WO2000052514A1 - Dispositif de modulation de l'intensite lumineuse avec un micro-choppeur - Google Patents

Dispositif de modulation de l'intensite lumineuse avec un micro-choppeur Download PDF

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Publication number
WO2000052514A1
WO2000052514A1 PCT/EP2000/001532 EP0001532W WO0052514A1 WO 2000052514 A1 WO2000052514 A1 WO 2000052514A1 EP 0001532 W EP0001532 W EP 0001532W WO 0052514 A1 WO0052514 A1 WO 0052514A1
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WO
WIPO (PCT)
Prior art keywords
surface element
base element
base
area
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2000/001532
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German (de)
English (en)
Inventor
Ralf Schnupp
Jochen Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of WO2000052514A1 publication Critical patent/WO2000052514A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers

Definitions

  • the invention relates to a device for light intensity modulation with a microchopper, which provides a surface element which has a reflecting surface on which a light beam directed onto the surface of the surface element can be reflected, and which is connected to a base element in this way via at least one connecting region, that the surface element is tiltable relative to the base element, the surface element and the base element having dimensions between the ⁇ m and mm range, and with an actuator by means of which the surface element can be repeatedly deflected from a normal position.
  • chopper systems serve to deliberately interrupt the path of a propagating light beam, which usually emanates from a continuously emitting light source.
  • the light interruption serves the purpose of generating light pulses which are used in a variety of ways in technical measuring methods. With suitably short selected light pulses, runtime measurements and thus also distance determinations can be carried out. It is also among other things
  • CONFIRMATION COPY possible to use such modulated light pulses for electronic amplifiers (lock-in amplifiers) in order to be able to better record strongly noisy measurement signals.
  • the signal to be measured is divided into small signal pulses, in that in the fluorescent light measurement the intensity of the exciting light is switched on and off by a chopper system with a specific modulation frequency up to several kHz.
  • This modulation frequency is given as a reference signal in the phase-sensitive amplifier, which filters out only a narrow range around the modulation frequency from the wide frequency spectrum of the measurement signal, then rectifies the signal synchronously with the modulator and smoothes it via a timing element. In this way, the signal to noise ratio can be improved by up to six orders of magnitude.
  • Chopper systems known per se consist of a rapidly rotating chopper wheel which rotates around a motor-driven axis like a carriage wheel and has areas which are translucent radially around the axis of rotation.
  • the chopper wheel is introduced into the light path of a light beam to interrupt the light, so that the light beam can propagate freely through the translucent areas provided in the chopper wheel. If the light beam hits wing sections of the chopper wheel which interrupt the light path due to rotation of the chopper wheel, this is periodically interrupted when the chopper wheel is turned.
  • modulation frequencies of a few 10 to 100 kHz can be achieved.
  • such devices can serve as miniaturized measuring probes, but the technological effort for producing the motor drive required for the rotary movement of the chopper wheels increases very strongly.
  • the micromotors produced with the aid of known micromechanical manufacturing methods have relatively short lifetimes and high synchronous fluctuations and low power, making them unusable for use in commercial measuring devices.
  • microchopper systems which can be produced using silicon technology and, in contrast to the chopper wheel principle, in which the light beam to be interrupted passes through the chopper wheel, are operated in the so-called reflection mode.
  • a largely free-standing micromechanically produced surface element is used, which is connected in the manner of a free-standing tongue to a base element, relative to which the surface element is mounted such that it can be tilted.
  • the free-standing surface element has a reflective surface, to which the light beam to be interrupted is directed.
  • the light beam directed onto the surface element is deflected.
  • the intensity of a light beam falling through the aperture can be varied and measured at the same time.
  • an electrode is provided on the tongue-shaped surface element, which is arranged at a distance from a counter electrode. If an electrical voltage is applied between this and the opposite electrode, the tongue-shaped surface element is deflected. Depending on the frequency of the AC voltage applied between the two electrodes, the surface element is periodically deflected in the same time rhythm, as a result of which a certain modulation frequency is impressed on the light beam.
  • the invention is based on the object of a device for light intensity modulation with a microchopper, which provides surface element, which has a reflecting surface on which a light beam directed onto the surface of the surface element can be reflected and which is connected to a base element in this way via at least one connecting region, that the surface element is tiltable relative to the base element, the surface element and the base element having dimensions between the ⁇ m and mm range, and with an actuator by means of which the surface element can be repeatedly deflected from a normal position, in such a way that the microchopper over has a high frequency stability and a long service life, and operation must not require high electrical voltages.
  • the chopper should also be able to be used in medical devices in which the use of high voltage should be avoided for reasons of increased operational safety.
  • a method is to be specified with which the light intensity modulation can be carried out on the basis of the known reflection technique, but which avoids any disadvantages associated with the electrostatic microchopper.
  • the chopper device should be able to be manufactured with the least possible technical, structural and also financial outlay.
  • the solution to the problem on which the invention is based is specified in claim 1.
  • the subject of claim 8 is a method for producing the chopper device.
  • the device according to the invention for light intensity modulation in the manner of a microchopper according to the preamble of claim 1 is designed according to the invention in that the surface element and the base element are integrally connected to one another and consist of a semiconductor material that at least a partial area of the surface element (1) has a ferromagnetic layer is coated, and that the actuator (5) generates alternating electromagnetic fields and is arranged in relation to the surface element (1) such that the surface element (1) can be deflected in a targeted manner relative to the base element (2) by means of the forces induced by the alternating electromagnetic field.
  • the microchopper according to the invention can also be realized on macroscopic scales, but the advantages associated with the microchopper device according to the invention are particularly clear, particularly in the component size range down to a few millimeters and even micrometers.
  • the microchopper according to the invention is manufactured as a micromechanical component based on silicon technology, the largely free-standing surface element, which is connected to a base element only via a small connection area, preferably having a ferromagnetic layer, preferably an Fe layer, over the entire surface.
  • a reflective layer is applied to at least one upper side of the surface element, the reflectivity of which is adapted to the light wavelength of the light directed onto the surface element, the wavelength of which can range from the ultraviolet to the visible wavelength range to the infrared. Depending on the light wavelength used, the reflectivity of the layer must be adjusted accordingly.
  • the targeted deflection of the tongue-shaped surface element takes place on the basis of an alternating electromagnetic field, which is generated by an electrical coil which is arranged in the immediate vicinity of the surface element.
  • an alternating electromagnetic field which is generated by an electrical coil which is arranged in the immediate vicinity of the surface element.
  • alternative measures can also be taken which expose the surface element to an alternating electromagnetic field. It is thus conceivable to integrate the surface element in an externally generated alternating electromagnetic field, which can be generated with magnetic coil arrangements, such as are used to record nuclear magnetic resonance examinations.
  • the design of the actuator for generating alternating electromagnetic fields in the form of an inductance can be achieved with the means of silicon semiconductor technology in the Micrometer range and below are scaled and in this way offers a decisive advantage over known, conventional motor drives, as is the case with miniaturized chopper wheels.
  • the actuator designed as an inductor is preferably arranged on the opposite side of the surface element to the reflective surface to which the light to be reflected is directed, whereby a compact construction of the device according to the invention is possible.
  • the device according to the invention is based on the principle of the method that a light beam to be interrupted or chopped is directed onto a reflective surface whose spatial position carries out periodic tilting movements according to a desired modulation frequency, whereby the light beam is deflected accordingly.
  • the spatial deflection of the surface element on which the reflecting surface is applied occurs exclusively by means of magnetic forces which are generated by the interaction of a ferromagnetic layer within an alternating electromagnetic field. Because of the interaction based on pure magnetic forces, it is possible to use the device according to the invention also in areas which are sensitive to the occurrence of electrical fields, which necessitate the use of high electrical voltages.
  • the device according to the invention is suitable for medical devices, since the operation of the device only involves electrical voltages in the low voltage range, i.e. Voltages ⁇ 40 volts required.
  • Another advantage of the device according to the invention is its cost-effective production using silicon technology and the associated low outlay for the assembly and connection technology with which the surface element is connected to the base element.
  • a crystalline silicon is particularly suitable as the base material for the microchopper device, from which the base element, initially in the form of a three-dimensional plate, typically with side edges from a few ⁇ m to some 100 ⁇ m in length or a few mm in length.
  • the base element initially in the form of a three-dimensional plate, typically with side edges from a few ⁇ m to some 100 ⁇ m in length or a few mm in length.
  • To form the largely free-standing surface element from the one-piece base element it is treated in a targeted manner by means of ion implantation or by means of an etching method, preferably an ion-etching method, using a suitable etching mask in an area which later corresponds to the largely free-standing surface element.
  • the ion implantation or the etching process takes place from one side of the base element and penetrates the element to depths of approximately 10 ⁇ m, which defines the volume of the surface element.
  • a masking layer for example in the form of an oxide or nitride layer, is applied to both sides of the base element, which serves as protection against the subsequent etching solution acting on the base element.
  • the protective layer is removed, for example, by photolithographic exposure at those locations that are to be removed in a subsequent etching process.
  • the photolithographic exposure process determines the outer shape of the subsequent, largely free-standing surface element, which remains connected to the rest of the base element only over a small area.
  • the surface element is preferably designed as a rectangular surface which remains connected to the base element via a single side edge which is as short as possible. However, other surface element geometries can also be produced which allow the surface element to be tilted relative to the base element.
  • connection area between the surface element and the base element can also be realized via one or more silicon webs, in order in this way to increase the flexibility of the device.
  • round or n-square surface elements are also conceivable, which can be connected to the base element via one or more connecting webs.
  • the base element consisting of silicon is etched from one side, preferably from that which does not have the highly reflective metal layer, with the aid of potassium hydroxide.
  • potassium hydroxide a material removal technique that can also be used targeted exposure of the desired surface element allowed to be applied.
  • etching solution consisting of potassium hydroxide
  • material is removed only at those locations on the base element which neither have a high dose of ions which have been introduced into the base material in the ion implantation step described above, nor have a protective layer on the surface of the base element, so that after the removal of any masking steps a largely free-standing surface element is created which remains connected to the base element in one or more areas.
  • the upper and / or the lower side of the surface element to be largely etched free subsequently is loaded with a ferromagnetic material, which is preferably deposited on the surface element as a ferromagnetic layer with a homogeneous layer thickness.
  • the reflection layer which preferably consists of a metal which is highly reflective for the desired wavelength range, is then applied to the top or bottom of the element.
  • the tiltable surface element obtained in this way is connected to an actuator generating an alternating electromagnetic field, as described in detail below.
  • Fig. 1 is a perspective view of a surface element with inductance attached to a base element
  • Fig. 2 shows a schematic measuring arrangement with a microchopper system. WAYS OF CARRYING OUT THE INVENTION, INDUSTRIAL APPLICABILITY
  • the square element 1 in the exemplary embodiment has a reflective layer 3 on its upper side, on which a light beam 4 is reflected as losslessly as possible.
  • the reflective layer 3 consists of a metal layer which is specifically selected as a function of the wavelength of the light beam 4 and which is applied locally to the surface element 1 by way of known deposition processes.
  • a further layer 31 made of ferromagnetic material is provided in a homogeneously distributed manner.
  • an excitation coil 5 is provided, which serves for the targeted generation of the alternating magnetic field.
  • the excitation coil 5 is shown schematically in FIG. 1 and can be designed as an inductor with dimensions in the micrometer range using the measures known in silicon technology.
  • the light beam 4 is deflected in different spatial directions.
  • the light beam is deflected synchronously with the periodic deflection of the surface element 1, which can be determined by the frequency and amplitude of the alternating magnetic field.
  • FIG. 2 shows an example of a measuring arrangement in which the microchopper system according to the invention is integrated.
  • the example shows an infrared absorption measuring system with which components of gases can be determined.
  • a light beam from an infrared light source 6 falls on the reflective top of the surface element 1 of the microchopper which, in the exemplary embodiment shown, provides an excitation coil 5 arranged below the surface element 1.
  • Via a collimator 7 and through an aperture 9 the light reflected on the reflecting upper side of the surface element 1 falls into the interior of a measuring volume 10 filled with gas.
  • the measurement volume 10 consists of a hollow glass channel through which a gas stream G flows, so that the light beam coupled into the measurement volume 10 is predominantly totally reflected several times on the inner wall of the hollow channel.
  • the light beam reaches a detector 8, which detects the intensity of the light beam, via a coupling-out location.
  • a detector 8 which detects the intensity of the light beam, via a coupling-out location.
  • an aperture 9 is provided through which the light enters as well as - emerges in or from the measurement volume 10 to be limited to a spatially narrow gap.
  • the light beam only enters the interior of the measuring volume when the surface element 1 of the microchopper is in a suitable position and runs there through the zigzag path shown in exemplary embodiment 2 until the light beam emerges from the measuring volume 10 again.
  • the light beam is subject to absorption and thus intensity attenuation within the measuring volume, which can be detected by the detector 8.
  • optical filters which are not shown in further detail and which are brought into the beam path, certain frequency ranges can be separated from the beam by suitable detector arrangements and the absorption can be measured.
  • the concentration of different gases within a measuring volume can be determined quickly and precisely, for example.
  • the aid of the lock-in amplifier technology explained in detail in the introduction to the description, it is possible with the measuring setup shown in FIG. 2 to significantly increase the signal-to-noise ratio of the measuring apparatus and thus to reduce the detection limits of gas concentrations.
  • the modulation frequency with which the excitation coil 5 is excited and which moves the surface element synchronously serves as a result of which the infrared light beam is only pulsed at a certain frequency the measuring volume 10 occurs as a reference signal, which is input into the lock-in amplifier.
  • the measurement signal originating from the detector is processed in a corresponding manner, so that the signal-to-noise ratio can be improved by a few orders of magnitude.
  • the measuring system shown in FIG. 2 can be used, for example, in medical technology for the determination of breathing gas and, because of its small dimensions, offers the possibility of constructing the smallest measuring probes.
  • the microchopper With the manufacture of the microchopper according to the invention, it is possible to implement it with an edge length of 100 m (LxWxH), the usual dimensions being a few mm, for example 3 x 3 x 0.3 mm (LxWxH). Combined with a coil, the smallest dimensions are around 500 x 500 x 400 ⁇ m.
  • the operating voltages required for operation are in the range between 5 and 50 V.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif et un procédé de modulation d'intensité lumineuse avec un micro-choppeur. Selon l'invention, il est prévu un élément de surface comportant une surface réfléchissante sur laquelle peut être réfléchi un faisceau lumineux dirigé sur la surface dudit élément de surface. Ce dernier est relié à un élément de base par l'intermédiaire d'au moins une zone de connexion, de manière que ledit élément de surface puisse basculer par rapport à l'élément de base, ainsi qu'à un actionneur permettant de dévier à plusieurs reprises l'élément de surface de manière ciblée d'une position normale. L'invention se caractérise en ce qu'au moins des zones partielles de l'élément de surface sont magnétiques et en ce que l'actionneur produit des champs alternatifs électromagnétiques et est disposé par rapport à l'élément de surface, de sorte à pouvoir être dévié de façon ciblée par rapport à l'élément de base, sous l'effet des forces induites par le champ alternatif électromagnétique.
PCT/EP2000/001532 1999-02-26 2000-02-24 Dispositif de modulation de l'intensite lumineuse avec un micro-choppeur Ceased WO2000052514A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19908514.5 1999-02-26
DE1999108514 DE19908514A1 (de) 1999-02-26 1999-02-26 Vorrichtung und Verfahren zur Lichtintensitätsmodulation

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WO2000052514A1 true WO2000052514A1 (fr) 2000-09-08

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7456155B2 (en) 2002-06-28 2008-11-25 Idenix Pharmaceuticals, Inc. 2′-C-methyl-3′-O-L-valine ester ribofuranosyl cytidine for treatment of flaviviridae infections

Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
US7760411B2 (en) * 2006-11-20 2010-07-20 Alcon, Inc. System and method for illumination attenuation

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JPS60243540A (ja) * 1984-05-18 1985-12-03 Fujitsu Ltd ガス険知装置
JPS62106430A (ja) * 1985-11-01 1987-05-16 Seiko Instr & Electronics Ltd シヤツタアレイ
US5468961A (en) * 1991-10-08 1995-11-21 Fisher & Paykel Limited Infrared gas analyser and humidity sensor
WO1997045878A1 (fr) * 1996-05-31 1997-12-04 The Regents Of The University Of California Micro-actionneur magnetique
DE29801643U1 (de) * 1998-01-31 1998-06-04 CMS Mikrosysteme GmbH Chemnitz, 09125 Chemnitz Mikromechanische und elektromagnetisch betriebene Spiegelanordnungen
US5910856A (en) * 1998-04-16 1999-06-08 Eastman Kodak Company Integrated hybrid silicon-based micro-reflector

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7456155B2 (en) 2002-06-28 2008-11-25 Idenix Pharmaceuticals, Inc. 2′-C-methyl-3′-O-L-valine ester ribofuranosyl cytidine for treatment of flaviviridae infections

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