WO1994004313A1 - Dispositifs et procedes de polissage magnetorheologique - Google Patents

Dispositifs et procedes de polissage magnetorheologique Download PDF

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Publication number
WO1994004313A1
WO1994004313A1 PCT/US1993/007393 US9307393W WO9404313A1 WO 1994004313 A1 WO1994004313 A1 WO 1994004313A1 US 9307393 W US9307393 W US 9307393W WO 9404313 A1 WO9404313 A1 WO 9404313A1
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WIPO (PCT)
Prior art keywords
fluid
polishing
tubular object
weight percent
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1993/007393
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English (en)
Inventor
Viliyam I. Kordonsky
Igor V. Prokhorov
Sergei R. Gorodkin
Gennadii R. Gorodkin
Leonid K. Gleb
Valentina I. Baladina
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Byelocorp Scientific Inc
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Byelocorp Scientific Inc
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Publication date
Application filed by Byelocorp Scientific Inc filed Critical Byelocorp Scientific Inc
Publication of WO1994004313A1 publication Critical patent/WO1994004313A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
    • B24B39/02—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor designed for working internal surfaces of revolution

Definitions

  • This invention relates to methods of polishing surfaces using magnetorheological fluids, and fluids used therein.
  • Simjian U.S. Patent No. 2,735,232, describes a device for polishing or surface-abrading articles by immersing the object to be polished in a bath containing magnetic particles.
  • the fluid in the polishing bath varies in viscosity when subject to the application of a magnetic field.
  • Simjian discloses a polishing bath consisting of an abrasive powder such as Carborundum, a magnetic powder such as iron filings, and a liquid which may be any type of lubricating oil .
  • This mixture is housed in a container and the article to be polished is immersed in the mixture.
  • An alternating polyphase magnetic field is applied to the mixture.
  • Simjian discloses that the magnetic field may be set up such that a rotating magnetic field results.
  • This spinning of the magnetic particles carries the abrasive particles into motion which causes the polishing or abrading action.
  • Simjian also discloses that uniform polishing may be obtained by rotating the work-piece in the bath.
  • Simjian has limited applicability. Alternating magnetic fields generally generate particle suspension velocities insufficient for acceptable polishing. Simjian's use of alternating magnetic fields is also generally unacceptable for polishing a work-piece with a complex geometry surface because of the difficulty of providing uniform contact between the work-piece and the polishing medium. Simjian also does not provide for the removal of excess heat generated by the polishing process, thereby neither allowing fluid velocities sufficient for desirably rapid polishing nor protecting the work-piece from thermal damage.
  • U.S. Patent No. 4,821,466 describes a device for polishing articles utilizing an abrasive-containing magnetic fluid.
  • the work-piece to be polished is immersed in the abrasive-containing magnetic fluid.
  • a floating pad is positioned adjacent to the work-piece and is given a buoyant force by a magnetic field that is supplied from the outside of the container.
  • the buoyant force of the pad forces abrasive particles located in the magnetic fluid between the work-piece and the pad against the work-piece.
  • the mutual motion of the work-piece and the magnetic fluid containing abrasive grains accomplishes the polishing.
  • the mutual motion between the work and the abrasive grains in the magnetic fluid may be accomplished by a revolution, a vibration or other kind of motion of the work-piece or by a reciprocation, a revolution or a vibration of the magnetic fluid by actuating the magnetic field or by a combination of these motions.
  • the device described by Kato also suffers from drawbacks such as an undesirably coarse finish to the work- piece.
  • the Kato process also is limited to flat surfaces with polishing of complex geometry surfaces being very difficult. Additionally, Kato et al. does not disclose means for removing excess heat generated by the polishing process, thereby limiting the rate at which a work-piece may be polished in order to avoid thermal damage to the work-piece.
  • This invention is directed to a device and method for polishing objects in a magnetorheological polishing fluid (MP-fluid) .
  • the method comprises the steps of bringing said object into contact with a fluid; moving at least one of said object and said fluid with respect to the other; and varying the consistency of said fluid in a region wherein said object is located.
  • the polishing vessel can be a circular vessel with an annular cavity in which the magnetorheological polishing fluid is contained.
  • the vessel and the MP-fluid are put into rotation.
  • the object to be polished is attached to a spindle which can spin about its axis.
  • the object to be polished is immersed in the MP-fluid and spun, thereby allowing all facets of the object to be exposed to the oncoming MP-fluid in the rotating vessel.
  • the MP-fluid can contain an abrasive suspension, a chemical solvent or both.
  • a polishing device comprises a plurality of lines for delivering a polishing fluid to a tubular work-piece and a means for connecting the tubular work-piece to the delivery lines.
  • connection can be adapted so that said tubular work-piece may move slidably and rotatably.
  • the tubular work-piece and the MP-fluid may be moved with respect to the other.
  • a magnetic field may act upon the MP-fluid causing it to acquire the characteristics of a plasticized solid polishing surface. This change in consistency provides resistance to the abrasive particles such that the particles have sufficient force to abrade the inner surface of the tubular work-piece.
  • Figure 1 is a cross-sectional side view of an apparatus of the invention useful for polishing work-pieces.
  • Figure 2 is a top planar view of the fluid vessel of the invention.
  • Figure 3 is a cross-sectional side view of another embodiment of the invention.
  • Figure 4 is a cross-sectional side view of a third apparatus of the invention.
  • Figure 5 is a cross-sectional side view of a fourth embodiment of the invention.
  • FIG. 1 there is shown a polishing device of the invention.
  • An abrasive containing magneto- rheological polishing fluid (MP-fluid) 11 is contained in a vessel 12.
  • the MP-fluid can contain a magnetorheological fluid and optionally, an abrasive medium.
  • MP-fluid is only magnetorheological fluid without any additional abrasive medium.
  • MP-Fluid 11 preferably has a composition as described in greater detail below.
  • Vessel 12 preferably is constructed of a non-magnetic material and is inert to the MP- fluid.
  • a work-piece 14 to be polished is connected to a rotatable spindle 16.
  • Spindle 16 is preferably made from a non-magnetic material.
  • Vessel 12 preferably is semi- cylindrically shaped in cross-section particularly where work- piece 14 is convexly shaped, as can be seen in Figure 1, and preferably is a circular annulus when viewed from above , as can be seen in Figure 2.
  • the particular shape of vessel 12 can be modified to suit the particular work-piece desired to be polished, as can be seen in Figure 4.
  • Movement of vessel 12 is controlled by spindle 18, which preferably is positioned in a central location below vessel 12.
  • Spindle 18 can be driven by a conventional motor or other power source.
  • An electromagnet 20 is positioned adjacent to vessel 12 so as to be capable of influencing MP-fluid 11 in a region containing work-piece 14. Magnet 20 should be capable of inducing a magnetic field sufficient to carry out the polishing operation, and preferably will induce a magnetic field of at least about 50 kA/m. Electromagnet 20 is activated by magnetic windings 22, 24. Windings 22 and 24 can be any conventional magnetic winding.
  • polishing device 10 operates as follows.
  • Work-piece 14 is coupled to spindle 16, and positioned so that the portion of work-piece 14 to be polished is in contact with MP-fluid 11 such as by immersing the work- piece in MP-fluid 11.
  • MP-fluid 11 such as by immersing the work- piece in MP-fluid 11.
  • both work-piece 14 and vessel 12 are both put into rotating motion.
  • a power source is activated to drive spindle 18 into rotating motion, thereby rotating vessel 12.
  • Spindle 18 rotates about a central axis
  • Spindle 16 is also rotated, about a central axis 28, to provide rotating movement to work-piece 14.
  • spindle 16 operates at speeds of up to 100,000 rpm with about 2,000 rpm particularly preferred.
  • the motion of spindle 16 provides continuous translational MP-fluid motion relative to the surface being polished.
  • Windings 22, 24 are activated to induce a magnetic field and influence MP-fluid 11.
  • MP-fluid 11 is acted on by a non-uniform magnetic field in a region adjacent to the work-piece 14 that is, equal-intensity lines of the field are equidistant to the surface of the work-piece, and the force of the magnetic field is a gradient directed to the vessel bottom normal to the surface.
  • Magnetic particles present in the magnetorheological fluid become aligned along force lines of the magnetic field thereby ⁇ imparting higher effective viscous, plastic, and elastic properties to the magnetorheological fluid.
  • the surface of the work-piece is gradually polished.
  • vessel 12 can be tilted at an angle to a horizontal plane.
  • vessel 12 may be attached by means of a hinge 30 allowing vessel 12 to tilt at an angle .
  • the ' angle of the tilt is less than about 90°, with about 45° particularly preferred.
  • Figure 4 illustrates modifications to the vessel 12 in which the shape of the vessel is rectangular in cross-section rather than semi- cylindrical. This modification allows for more efficient polishing of a flat work-piece 14, such as a semiconductors.
  • the tips of the magnetic poles 20, are shaped such that a nonuniform magnetic field is applied across the work-piece 14.
  • the tips of the magnet can be angled toward work-piece 14.
  • the angling can be provided in the manufacture of the magnet, or by attaching a detachable angular section to a magnet such as that depicted in Figure 1.
  • the angled attachable section can be fastened to magnet 20 by, for example, screwing a triangular section onto magnet 20.
  • the embodiment depicted in Figure 4 is the same as that depicted in Figure 1.
  • a tube work- piece 34 contains a volume of MP-fluid 11.
  • Pump 32 is connected via lines 38 to the inner portion of work-piece 34.
  • Seals 40 provide a closed fluid loop between lines 38, pump 32 and work-piece 34.
  • the tube work-piece 34 is placed between the pole pieces of electromagnet 36.
  • the tube work-piece is placed in contact with a friction unit 44.
  • Friction unit 44 is mounted upon shaft 46 which may rotate about its axis 48.
  • the polishing device operates as follows.
  • Work-piece 34 is connected to lines 38 and the MP- fluid is pumped by pump 32 through work-piece 34.
  • Work-piece 34 is rotated about its central axis 42 by friction unit 44 which rotates about axis 48 and is brought into contact with work-piece 34.
  • a non-uniform magnetic field is created by pole pieces 36, and is applied to the MP-fluid passing through work-piece 34.
  • the magnetic field varies in time. The magnetic field is not applied while the MP-fluid is being pumped, allowing easy flow of the MP-fluid.
  • the magnetic field is applied while MP-fluid is not being pumped through work-piece 34, allowing the formation of a closely fitted polishing tool against the inner surface of the work-piece 34.
  • the electromagnetic pole pieces 36 are located along the axis 42 of the tube work-piece 34 equidistant from work-piece 34.
  • the composition of MP-fluid 11 preferably minimizes sedimentation and aggregation of the particles in the fluid.
  • the MP-fluid may contain one or more thickening agents and/or surfactants to limit particle sedimentation and aggregation.
  • thickening agents may also impart thixotropic properties to the MP-fluid.
  • the MP-fluid contains magnetorheological fluid which is mixed with an abrasive medium.
  • the magnetorheological fluid may comprise magnetic particles, a stabilizer, and a carrying fluid.
  • the carrying fluid is preferably water.
  • a magnetorheological fluid has the following composition.
  • the abrasive medium is immiscible with the magnetorheological fluid.
  • the magnetorheological fluid preferably is of a composition such as those described in co-pending application Serial No. 868,466 filed April 14, 1992, whose disclosure is incorporated herein by reference.
  • the carrying fluid in this embodiment preferably comprises an aromatic alcohol, a vinyl-alkyl ether, and kerosene.
  • a particularly preferred magnetorheological fluid has the following composition.
  • the magnetic particles are made from carbonyl iron and have a diameter of about 1 to 10 ⁇ m in diameter.
  • Vinyl-n-butyl polymer ether 1.83-3.02 ⁇ -naphthanol 0.013-0.020 Aerosil 4.5-7.5
  • the abrasive medium is a liquid suspension of abrasive particles.
  • a preferred suspension contains a water suspension of an abrasive powder sold under the tradename POLIRIT (PF-0) , manufactured by Plant of Polirits, Narva, Estonia.
  • POLIRIT (PF-O) is produced from a mineral called laporit .
  • POLIRIT is a mixture of the following components, plus trace amounts of oxides of elements such as Sm, It, Gd:
  • abrasive powders are: DIAMOND powder (ASM (2/1) (manufactured by Plant optical mechanics, Rostove Veliki, Russia) ; electrocorrund (Al 2 0 3 ) ; and silicon dioxide (Si0 2 ) .
  • suitable solvents include acids, solutions of salts, bases and water. The choice of solvent is dependent upon the properties of the work-piece 14. The solvent can be chosen such that it is inert to work-piece 14 or, preferably so that it will chemically react with or otherwise soften the surface of the work-piece 14. In this preferred embodiment, reaction of the solvent with the surface of work-piece 14 can substantially shorten polishing time.
  • the MP- fluid components can be dispersed within each other by, for example, ultrasonic dispersion techniques prior to delivery of the MP-fluid to vessel 12.
  • This embodiment yields a more uniform fluid composition and minimizes the adverse effects of the immiscibility of the magnetorheological fluid and the abrasive medium.
  • the abrasive medium is injected into the magnetorheological fluid and this admixture is subjected to dispersion by an ultrasonic disperser.
  • a preferred composition is:
  • Kerosene 12.33-23.63 Sodium salt of dodecylsulphacid 0.033-0.05
  • suspensions of abrasive particles (abrasive medium) and carbonyl iron powder (magnetorheological fluid) are prepared separately.
  • a suspension of POLIRIT abrasive is prepared in an aqueous solution of a sodium salt of dodecylsulphacid.
  • a preferred composition is:
  • the carbonyl iron powder is suspended in a kerosene based dispersion medium.
  • the dispersion medium may have a gel like consistency.
  • a preferred composition is: Component Weight Percentage
  • Carrying fluid 22.5-45.5 comprising: polyvinyl-n-butyl ether 1.83-3.02 ⁇ -naphthanol 0.013-0.020 kerosene 96.96-98.157
  • the two prepared suspensions are placed in vessel 12 separately prior to polishing. In operation, the two fluids mix to form a MP-fluid.
  • the cutting of a surface of a work-piece that occurs when there is relative movement between the work-piece and the MP-fluid is due to the contact of the abrasive particles with the work-piece.
  • the abrasive particles are held in position relative to the work-piece by the magnetorheological fluid.
  • the rigidity of the matrix holding the abrasive particle may be changed, thus varying the level of cutting force applied to the work-piece. Controlling the interaction between the abrasive particles and the work- piece by interaction of the magnetic particles and a magnetic field, allows for precise and nearly infinite regulation of the interaction between work-piece and abrasive.
  • MP-fluid also provides effective heat dissipation due to the convective heat removal. This allows polishing to be carried out under intensive operating conditions with a reduced likelihood of thermal damage in the work-piece.
  • the magnetorheological fluid upon action of the incoming flow, the magnetic field and the friction of the lower fluid layers against the rotating vessel surface, the magnetorheological fluid is put into rotation in the polishing region.
  • the axis of the observed rotation of the magnetorheological fluid volume is normal to the flow direction.
  • control of the abrasive properties of the MP-fluid is determined by two factors: force and structure.
  • force and structure The effect of a nonuniform magnetic field provides a polishing zone where an elastic polishing instrument is formed. This also provides thrust toward the surface to be finished which is controllable.
  • the structure factor is characterized by a magnetic field affecting the rheological properties (such as plasticity and effective viscosity) of magnetorheological fluid and the mechanical abrasive properties of the MP-fluid, putting the abrasive particles into motion at the polishing site.
  • rheological properties such as plasticity and effective viscosity
  • Coarse abrasive particles that may be present in the abrasive filler cause little or no damage to the polished surface because the magnetorheological fluid-polishing instrument is soft and elastic, possessing plasticity. Therefore, the coarse abrasive is simply "immersed" into the magnetorheological fluid as the fluid yields to the pressure of the particle when the particle comes into contact with the work-piece. This occurs before the particle cuts into the work-piece surface which would otherwise result in damage to the work-piece.
  • the polishing devices of the invention permit polishing of flat, spherical, aspherical and inner tube surfaces.
  • the nature of the fluid and the ability to change effective viscosity, plasticity, and elasticity permits the fluid to conform to the work-piece irrespective of the surface shape to be polished. This makes the polishing of complex- geometry surfaces possible. Additionally, formation of the polishing working surface shape may be regulated by varying the magnetic field topography.
  • the polishing rate was 0.8 ⁇ m/min.
  • a flat work-piece made from gallium arsenide (GaAs) , with a diameter of 40 mm and a thickness of 400 ⁇ m was polished using a device shown in Figure 1 and described herein. Before polishing, the work-piece was preliminary ground on a device ("MULTIPOL", France) to an initial surface roughness of Ra 0.5 ⁇ m.
  • the gallium arsenide disc was attached to a spindle and positioned in the MP-fluid described below. The work-piece and vessel were each rotated and a magnetic field was applied to the fluid, until the disc was polished sufficiently.
  • the vessel rotation speed was about 120 rpm and the work-piece rotation speed was about 20 rpm.
  • the intensity of the magnetic field near the work-piece surface was about 200 kA/m.
  • An aqueous glycerin mixture-based magnetorheological polishing fluid was used having the following composition: (Silicon carbide (SiC, particle sizes 0.4-1.0 ⁇ m) served as the abrasive filler.)
  • the polishing rate was 0.7 ⁇ m/min.
  • the tube was installed between the poles of an electromagnet.
  • the tube was filled with MP-fluid and rotated and oscillated along its axis. A magnetic field was applied.
  • the tube rotation speed was about 1500 rpm, with an oscillation displacement of about 150 mm and an oscillation speed of about 0.3 m/minute.
  • the magnetic field intensity near the work-piece surface was about 600 kA/m.
  • the polishing time was about 110 minutes.
  • a kerosene mixture-based magnetorheological fluid was used having the following composition: (Electrocorrund (A1 2 0 3 , particle sizes 3-10 ⁇ m) served as the abrasive filler)

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention concerne un procédé de polissage d'un objet. Dans un mode de réalisation, ce procédé consiste à mettre l'objet (14) en contact avec un fluide (11), à déplacer au moins l'objet (14) ou le fluide (11) l'un par rapport à l'autre, à faire varier la consistance du fluide dans la zone où est placé l'objet. L'invention se rapporte également à un dispositif de polissage (10) qui, dans un mode de réalisation, est constitué d'un récipient (12) pour le fluide de polissage (11), d'un support (16) conçu pour recevoir l'objet (14) à polir de façon que ce dernier soit en contact avec le fluide (11), un dispositif permettant de déplacer au moins le fluide (11) et le support (16), et un dispositif permettant de faire varier la consistance du fluide (11) dans la zone contenant le support (16).
PCT/US1993/007393 1992-08-14 1993-08-05 Dispositifs et procedes de polissage magnetorheologique Ceased WO1994004313A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US93011692A 1992-08-14 1992-08-14
US07/930,116 1992-08-14

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WO1994004313A1 true WO1994004313A1 (fr) 1994-03-03

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795212A (en) * 1995-10-16 1998-08-18 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
DE10314625B3 (de) * 2003-04-01 2004-10-14 Optotech Optikmaschinen Gmbh Verfahren und Vorrichtung zum Nacharbeiten von Präzisionsoberflächen
EP1087860A4 (fr) * 1998-03-25 2004-12-29 Qed Technologies Inc Systeme permettant d'utiliser un fluide magneto-rheologique pour le formage et le polissage au jet d'une surface
US7261616B2 (en) 1992-04-14 2007-08-28 Qed Technologies International, Inc. Magnetorheological polishing devices and methods
US8062541B2 (en) 2007-08-01 2011-11-22 Lord Corporation Non-settling glycol based magnetorheological fluids
US20110318994A1 (en) * 2010-06-25 2011-12-29 Charles Michael Darcangelo Method of preparing an edge-strengthened article
CN103072047A (zh) * 2012-12-26 2013-05-01 哈尔滨工业大学 一种小口径非球面永磁式磁流变抛光加工机床
CN103128602A (zh) * 2012-12-26 2013-06-05 哈尔滨工业大学 一种超精密加工用工件轴数控运动平台装置
CN104487204A (zh) * 2012-07-18 2015-04-01 Qed技术国际股份有限公司 用于超光滑抛光的磁流变流体
CN106736879A (zh) * 2016-12-12 2017-05-31 东北大学 一种滚轴式磁流变抛光装置与方法
CN107414608A (zh) * 2017-09-07 2017-12-01 河南工业大学 一种回转式光纤预制棒磁流变抛光机及其抛光方法
WO2018058772A1 (fr) * 2016-09-30 2018-04-05 广州特种承压设备检测研究院 Machine à meuler et polir un volet de soupape de sécurité au moyen d'un fluide magnétique et procédé de polissage
CN110340744A (zh) * 2019-07-18 2019-10-18 浙江科惠医疗器械股份有限公司 骨科植入物球面精密加工装置
CN111347295A (zh) * 2020-03-27 2020-06-30 台州学院 高压锅内胆表面抛光装置
EP3970914A1 (fr) * 2020-09-16 2022-03-23 FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. Dispositif permettant de soumettre un liquide magnétorhéologique à un champ magnétique, système et procédé de traitement d'une pièce au moyen du liquide magnétorhéologique
CN114599761A (zh) * 2019-10-28 2022-06-07 3M创新有限公司 修整金属表面的系统和方法
CN115302381A (zh) * 2022-07-19 2022-11-08 中国人民解放军国防科技大学 曲面光学微结构磁流变抛光装置及其应用方法
CN119238227A (zh) * 2024-12-05 2025-01-03 中国人民解放军国防科技大学 超声振动辅助磁流变确定性抛光的粗糙度优化方法及系统

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SU1089968A1 (ru) * 1982-03-01 1996-04-10 Институт тепло- и массообмена им.А.В.Лыкова Магнитореологическая суспензия
SU1154938A1 (ru) * 1983-07-13 1996-04-10 Институт тепло- и массообмена им.А.В.Лыкова Магнитореологическая суспензия

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Publication number Priority date Publication date Assignee Title
US2735231A (en) * 1953-05-22 1956-02-21 Reflectone Corp simjian
US3848363A (en) * 1973-02-20 1974-11-19 Minnesota Mining & Mfg Apparatus for treating objects with particles moved by magnetic force
US3897350A (en) * 1974-05-30 1975-07-29 Mobil Oil Corp Anti-rust compositions
SU1089968A1 (ru) * 1982-03-01 1996-04-10 Институт тепло- и массообмена им.А.В.Лыкова Магнитореологическая суспензия
USRE32573E (en) * 1982-04-07 1988-01-05 Nippon Seiko Kabushiki Kaisha Process for producing a ferrofluid, and a composition thereof
SU1154938A1 (ru) * 1983-07-13 1996-04-10 Институт тепло- и массообмена им.А.В.Лыкова Магнитореологическая суспензия
DD227372A1 (de) * 1984-10-25 1985-09-18 Orsta Hydraulik Veb K Verfahren zur feinstbearbeitung von stahlrohren
US4821466A (en) * 1987-02-09 1989-04-18 Koji Kato Method for grinding using a magnetic fluid and an apparatus thereof
US4839074A (en) * 1987-05-22 1989-06-13 Exxon Chemical Patents Inc. Specified C14 -carboxylate/vinyl ester polymer-containing compositions for lubricating oil flow improvement
US4992190A (en) * 1989-09-22 1991-02-12 Trw Inc. Fluid responsive to a magnetic field

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7261616B2 (en) 1992-04-14 2007-08-28 Qed Technologies International, Inc. Magnetorheological polishing devices and methods
US5804095A (en) * 1995-10-16 1998-09-08 Byelocorp Scientific, Inc. Magnetorheological fluid composition
US5839944A (en) * 1995-10-16 1998-11-24 Byelocorp, Inc. Apparatus deterministic magnetorheological finishing of workpieces
US6106380A (en) * 1995-10-16 2000-08-22 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
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EP1087860A4 (fr) * 1998-03-25 2004-12-29 Qed Technologies Inc Systeme permettant d'utiliser un fluide magneto-rheologique pour le formage et le polissage au jet d'une surface
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