WO2002098603A1 - Produktionsmaschine - Google Patents
Produktionsmaschine Download PDFInfo
- Publication number
- WO2002098603A1 WO2002098603A1 PCT/DE2002/001782 DE0201782W WO02098603A1 WO 2002098603 A1 WO2002098603 A1 WO 2002098603A1 DE 0201782 W DE0201782 W DE 0201782W WO 02098603 A1 WO02098603 A1 WO 02098603A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- production machine
- machine according
- actuator
- rod
- pal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Program-controlled manipulators
- B25J9/16—Program controls
- B25J9/1615—Program controls characterised by special kind of manipulator, e.g. planar, scara, gantry, cantilever, space, closed chain, passive/active joints and tendon driven manipulators
- B25J9/1623—Parallel manipulator, Stewart platform, links are attached to a common base and to a common platform, plate which is moved parallel to the base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
- B23Q1/5462—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces with one supplementary sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
- B25J17/0258—Two-dimensional joints
- B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Program-controlled manipulators
- B25J9/003—Program-controlled manipulators having parallel kinematics
- B25J9/0033—Program-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base
- B25J9/0039—Program-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base with kinematics chains of the type prismatic-spherical-spherical
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Program-control systems
- G05B19/02—Program-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/39—Robotics, robotics to robotics hand
- G05B2219/39176—Compensation deflection arm
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/40—Robotics, robotics mapping to robotics vision
- G05B2219/40267—Parallel manipulator, end effector connected to at least two independent links
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/40—Robotics, robotics mapping to robotics vision
- G05B2219/40272—Manipulator on slide, track
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41206—Lookup table, memory with certain relationships
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41264—Driven by two motors
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41344—Piezo, electrostrictive linear drive
Definitions
- the invention relates to a production machine, also a machine tool or robot, in which an assembly can be positioned in space by means of a parallel kinematic arrangement with force-absorbing rods that can be driven by traversing axes.
- Typical of the principle of parallel kinematics is the use of rods, which are used both to apply force to the movement and to support a platform.
- a tripod as will be described in detail in connection with FIG. 1, is commercially available, for example. In such a tripod, two rods are arranged parallel to each other. The ends of each pair of rods are each connected to a slide. All carriages are moved in the x-direction either by an assigned linear motor or by a linearly acting servo motor (rack and pinion). So the three motors can do the three
- the object of the invention is to design a production machine of the type mentioned in the introduction in such a way that optimum conditions are achieved in the entire travel range by means of an optimized rod length correction.
- this object is achieved in that a linear actuator is provided in at least one of the rods, the axis of movement of which corresponds to the respective rod axis.
- the actuator can be supplied with a setpoint for static rod length correction that is assigned to the position of the unit, the simplest case of compensation without the effects of acceleration and load can be mastered become.
- further disturbance variables can also be compensated for by assigning an assigned setpoint for dynamic rod length correction to the actuator in accordance with the acceleration of the unit, or by assigning an assigned setpoint for load-dependent rod length correction to the actuator in accordance with a load effect on the unit.
- the number of possible degrees of freedom of movement depends on the parallel kinematics used. Accordingly, it is provided according to a further advantageous embodiment of the invention that in each case a linear actuator is provided in so many rods that all necessary degrees of freedom of movement can be controlled with the aid of some or all axes of movement of the rods. For example, it is conceivable that with three drives and three actuators in each rod of the rod pairs of a tripod, its six possible degrees of freedom can be mastered. Of course, the motors involved not only have to perform the pure movement function, they also have to perform correction movements.
- the actuator can be supplied with a setpoint for rod length correction in the assigned rod in accordance with the force or length state that can be determined by means of force or length measuring means, the actual state actually present in the system can be deduced and it does not have to expected target states are assumed.
- a piezo sensor is provided for each rod length or rod force detection, since such sensors have proven to be extremely reliable. If, however, both the actuator and the sensor operate according to the piezo principle, it is also conceivable that the respective piezo actuators in measuring phases for rod length detection or for rod force detection as
- Piezo sensor can be used. This results in a material-saving double use. However, it is also possible that strain gauges can be used as proven, inexpensive sensors for rod length or rod force detection.
- the illustration in Figure 1 shows a tripod having three rod pairs • consisting of rods Sl and S2 or S3 and S4 and S5 and S ⁇ .
- the bars S1 and S2 are attached to a slide SCHI and to a platform P.
- the rods S3 and S4 are attached to a slide SCH2 and also to the platform P.
- the rods S5 and S6 are attached to a slide SCH3 and also to the platform P.
- the platform P is a carrier of a tool WZ, which is used to machine a workpiece WS, which is located on a table T.
- the slides SCHI, SCH2 and SCH3 move in the x-direction along a guide F.
- the assigned drives are hidden in the illustration. If all three slides SCHI, SCH2 and SCH3 are moved without relative movement to one another, this leads to a pure movement in the x direction. If the tool direction WZ is intended to approach the y direction or the z direction orthogonally, the slides SCHI to SCH3 must be moved relative to one another. In this respect, the tripod corresponds to the state of the art.
- piezo actuators for rod length compensation are located in the bars S1 to S6. This is indicated for the rod S1 in the illustration according to FIG. 2 by the piezo actuator PA1.
- the required joint Gll or G12 is also symbolically indicated on both sides of the rod S1 and a stretching strip Dl for elongation or
- Piezo actuators would be PA2 to for the rods S2 to S6 PAß can be used accordingly. The same applies to the joints and strain gauges.
- the illustration according to FIG. 3 now shows that in principle three input variables for a converter UI can generate control signals for the rod length correction of all possible piezo actuators.
- the rod length corrections are designated as s P ⁇ ⁇ to s PA 6, since they are to be supplied to the piezo actuators PAl to PA ⁇ of the rods S1 to S6.
- the locations of the tool WZ targeted by the travel program are provided as Cartesian locations x WZ r ywz and z wz .
- the converter UI can then carry out a static compensation.
- the compensation variables can be present in the converter UI, for example by calculation or in the form of tabular relationships made from measurements.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Manufacturing & Machinery (AREA)
- Human Computer Interaction (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Orthopedic Medicine & Surgery (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/478,952 US6979932B2 (en) | 2001-06-01 | 2002-05-17 | Production machine |
| EP02737841A EP1392471B1 (de) | 2001-06-01 | 2002-05-17 | Produktionsmaschine |
| DE50212441T DE50212441D1 (de) | 2001-06-01 | 2002-05-17 | Produktionsmaschine |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10126848.3 | 2001-06-01 | ||
| DE10126848A DE10126848B4 (de) | 2001-06-01 | 2001-06-01 | Produktionsmaschine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2002098603A1 true WO2002098603A1 (de) | 2002-12-12 |
Family
ID=7686971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/DE2002/001782 Ceased WO2002098603A1 (de) | 2001-06-01 | 2002-05-17 | Produktionsmaschine |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6979932B2 (de) |
| EP (1) | EP1392471B1 (de) |
| DE (2) | DE10126848B4 (de) |
| WO (1) | WO2002098603A1 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110545963A (zh) * | 2018-04-10 | 2019-12-06 | 苏州迈澜医疗科技有限公司 | 多自由度并联机构 |
| CN111515926A (zh) * | 2020-04-07 | 2020-08-11 | 上海工程技术大学 | 一种并联机器人 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202004010386U1 (de) * | 2004-07-01 | 2005-11-17 | Kuka Schweissanlagen Gmbh | Pressschweißmaschine |
| CN101860256B (zh) * | 2010-04-02 | 2012-07-04 | 大连理工大学 | 高精度可调速直线型微位移工作台 |
| US20120038469A1 (en) * | 2010-08-11 | 2012-02-16 | Research In Motion Limited | Actuator assembly and electronic device including same |
| EP2574821B1 (de) | 2011-09-30 | 2013-10-30 | Siemens Aktiengesellschaft | Aktiver Schwingungsdämpfer ohne direkte Beschleunigungserfassung |
| EP2574820B1 (de) | 2011-09-30 | 2014-04-16 | Siemens Aktiengesellschaft | Bearbeitungsmaschine mit Schwingungskompensation beweglicher mechanischer Strukturen |
| DE102012000989A1 (de) * | 2012-01-20 | 2013-07-25 | SmarAct Holding GmbH | Hybridkinematik mit sechs Freiheitsgraden |
| GB2514775B (en) * | 2013-06-03 | 2020-09-09 | Tannlin Tech Limited | Precision two-dimensional actuator |
| CN104511896B (zh) * | 2013-09-28 | 2016-02-10 | 沈阳新松机器人自动化股份有限公司 | 一种自动化协同并联操作装置 |
| KR102177156B1 (ko) | 2014-03-10 | 2020-11-10 | 삼성전자주식회사 | 로봇 및 그를 구비한 기판 처리 장치 |
| WO2016113854A1 (ja) * | 2015-01-14 | 2016-07-21 | 三菱電機株式会社 | 位置決め装置 |
| US10906172B2 (en) | 2018-11-14 | 2021-02-02 | Battelle Energy Alliance, Llc | Linear delta systems, hexapod systems, and related methods |
| US11059166B2 (en) | 2018-11-14 | 2021-07-13 | Battelle Energy Alliance, Llc | Linear delta systems with additional degrees of freedom and related methods |
| US10821599B2 (en) | 2018-11-14 | 2020-11-03 | Battelle Energy Alliance, Llc | Dual linear delta assemblies, linear delta systems, and related methods |
| DE102019101071B3 (de) | 2019-01-16 | 2020-01-09 | Picofine GmbH | Hybridkinematik mit sechs Freiheitsgraden und Verfahren |
| CN115431265B (zh) * | 2022-08-19 | 2024-06-18 | 昆明理工大学 | 一种基于优化算法的并联机器人误差补偿方法、系统 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5327061A (en) * | 1992-06-26 | 1994-07-05 | Hughes Aircraft Company | Force (torque) nulling inertially servoed structural interface |
| JPH1190867A (ja) * | 1997-09-17 | 1999-04-06 | Olympus Optical Co Ltd | マイクロマニピュレータ |
| WO1999028095A1 (en) * | 1997-12-01 | 1999-06-10 | Giddings & Lewis | System and method for compensating for compliance of a hexapod positioning device |
| US5960672A (en) * | 1996-03-21 | 1999-10-05 | Vdw Verein Deutscher Werkzeugmaschinenfabriken E.V. | Device for generating a defined position and orientation of at least one platform |
| CN1246400A (zh) * | 1999-07-16 | 2000-03-08 | 清华大学 | 龙门滑块式内外副混合驱动虚拟轴机床结构 |
| DE10033074A1 (de) * | 2000-04-11 | 2001-10-25 | Siemens Ag | Verfahren und Vorrichtung zur Gewichtskraftkompensation |
| US6402444B1 (en) * | 1999-04-29 | 2002-06-11 | Tsinghua University | Type of parallel machine tool frame driven by slider and extensible strut |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3241601A1 (de) * | 1982-08-19 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch zu betaetigendes stellglied |
| US4593658A (en) * | 1984-05-01 | 1986-06-10 | Moloney Paul J | Valve operating mechanism for internal combustion and like-valved engines |
| US4742261A (en) * | 1986-12-10 | 1988-05-03 | Kaman Aerospace Corporation | Constant length strut |
| US5043621A (en) * | 1988-09-30 | 1991-08-27 | Rockwell International Corporation | Piezoelectric actuator |
| DE19534535C2 (de) * | 1995-09-18 | 2000-05-31 | Leitz Mestechnik Gmbh | Koordinatenmeßmaschine |
| DE19703735C2 (de) * | 1997-01-31 | 2002-02-07 | Leitz Brown & Sharpe Mestechni | Längenveränderliches Element |
| DE19904702B4 (de) * | 1999-02-05 | 2008-06-05 | Schaeffler Kg | Parallel-Kinematik-Maschine |
| US6671975B2 (en) * | 2001-12-10 | 2004-01-06 | C. William Hennessey | Parallel kinematic micromanipulator |
-
2001
- 2001-06-01 DE DE10126848A patent/DE10126848B4/de not_active Expired - Fee Related
-
2002
- 2002-05-17 US US10/478,952 patent/US6979932B2/en not_active Expired - Fee Related
- 2002-05-17 EP EP02737841A patent/EP1392471B1/de not_active Expired - Lifetime
- 2002-05-17 WO PCT/DE2002/001782 patent/WO2002098603A1/de not_active Ceased
- 2002-05-17 DE DE50212441T patent/DE50212441D1/de not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5327061A (en) * | 1992-06-26 | 1994-07-05 | Hughes Aircraft Company | Force (torque) nulling inertially servoed structural interface |
| US5960672A (en) * | 1996-03-21 | 1999-10-05 | Vdw Verein Deutscher Werkzeugmaschinenfabriken E.V. | Device for generating a defined position and orientation of at least one platform |
| JPH1190867A (ja) * | 1997-09-17 | 1999-04-06 | Olympus Optical Co Ltd | マイクロマニピュレータ |
| WO1999028095A1 (en) * | 1997-12-01 | 1999-06-10 | Giddings & Lewis | System and method for compensating for compliance of a hexapod positioning device |
| US6402444B1 (en) * | 1999-04-29 | 2002-06-11 | Tsinghua University | Type of parallel machine tool frame driven by slider and extensible strut |
| CN1246400A (zh) * | 1999-07-16 | 2000-03-08 | 清华大学 | 龙门滑块式内外副混合驱动虚拟轴机床结构 |
| DE10033074A1 (de) * | 2000-04-11 | 2001-10-25 | Siemens Ag | Verfahren und Vorrichtung zur Gewichtskraftkompensation |
Non-Patent Citations (1)
| Title |
|---|
| PATENT ABSTRACTS OF JAPAN vol. 1999, no. 09 30 July 1999 (1999-07-30) * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110545963A (zh) * | 2018-04-10 | 2019-12-06 | 苏州迈澜医疗科技有限公司 | 多自由度并联机构 |
| CN110545963B (zh) * | 2018-04-10 | 2021-04-13 | 苏州迈澜医疗科技有限公司 | 多自由度并联机构 |
| CN111515926A (zh) * | 2020-04-07 | 2020-08-11 | 上海工程技术大学 | 一种并联机器人 |
| CN111515926B (zh) * | 2020-04-07 | 2021-10-26 | 上海工程技术大学 | 一种并联机器人 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10126848A1 (de) | 2002-12-12 |
| DE10126848B4 (de) | 2006-02-02 |
| US20040150291A1 (en) | 2004-08-05 |
| US6979932B2 (en) | 2005-12-27 |
| EP1392471A1 (de) | 2004-03-03 |
| EP1392471B1 (de) | 2008-07-02 |
| DE50212441D1 (de) | 2008-08-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1392471B1 (de) | Produktionsmaschine | |
| DE102021106878A1 (de) | Verfahren zur direkten raumlage-rückkopplungssteuerung und direkte raumlage-rückkopplungsgesteuerte maschine | |
| DE19709851A1 (de) | Verfahren und programmierbarer Positioner für die spannungsfreie Montage von Baugruppen | |
| DE2841284C2 (de) | Vorrichtung zum Programmieren eines Handhabungsgeräts | |
| DE112009003699T5 (de) | Maschinenbewegungsbahnmessvorrichtung, numerisch gesteuertewerkzeugmaschine und maschinenbewegungsbahnmessverfahren | |
| DE69315953T2 (de) | Trägervorrichtung und Positionierungseinrichtung für eine Rasterabtastsonde | |
| DE102009014766A1 (de) | Überlagerte Achsen bei einer Vorrichtung zur Bearbeitung eines Werkstücks mit einem Werkzeug | |
| EP2089780B1 (de) | Verfahren zur beseitigung des schleppfehlers des arbeitspunktes einer vorrichtung | |
| EP1980374A2 (de) | Robotersteuerung, Industrieroboter und Verfahren zum Erhalten eines absolutgenauen Modells | |
| EP1436125B1 (de) | Verfahren und vorrichtung zur verringerung von fehlern bei der positionierung eines roboterarmes | |
| EP1068044B1 (de) | Tripod-lagerungseinrichtung und verfahren zur torsionskompensation | |
| DE102019131400B4 (de) | Kraftmessung und Krafterzeugung in redundanten Robotermanipulatoren | |
| WO2011023185A2 (de) | Einrichtung zur kompensation von drehmomenten, die durch beschleunigung von redundanten zusatzachsen bei mess- und werkzeugmaschinen entstehen mittels einer mehrzahl koordiniert linear bewegbarer ausgleichsmassen | |
| EP3342547B1 (de) | Positioniereinheit | |
| DE10016785A1 (de) | Verfahren zur Kalibrierung | |
| DE10211055A1 (de) | Bewegungs- und/oder Positioniervorrichtung | |
| EP1228838B1 (de) | Kinematische Vorrichtung zum Bewegen eines Trägers | |
| DE102022126205B4 (de) | Robotersystem zum Bewegen einer Nutzlast mit minimalem Schwanken der Nutzlast und erhöhter Positionierungsgenauigkeit | |
| WO2006136533A1 (de) | Maschine mit einem entlang einer traverse bewegbaren maschinenelement | |
| DE102019127499B4 (de) | Koordinatenmessgerät und Steuerungsverfahren eines Koordinatenmessgerätes | |
| WO2006094320A2 (de) | Verfahren zur bestimmung der elastischen verformung von bauteilen | |
| DE19826587A1 (de) | Regelvorrichtung und -verfahren für Bearbeitungsmaschinen | |
| DE9115391U1 (de) | Universelle Meßplattform | |
| DE102021125193B4 (de) | Verfahren und Vorrichtung zum Betreiben einer Messvorrichtung für ein Bauteil | |
| WO2015185397A1 (de) | Vorrichtung und verfahren zur kompensation der gewichtskraft |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): US |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
| WWE | Wipo information: entry into national phase |
Ref document number: 2002737841 Country of ref document: EP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 10478952 Country of ref document: US |
|
| WWP | Wipo information: published in national office |
Ref document number: 2002737841 Country of ref document: EP |
|
| WWG | Wipo information: grant in national office |
Ref document number: 2002737841 Country of ref document: EP |