WO2002103298A2 - Appareil d'examen micrometrique d'une surface - Google Patents
Appareil d'examen micrometrique d'une surface Download PDFInfo
- Publication number
- WO2002103298A2 WO2002103298A2 PCT/FR2002/002009 FR0202009W WO02103298A2 WO 2002103298 A2 WO2002103298 A2 WO 2002103298A2 FR 0202009 W FR0202009 W FR 0202009W WO 02103298 A2 WO02103298 A2 WO 02103298A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- crown
- rotation
- drive
- guide rail
- carriage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Definitions
- the invention relates to an apparatus intended for micrometric examination of a surface, of any application, in particular medical, comprising a reading device, of optical or other type, capable of being positioned in front of said surface through of a suitable support structure capable of being subjected to scanning by displacement in a plane under the impulse of appropriate control means.
- the present invention relates to the field of metrology and technical, scientific and medical instrumentation and relates, more particularly, to devices intended for micrometric examination of a surface, of any application and in particular medical.
- the data acquisition by the reading device is done by horizontal scanning of the whole of the rectangular surface defined by the said rails.
- Each carriage run on the first axis is followed by a movement of the door rail carriage relative to the second axis, defining a step, the scanning continuing alternately from right to left, then from left to right, or always in the same direction with return to the end of the rail after each scanning, until reaching the stop on the rail materializing the second axis.
- the number of scans is equal to the number of steps on said rail, plus one, corresponding to the first scan, prior to the first movement on the second axis.
- the present invention therefore aims to respond to these problems by optimizing the scanning as a function of the interest of the area to be observed, by limiting the mechanical wear of the parts in contact through the elimination of the acceleration cycles and slowdown.
- this invention is intended to achieve these objectives through an extreme simplification of the means used using only one actuator.
- the invention relates to an apparatus intended for micrometric examination of a surface, of any application and in particular medical, comprising a reading device, of optical or other type, capable of being positioned in front of said surface through a suitable support structure and capable of being subjected to scanning by displacement in a plane under the impulse of appropriate control means.
- the latter are constituted by support means with rectilinear displacement of which the lifting device is integral, which means are moreover subjected to means circular drive to subject this reading device to a spiral scan.
- the support means with rectilinear displacement consist of a carriage provided capable of moving along a guide rail mounted in rotation about an axis which is perpendicular thereto via a main flywheel of which it is integral and constituting said circular drive means.
- the circular drive means are supplemented by a drive motor acting on said main flywheel.
- the apparatus also comprises means for subjecting the carriage to rectilinear displacement, according to a defined amplitude, along its guide rail for rotation of the main flywheel by a determined angle, in particular under the impulse of said drive motor.
- a vertical displacement means completes said control means.
- Figure 1 is a schematic representation in section of an apparatus for the mi ⁇ rometric analysis of a surf ce, according to the invention.
- Figure 2 shows schematically the spiral scan described by the device for reading this device.
- the invention relates to an apparatus 1 for micrometric examination of a surface 2 of any application and in particular medical.
- a device can consist of a dermatological micro scanner
- FIG. 1 of the attached drawings it comprises a reading device 3, such as an optical transceiver, capable of being subjected to micrometric scanning in front of a surface 2, represented plane in solid lines.
- a reading device 3 such as an optical transceiver, capable of being subjected to micrometric scanning in front of a surface 2, represented plane in solid lines.
- this device 1 comprises a support structure 4 which is particularly suitable for positioning the lifting device 3 in front of said surface 2, while control means 5 are designed capable of subjecting this lifting device 3 to displacement in a plane substantially parallel to this surface 2.
- said control means 5 are constituted by support means 6 capable of subjecting the lifting device 3 to rectilinear displacement, which means 6 are moreover subjected to circular drive means 7. As will be described further forward, the two movements are combined and preferably generated by a single actuator.
- said support means 6 are in the form of a carriage 8 mounted mobile along a guide rail 9 held by said support structure 4.
- This guide rail 9 is, moreover, subjected to a rotational movement about an axis 10 which is perpendicular thereto, this by means of said circular drive means 7.
- these circular drive means are defined in the form of a main flywheel 11 rotatably mounted in a cylindrical casing 12 defining, at least in part, the support structure 4.
- circular drive means 7 are further supplemented by a drive motor 13, in particular an electric motor, acting on a first drive pinion 14 engaged with a driving crown 15 associated with the main flywheel 11 and of axis coinciding with axis 10 rail rotation 9.
- the apparatus also includes means for translational control 16 of the carriage 8, with which the lifting device 3 is associated, this along the guide rail 9.
- These translation control means 16 are defined through a cam 17, shown in FIG. 1 in the form of a ring 18 which is eccentric with respect to the axis 10 and with which a drive roller 19 associated with the carriage cooperates. 8.
- these translation control means 16 are further supplemented by means for driving the crown 18 in rotation corresponding to the cam 1.
- this ring 18 is mounted in free rotation inside the main flywheel 11 supporting the rail 9 and, therefore, the carriage 8, while a second pinion drive 22, again likely to be driven in rotation, just like the first drive pinion 14, by the motor 13 engages on a driving crown 23 associated with said secondary flywheel 21.
- a different transmission ratio is chosen between, on the one hand, the first pinion of drive 14 and the drive ring 15 associated with the main flywheel 11 and, on the other hand, between the second drive pinion 22 and the drive ring 23 of the secondary flywheel 21.
- a vertical displacement means 24 completes said control means 5.
- Such functionality can be associated either directly with the support structure 4, or with the main flywheel 11, of which the guide rail 9 is made integral, this main flywheel 11 being mounted vertically movable in the casing 12.
- the apparatus 1 which has just been described has the function that of subjecting a reading device 3, more particularly of the optical type, to a spiral scanning, it can be employed, judiciously and through suitable reflection means 25, to transform this spiral scan into a scan cylindrical type. More particularly, such means 25 can be, as shown in broken lines in FIG. 1, in the form of a reflection cone placed in the axial extension of the device, under said reading device 3. Thus, the beam optic of the latter, by performing a spiral scan above this reflection cone, is returned to describe, finally, a cylindrical scan.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Textile Engineering (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Transmission Devices (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU2002347583A AU2002347583A1 (en) | 2001-06-14 | 2002-06-12 | Micrometric surface monitor |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0107815A FR2826112B1 (fr) | 2001-06-14 | 2001-06-14 | Appareil d'examen micrometrique d'une surface, d'application quelconque et notamment medicale |
| FR01/07815 | 2001-06-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2002103298A2 true WO2002103298A2 (fr) | 2002-12-27 |
| WO2002103298A3 WO2002103298A3 (fr) | 2003-02-20 |
Family
ID=8864325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/FR2002/002009 Ceased WO2002103298A2 (fr) | 2001-06-14 | 2002-06-12 | Appareil d'examen micrometrique d'une surface |
Country Status (3)
| Country | Link |
|---|---|
| AU (1) | AU2002347583A1 (fr) |
| FR (1) | FR2826112B1 (fr) |
| WO (1) | WO2002103298A2 (fr) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
| WO1997012226A1 (fr) * | 1995-09-25 | 1997-04-03 | Tencor Instruments | Systeme ameliore d'examen de surface |
| US5866806A (en) * | 1996-10-11 | 1999-02-02 | Kla-Tencor Corporation | System for locating a feature of a surface |
-
2001
- 2001-06-14 FR FR0107815A patent/FR2826112B1/fr not_active Expired - Fee Related
-
2002
- 2002-06-12 AU AU2002347583A patent/AU2002347583A1/en not_active Abandoned
- 2002-06-12 WO PCT/FR2002/002009 patent/WO2002103298A2/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| FR2826112B1 (fr) | 2003-09-05 |
| AU2002347583A1 (en) | 2003-01-02 |
| FR2826112A1 (fr) | 2002-12-20 |
| WO2002103298A3 (fr) | 2003-02-20 |
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