US9453728B2 - Optical measurement system for determining distances - Google Patents

Optical measurement system for determining distances Download PDF

Info

Publication number
US9453728B2
US9453728B2 US13/818,274 US201113818274A US9453728B2 US 9453728 B2 US9453728 B2 US 9453728B2 US 201113818274 A US201113818274 A US 201113818274A US 9453728 B2 US9453728 B2 US 9453728B2
Authority
US
United States
Prior art keywords
measured object
light beam
measuring system
illumination light
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US13/818,274
Other languages
English (en)
Other versions
US20130148099A1 (en
Inventor
Torsten Stautmeister
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Optronic GmbH
Original Assignee
Micro Epsilon Optronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Optronic GmbH filed Critical Micro Epsilon Optronic GmbH
Assigned to MICRO-EPSILON OPTRONIC GMBH reassignment MICRO-EPSILON OPTRONIC GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: STAUTMEISTER, TORSTEN
Publication of US20130148099A1 publication Critical patent/US20130148099A1/en
Application granted granted Critical
Publication of US9453728B2 publication Critical patent/US9453728B2/en
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone

Definitions

  • the invention relates to a measuring system for determining a distance between a sensor device and a measured object, wherein the sensor device comprises a light source for generating an illumination light beam and a detector for detecting a portion of the illumination light beam reflected on the surface of the measured object and wherein the measured object is designed so it is transparent at least for a wavelength range of the visible light.
  • the invention also relates to a measuring system for determining a distance between a sensor device and a measured object, wherein the sensor device comprises a light source for generating an illumination light beam and a detector for detecting a portion of the illumination light beam reflected on the surface of the measured object and wherein the measured object is designed in such a way that visible light is reflected directly.
  • Optical measuring systems have wide-ranging applications in practice.
  • the contactless measurement that is precise and still fast opens up a number of application areas in which the distance between a measured object and a sensor device will be measured contactlessly or measure a measured object without wear.
  • One important application area is quality assurance, in which the quality of a workpiece is tested.
  • a measured object is illuminated with an illumination light beam—very frequently a red or infrared laser beam—and the portion of the illumination light beam reflected on the measured object is detected with a detector.
  • an illumination light beam very frequently a red or infrared laser beam—and the portion of the illumination light beam reflected on the measured object is detected with a detector.
  • Various methods are known from experience, according to which the distance of the measured object from the sensor device can be determined with such a sensor device. Reference is made to a triangulation measurement as an example.
  • transparent means that broad spectral portions of the visible light (wavelength range between 400 nm and 800 nm) can pass through the measured object. During the passage, the spectral portions are only attenuated to a slight extent.
  • Partially transparent means that at least one spectral portion of the visible light can pass through the measured object while another spectral portion of the visible light is absorbed or reflected completely or to an extent that is not inconsiderable.
  • an illumination light beam falls on measured objects of this type, it is reflected directly, i.e. the angle of incidence of the illumination light beam on the surface of the measured object is equal to the angle of reflection of the reflected illumination light beam. Scatter in other spatial directions practically does not exist. Because of this, sensor device and measured object must be aligned to each other optimally so that a measurement leads to results that are usable. If the surface of the measured object is tipped out of the optimal position only slightly, the illumination light beam is not reflected to the detector. The measuring process fails and is considerably unstable. An optimal alignment of the sensor device and of the measured object with respect to each other is practically impossible to ensure, especially in quality assurance in manufacturing environments. This alignment is practically impossible with curved or rounded measured objects. Similar problems occur with optical measurement on non-transparent measured objects that do not reflect light directly because of their surface finish. The problems are comparable here. As an example, reference is made to mirroring surfaces.
  • FIG. 1 shows an intensity distribution along a detector with the use of a red illumination light beam with a wavelength of 670 nm and
  • FIG. 2 shows an intensity distribution along a detector with the use of a violet illumination light beam with a wave length of 405 nm in a measuring system according to the invention.
  • a laser generates a focused laser beam which is deflected to a vehicle headlight glass—measuring object—from approx. 2 mm thick plastic-glass.
  • the laser beam is at least partially reflected on a surface of the measured object and goes through another lens, a wavelength-selective filter that is adapted to the wavelength of the illumination light beam and a shade for a line detector.
  • the sensor device performs a measurement according to the triangulation method.
  • the measured object is provided with a coating that is impermeable to ultraviolet light on the surface that is turned toward the sensor device.
  • FIG. 1 shows an intensity distribution with the use of a red laser with an emission wavelength of 670 nm according to the state of the art. For one thing, an optimal alignment of the measured object and the sensor device with respect to each other is necessary. For another, two pronounced main peaks are present in the intensity distribution.
  • the left peak in FIG. 1 originates from the reflection of the illumination light beam on the surface of the measured object, which is turned toward the sensor device. With the right peak, the illumination light beam penetrates into the measured object and is reflected at the surface of the measured object that is turned away from the sensor device. Because of this, the measurement is no longer unambiguous.
  • Another problem consists in that the right peak is higher than the left peak.
  • an evaluation of the intensity curve is performed based on the highest peak, erroneous distance values result. If the intensity of the illumination light beam and illumination time are regulated based on the highest peak, unstable measurements can even occur. Because of object tipping, the intensity of the first peak may be so low that it is no longer evaluated by the sensor device and thus an erroneous measurement occurs with respect to the reverse side of the measured object or to internal reflection points. The smaller peaks, which can be seen in the intensity distribution according to FIG. 1 , result from multiple reflections in the measured object.
  • FIG. 2 shows the use according to the invention of a violet laser with a wavelength of 405 nm. Because of the diffuse reflection on the surface of the measured object, the sensor device and the measured object can be positioned more freely. In addition, in the intensity distribution according to FIG. 2 , only one individual peak is expressed. A very small additional peak indicates that a small portion of the illumination light beam penetrates into the measured object and is reflected on the surface of the measured object that is turned away from the sensor device. However, the intensity is so low that the additional peak is of no consequence. Multiple reflections do not occur.
  • the present invention is based on the object of designing and further developing measuring systems of the type named at the beginning for transparent, partially transparent or non-transparent measured objects in such a way that a reliable optical distance measurement can be performed even on measured objects on the surface of which a direct reflection occurs.
  • the object above for measurement on transparent and semi-transparent measured objects is achieved by the characteristics of Claim 1 .
  • the measuring system being discussed is characterized in that the illumination light beam has a wavelength in the violet or ultraviolet range and that the measured object is designed in such a way that the illumination light beam is diffusely reflected on the surface of the measured object.
  • the object above is achieved using the characteristics of Claim 5 .
  • the measuring system being discussed is characterized in that the illumination light beam has a wavelength in the violet or ultraviolet range and that a coating is applied on a surface of the measured object because of which the illumination light beam is diffusely reflected on the surface of the measured object.
  • transparent or semi-transparent measured objects very often have the characteristic that they are designed so they are impermeable to light in the violet or ultraviolet wavelength range or greatly attenuate light.
  • this characteristic is purposely brought about as a protective measure.
  • plastics have the tendency to lose their transparency with very prolonged irradiation with ultraviolet light. To prevent this effect, the plastics are treated in such a way that violet and/or ultraviolet light does not penetrate into the material, or barely penetrates. Rather, violet and/or ultraviolet light is diffusely reflected on the surface of the material.
  • the light impermeability or strong light attenuation of these measured objects is used in the measuring system according to the invention.
  • a light beam is used that has a wavelength in the violet or ultraviolet range. Because of the combination of the illumination light beam with the measured object named, the illumination light beam being reflected not directly, but diffusely, is achieved in a surprisingly simple way. Because of this, a measurement can be performed with an optical measuring system on transparent or semi-transparent measured objects without the optical properties of the measured object in the visible range being influenced.
  • this combination of characteristics can also be used in the measurement of non-transparent measured objects, i.e. for measured objects that are practically impenetrable to visible light and on which visible light is reflected directly.
  • a coating is applied to the measured object that is impermeable to violet and/or ultraviolet light or attenuates the violet or ultraviolet light to a non-inconsiderable extent. Because of this, a diffuse reflection of the violet or ultraviolet illumination beam occurs on the surface of the measured object.
  • the illumination light beam is no longer reflected in one spatial direction, rather in an angular range around the light beam of the direct reflection. Because of this, the measured object and the sensor device no longer have to be aligned precisely to each other and the usage area of this measuring system is clearly expanded. Measuring situations that are definitely more stable can be achieved.
  • the surface of the measured object, on which the illumination light beam is reflected is preferably the outer surface of the measured object turned toward the sensor device.
  • the illumination light beam it is also conceivable for the illumination light beam to first penetrate the measured object and then to be reflected in the direction of the detector on the surface turned away from the sensor device or any separating plane arranged in the measured object.
  • measured objects are used in which the illumination light beam does not penetrate into the measured object or only does so slightly.
  • the diffuse reflection of the illumination light beam can be caused by a special coating on the measured object.
  • Coatings that are suitable for this which are impermeable or highly attenuating in the violet and/or ultraviolet range, are known from experience.
  • the measured object already has the required characteristic because of its material composition and violet and/or ultraviolet light cannot penetrate noticeably into the measured object.
  • Corresponding materials that are transparent to visible light and impermeable in the violet and/or ultraviolet range are known from experience.
  • the measured object consists of transparent plastic parts or coated glass from the automotive industry.
  • the measuring system is used for measuring lenses or disks of a vehicle headlight or a tail light.
  • Preferred exemplary embodiments with non-transparent measured objects relate to the measurement of plastics, polished metal plates or other objects designed differently from metal, which are impermeable to light.
  • wood, woody materials or paper can be non-transparent objects.
  • the measured object does not have to be completely impermeable to light. In principle, the measured object can also be translucent.
  • the measured objects are designed so that they are impermeable or highly attenuating for light with a wavelength of less than 420 nm. In an especially preferred manner, they are impermeable or highly attenuating for light with a wavelength of less than or equal to 390 nm.
  • the light source can be formed by a laser that emits a laser beam as illumination light beam.
  • laser diodes can be used as well as solid or gas lasers.
  • the light source can also be made up of an LED. In many application areas, the reduced light quality is adequate.
  • the illumination light beam preferably has a wavelength less than or equal to 425 nm.
  • an illumination light beam with a wavelength less than or equal to 405 nm is used.
  • the wavelength of the illumination light beam is less than or equal to 390 nm.
  • light sources up to extremely short-wavelength UV light can be used.
  • light sources of this type are very expensive and safe operation of the measuring system is very complicated because of special protective measures. Therefore, limits are set for the wavelength. Minimum wavelengths that are currently reasonable to use technically lie at 300 nm.
  • the illumination light beam preferably illuminates the measured object in a spot shape or linear shape.
  • the spots or lines can also be combined to form patterns like crossed lines or several parallel lines.
  • Preferably the lines of the illumination are straight.
  • a focusing device is arranged after the light source, with which the illumination light beam is focused.
  • Light source and focusing device together form an illumination unit.
  • the illumination light beam is focused on the surface of the measured object.
  • CMOS Complementary Metal Oxide Silicon
  • CCD Charge Coupled Device
  • the array is preferably a linear array or an area array (i.e., with two-dimensional expansion).
  • linear arrays can be used for spot-shaped distance measurements and area arrays can be used for distance measurement according to the grid intersection method.
  • the detector can also be formed of a conventional line scan or matrix camera.
  • PSD Position Sensitive Diode
  • APD Anagonal PhotoDiode
  • PSDs or APDs can be mounted in an array.
  • a wavelength-selective element can be mounted before the detector. Because of the wavelength-selective element, ambient light, for example, can be kept away from the detector that is sensitive to broadband.
  • the wavelength-selective element can be designed as a filter (e.g., an interference filter) or a dispersive element. However, for example for reducing the construction size of the sensor device, the wavelength-selective element can also be designed as a dichroic minor for beam deflection/folding. Generally it makes sense to adapt the entire optical channel, i.e. the path that the illumination light beam takes from the light source to the detector, to the wavelength of the illumination light.
  • wavelength-selective elements In order to further improve the wavelength selection, a combination of several wavelength-selective elements is also conceivable.
  • several dispersive elements can be arranged in succession.
  • different types of wavelength-selective elements are combined with each other. This means the combination of a filter or a dispersive element with a dichroic minor is possible.
  • the measuring system comprises an evaluation unit that is connected to the sensor device and receives measuring signals of the sensor device.
  • the evaluation device may receive additional information regarding the illumination light beam, for example if the illumination light beam is modulated.
  • the evaluation device Based on the received light beam (i.e., the portion of the illumination light beam reflected and received at the detector) and possibly based on the knowledge about the illumination light beam itself, the evaluation device performs a determination of a distance between the sensor device and the measured object. Determination of the distance can occur, for example, by calculation or by reading values out from a table, the contents of which have been determined in calibration measurements and stored in the evaluation unit.
  • the evaluation unit can receive information regarding the intensity of the light reflected from the measured object and regulate according to the intensity of the light source by means of a control unit and/or adjust the integration time of the detector and/or a signal amplifier mounted in the detector branch.
  • Sensor device and evaluation can be designed in such way that distance measurement is performed according to the triangulation process.
  • light source and detector are arranged in such a way that the light source, the illuminated spot on the surface of the measured object and the illuminated spot on the detector form a triangle.
  • the distance of the illuminated spot on the surface of the measured object can be calculated by the sensor device.
  • Sensor device and evaluation unit can also be designed in such a way that a distance measurement can be determined using a measurement of the light running time. To do this, how much time required for a light beam from the light source to the measured object and to the detector is measured. With knowledge of the speed of the light, the distance can be determined from this.
  • Another possible design of the sensor device and the evaluation unit consists in that a phase shift is measured. To do this, the brightness of the illumination light beam is modulated with a suitable frequency and the changes in brightness of the illumination light beam and of the received light beam are compared to each other. Decisions about the light running time, and thus on the distance between sensor device and measured object, can be made from the mutual phase position.
  • the evaluation unit can combine several distance measurements in such a way that a profile of the measured object and/or a part of the measured object occurs. To do this, distance values are brought into a relationship with the position of the measuring points on the measured object. If the sensor device operates, e.g. according to the grid intersection method, a profile along a line can be determined with one measurement. If the line passes over the measured object, the three-dimensional structure of the measured object or a part of the measured object can be determined. For a profile measurement, sensor device and measured object can also be designed so they can move with respect to each other. However, it is also possible for the illumination light beam to be moved over the measured object with a deflecting device. Appropriate scanning devices are known from experience.
  • the invention relates to a measuring system according to the triangulation principle that is used for measuring distances with respect to objects, which partially absorb and partially reflect UV light because of a coating or their material composition.
  • An illumination unit e.g., laser diode with focusing optics
  • a selection of this wavelength from other wavelengths in the received beam path occurs using optical filters, dispersive elements and/or dichroic mirrors with appropriate shades. Parts of the light emitted are reflected diffusely by the surface of the object and/or from the object in the received beam path.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
US13/818,274 2010-09-13 2011-09-07 Optical measurement system for determining distances Expired - Fee Related US9453728B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102010045097.9 2010-09-13
DE102010045097 2010-09-13
DE102010045097 2010-09-13
PCT/DE2011/001692 WO2012075978A1 (de) 2010-09-13 2011-09-07 Optisches messsystem zum bestimmen von abständen

Publications (2)

Publication Number Publication Date
US20130148099A1 US20130148099A1 (en) 2013-06-13
US9453728B2 true US9453728B2 (en) 2016-09-27

Family

ID=45023460

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/818,274 Expired - Fee Related US9453728B2 (en) 2010-09-13 2011-09-07 Optical measurement system for determining distances

Country Status (6)

Country Link
US (1) US9453728B2 (de)
EP (1) EP2616765B1 (de)
JP (1) JP5681799B2 (de)
KR (1) KR101501536B1 (de)
DE (1) DE102011112529A1 (de)
WO (1) WO2012075978A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5348192B2 (ja) * 2011-07-11 2013-11-20 日本電気株式会社 作業支援システム、端末、方法およびプログラム
JP6505506B2 (ja) * 2015-05-29 2019-04-24 シャープ株式会社 光センサおよび電子機器
DE102015011427B4 (de) 2015-09-01 2019-01-17 Thomas Engel Bildaufnahmesystem und Bildauswertesystem
KR101961987B1 (ko) * 2016-04-27 2019-03-25 유태경 거리 감지를 통한 안전 거리 제어 장치
CN108008405A (zh) * 2018-01-15 2018-05-08 上海兰宝传感科技股份有限公司 一种双波长光电传感器测距系统及方法
DE102020209065B4 (de) * 2020-07-07 2024-01-25 Micro-Epsilon Optronic Gmbh Optischer Abstandssensor mit Belichtungsregelung sowie entsprechendes Verfahren
US12186459B2 (en) 2020-07-10 2025-01-07 Luv Systems, Inc. Ultraviolet pathogen disinfection system
US11844884B2 (en) 2020-07-10 2023-12-19 Luv Systems, Inc. Ultraviolet pathogen disinfection system
US20220008575A1 (en) 2020-07-10 2022-01-13 Sood, Seth, Khatri & Chaudhary Llc Ultraviolet pathogen disinfection system

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009442A (ja) 1998-06-22 2000-01-14 Fuji Xerox Co Ltd ３次元画像撮影装置
JP2000249546A (ja) 1999-02-26 2000-09-14 Seiko Precision Inc 携帯式小型電子メジャー
JP2001013049A (ja) 1999-06-30 2001-01-19 Tohoku Techno Arch Co Ltd 局所弾性率測定装置
US20020040971A1 (en) 2000-09-26 2002-04-11 Shuji Ono Distance information obtaining apparatus and distance information obtaining method
US20020055082A1 (en) 2000-10-25 2002-05-09 Duane Durbin Method and system for imaging and modeling a three dimensional structure
WO2002066924A1 (de) 2001-02-21 2002-08-29 Charalambos Tassakos Verfahren und vorrichtung zur optischen erfassung eines objekts
US20030069350A1 (en) 2001-08-29 2003-04-10 Kazutoshi Yoshihara Transparent silicone film-forming composition and method for curing same
DE10153760A1 (de) 2001-10-31 2003-05-22 Fraunhofer Ges Forschung Verfahren zur Herstellung einer UV-absorbierenden transparenten Abriebschutzschicht
US20040027554A1 (en) * 2002-08-08 2004-02-12 Ikuo Ishinabe Light wave distance-measuring system
DE10336666A1 (de) 2003-08-09 2005-03-10 Daimler Chrysler Ag Geometrische Oberflächenerfassung, insbesondere Spaltmessung, unter Verwendung von UV-Strahlung
DE102004025490A1 (de) 2004-05-22 2005-12-15 Hubert Kammer Verfahren zum optischen Vermessen reflektierender und/oder transparenter Objekte mittels Lasermesstechnik
US20060262310A1 (en) * 2005-05-17 2006-11-23 Starry Adam B Diffuse reflective article
DE102007003024A1 (de) 2007-01-20 2008-07-31 Sick Ag Triangulationssensor mit Entfernungsbestimmung aus Lichtfleckposition und -form
US20080225303A1 (en) * 2007-03-13 2008-09-18 3D-Shape Gmbh Method and Apparatus for the Three-Dimensional Measurement of the Shape and the Local Surface Normal of Preferably Specular Objects
DE102007029440A1 (de) 2007-06-26 2009-01-08 Mtu Aero Engines Gmbh Verfahren und Anordnung zum Erfassen einer Oberfläche eines Objekts
EP2189752A1 (de) 2008-11-19 2010-05-26 Stichting Dutch Polymer Institute Verfahren zur Verstärkung des Kontrasts von Oberflächen und Verwendung dafür

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3175317B2 (ja) * 1992-05-07 2001-06-11 ソニー株式会社 距離測定装置
JPH0743115A (ja) * 1993-07-26 1995-02-10 Sony Corp 距離測定方法および距離測定装置
JPH09243729A (ja) * 1996-03-06 1997-09-19 Omron Corp 車両搭載用光学的計測装置および光学的計測方法
JP2001194114A (ja) * 2000-01-14 2001-07-19 Sony Corp 画像処理装置および画像処理方法、並びにプログラム提供媒体
GB0405014D0 (en) * 2004-03-05 2004-04-07 Qinetiq Ltd Movement control system

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009442A (ja) 1998-06-22 2000-01-14 Fuji Xerox Co Ltd ３次元画像撮影装置
JP2000249546A (ja) 1999-02-26 2000-09-14 Seiko Precision Inc 携帯式小型電子メジャー
JP2001013049A (ja) 1999-06-30 2001-01-19 Tohoku Techno Arch Co Ltd 局所弾性率測定装置
US20020040971A1 (en) 2000-09-26 2002-04-11 Shuji Ono Distance information obtaining apparatus and distance information obtaining method
US20020055082A1 (en) 2000-10-25 2002-05-09 Duane Durbin Method and system for imaging and modeling a three dimensional structure
WO2002066924A1 (de) 2001-02-21 2002-08-29 Charalambos Tassakos Verfahren und vorrichtung zur optischen erfassung eines objekts
US20030069350A1 (en) 2001-08-29 2003-04-10 Kazutoshi Yoshihara Transparent silicone film-forming composition and method for curing same
US20050003104A1 (en) 2001-10-31 2005-01-06 Manfred Neumann Method for producing a uv-absorbing transparent wear protection layer
DE10153760A1 (de) 2001-10-31 2003-05-22 Fraunhofer Ges Forschung Verfahren zur Herstellung einer UV-absorbierenden transparenten Abriebschutzschicht
US20040027554A1 (en) * 2002-08-08 2004-02-12 Ikuo Ishinabe Light wave distance-measuring system
DE10336666A1 (de) 2003-08-09 2005-03-10 Daimler Chrysler Ag Geometrische Oberflächenerfassung, insbesondere Spaltmessung, unter Verwendung von UV-Strahlung
DE102004025490A1 (de) 2004-05-22 2005-12-15 Hubert Kammer Verfahren zum optischen Vermessen reflektierender und/oder transparenter Objekte mittels Lasermesstechnik
US20060262310A1 (en) * 2005-05-17 2006-11-23 Starry Adam B Diffuse reflective article
DE102007003024A1 (de) 2007-01-20 2008-07-31 Sick Ag Triangulationssensor mit Entfernungsbestimmung aus Lichtfleckposition und -form
US20080225303A1 (en) * 2007-03-13 2008-09-18 3D-Shape Gmbh Method and Apparatus for the Three-Dimensional Measurement of the Shape and the Local Surface Normal of Preferably Specular Objects
DE102007029440A1 (de) 2007-06-26 2009-01-08 Mtu Aero Engines Gmbh Verfahren und Anordnung zum Erfassen einer Oberfläche eines Objekts
US20110133102A1 (en) * 2007-06-26 2011-06-09 Mtu Aero Engines, Gmbh Method and arrangement for detecting a surface of an object
EP2189752A1 (de) 2008-11-19 2010-05-26 Stichting Dutch Polymer Institute Verfahren zur Verstärkung des Kontrasts von Oberflächen und Verwendung dafür

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Bachman, C.G., "Chapter 2: LADAR Performance Prediction," Laser Radar Systems and Techniques, 1979, pp. 9 and 10, Artech House, Inc., Dedham, MA.
International Searching Authority, International Search Report for International Application No. PCT/DE2011/001692, mailed Mar. 30, 2012, 9 pages, European Patent Office, The Netherlands.
International Searching Authority, Written Opinion for International Application No. PCT/DE2011/001692, mailed Mar. 30, 2012, 10 pages, European Patent Office, Germany.
International Searching Authority, Written Opinion for International Application No. PCT/DE2011/001692, mailed Mar. 30, 2012, 8 pages, European Patent Office, Germany.

Also Published As

Publication number Publication date
EP2616765B1 (de) 2020-11-11
JP2013540999A (ja) 2013-11-07
WO2012075978A1 (de) 2012-06-14
JP5681799B2 (ja) 2015-03-11
EP2616765A1 (de) 2013-07-24
US20130148099A1 (en) 2013-06-13
DE102011112529A1 (de) 2012-03-15
CN103097858A (zh) 2013-05-08
KR101501536B1 (ko) 2015-03-11
KR20130054428A (ko) 2013-05-24

Similar Documents

Publication Publication Date Title
US9453728B2 (en) Optical measurement system for determining distances
US7443555B2 (en) Laser scanner
US6858836B1 (en) Laser scanner measurement system
US9476828B2 (en) Optoelectronic sensor for testing transmissivity of a front screen
US6323954B1 (en) Process and device for the detection or determination of the position of edges
US10739191B2 (en) Determining a beam profile of a laser beam
US10761193B2 (en) Optoelectronic sensor and method for detecting an object
TWI431252B (zh) 測距裝置及測距方法
US20030227635A1 (en) Device and method for the optical detection of objects
JP2529691B2 (ja) 光学式距離測定装置及び支持部材上の部品の位置を決定する装置
US20210333365A1 (en) Optical system for detecting a scanning field
CN104062690A (zh) 有限区域反射型光电传感器
JP4785044B2 (ja) 反射型光学センサ及び測定面の表面粗さ検出方法
US20200264284A1 (en) Optoelectronic sensor and method for detecting an object
US8395759B2 (en) Device for optical distance measurement
JP2015072175A (ja) 検査装置
CN103097858B (zh) 用于测定距离的光学测量系统
FI130557B (en) Device for determining a distance, surface thickness and optical properties of an object and related method
CN102341730B (zh) 非接触式测量距离和/或外形的装置和方法
CA3193114C (en) Device for determining a distance, surface thickness and optical properties of an object and related method
JP2026065169A (ja) 付加造形における溶融池位置の計測
KR20170017019A (ko) 집광점 검출장치
HK40099084A (en) Device for determining a distance, surface thickness and optical properties of an object and related method
HK40099084B (en) Device for determining a distance, surface thickness and optical properties of an object and related method
KR20250155522A (ko) 광학 센서 장치

Legal Events

Date Code Title Description
AS Assignment

Owner name: MICRO-EPSILON OPTRONIC GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:STAUTMEISTER, TORSTEN;REEL/FRAME:029852/0917

Effective date: 20130204

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4

FEPP Fee payment procedure

Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

LAPS Lapse for failure to pay maintenance fees

Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20240927