WO2001071299A2 - Procede et appareil de correction des sorties de microbolometres - Google Patents

Procede et appareil de correction des sorties de microbolometres Download PDF

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Publication number
WO2001071299A2
WO2001071299A2 PCT/US2001/008417 US0108417W WO0171299A2 WO 2001071299 A2 WO2001071299 A2 WO 2001071299A2 US 0108417 W US0108417 W US 0108417W WO 0171299 A2 WO0171299 A2 WO 0171299A2
Authority
WO
WIPO (PCT)
Prior art keywords
temperature
microbolometer
output
offset
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/008417
Other languages
English (en)
Other versions
WO2001071299A3 (fr
Inventor
P. E. Jonathan P. Knauth
Steven M. Balik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infrared Components Corp
Original Assignee
Infrared Components Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/804,945 external-priority patent/US6630674B2/en
Priority claimed from US09/809,554 external-priority patent/US6610984B2/en
Application filed by Infrared Components Corp filed Critical Infrared Components Corp
Priority to AU2001255178A priority Critical patent/AU2001255178A1/en
Publication of WO2001071299A2 publication Critical patent/WO2001071299A2/fr
Publication of WO2001071299A3 publication Critical patent/WO2001071299A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/20—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming only infrared radiation into image signals
    • H04N25/21—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming only infrared radiation into image signals for transforming thermal infrared radiation into image signals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/67—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response
    • H04N25/671—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response for non-uniformity detection or correction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors

Definitions

  • a lens is employed to focus energy onto a two-dimensional array of microbolometer detectors such that a spatially varying infrared field can be detected and converted to visible imagery using electronics and display means such as are commonly employed for visible imagery using Charge-Coupled Device (CCD) cameras.
  • the electronics typically include a multiplexing circuit in intimate contact with the microbolometer array which converts the voltage or current variation of the many microbolometer elements to one or several multiplexed analog ⁇ e . g. , voltage variation) data streams. This analog data is then converted to digital data using an analog-to-digital converter (ADC) , and is then further processed to produce data for analysis or imagery on a Cathode Ray Tube (CRT) or similar video monitor.
  • ADC analog-to-digital converter
  • the detection means is based on the thermal variations of the detector causes several practical problems.
  • the material must be thermally isolated from surrounding matter so that a sufficiently large ⁇ e . g. , several mK) temperature variation may occur as a result of the weak impinging infrared energy.
  • Liddiard, in US Patents 4,574,263 and 5,369,280, and Higashi, et al . , in US Patent 5,300,915 describe a microbolometer that provides thermal isolation by depositing a semiconductor material onto a pellicle, or "micro-bridge" structure that physically separates the detector from the supporting substrate.
  • the temperature of the supporting substrate must be stable so that erroneous signals are not generated from its temperature fluctuations.
  • a third general aspect of the present invention is to provide an apparatus for correction of a microbolometer detector output, said apparatus comprising: at least one microbolometer detector; a thermal noise reduction system operationally connected to said at least one microbolometer detector; an electrical reference circuit connected to said at least one microbolometer detector; an output from said electrical reference circuit connected to an input of a signal conditioning circuit; and an output from said signal conditioning circuit connected to a display device.
  • a fourth general aspect of this invention is to provide a method for modulating the sensitivity of a microbolometer by conditioning the multiplexed output of a microbolometer focal plane array so that the peak-to-peak voltage of the analog signal is within the range of an analog-to-digital converter's input sensitivity at any arbitrary sampling time.
  • offset difference (T) offset (T n ) - offset (T)
  • offset difference (T) offset (T n ) - offset (T)
  • offset values corresponding to many different detectors may be averaged to create an average offset difference function vs. detector temperature.
  • This function is 5 preferably in the form of a polynomial expression that is determined through the process of empirical curve fitting of calibration data.
  • the fixed pattern noise may then be removed by algebraically adding the offset difference function so created from pixel offset
  • offset Corrected (T) offset piXe i (T n ) +offset_difference (T) * correction_factor
  • the temperature sensor is read 706 by the computer and an algorithm is applied to correct 708 the analog output of the FPA to bring its peak-to-peak voltage output into the sensitivity range of the analog-to- digital converter (ADC) 122 (FIG. 1) .
  • the predetermined per-pixel stored offset data 707 is used in the correction algorithm 708 to calculate analog offset values which are stored in memory 709.
  • the previously calculated offset values are applied 711 to these frames.
  • the resulting signal is then converted to digital data 712, and when used, the stored digital offset values are applied 713.
  • the previously stored gain values are applied 714, yielding the corrected images 715.

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

La présente invention concerne un procédé et un appareil de correction des variations dues à la température dans les caractéristiques de sorties analogues d'un détecteur microbolométrique dans un réseau plan focal de détection infrarouge, utilisant un dispositif électronique pour corriger les variations de température du détecteur microbolométrique. En outre, cette invention concerne le circuit électronique et le logiciel associé nécessaires à la mise en oeuvre.
PCT/US2001/008417 2000-03-17 2001-03-16 Procede et appareil de correction des sorties de microbolometres Ceased WO2001071299A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001255178A AU2001255178A1 (en) 2000-03-17 2001-03-16 Method and apparatus for correction of microbolometer output

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US19015600P 2000-03-17 2000-03-17
US60/190,156 2000-03-17
US09/804,945 2001-03-13
US09/804,945 US6630674B2 (en) 2000-03-17 2001-03-13 Method and apparatus for correction of microbolometer output
US09/809,554 2001-03-15
US09/809,554 US6610984B2 (en) 2000-03-17 2001-03-15 Method and apparatus for correction of microbolometer output

Publications (2)

Publication Number Publication Date
WO2001071299A2 true WO2001071299A2 (fr) 2001-09-27
WO2001071299A3 WO2001071299A3 (fr) 2002-01-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/008417 Ceased WO2001071299A2 (fr) 2000-03-17 2001-03-16 Procede et appareil de correction des sorties de microbolometres

Country Status (2)

Country Link
AU (1) AU2001255178A1 (fr)
WO (1) WO2001071299A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8645104B2 (en) 2006-12-28 2014-02-04 Thermoteknix Systems Limited Correction of non-uniformity of response in sensor arrays
EP2833622A1 (fr) * 2013-07-30 2015-02-04 Ulis Diagnostic de l'etat defectueux d'une matrice de detection bolométrique
CN113063503A (zh) * 2021-03-17 2021-07-02 北京安酷智芯科技有限公司 一种基于探测器的高温目标检测方法及装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2110368C (fr) * 1992-12-07 1999-11-23 Gary M. Lindgren Correction a grande dynamique des defauts d'uniformite dans les reseaux a plan focal infrarouges
US5631466A (en) * 1995-06-16 1997-05-20 Hughes Electronics Apparatus and methods of closed loop calibration of infrared focal plane arrays
US5756999A (en) * 1997-02-11 1998-05-26 Indigo Systems Corporation Methods and circuitry for correcting temperature-induced errors in microbolometer focal plane array

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8645104B2 (en) 2006-12-28 2014-02-04 Thermoteknix Systems Limited Correction of non-uniformity of response in sensor arrays
EP2833622A1 (fr) * 2013-07-30 2015-02-04 Ulis Diagnostic de l'etat defectueux d'une matrice de detection bolométrique
FR3009388A1 (fr) * 2013-07-30 2015-02-06 Ulis Diagnostic de l'etat defectueux d'une matrice de detection bolometrique
US9581500B2 (en) 2013-07-30 2017-02-28 Ulis Diagnosis of the defective state of a bolometric detection array
CN113063503A (zh) * 2021-03-17 2021-07-02 北京安酷智芯科技有限公司 一种基于探测器的高温目标检测方法及装置

Also Published As

Publication number Publication date
AU2001255178A1 (en) 2001-10-03
WO2001071299A3 (fr) 2002-01-17

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