WO2000016043A1 - Angle speed sensor - Google Patents
Angle speed sensor Download PDFInfo
- Publication number
- WO2000016043A1 WO2000016043A1 PCT/JP1999/005029 JP9905029W WO0016043A1 WO 2000016043 A1 WO2000016043 A1 WO 2000016043A1 JP 9905029 W JP9905029 W JP 9905029W WO 0016043 A1 WO0016043 A1 WO 0016043A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- amplifier
- output
- voltage
- detecting
- output signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
Definitions
- the present invention relates to an angular velocity sensor.
- the angular velocity sensor includes an excitation unit that applies vibration to the tuning fork vibrator, a unit that detects a vibration level of the vibrator, a detection unit that detects Coriolisa that occurs according to the angular velocity, and an output signal of the unit that detects the vibration level.
- a first amplifier that amplifies the output of the first amplifier; a rectifier circuit that rectifies an output signal of the first amplifier to obtain a DC voltage; a comparator that compares an output voltage of the rectifier with a reference voltage; and an output from the first amplifier.
- a variable gain amplifier connected to the excitation unit so that the amplification degree of amplifying a voltage whose voltage phase is shifted by 90 ° by the output voltage from the comparison unit changes and the amplitude of the tuning fork vibrator is kept constant. are doing.
- variable gain amplifier immediately after the power is turned on, the amplification of the variable gain amplifier becomes the maximum within a predetermined value, and the sound ⁇ ⁇ works so as to increase the amplitude of the vibrator rapidly, and the effect of shortening the startup time of the sensor is somewhat reduced. Is there.
- variable range of the amplification factor of the variable gain amplifier is finite and cannot be made very large, it takes a long time for the amplitude level of the tuning fork vibrator to reach the predetermined value.
- the startup time of the sensor can be reduced, but the problem of saturation of the output voltage waveform of the variable gain amplifier, It is difficult to increase the maximum value of the amplification of the variable gain amplifier beyond the specified value from the comprehensive viewpoint of maintaining the reduction of the amplitude and stability when controlling the amplitude of the tuning fork vibrator at a constant value.
- An object of the present invention is to solve the above-mentioned conventional problems and to provide an angular velocity sensor capable of shortening a start-up time.
- the present invention provides an exciting unit that applies vibration to a vibrating body, a unit that detects a vibration level of the vibrating body, a detecting unit that detects Corioliska generated according to an angular velocity, A first amplifier for amplifying an output signal of the detecting means, a rectifying circuit for rectifying an output signal of the first amplifier to obtain a DC voltage, and a rectifying circuit for receiving an output signal of the first amplifier and inputting the output signal of the first amplifier.
- a variable gain amplifier whose amplification degree changes according to the value of the output voltage; a second amplifier that amplifies an output signal of the variable gain amplifier; and an output voltage of the rectifier circuit and an output voltage of a reference voltage generation unit that are input.
- a first resistor is inserted between a negative input terminal of a third amplifier and an output terminal of the third amplifier, A voltage having a magnitude near 1 to 2 of the power supply voltage is applied to the negative input terminal of the third amplifier via a capacitor, and a voltage between the output terminal of the third amplifier and the input terminal of the second amplifier is applied.
- a second resistor and the switch means are connected in series, and the switch means is driven by the output of the level determination circuit.
- the angular velocity sensor clears all general items such as the problem of saturation of the output voltage waveform of the variable gain amplifier, maintenance of reduced noise, and stability when controlling the amplitude of the tuning fork vibrator at a constant level. It is possible to reduce the start-up time of the system. This is particularly effective in the case of a quartz tuning fork vibrator with a large sharpness Q.
- FIG. 1 is a block diagram illustrating an embodiment of an angular velocity sensor according to the present invention
- FIG. 2 is a switch control circuit of a second voltage amplifier in the sensor
- FIG. 3 is a diagram for detecting a vibration level in the sensor.
- FIG. 4 is an explanatory diagram of output signals of the means and a state of applying a voltage to an excitation unit.
- FIG. 1 is a block diagram of an angular velocity sensor according to an embodiment of the present invention.
- 1 is a tuning fork structure vibration type angular velocity sensor element block
- 2 is a first amplifier
- 3 is a rectifier
- 4 is a smoothing circuit
- 5 is a variable gain amplifier
- 6 is a second amplifier
- 7 is a second amplifier.
- 4 is an amplifier
- 8 is a synchronous detector
- 9 is a mouth-to-pass filter.
- Reference numeral 10 denotes an excitation unit configured by attaching a piezoelectric element to a vibrating member
- 11 denotes a unit configured by attaching a piezoelectric element to a vibrating member, and a means for detecting a vibration level.
- Exciting part 10 and first detecting means 12 are orthogonally joined by first and second detecting means for detecting the generated Coriolis, and means 11 and second detecting means 13 for detecting vibration level are also orthogonal. They are joined and connected by a connecting plate 14, and the connecting plate 14 is supported at one point by a support rod 15 to form a tuning fork structure vibration type angular velocity sensor element block 1.
- a first amplifier 2 for amplifying as an input signal an output signal of a means 11 for detecting a sound or vibration caused by the vibration of the excitation unit 10 and a means 11 for detecting the vibration level
- the first amplifier 2 A rectifier 3 for rectifying the output signal of the rectifier 3, a smoothing circuit 4 for smoothing an output voltage of the rectifier 3, and an amplification degree for amplifying an output voltage from the first amplifier 2 according to an output voltage value of the smoothing circuit 4. It comprises a variable gain amplifier 5 for controlling the amplitude of the tuning fork vibrator to be constant, and a second amplifier 6 for amplifying the output signal of the variable gain amplifier.
- the signals of the first and second detecting means 12 and 13 for detecting Coriolisa generated according to the applied angular velocity are amplified by a fourth amplifier 7 and are synchronized by a synchronous detector 8 at the period of the tuning fork vibrator.
- the voltage is detected and becomes a voltage proportional to the angular velocity, amplified by the low-pass filter 9, and output as an angular velocity voltage signal.
- reference numeral 20 denotes a third amplifier
- 21 denotes a capacitor
- 22 denotes a first resistor
- 23 denotes a second resistor
- 24 denotes a capacitor
- 25 denotes a reference voltage generator
- 2 denotes a reference voltage generator.
- 6 is a level judgment circuit
- 27 is a switch means.
- a level determination circuit 26 to which the output voltage of the rectifier 3 and the output voltage of the reference voltage generator 25 are input, and a third amplifier 2 between the first amplifier 2 and the second amplifier 6 0 and switch means 27 are provided.
- the negative input terminal of the third amplifier 20 is connected to a voltage of 1 Z2 of the power supply voltage Vcc via a capacitor 21.
- an output signal of the first amplifier 2 is input to a positive input terminal of the third amplifier 20, and a negative input terminal of the third amplifier 20 and the third amplifier 20.
- a first resistor 22 is inserted between the output terminal of the third amplifier 20 and a second resistor 23 between the output terminal of the third amplifier 20 and the input terminal of the second amplifier 6.
- Switch means 27 are connected in series. The first resistor 22 and the second resistor 23 are 1 ⁇ and 20 respectively.
- the third amplifier 20 operates with an output waveform from the power supply voltage to the ground voltage centering on the reference voltage (1/2 of the power supply voltage V cc), and operates in the first stage of the timing chart (see FIG. 2).
- the third amplifier 20 is turned on and off, respectively, and as shown in FIG. 3, the initial stage where the amplitude of the tuning fork vibrator is small (the output signal of the means 11 for detecting the vibration level).
- the output voltage of the second amplifier 6 can be very large (the voltage applied to the excitation unit 10 becomes the maximum output voltage from the start-up), and the amplitude of the tuning fork vibrator is reduced.
- the amplification becomes small (the voltage applied to the excitation unit 10 also decreases), and the angular velocity sensor is activated. Only time can be significantly reduced Alternatively, the third amplifier 20 is driven by the switch means 27 only when necessary at the time of startup, and at least after entering the final control area, the maximum value of the amplification of the variable gain amplifier 5 is set to the predetermined value as before. , It is possible to clear all comprehensive items such as output voltage waveform saturation, noise reduction, and stability when controlling the amplitude of the tuning fork vibrator constantly. .
- the vibrating body is not necessarily limited to the conventional sound or structural vibration type.
- the output voltage from the second amplifier is maximized by the third amplifier and the switch means at the time of startup, and the maximum value of the amplification degree of the variable gain amplifier at least after entering the final control region.
- An angular velocity sensor can be obtained that can significantly reduce the startup time while clearing all items such as maintaining the reduction and stability when controlling the amplitude of the vibrating body at a constant level.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE69938333T DE69938333T2 (de) | 1998-09-16 | 1999-09-14 | Winkelgeschwindigkeitssensor |
| US09/554,522 US6412347B1 (en) | 1998-09-16 | 1999-09-14 | Angle speed sensor |
| EP99943348A EP1031815B1 (en) | 1998-09-16 | 1999-09-14 | Angle speed sensor |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26114498A JP4075152B2 (ja) | 1998-09-16 | 1998-09-16 | 角速度センサ |
| JP10/261144 | 1998-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2000016043A1 true WO2000016043A1 (en) | 2000-03-23 |
Family
ID=17357720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP1999/005029 Ceased WO2000016043A1 (en) | 1998-09-16 | 1999-09-14 | Angle speed sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6412347B1 (ja) |
| EP (1) | EP1031815B1 (ja) |
| JP (1) | JP4075152B2 (ja) |
| DE (1) | DE69938333T2 (ja) |
| WO (1) | WO2000016043A1 (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6792802B2 (en) * | 2002-03-07 | 2004-09-21 | Honeywell International Inc. | Noise source for starting MEMS gyroscope |
| US6972619B2 (en) * | 2002-12-17 | 2005-12-06 | Matsushita Electric Industrial Co., Ltd. | Amplifier with a gain proportional to power source voltage |
| JP4529444B2 (ja) * | 2004-01-13 | 2010-08-25 | パナソニック株式会社 | 角速度センサ |
| JP2005227214A (ja) * | 2004-02-16 | 2005-08-25 | Matsushita Electric Ind Co Ltd | 角速度センサ及びそれを用いた自動車 |
| CN100368772C (zh) * | 2004-06-29 | 2008-02-13 | 东南大学 | 电容式微陀螺敏感信号的双路谐波提取方法及提取装置 |
| CN100368773C (zh) * | 2004-06-29 | 2008-02-13 | 东南大学 | 电容式微陀螺敏感信号的单路谐波提取方法及提取装置 |
| JP2006349409A (ja) * | 2005-06-14 | 2006-12-28 | Denso Corp | 静電駆動・容量検出型のジャイロセンサのセンサ回路 |
| JP4696996B2 (ja) * | 2006-03-27 | 2011-06-08 | パナソニック株式会社 | 慣性力センサ |
| JP5034808B2 (ja) * | 2006-10-17 | 2012-09-26 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
| JP5136016B2 (ja) * | 2006-11-27 | 2013-02-06 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
| JP4450029B2 (ja) * | 2007-07-24 | 2010-04-14 | セイコーエプソン株式会社 | 発振駆動回路、発振駆動装置、物理量測定回路、物理量測定装置および電子機器 |
| FR2937413B1 (fr) | 2008-10-22 | 2010-11-26 | Sagem Defense Securite | Procede de commande d'un capteur a resonateur vibrant a demarrage rapide |
| JP5625916B2 (ja) | 2009-02-13 | 2014-11-19 | パナソニック株式会社 | 発振回路、発振回路の製造方法、この発振回路を用いた慣性センサ及び電子機器 |
| JP6662254B2 (ja) * | 2016-09-13 | 2020-03-11 | 横河電機株式会社 | 駆動回路および物理量センサ装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0348714A (ja) * | 1989-07-18 | 1991-03-01 | Matsushita Electric Ind Co Ltd | 角速度センサ駆動回路 |
| JPH0933262A (ja) * | 1995-07-25 | 1997-02-07 | Nikon Corp | 励振駆動回路及び方法並びにこれを用いた圧電振動角速度計 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041802A (en) | 1989-10-11 | 1991-08-20 | Zilog, Inc. | Low power oscillator with high start-up ability |
| JP3932661B2 (ja) * | 1998-03-31 | 2007-06-20 | 松下電器産業株式会社 | 角速度センサ駆動回路 |
-
1998
- 1998-09-16 JP JP26114498A patent/JP4075152B2/ja not_active Expired - Fee Related
-
1999
- 1999-09-14 US US09/554,522 patent/US6412347B1/en not_active Expired - Fee Related
- 1999-09-14 DE DE69938333T patent/DE69938333T2/de not_active Expired - Lifetime
- 1999-09-14 WO PCT/JP1999/005029 patent/WO2000016043A1/ja not_active Ceased
- 1999-09-14 EP EP99943348A patent/EP1031815B1/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0348714A (ja) * | 1989-07-18 | 1991-03-01 | Matsushita Electric Ind Co Ltd | 角速度センサ駆動回路 |
| JPH0933262A (ja) * | 1995-07-25 | 1997-02-07 | Nikon Corp | 励振駆動回路及び方法並びにこれを用いた圧電振動角速度計 |
Non-Patent Citations (1)
| Title |
|---|
| See also references of EP1031815A4 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4075152B2 (ja) | 2008-04-16 |
| DE69938333T2 (de) | 2009-05-14 |
| EP1031815B1 (en) | 2008-03-12 |
| US6412347B1 (en) | 2002-07-02 |
| DE69938333D1 (de) | 2008-04-24 |
| EP1031815A4 (en) | 2000-11-29 |
| EP1031815A1 (en) | 2000-08-30 |
| JP2000088581A (ja) | 2000-03-31 |
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