WO2003084861A3 - Method of manufacturing an electronic device in a cavity with a cover - Google Patents

Method of manufacturing an electronic device in a cavity with a cover Download PDF

Info

Publication number
WO2003084861A3
WO2003084861A3 PCT/IB2003/001300 IB0301300W WO03084861A3 WO 2003084861 A3 WO2003084861 A3 WO 2003084861A3 IB 0301300 W IB0301300 W IB 0301300W WO 03084861 A3 WO03084861 A3 WO 03084861A3
Authority
WO
WIPO (PCT)
Prior art keywords
cavity
cover
electronic device
patterned
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2003/001300
Other languages
French (fr)
Other versions
WO2003084861A2 (en
Inventor
Johannes W Weekamp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to EP03712496A priority Critical patent/EP1501756B1/en
Priority to US10/510,590 priority patent/US7160476B2/en
Priority to JP2003582070A priority patent/JP4504024B2/en
Priority to KR10-2004-7016122A priority patent/KR20040098070A/en
Priority to AU2003216588A priority patent/AU2003216588A1/en
Priority to DE60311982T priority patent/DE60311982T2/en
Publication of WO2003084861A2 publication Critical patent/WO2003084861A2/en
Publication of WO2003084861A3 publication Critical patent/WO2003084861A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0284—Details of three-dimensional rigid printed circuit boards
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H10W70/614—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together the multiple chips being integrally enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/688—Flexible insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
    • H05K1/183—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components mounted in and supported by recessed areas of the PCBs
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09063—Holes or slots in insulating substrate not used for electrical connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09118—Moulded substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/30—Details of processes not otherwise provided for in H05K2203/01 - H05K2203/17
    • H05K2203/302—Bending a rigid substrate; Breaking rigid substrates by bending
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/60—Seals

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

The electronic device (100) comprises an electrical element (30), for instance a MEMS capacitor or a BAW filterin a cavity (37) that is protected from the environment by a cover (38). The cover (38) is a patterned layer which is mechanically embedded in isolating material (7) present beside the cavity (37) and may further include contact pads (41). The device (100) may be suitably manufactured from an accurately folded foil including a patterned layerand a sacrifice layer. After applying the foil to the cavity (37) the isolating material (7) is provided and the sacrifice layer is removed. The patterned layer, or part thereof, stays behind and forms the cover (38).
PCT/IB2003/001300 2002-04-11 2003-04-10 Method of manufacturing an electronic device in a cavity with a cover Ceased WO2003084861A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP03712496A EP1501756B1 (en) 2002-04-11 2003-04-10 Method of manufacturing an electronic device in a cavity with a cover
US10/510,590 US7160476B2 (en) 2002-04-11 2003-04-10 Method of manufacturing an electronic device
JP2003582070A JP4504024B2 (en) 2002-04-11 2003-04-10 Manufacturing method of electronic device
KR10-2004-7016122A KR20040098070A (en) 2002-04-11 2003-04-10 Method of manufacturing an electronic device in a cavity with a cover
AU2003216588A AU2003216588A1 (en) 2002-04-11 2003-04-10 Method of manufacturing an electronic device in a cavity with a cover
DE60311982T DE60311982T2 (en) 2002-04-11 2003-04-10 METHOD OF CREATING AN ELECTRONIC DEVICE IN A CAVITY WITH A COVER

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
EP02076427 2002-04-11
EP02076427.0 2002-04-11
EP02078208.2 2002-08-05
EP02078208 2002-08-05
EP02079545.6 2002-10-30
EP02079545 2002-10-30

Publications (2)

Publication Number Publication Date
WO2003084861A2 WO2003084861A2 (en) 2003-10-16
WO2003084861A3 true WO2003084861A3 (en) 2004-05-13

Family

ID=28794672

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2003/001300 Ceased WO2003084861A2 (en) 2002-04-11 2003-04-10 Method of manufacturing an electronic device in a cavity with a cover

Country Status (10)

Country Link
US (1) US7160476B2 (en)
EP (2) EP1753023A3 (en)
JP (1) JP4504024B2 (en)
KR (1) KR20040098070A (en)
CN (1) CN100415634C (en)
AT (1) ATE354538T1 (en)
AU (1) AU2003216588A1 (en)
DE (1) DE60311982T2 (en)
TW (1) TWI279391B (en)
WO (1) WO2003084861A2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7446926B2 (en) 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
US7470373B2 (en) 2003-08-15 2008-12-30 Qualcomm Mems Technologies, Inc. Optical interference display panel
US7518775B2 (en) 2004-09-27 2009-04-14 Idc, Llc Method and system for packaging a MEMS device
US7532385B2 (en) 2003-08-18 2009-05-12 Qualcomm Mems Technologies, Inc. Optical interference display panel and manufacturing method thereof
US7573547B2 (en) 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006020744A2 (en) * 2004-08-12 2006-02-23 Tessera, Inc. Structure and method of forming capped chips
US7368803B2 (en) * 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7999366B2 (en) 2004-11-26 2011-08-16 Stmicroelectronics, S.A. Micro-component packaging process and set of micro-components resulting from this process
DE602005001386T2 (en) * 2004-11-26 2008-02-14 Stmicroelectronics S.A. Method of packaging microcomponents by means of a die
US7327044B2 (en) * 2005-01-21 2008-02-05 Fox Electronics Integrated circuit package encapsulating a hermetically sealed device
US7741189B2 (en) * 2005-06-20 2010-06-22 E.I. Du Pont De Nemours And Company Electrodes, inner layers, capacitors, electronic devices and methods of making thereof
TWI257656B (en) * 2005-08-03 2006-07-01 Advanced Semiconductor Eng Method for fabricating protection caps for protecting elements on wafer surface
DE102005053722B4 (en) 2005-11-10 2007-08-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Cover wafer, in the microsystem technology usable component with such a wafer and soldering method for connecting corresponding component parts
EP2098478A1 (en) * 2008-03-07 2009-09-09 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Manufacturing micro components including a cover structure.
JP5463961B2 (en) * 2010-03-04 2014-04-09 富士通株式会社 Method for manufacturing MEMS device and MEMS device
DE102011004577B4 (en) * 2011-02-23 2023-07-27 Robert Bosch Gmbh Component carrier, method for producing such a component carrier and component with a MEMS component on such a component carrier
US8749056B2 (en) 2011-05-26 2014-06-10 Infineon Technologies Ag Module and method of manufacturing a module
US9203451B2 (en) 2011-12-14 2015-12-01 Infineon Technologies Ag System and method for an RF receiver
US8716852B2 (en) * 2012-02-17 2014-05-06 Taiwan Semiconductor Manufacturing Company, Ltd. Micro-electro mechanical systems (MEMS) having outgasing prevention structures and methods of forming the same
US9225311B2 (en) 2012-02-21 2015-12-29 International Business Machines Corporation Method of manufacturing switchable filters
US10224260B2 (en) 2013-11-26 2019-03-05 Infineon Technologies Ag Semiconductor package with air gap
DE102014102518B4 (en) 2014-02-26 2022-04-28 Snaptrack, Inc. Package for a tunable filter
US9738516B2 (en) 2015-04-29 2017-08-22 Taiwan Semiconductor Manufacturing Co., Ltd. Structure to reduce backside silicon damage
CN110076940B (en) * 2019-03-26 2021-10-08 中国科学院微电子研究所 A precision mold based on metal microstructure
US10959336B2 (en) * 2019-03-28 2021-03-23 Mikro Mesa Technology Co., Ltd. Method of liquid assisted binding

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EP0828346A2 (en) * 1996-08-29 1998-03-11 Harris Corporation Lid wafer bond packaging and micromachining
US5738797A (en) * 1996-05-17 1998-04-14 Ford Global Technologies, Inc. Three-dimensional multi-layer circuit structure and method for forming the same

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US5155299A (en) * 1988-10-05 1992-10-13 Olin Corporation Aluminum alloy semiconductor packages
US5043534A (en) * 1990-07-02 1991-08-27 Olin Corporation Metal electronic package having improved resistance to electromagnetic interference
US6140144A (en) * 1996-08-08 2000-10-31 Integrated Sensing Systems, Inc. Method for packaging microsensors
US6146917A (en) * 1997-03-03 2000-11-14 Ford Motor Company Fabrication method for encapsulated micromachined structures

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US5738797A (en) * 1996-05-17 1998-04-14 Ford Global Technologies, Inc. Three-dimensional multi-layer circuit structure and method for forming the same
EP0828346A2 (en) * 1996-08-29 1998-03-11 Harris Corporation Lid wafer bond packaging and micromachining

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7470373B2 (en) 2003-08-15 2008-12-30 Qualcomm Mems Technologies, Inc. Optical interference display panel
US7532385B2 (en) 2003-08-18 2009-05-12 Qualcomm Mems Technologies, Inc. Optical interference display panel and manufacturing method thereof
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7446926B2 (en) 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
US7518775B2 (en) 2004-09-27 2009-04-14 Idc, Llc Method and system for packaging a MEMS device
US7573547B2 (en) 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device

Also Published As

Publication number Publication date
DE60311982T2 (en) 2007-11-08
AU2003216588A8 (en) 2003-10-20
EP1501756B1 (en) 2007-02-21
EP1753023A3 (en) 2007-02-21
EP1501756A2 (en) 2005-02-02
TWI279391B (en) 2007-04-21
US20050121413A1 (en) 2005-06-09
ATE354538T1 (en) 2007-03-15
TW200400918A (en) 2004-01-16
US7160476B2 (en) 2007-01-09
EP1753023A2 (en) 2007-02-14
JP2005522334A (en) 2005-07-28
CN1646417A (en) 2005-07-27
JP4504024B2 (en) 2010-07-14
CN100415634C (en) 2008-09-03
DE60311982D1 (en) 2007-04-05
KR20040098070A (en) 2004-11-18
AU2003216588A1 (en) 2003-10-20
WO2003084861A2 (en) 2003-10-16

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