US4984467A - Transducer for pressures and/or vibrations and method for manufacturing thereof - Google Patents

Transducer for pressures and/or vibrations and method for manufacturing thereof Download PDF

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Publication number
US4984467A
US4984467A US07/322,142 US32214289A US4984467A US 4984467 A US4984467 A US 4984467A US 32214289 A US32214289 A US 32214289A US 4984467 A US4984467 A US 4984467A
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United States
Prior art keywords
pressure transducer
transducer
bodies
diaphragm
end surface
Prior art date
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Expired - Fee Related
Application number
US07/322,142
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English (en)
Inventor
Hans W. Haefner
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Pfister GmbH
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Pfister GmbH
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Filing date
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Priority claimed from DE19883808605 external-priority patent/DE3808605A1/de
Priority claimed from DE19883814717 external-priority patent/DE3814717A1/de
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Assigned to PFISTER GMBH reassignment PFISTER GMBH ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: HAEFNER, HANS W.
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G15/00—Resilient suspensions characterised by arrangement, location or type of combined spring and vibration damper, e.g. telescopic type
    • B60G15/02—Resilient suspensions characterised by arrangement, location or type of combined spring and vibration damper, e.g. telescopic type having mechanical spring
    • B60G15/06—Resilient suspensions characterised by arrangement, location or type of combined spring and vibration damper, e.g. telescopic type having mechanical spring and fluid damper
    • B60G15/067—Resilient suspensions characterised by arrangement, location or type of combined spring and vibration damper, e.g. telescopic type having mechanical spring and fluid damper characterised by the mounting on the vehicle body or chassis of the spring and damper unit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0083—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/122—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by metal resistance strain gauges, e.g. wire resistance strain gauges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2202/00—Indexing codes relating to the type of spring, damper or actuator
    • B60G2202/30—Spring/Damper and/or actuator Units
    • B60G2202/31—Spring/Damper and/or actuator Units with the spring arranged around the damper, e.g. MacPherson strut
    • B60G2202/312—The spring being a wound spring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2204/00—Indexing codes related to suspensions per se or to auxiliary parts
    • B60G2204/10—Mounting of suspension elements
    • B60G2204/11—Mounting of sensors thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2204/00—Indexing codes related to suspensions per se or to auxiliary parts
    • B60G2204/10—Mounting of suspension elements
    • B60G2204/11—Mounting of sensors thereon
    • B60G2204/112—Mounting of sensors thereon on dampers, e.g. fluid dampers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2204/00—Indexing codes related to suspensions per se or to auxiliary parts
    • B60G2204/10—Mounting of suspension elements
    • B60G2204/12—Mounting of springs or dampers
    • B60G2204/128—Damper mount on vehicle body or chassis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2400/00—Indexing codes relating to detected, measured or calculated conditions or factors
    • B60G2400/60—Load

Definitions

  • the invention relates to a transducer for picking-up pressures, vibrations and/or accelerations and converting them into electrical signals.
  • the U.S. Pat. No. 4,311,980 discloses a pressure transducer and a method for making it.
  • a plurality of thickfilm resistors are screen-printed onto a deformable substrate specifically a circular diaphragm formed of ceramic material and clamped along its periphery.
  • the resistors are circuit-connected to a Wheatstone bridge for measuring pressure or forces applied to the diaphragm.
  • One problem of this known transducer is the assembly and safe securement of the diaphragm in mass production.
  • the thickfilm resistors are subject to exterior influences leading to considerable deterioration. In many cases specific measures are required for securing the known transducer in a fixed position. Even then it is almost impossible to avoid a distortion of the diaphragm resulting in considerable non-linearities of the measurement.
  • the German Patent Publication No. 12 99 441 shows a flat pressure transducer including two opposing plates maintained in spaced relationship by a rectangular frame. At least one of the opposing inner surfaces of the two plates is provided with a strain gauge.
  • German Patent No. 11 25 205 discloses a pressure transducer using a measuring member projecting with air-tight sealing from a housing. For compensating the influence of the atmospheric pressure the measuring member is set under atmospheric pressure from the opposite side of the projection.
  • the German Laid Open Publication No. 36 31 651 discloses an acceleration or vibration transducer using a circular diaphragm peripherally clamped between two rigid parts forming an air-tight cavity. At a central position the diaphragm is provided with a mass element such that upon application of an acceleration or vibration onto the unit the diaphragm is bent in the one or other direction resulting in a change of resistance of thickfilm resistors applied to one surface of the diaphragm by screen printing.
  • a canty-lever type of acceleration or vibration transducer having the free end thereof provided with a mass element and one surface provided with a thickfilm resistor circuitry.
  • German Laid Open Publication No. 33 10 538 discloses a pressure transducer similar to that of the U.S. Pat. No. 4,311,980, however, with a rectangular shape of the diaphragm and the clamping elements.
  • a transducer for picking-up pressures comprising a rigid body formed of non-creeping material with a ringlike shape and having a central opening, and a radially extending plane end surface; a diaphragm unitary with said rigid body and covering said opening at an end surface opposite to said plane end surface; and thickfilm resistor means applied to at least one of two main surfaces of said diaphragm.
  • a method for manufacturing transducers comprising the steps forming a rigid body of non-creeping material with a ring-like shape, a radially extending plane end surface and a central opening covered by a unitary diaphragm at an end surface opposite to said plane end surface; applying a pattern of thickfilm resistor means to at least one of two main surfaces of said diaphragm; and burning of the so formed transducer.
  • FIG. 1a and 1b are elevational views in vertical section of a first embodiment of the invention in two production steps according to the method of the invention
  • FIG. 2 is a schematic plan view onto the transducer of FIG. 1a
  • FIG. 3 is a plan view of the transducer according to FIG. 1a with removed upper part
  • FIG. 4 is an elevational view in vertical section of a force measuring device using a transducer according to the invention
  • FIG. 5 is a view similar to that of FIG. 1a of a transducer having an symmetrical expansion
  • FIG. 6 is an elevational view in cross-section of a pressure measuring device using a transducer modified in respect of that of FIG. 1a;
  • FIG. 7 is a view similar to that of FIG. 6 of a further pressure measuring device using a transducer according to the invention.
  • FIG. 8 is an elevational view in vertical section of a wheel load sensor for vehicles or planes using a transducer of the embodiments;
  • FIG. 9 is elevational view in vertical section of a combined pressure and vibration transducer according to the invention.
  • FIG. 10 is a plan view of the transducer of FIG. 9 with the upper part removed.
  • FIG. 1a illustrates a first embodiment of a pressure transducer of the invention using two pressure transducer elements 10 connected with each other in symmetrical opposition.
  • Each pressure transducer element 10 comprises a ring or frame 14 whose central opening 18 is closed at the exterior surface by a diaphragm 16 having a thickness which is small as compared with that of the frame 14.
  • the frame 14 and the diaphragm 16 are preferably unitary formed of ceramic material (or another noncreeping high-temperature resistive material). The simple shape enables mass production with a simple tool.
  • a well-known Wheatstone bridge formed of thickfilm resistors 22 are applied to one or both main surfaces, preferably the outer surface of the diaphragm 16 by screen printing or any other known thick film coating method, e.g. a thickfilm plotter.
  • this Wheatstone bridge is generally marked with the reference numeral 12.
  • the terminals of the thickfilm resistors 22 are connected by means of printed circuits 23 to ports 24 provided for connection to appropriate external connections as 26.
  • the thickfilm layers include as conductive components noble metals, oxides thereof or similar components intermixed in a glass frit selected of the group of bore silicates, aluminium silicates or lead silicates.
  • This material composition is applied as a glass frit in a molten condition by means of screen printing or a thick film plotter in the form of a pen to the diaphragm 16.
  • a thick film plotter in the form of a pen to the diaphragm 16.
  • a single pressure transducer element 10 may be used as an independent pressure transducer with the advantage of a simple mass production of the unitary element. It should be noted, that with this embodiment the opening 18 has a rectangular, in particular squarelike shape giving the diaphragm 16 a higher sensitivity.
  • the thickfilm resistors 22 upon application onto the outer surface of the diaphragm 16 may be covered by a protective coating 17 formed of glass or similar material in a molten form improving the stability of the device and offering protection against exterior deterioration (see FIG. 1b).
  • a particularly preferred embodiment results in connecting two preferably identical pressure transducer elements 10 in opposition to each other (FIGS. 1a and 1b) the end surfaces of the frames 14 of the two elements 10 being molten together by means of glass frit 15.
  • bonding by adhesive may be used.
  • the cavity formed by the openings 18 may be connected to the atmosphere by means of a passage 13 in case that the pressure is measured in relation to the atmospheric pressure.
  • the cavity may be evacuated or filled with gas with the passage 13 sealed thereafter.
  • the passage 13 results from forming it radially during application of the glass frit 15. Therefore, it is no more necessary to provide a bore into the glass body or the diaphragm.
  • FIG. 3 clearly shows the passage 13.
  • melting the two pressure transducer elements 10 together may be performed simultaneously with the application of the protective glass layer 17 followed by one burning process step.
  • the pressure transducer may be arranged buoyant in liquid or elastomeric material without any complicated fixings.
  • the connectors 26 (FIG. 2) or very simple support elements are sufficient to maintain the pressure tansducer in position. This ensures that the inherent distorsional strains of the diaphragm are totally avoided.
  • a compensation of non-linearities may be achieved by arranging two or more pressure transducer elements 10 not in opposition, but in series with each other. Application of pressure results in a tension or strain of the thickfilm resistors of one diaphragm and in a compression of the thickfilm resistors of the other diaphragm. By appropriate connection of the resistors non-linearities may be reduced considerably. Again either the resistors of the individual diaphragms may be connected to a Wheatstone bridge or part of the resistors of one diaphragm may be connected with part of the resistors of the other diaphragm.
  • FIG. 5 illustrates a further embodiment of the invention using pairs of pressure transducer elements arranged beside each other.
  • the pairs may be arranged in opposition as shown in FIG. 5 or in series as just explained above.
  • FIG. 5 With the embodiment of FIG. 5 expanded as compared with that of FIG. 1a an additional symmetry may be achieved.
  • a pressure transducer 30 according to this embodiment beside a pressure transducer unit 31 a cell 32 of similar structure is formed including a diaphragm 37 supporting an integrated circuit 38 connected through leads 36 with thickfilm resistors 22 of the pressure transducer unit 31.
  • Output conductors 40 transmit signals already processed in the integrated circuit 38.
  • connecting of the two halves of pressure transducer elements is achieved by glass frit 42 leaving radial passages 13 and 25, respectively, for the two cavities 34 and 44, respectively.
  • the symmetric design of the pressure transducer according to FIG. 5 results in a further improvement of the linearity of response and a particular simple possibility to arrange processing circuitry as close as possible to the pressure transducer.
  • thickfilm resistors included in the integrated circuit 38 provided on the diaphragm 37 are subject to strains and compressions.
  • the integrated circuitry 38 may be housed in the cavities 34 and 44, respectively
  • the thickfilm resistors may be applied to the interior surface of the associated diaphragm. It is important that by the multiplicity of pressure transducer pairs a signal with multiple amplitude may be derived enhancing processing and increasing the accuracy of measurement. Furthermore, hysteresis effects are reduced considerably.
  • FIG. 4 shows an example how a pressure transducer according to the invention may advantageously be used incorporated into an elastic joint between two concentric tubelike parts which arrangement may serve as a force measuring cell 110.
  • an inner tubelike parts 112 having its exterior diameter increased along a predetermined region such that there is formed a circumferential, preferably inclined step 114.
  • the inner part 112 is surrounded by an outer part 116 provided with a central passage 115 and having contours complementary to the exterior peripheral surface of the inner part 112 leaving a narrow circular gap 118 filled with preferably bubble-free elastomeric material.
  • the circular gap is somewhat expanded resulting in a conical space 120 filled with elastomeric material as well, having embedded therein at least one pressure transducer 130.
  • pressure transducers 130 may be peripherally distributed in the space 120 embedded in the elastomeric material.
  • the pressure transducer 130 are connected by means of electrical leads, f.i. passed through the interior of the inner part 112 or wireless with an appropriate evaluation device.
  • the narrow gap 118 may be sealed at the opposite ends of the inner and outer part 112, 116 by means of annular sealings 126 and 128, respectively.
  • FIGS. 6 and 7 illustrate two embodiments using single pressure transducer elements as explained in detail in connection with FIGS. 1a and 1b.
  • FIG. 6 shows a pressure transducer element 60 corresponding to the pressure element 10 of FIGS. 1a and 1b and being secured with its ring end surface on the plate 61 in a sealed manner, in particular molten thereon by means of a glass frit or bonded thereto.
  • the plate 61 is, for example, supported between two elements 62 and 63 which may be formed tube- or ringlike and may be screwed together ensuring a sealed support of the plate 61 between the elements 62 and 63.
  • the pressure acting in the interior of element 62 is transmitted to the diaphragm 16 and the thickfilm resistors 22 as explained in connection with FIG. 1a.
  • the diaphragm 16 is bent through correspondingly and the change in resistance of the thickfilm resistors 22 is a measure for the pressure acting in the interior of the element 62.
  • a space 64 below the diaphragm 16 and formed by the ring 14 may be connected with the atmosphere by means of a passage 65 formed through the plate 61 for relative pressure measurement.
  • the thickfilm resistors 22 are connected to an appropriate well-known evaluation device through a corresponding conductor 66 passed insolated through the plate 61.
  • a pressure transducer element 80 is supported by a plate 81 in a reversed position as compared with the pressure transducer element 60 of FIG. 6.
  • the plate 81 is provided with central opening 85 and is clamped between elements 82 and 83.
  • FIGS. 6 and 7 have the advantage that a very simple pressure transducer element may be secured in an extremely simple manner. Furthermore, since the end face of each ring of frame 14 is fixedly connected over a large area with the surface of the plate 61 and 81, respectively, twisting of the ring or frame 14 upon pressure application to the diaphragm of the pressure transducer element 60 or 80, respectively, is avoided or at least considerably reduced.
  • FIG. 8 shows a practical embodiment of the use of a pressure transducer 221 according to the invention in an elastic connection or joint between a spring strut 210 and the body 200 of a vehicle such that the pressure transducer 221 acts as a wheel load sensor.
  • This wheel load sensor includes an elastic unit generally marked with the reference numeral 203 having a preferably cylindrical exterior wall 224 surrounding elastomeric material (for example rubber) and having a radial expansion in the form of a rim 237.
  • the elastic unit 203 is surrounded by a housing 222 having a shape essentially complementary to the contours of the outer wall 224.
  • a relatively narrow gap is provided along an essential part of the peripheral surface and one or possibly several pockets 238 are formed peripherally in the region of the rim 237 only.
  • elastomeric material 223 is provided in which practically buoyant or only supported by electrical leads one or several pressure transducers 221 are embedded.
  • the housing 222 is connected to the body 200 of the vehicle for example by means of screws 226.
  • a strut 210 supported by the wheels is surrounded usually by spring 229 supporting on a spring disk 228 abutting at a stop 257 of the strut 210.
  • a ball bearing 227 insures rotational movability between the strut and the force measuring device.
  • this particularly preferred embodiment of a wheel load sensor is a very compact design due to the interlacing of the elastic unit with the housing 222 and due to the buoyant arrangement of the pressure transducer(s) 221.
  • the integrated design of the overall arrangement results in an optimum construction without any specific securing of the pressure transducer with the considerable advantages explained above due to the buoyant arrangement of the pressure transducer.
  • the last embodiment illustrates the variety of applications for the pressure transducer according to the invention with the advantage of an extremely cost effective design and assembly, the compact construction and the high accuracy.
  • FIG. 9 shows a further embodiment of the invention of a unitary transducer both for pressure measurement and for measuring centrifugal forces, accelerations or vibrations.
  • this transducer uses two pressure transducer elements 10 molten together in opposition each comprising a diaphragm 16 having screen-printed thereon thickfilm resistors forming a Wheatstone bridge 12.
  • this vibration sensor may comprise of resilient sheet material 35 preferably formed of steel with a shape adapted to that of the pressure transducer elements 10.
  • the central region of the sheet material 35 corresponding to the cavity 30 is partially punched out leaving a tongue 28 forming a type of canty-lever with the free end thereof being provided with a mass element 27.
  • One or both surfaces of the tongue 28 are provided with thickfilm resistors 122, 124 again forming a Wheatstone bridge for converting any bending of the tongue 28 in view of forces or vibrations acting upon the transducer into electrical signals.
  • These signals are transmitted through printed circuit connections 32 to ports 36 for connection to an appropriate evaluation apparatus for the signals derived from the vibration sensor 20.
  • the vibration sensor 20 may be easily incorporated into the transducer during production. It is just inserted between the two pressure transducer elements 10 and molten together therewith by glass frit 15. Again, a radial passage 13 may connect the cavity 230 with the atmosphere or be used for evacuation offering with gas.
  • the transducer of this embodiment combines in a very simple way the measurement of pressures and momentary forces as centrifugal forces, accelerations, decelerations and/or vibrations acting upon the transducer.
  • Such a combined unitary transducer for picking-up both pressures and centrifugal forces or vibrations may be conveniently used instead of the pressure transducer 221 in a strut constuction of a vehicle according to FIG. 8.
  • the pressure transducer 221 may be randomly positioned in the space 223 the combined unitary transducer should be positioned such that centrifugal forces, accelerations or vibrations act upon the transducer in a direction normal to the main surface of the tongue 28.
  • any acceleration or deceleration may be determined by the transducer.
  • the main surface of the tongue 28 faces a direction lateral to the forward movement of the vehicle any centrifugal forces acting upon the vehicle may be determined.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
US07/322,142 1988-03-15 1989-03-13 Transducer for pressures and/or vibrations and method for manufacturing thereof Expired - Fee Related US4984467A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE3808605 1988-03-15
DE19883808605 DE3808605A1 (de) 1988-03-15 1988-03-15 Druckaufnehmer
DE19883814717 DE3814717A1 (de) 1988-04-30 1988-04-30 Einrichtung zum feststellen von schwingungen
DE3814717 1988-04-30

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US4984467A true US4984467A (en) 1991-01-15

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US (1) US4984467A (fr)
EP (1) EP0333091B1 (fr)
DE (1) DE68903235T2 (fr)

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US5291795A (en) * 1991-01-31 1994-03-08 Pfister Messtechnik Gmbh Transmission element for force or moment measuring devices
US5353644A (en) * 1992-09-03 1994-10-11 Robert Bosch Gmbh Method and system for evaluating a signal from a vibrationally-sensitive pressure sensor in a motor vehicle
WO1997032190A1 (fr) * 1996-02-27 1997-09-04 Nyfotek A/S Capteur de pression
WO1997032320A1 (fr) * 1996-02-28 1997-09-04 Sigma-Netics, Inc. Jauge de contrainte amelioree et son procede de fabrication
US5744727A (en) * 1994-03-07 1998-04-28 Sinvent A/S Pressure gauge
US6247364B1 (en) 1997-10-27 2001-06-19 Thomas P. Kicher & Co. Acceleration transducer and method
WO2003014690A1 (fr) * 2001-07-13 2003-02-20 Presens As Capteur de pression
US20030154765A1 (en) * 1999-12-15 2003-08-21 Hartmut Brammer Vibration pickup comprising a pressure sleeve
US6752908B2 (en) 2001-06-01 2004-06-22 Stowe Woodward, Llc Shoe press belt with system for detecting operational parameters
US20040219346A1 (en) * 2002-05-14 2004-11-04 Eric Gustafson Belt for shoe press and shoe calender and method for forming same
US20040234716A1 (en) * 2003-05-21 2004-11-25 Madden Michael D. Method for forming endless belt
US20050278089A1 (en) * 2004-06-15 2005-12-15 Lueschow Kevin J Method for indicating a faulty strut and vehicle using same
US20090320606A1 (en) * 2008-06-27 2009-12-31 Edwin Carlen Accessible stress-based electrostatic monitoring of chemical reactions and binding
US8429976B2 (en) 2010-05-19 2013-04-30 Schlumberger Technology Corporation Low cost resonator-based pressure transducer
CN104458076A (zh) * 2014-11-26 2015-03-25 西安交通大学 一种具有高过载低加速度干扰的微压力传感器
US9038263B2 (en) 2011-01-13 2015-05-26 Delaware Capital Formation, Inc. Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
US20150192487A1 (en) * 2014-01-08 2015-07-09 General Electric Company Low pressure sensors and flow sensors
US20150276533A1 (en) * 2014-01-08 2015-10-01 Amphenol Thermometrics, Inc. Low Pressure Sensor and Flow Sensor
WO2016072843A1 (fr) * 2014-11-05 2016-05-12 Eminent Products B.V. Suspension de roue, procédé pour déterminer une quantité mécanique dans une suspension de roue et véhicule comprenant une telle suspension de roue
NL1041034B1 (nl) * 2014-10-29 2016-09-01 Eminent Products B V Wielophanging, werkwijze voor het bepalen van een mechanische grootheid in een wielophanging, tevens voertuig omvattende zo een wielophanging.
EP2158586A4 (fr) * 2007-06-01 2017-01-18 Axsensor AB Dispositif transducteur piézoélectrique

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Publication number Priority date Publication date Assignee Title
FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
DE4018638A1 (de) * 1990-06-11 1991-12-12 Schoppe & Faeser Gmbh Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik
JP3114006B2 (ja) * 1994-08-29 2000-12-04 セイコーインスツルメンツ株式会社 半導体装置、及び、その製造方法
DE19547472A1 (de) * 1995-12-19 1997-06-26 Pfister Mestechnik Gmbh Kraftmeßvorrichtung
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US6807863B2 (en) * 1999-12-15 2004-10-26 Robert Bosch Gmbh Vibration pickup comprising a pressure sleeve
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US6752908B2 (en) 2001-06-01 2004-06-22 Stowe Woodward, Llc Shoe press belt with system for detecting operational parameters
US20040159160A1 (en) * 2001-07-13 2004-08-19 Seeberg Bjorn Erik Pressure sensor
US6966229B2 (en) 2001-07-13 2005-11-22 Presens As Pressure sensor
WO2003014690A1 (fr) * 2001-07-13 2003-02-20 Presens As Capteur de pression
US7014733B2 (en) 2002-05-14 2006-03-21 Stowe Woodward L.L.C. Belt for shoe press and shoe calender and method for forming same
US20040219346A1 (en) * 2002-05-14 2004-11-04 Eric Gustafson Belt for shoe press and shoe calender and method for forming same
US20040234716A1 (en) * 2003-05-21 2004-11-25 Madden Michael D. Method for forming endless belt
US20050278089A1 (en) * 2004-06-15 2005-12-15 Lueschow Kevin J Method for indicating a faulty strut and vehicle using same
US7418331B2 (en) * 2004-06-15 2008-08-26 Caterpillar Inc. Method for indicating a faulty strut and vehicle using same
AU2005201653B2 (en) * 2004-06-15 2012-03-29 Caterpillar Inc. Method for indicating a faulty strut and vehicle using same
EP2158586A4 (fr) * 2007-06-01 2017-01-18 Axsensor AB Dispositif transducteur piézoélectrique
US20090320606A1 (en) * 2008-06-27 2009-12-31 Edwin Carlen Accessible stress-based electrostatic monitoring of chemical reactions and binding
US8181531B2 (en) * 2008-06-27 2012-05-22 Edwin Carlen Accessible stress-based electrostatic monitoring of chemical reactions and binding
US8429976B2 (en) 2010-05-19 2013-04-30 Schlumberger Technology Corporation Low cost resonator-based pressure transducer
US9038263B2 (en) 2011-01-13 2015-05-26 Delaware Capital Formation, Inc. Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
US10048146B2 (en) 2011-01-13 2018-08-14 Quartzdyne, Inc. Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
US20150192487A1 (en) * 2014-01-08 2015-07-09 General Electric Company Low pressure sensors and flow sensors
US20150276533A1 (en) * 2014-01-08 2015-10-01 Amphenol Thermometrics, Inc. Low Pressure Sensor and Flow Sensor
NL1041034B1 (nl) * 2014-10-29 2016-09-01 Eminent Products B V Wielophanging, werkwijze voor het bepalen van een mechanische grootheid in een wielophanging, tevens voertuig omvattende zo een wielophanging.
WO2016072843A1 (fr) * 2014-11-05 2016-05-12 Eminent Products B.V. Suspension de roue, procédé pour déterminer une quantité mécanique dans une suspension de roue et véhicule comprenant une telle suspension de roue
CN104458076B (zh) * 2014-11-26 2017-01-04 西安交通大学 一种具有高过载低加速度干扰的微压力传感器
CN104458076A (zh) * 2014-11-26 2015-03-25 西安交通大学 一种具有高过载低加速度干扰的微压力传感器

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DE68903235T2 (de) 1993-05-27
EP0333091A2 (fr) 1989-09-20
EP0333091B1 (fr) 1992-10-21
EP0333091A3 (fr) 1991-02-27
DE68903235D1 (de) 1992-11-26

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