WO2003016874A1 - Detecteur-sonde vibrant - Google Patents

Detecteur-sonde vibrant Download PDF

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Publication number
WO2003016874A1
WO2003016874A1 PCT/JP2002/008274 JP0208274W WO03016874A1 WO 2003016874 A1 WO2003016874 A1 WO 2003016874A1 JP 0208274 W JP0208274 W JP 0208274W WO 03016874 A1 WO03016874 A1 WO 03016874A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
vibration
fiber
material layer
electrostrictive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/008274
Other languages
English (en)
Japanese (ja)
Inventor
Motonobu Kourogi
Motoichi Ohtsu
Takashi Yatsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanagawa Academy of Science and Technology
Original Assignee
Kanagawa Academy of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanagawa Academy of Science and Technology filed Critical Kanagawa Academy of Science and Technology
Publication of WO2003016874A1 publication Critical patent/WO2003016874A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe

Definitions

  • the present invention relates to a vibration-type probe sensor.
  • the present invention relates to a method in which a tip of a fiber probe having a sharpened tip of a fiber is vibrated and the tip of the probe of the fiber probe is brought close to an object to be measured.
  • the present invention relates to a vibration-type probe sensor that obtains a measurement output as a change in a vibration state caused by the vibration.
  • a scanning probe microscope (SPM) that can measure irregularities up to the atomic level in a non-contact manner has been used as a device for accurately evaluating products such as materials and devices. ing.
  • Such scanning probe microscopes include a scanning tunneling microscope (STM) that obtains an uneven image of the sample based on the tunnel current flowing between the probe and the sample, and a cantilever-type cantilever.
  • STM scanning tunneling microscope
  • AFM atomic force microscope
  • a cantilever beam is caused to vibrate radially.
  • a probe-like sensor has been proposed in which the detection sensitivity is improved by using a vertical oscillator.
  • the conventional sharpened fiber probe had to be used by attaching it to another vibrating element such as a tuning fork to control the distance between the sample and the probe. Disclosure of the invention An object of the present invention has been proposed in view of such a conventional situation, and a vibrating probe sensor which does not need to be attached to another vibrating element such as a tuning fork is used as the sharpened fiber probe itself. Is to provide.
  • the present invention relates to a method for measuring a change in vibration state caused by bringing a tip of a probe portion of the fiber probe close to an object to be measured in a state where a fiber probe having a probe portion having a sharpened tip of a fiber is vibrated.
  • a vibrating probe sensor for obtaining an output comprising: a driving unit formed by stacking a lower electrode, an electrostrictive material layer, and an upper electrode on an outer periphery of a base end of the fiber probe; The fiber probe vibrates when an AC drive voltage is applied to the electrostrictive material layer via the upper electrode.
  • FIG. 1 is a front view showing an example of the structure of a vibration type probe sensor according to the present invention.
  • FIG. 4 is a view showing a manufacturing process of the present invention.
  • FIG. 3A and 3B are a longitudinal sectional view and a transverse sectional view of the vibration type probe sensor.
  • C FIG. 4 is a front view schematically showing a use state of the vibration type probe sensor.
  • FIG. 5 is a front view showing a configuration for measuring a change in a vibration state due to an effect of an atomic force in the above-mentioned vibration type probe sensor as a current value according to a change in a complex transfer characteristic of an electrostrictive material layer.
  • FIG. 6 is a front view showing another example of the structure of the vibration type probe sensor according to the present invention.
  • FIGS. 1A and 1B are a front view and a longitudinal sectional view showing another example of the structure of the vibration-type probe sensor according to the present invention.
  • FIG. 8 is a front view showing another example of the structure of the vibration type probe sensor according to the present invention.
  • FIG. 9 is a longitudinal sectional view of the vibration probe sensor shown in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
  • a vibration type probe sensor includes a fiber probe 13 having a probe portion 12 formed by sharpening the tip of an optical fiber 11, and a fiber probe 13.
  • a lower electrode 14 On the outer periphery of the base end, a lower electrode 14, a driving section 17 in which an electrostrictive material layer 15 such as PZT or Z ⁇ and an upper electrode 16 are laminated are provided.
  • an AC drive voltage AC is applied to the electrostrictive material layer 15 via the electrode 14 and the upper electrode 16
  • the fiber probe 13 vibrates in the axial direction.
  • the vibration type probe sensor 10 having such a structure is manufactured by the following steps 1 to 4.
  • step 1 the tip of the optical fiber 11 is sharpened by a chemical etching method or the like to produce a fiber probe 13 having a probe 12.
  • step 2 gold Au is deposited while rotating the optical fiber 11 with a vacuum deposition machine, so that the outer periphery of the base end of the fiber probe 13 is uniformly distributed as shown in FIG. 2B.
  • a u film is formed and used as a lower electrode 14.
  • the fins 11 are rotated in the same manner as the gold of the lower electrode 14 by rotating the fins 11 by sputtering or by CVD or vacuum deposition.
  • a Z ⁇ film is formed concentrically on S and 11 and is used as an electrostrictive material layer 15.
  • the lower electrode 14 is left on the surface.
  • gold for an electrode is deposited again on the ZnO film, that is, the electrostrictive material layer 15 in the same manner as the lower electrode 14 to obtain a film.
  • An ⁇ ⁇ film is formed and is used as an upper electrode 16.
  • FIGS. 3A and 3C show a longitudinal sectional view and a transverse sectional view of the vibration type probe sensor 10 in this manner.
  • This vibrating probe sensor 1 ⁇ has a drive section 17 having a structure symmetrical with respect to the axis of the optical fins 1-1 1 .
  • the vibrating probe sensor 10 oscillates a fiber probe 13 having a probe 12 formed by sharpening the tip of an optical fiber 11 in the axial direction. This is to obtain the measurement output as a change in the vibration state by bringing the tip of the probe section 12 of the fiber probe 13 closer to the measurement target 1 while moving it, and attached to the scanner 3 by the holder 2. Used to be.
  • the driving section 17 is provided with the driving section 17 having a structure symmetrical with respect to the axis of the optical fiber 11
  • the lower electrode 14 of the driving section 17 is connected to the lower electrode 14.
  • an AC drive voltage AC is applied to the electrostrictive material layer 15 via the upper electrode 16
  • the electrostrictive material layer 15 expands and contracts, and the fiber probe 13 vibrates in the axial direction.
  • the tip of the probe portion 12 of the fiber probe 13 approaches the measurement object 1, the vibration is affected by the atomic force, and the change in the vibration state is detected to detect the vibration of the measurement object 1.
  • Shape measurement can be performed.
  • the vibration-type probe sensor 10 has an asymmetric structure with respect to the axis of the optical fiber 11 by, for example, locally changing the thickness of the electrostrictive material layer 15. It is also possible to vibrate laterally.
  • the change in the vibration state due to the effect of the atomic force is also transmitted to the Z ⁇ film, that is, the electrostrictive material layer 15, so that the complex transfer characteristic of the electrostrictive material layer 15 changes. Therefore, as shown in FIG. 5, a series connection with a power supply 5 for applying an AC driving voltage AC to the electrostrictive material layer 15 via the lower electrode 14 and the upper electrode 16 of the driving section 17 is provided. By providing the ammeter 6 at the position, the change in the vibration state can be measured as a current value corresponding to the change in the complex transfer characteristic of the electrostrictive material layer 15.
  • the vibration type probe sensor according to the present invention has a structure in which a lower electrode, an electrostrictive material layer, and an upper electrode are laminated on the outer periphery of a base end of a fiber probe in order to detect a change in a vibration state due to an atomic force.
  • a detection unit may be provided.
  • the vibration type probe sensor 20 shown in FIG. 6 is composed of an optical fin, a fiber probe 13 having a probe portion 12 formed by sharpening the tip of “11”, and a base end of the fiber probe 13.
  • a drive section 17 comprising a lower electrode 14, an electrostrictive material layer 15 such as PZT or Zn ⁇ and an upper electrode 16 laminated on the outer periphery of the section, and an outer periphery of the base end of the fiber probe 13.
  • the lower electrode 21, the electrostrictive material layer 22, and the upper electrode 23 of the detecting section 24 are connected to the driving section 17. It is also possible to form a multi-layer structure laminated on the outer periphery of.
  • the vibration type probe sensor has a cantilever structure and has a natural vibration mode. Since the resonance state is detected and modulated at the frequency of the natural vibration mode, it is desirable that the frequency of the natural vibration mode can be adjusted.
  • the vibration-type probe sensor 10 used by being attached to the scanner 3 with the holder 2 uses the natural vibration by adjusting the distance L from the fixed end 2 to the tip of the vibration-type probe sensor 10.
  • the mode frequency can be adjusted.
  • the frequency of the lowest natural vibration mode is given by v / (4 L). Therefore, by adjusting the distance L, the frequency of the natural vibration mode can be adjusted.
  • the vibration type probe sensor 40 shown in FIG. 8 when the optical fiber 11 is gradually reduced in thickness, a natural vibration mode is generated in the reduced portion. In this case, the reproducibility of the frequency of the natural vibration mode can be improved because the length of the portion narrowed by d.
  • the electrostrictive material layers 15 and 22 are attached only to the thinned portion, and the insulating material layers 31 and 32 are attached to the other portions. It is possible to detect the natural vibration mode of the thinned portion with high accuracy.
  • an intermediate portion is fixed by the holder 2, and a power source 5 is connected to the lower electrode 14 and the upper electrode 16 of the driving section 17 at a rear end side of the fixed portion. and, by be tied voltmeter 8 to the lower electrode 2 1 and the upper electrode 2 3 of the detection unit 2 4, the connecting portion further c can be prevented resulting in mechanical vibration, thus The distance between the sample and the probe can be controlled, and this vibrating probe sensor can perform near-field microscope measurement while controlling the distance between the sample and the probe because the core material is the optical fiber 11.
  • the vibration type probe sensor according to the present invention
  • a fiber probe is coated with an electrode and an electrostrictive material such as PZT and ⁇ , and the fiber probe is used to vibrate the sharpened fiber probe, which is used to detect the vibration of the sharpened fiber probe.
  • the conventional sharpened fiber probe is attached to another vibrating element such as a tuning fork to control the distance between the sample and the probe.
  • the sharpened fiber probe itself becomes a vibrator. There is no need to attach to other vibrating elements such as tuning forks. '
  • the sharpened fiber probe itself becomes the vibrator, stable, small size and high detection sensitivity can be expected.
  • the resonance frequency is increased, and the control band for controlling the distance between the sample and the probe can be increased.
  • the sharpened fiber probe is extremely sharp, and can be used as a general-purpose surface shape measuring probe.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un détecteur-sonde vibrant comportant une sonde à fibre (13) pourvue d'un élément de détection (12) formé par l'affûtage de la pointe d'une fibre optique (11), une unité d'entraînement (17) formée par la superposition d'une électrode inférieure (14) sur la périphérie externe de l'extrémité de base de la sonde à fibre (13), une couche de matériau à électrostriction (15), par exemple le PZT et le ZnO, et enfin, une électrode supérieure (16). L'électrode inférieure (14) et l'électrode supérieure (16) de l'unité d'entraînement (17) permettent d'appliquer à la couche de matériau à électrostriction (15) une tension d'entraînement à courant alternatif pour faire vibrer la sonde à fibre (13). Du fait que la sonde à fibre à pointe affûtée fonctionne elle-même comme un appareil vibrant, il n'est pas nécessaire de fixer le détecteur-sonde vibrant à un élément vibrant séparé tel qu'un diapason.
PCT/JP2002/008274 2001-08-16 2002-08-14 Detecteur-sonde vibrant Ceased WO2003016874A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-247377 2001-08-16
JP2001247377A JP2003057162A (ja) 2001-08-16 2001-08-16 振動型プローブセンサ

Publications (1)

Publication Number Publication Date
WO2003016874A1 true WO2003016874A1 (fr) 2003-02-27

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ID=19076735

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/008274 Ceased WO2003016874A1 (fr) 2001-08-16 2002-08-14 Detecteur-sonde vibrant

Country Status (2)

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JP (1) JP2003057162A (fr)
WO (1) WO2003016874A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09119938A (ja) * 1995-10-24 1997-05-06 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡
JPH09257814A (ja) * 1996-03-19 1997-10-03 Seiko Instr Inc 光導波路プローブおよび光システム
JPH10209516A (ja) * 1997-01-17 1998-08-07 Toyota Motor Corp 圧電素子の状態検出方法および圧電素子装置
JPH11281656A (ja) * 1998-03-27 1999-10-15 Jasco Corp 光触針の制御方法
JP2000214005A (ja) * 1999-01-28 2000-08-04 Matsushita Electric Ind Co Ltd 圧力検出装置
JP2001197758A (ja) * 1999-10-29 2001-07-19 Seiko Instruments Inc 圧電アクチュエータ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09119938A (ja) * 1995-10-24 1997-05-06 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡
JPH09257814A (ja) * 1996-03-19 1997-10-03 Seiko Instr Inc 光導波路プローブおよび光システム
JPH10209516A (ja) * 1997-01-17 1998-08-07 Toyota Motor Corp 圧電素子の状態検出方法および圧電素子装置
JPH11281656A (ja) * 1998-03-27 1999-10-15 Jasco Corp 光触針の制御方法
JP2000214005A (ja) * 1999-01-28 2000-08-04 Matsushita Electric Ind Co Ltd 圧力検出装置
JP2001197758A (ja) * 1999-10-29 2001-07-19 Seiko Instruments Inc 圧電アクチュエータ

Also Published As

Publication number Publication date
JP2003057162A (ja) 2003-02-26

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