-03-15 2004-01-13 Varian S.P.A. Turbine pump with a stator stage integrated with a spacer ring
WO2016037452A1 (fr) * 2014-09-11 2016-03-17 摩尔动力(北京)技术股份有限公司 Mécanisme d'hélice contre-rotative et son dispositif
EP3734078A3 (fr) * 2020-03-05 2020-12-23 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
DE10203648B4 (de) * 2001-02-10 2016-05-25 Pfeiffer Vacuum Gmbh Rotor-und Statorscheiben für eine Turbomolekularpumpe
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
CN205189965U (zh) * 2014-09-29 2016-04-27 摩尔动力(北京)技术股份有限公司 压胀一体对转叶轮机构

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (fr) *
FR519759A (fr) * 1919-12-24 1921-06-15 Anciens Ets Sautter Harle Hélice à aile métallique
US1767786A (en) * 1927-05-06 1930-06-24 William Braat Propeller
US2011672A (en) * 1933-06-07 1935-08-20 Barker Auriol Screw propeller
US2500071A (en) * 1948-03-12 1950-03-07 Edmund E Hans Fan
US3477381A (en) * 1966-12-30 1969-11-11 Pfeiffer Vakuumtechnik Turbo-molecular pump
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (fr) *
FR519759A (fr) * 1919-12-24 1921-06-15 Anciens Ets Sautter Harle Hélice à aile métallique
US1767786A (en) * 1927-05-06 1930-06-24 William Braat Propeller
US2011672A (en) * 1933-06-07 1935-08-20 Barker Auriol Screw propeller
US2500071A (en) * 1948-03-12 1950-03-07 Edmund E Hans Fan
US3477381A (en) * 1966-12-30 1969-11-11 Pfeiffer Vakuumtechnik Turbo-molecular pump
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3826588A (en) * 1972-06-19 1974-07-30 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
US4111595A (en) * 1975-12-06 1978-09-05 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Turbomolecular pump with magnetic mounting
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
EP1201928A3 (fr) * 2000-10-24 2003-04-16 Pfeiffer Vacuum GmbH Disques pour pompe turbomoléculaire
US6676368B2 (en) * 2001-03-15 2004-01-13 Varian S.P.A. Turbine pump with a stator stage integrated with a spacer ring
WO2016037452A1 (fr) * 2014-09-11 2016-03-17 摩尔动力(北京)技术股份有限公司 Mécanisme d'hélice contre-rotative et son dispositif
EP3734078A3 (fr) * 2020-03-05 2020-12-23 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Also Published As

Publication number Publication date
NL157387B (nl) 1978-07-17
DE2035063B2 (de) 1973-10-31
GB1308263A (en) 1973-02-21
CH529927A (de) 1972-10-31
JPS5224683B1 (fr) 1977-07-02
BE769932A (fr) 1971-11-16
NL7109533A (fr) 1972-01-18
FR2097945A5 (fr) 1972-03-03
CA950872A (en) 1974-07-09
SE371867B (fr) 1974-12-02
DE2035063A1 (de) 1972-01-20
DE2035063C3 (de) 1974-05-30

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