WO1999044204A3 - Speicherzellenanordnung und entsprechendes herstellungsverfahren - Google Patents

Speicherzellenanordnung und entsprechendes herstellungsverfahren Download PDF

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Publication number
WO1999044204A3
WO1999044204A3 PCT/DE1999/000517 DE9900517W WO9944204A3 WO 1999044204 A3 WO1999044204 A3 WO 1999044204A3 DE 9900517 W DE9900517 W DE 9900517W WO 9944204 A3 WO9944204 A3 WO 9944204A3
Authority
WO
WIPO (PCT)
Prior art keywords
bit line
semiconductor substrate
trench
memory cell
cell arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1999/000517
Other languages
English (en)
French (fr)
Other versions
WO1999044204A2 (de
Inventor
Ulrich Zimmermann
Thomas Boehm
Manfred Hain
Armin Kohlhase
Yoichi Otani
Andreas Rusch
Alexander Trueby
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to EP99916757A priority Critical patent/EP1060474A2/de
Priority to JP2000533875A priority patent/JP2002505516A/ja
Publication of WO1999044204A2 publication Critical patent/WO1999044204A2/de
Publication of WO1999044204A3 publication Critical patent/WO1999044204A3/de
Priority to US09/645,763 priority patent/US6472696B1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/27—ROM only
    • H10B20/40—ROM only having the source region and drain region on different levels, e.g. vertical channel
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices

Landscapes

  • Semiconductor Memories (AREA)

Abstract

Die vorliegende Erfindung schafft eine Speicherzellenanordnung mit einer Vielzahl von in einem Halbleitersubstrat (10) vorgesehenen Speicherzellen (S) mit in Längsrichtung in der Hauptfläche des Halbleitersubstrats (10) parallel verlaufenden Bitleitungsgräben (1a-1d), in deren Böden jeweils ein erstes leitendes Gebiet (15a-15d) vorgesehen ist, in deren Kronen jeweils ein zweites leitendes Gebiet (20a-20e) vom gleichen Leitungstyp wie das erste leitende Gebiet vorgesehen ist und in deren Wänden jeweils ein dazwischenliegendes Kanalgebiet vorgesehen ist, und in Querrichtung entlang der Hauptfläche des Halbleitersubstrats (10) durch bestimmte Bitleitungsgräben (1a, 1c, 1d) verlaufende Wortleitungen (2a-2c) zur Ansteuerung von dort vorgesehenen Transistoren. In die Grabenwände der Bitleitungsgräben (1a-1d), welche zwischen den Wortleitungen (2a-2c) liegen, ist ein zusätzlicher Dotierstoff eingebracht, um dort die entsprechende Transistor-Einsatzspannung zur Unterdrückung von Leckströmen zu erhöhen.
PCT/DE1999/000517 1998-02-25 1999-02-25 Speicherzellenanordnung und entsprechendes herstellungsverfahren Ceased WO1999044204A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP99916757A EP1060474A2 (de) 1998-02-25 1999-02-25 Speicherzellenanordnung und entsprechendes herstellungsverfahren
JP2000533875A JP2002505516A (ja) 1998-02-25 1999-02-25 メモリセル装置及び相応の製造方法
US09/645,763 US6472696B1 (en) 1998-02-25 2000-08-25 Memory cell configuration and corresponding production process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19807920A DE19807920A1 (de) 1998-02-25 1998-02-25 Speicherzellenanordnung und entsprechendes Herstellungsverfahren
DE19807920.6 1998-02-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/645,763 Continuation US6472696B1 (en) 1998-02-25 2000-08-25 Memory cell configuration and corresponding production process

Publications (2)

Publication Number Publication Date
WO1999044204A2 WO1999044204A2 (de) 1999-09-02
WO1999044204A3 true WO1999044204A3 (de) 1999-10-14

Family

ID=7858873

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1999/000517 Ceased WO1999044204A2 (de) 1998-02-25 1999-02-25 Speicherzellenanordnung und entsprechendes herstellungsverfahren

Country Status (6)

Country Link
US (1) US6472696B1 (de)
EP (1) EP1060474A2 (de)
JP (1) JP2002505516A (de)
KR (1) KR100604180B1 (de)
DE (1) DE19807920A1 (de)
WO (1) WO1999044204A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004063025B4 (de) * 2004-07-27 2010-07-29 Hynix Semiconductor Inc., Icheon Speicherbauelement und Verfahren zur Herstellung desselben
KR100771871B1 (ko) * 2006-05-24 2007-11-01 삼성전자주식회사 수직 채널 트랜지스터를 구비한 반도체 소자
KR101052871B1 (ko) * 2008-05-07 2011-07-29 주식회사 하이닉스반도체 반도체 소자 및 그의 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4214923A1 (de) * 1991-05-31 1992-12-03 Mitsubishi Electric Corp Masken-rom-einrichtung und verfahren zu deren herstellung
JPH05343680A (ja) * 1992-06-10 1993-12-24 Kawasaki Steel Corp 半導体装置の製造方法
US5448090A (en) * 1994-08-03 1995-09-05 International Business Machines Corporation Structure for reducing parasitic leakage in a memory array with merged isolation and node trench construction
DE19514834C1 (de) * 1995-04-21 1997-01-09 Siemens Ag Festwertspeicherzellenanordnung und Verfahren zu deren Herstellung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04226071A (ja) * 1990-05-16 1992-08-14 Ricoh Co Ltd 半導体メモリ装置
DE19510042C2 (de) * 1995-03-20 1997-01-23 Siemens Ag Festwert-Speicherzellenanordnung und Verfahren zu deren Herstellung
DE19609678C2 (de) * 1996-03-12 2003-04-17 Infineon Technologies Ag Speicherzellenanordnung mit streifenförmigen, parallel verlaufenden Gräben und vertikalen MOS-Transistoren und Verfahren zu deren Herstellung
DE19732871C2 (de) * 1997-07-30 1999-05-27 Siemens Ag Festwert-Speicherzellenanordnung, Ätzmaske für deren Programmierung und Verfahren zu deren Herstellung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4214923A1 (de) * 1991-05-31 1992-12-03 Mitsubishi Electric Corp Masken-rom-einrichtung und verfahren zu deren herstellung
JPH05343680A (ja) * 1992-06-10 1993-12-24 Kawasaki Steel Corp 半導体装置の製造方法
US5448090A (en) * 1994-08-03 1995-09-05 International Business Machines Corporation Structure for reducing parasitic leakage in a memory array with merged isolation and node trench construction
DE19514834C1 (de) * 1995-04-21 1997-01-09 Siemens Ag Festwertspeicherzellenanordnung und Verfahren zu deren Herstellung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 174 (E - 1530) 24 March 1994 (1994-03-24) *

Also Published As

Publication number Publication date
DE19807920A1 (de) 1999-09-02
KR100604180B1 (ko) 2006-07-25
EP1060474A2 (de) 2000-12-20
US6472696B1 (en) 2002-10-29
WO1999044204A2 (de) 1999-09-02
KR20010041278A (ko) 2001-05-15
JP2002505516A (ja) 2002-02-19

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