WO2003087706A3 - Optische positionsmesseinrichtung - Google Patents

Optische positionsmesseinrichtung Download PDF

Info

Publication number
WO2003087706A3
WO2003087706A3 PCT/EP2003/003421 EP0303421W WO03087706A3 WO 2003087706 A3 WO2003087706 A3 WO 2003087706A3 EP 0303421 W EP0303421 W EP 0303421W WO 03087706 A3 WO03087706 A3 WO 03087706A3
Authority
WO
WIPO (PCT)
Prior art keywords
grating
lens array
periodic
period
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2003/003421
Other languages
English (en)
French (fr)
Other versions
WO2003087706A2 (de
Inventor
Ulrich Benner
Elmar Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to EP03746157A priority Critical patent/EP1497609B1/de
Priority to US10/510,868 priority patent/US6963409B2/en
Priority to DE50310006T priority patent/DE50310006D1/de
Priority to JP2003584608A priority patent/JP4266834B2/ja
Publication of WO2003087706A2 publication Critical patent/WO2003087706A2/de
Publication of WO2003087706A3 publication Critical patent/WO2003087706A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Adjustment Of Camera Lenses (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
  • Eye Examination Apparatus (AREA)

Abstract

In einer optischen Positionsmesseinrichtung mit einer Abtasteinheit (2), die eine Lichtquelle (4), eine Abbildungsebene (9) und eine Linsenoptik (8) zur Erzeugung eines Abbildes einer periodischen Gitterstruktur (10) in der Abbildungsebene (9) enthält, besteht die Linsenoptik (8) aus einem periodischen Linsenarray (80) mit der Gitterperiode oder dem gegenseitigen Abstand benachbarter Linsen (81, 82) mit AG (r) der Gitterperiode des Linsenarrays, t (r) der Periode der periodischen Gitter struktur (10), Iβ(r)| dem Absolutbetrag des Abbildungsmassstabes β des Linsenarrays (80), ψ einem vorgebbaren, definierten Phasensprung, r dem Radius der Gitteranord nung, der für ein lineares Gitter r = ∞ ist, während und AG, t und β Konstanten sind, sowie i, k, n natürlichen Zahlen einschliesslich Null.
PCT/EP2003/003421 2002-04-17 2003-04-02 Optische positionsmesseinrichtung Ceased WO2003087706A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP03746157A EP1497609B1 (de) 2002-04-17 2003-04-02 Optische positionsmesseinrichtung
US10/510,868 US6963409B2 (en) 2002-04-17 2003-04-02 Optical position measuring device
DE50310006T DE50310006D1 (de) 2002-04-17 2003-04-02 Optische positionsmesseinrichtung
JP2003584608A JP4266834B2 (ja) 2002-04-17 2003-04-02 光学エンコーダ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10217726.0 2002-04-17
DE10217726A DE10217726A1 (de) 2002-04-17 2002-04-17 Optische Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
WO2003087706A2 WO2003087706A2 (de) 2003-10-23
WO2003087706A3 true WO2003087706A3 (de) 2004-09-02

Family

ID=29224628

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/003421 Ceased WO2003087706A2 (de) 2002-04-17 2003-04-02 Optische positionsmesseinrichtung

Country Status (8)

Country Link
US (1) US6963409B2 (de)
EP (1) EP1497609B1 (de)
JP (1) JP4266834B2 (de)
CN (1) CN1313804C (de)
AT (1) ATE398760T1 (de)
DE (2) DE10217726A1 (de)
ES (1) ES2307959T3 (de)
WO (1) WO2003087706A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10317736A1 (de) * 2003-04-11 2004-10-28 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung
DE10319798A1 (de) * 2003-04-30 2004-11-25 Werth Messtechnik Gmbh Durchlichtbeleuchtungsanordnung
JP4953660B2 (ja) * 2005-03-11 2012-06-13 株式会社ミツトヨ 光電式エンコーダ
EP1701138B1 (de) * 2005-03-11 2016-02-17 Mitutoyo Corporation Fotoelektrischer Kodierer
DE102006011540A1 (de) * 2006-02-12 2007-08-23 Samland, Thomas, Dipl.-Math. Abtasteinheit für eine Positionsmesseinrichtung zur Detektion von optischen Maßverkörperungen sowie entsprechende Positionsmesseinrichtung
GB0613902D0 (en) * 2006-07-13 2006-08-23 Renishaw Plc Scale and readhead
US9029157B2 (en) * 2007-04-12 2015-05-12 Nipro Diagnostics, Inc. Error detection and rejection for a diagnostic testing system
JP2008292352A (ja) * 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
EP2579005A4 (de) * 2010-05-31 2013-10-23 Yaskawa Denki Seisakusho Kk Drehbarer encoder, drehbarer motor und drehbares motorsystem
JP6000759B2 (ja) * 2012-08-31 2016-10-05 キヤノン株式会社 スケール、エンコーダ、レンズ装置、および、撮像システム
US9008757B2 (en) 2012-09-26 2015-04-14 Stryker Corporation Navigation system including optical and non-optical sensors
DE102013110190B4 (de) 2013-09-16 2023-04-13 Ic-Haus Gmbh Sensorvorrichtung
JP6629014B2 (ja) 2015-09-08 2020-01-15 株式会社ミツトヨ エンコーダ
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
TWI623200B (zh) * 2016-04-27 2018-05-01 財團法人工業技術研究院 定位絕對碼的解碼裝置及解碼方法
CN105933697B (zh) * 2016-06-30 2017-10-27 北京邮电大学 一种光栅参数输出的方法及装置
IT201700030602A1 (it) * 2017-03-20 2018-09-20 Giuliani S R L Sistema per la misurazione della posizione di un organo meccanico e metodo per la misurazione della posizione di un organo meccanico
CN109342437B (zh) * 2018-09-28 2020-03-31 中国兵器工业标准化研究所 光学材料条纹的定量测试方法
JP7252809B2 (ja) 2019-03-28 2023-04-05 株式会社ミツトヨ 光電式エンコーダおよび光電式エンコーダにおける演算方法
TWI710795B (zh) * 2019-12-04 2020-11-21 國立中興大學 光學旋轉編碼器
CN113405460B (zh) * 2020-03-16 2023-04-14 晋城三赢精密电子有限公司 微位移测量装置
KR20210125761A (ko) * 2020-04-09 2021-10-19 현대모비스 주식회사 자동차용 램프 및 그 램프를 포함하는 자동차
US11874144B2 (en) * 2020-07-28 2024-01-16 Li Lin Displacement measurement system
JP7674993B2 (ja) * 2020-11-25 2025-05-12 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 光学式位置測定装置

Citations (2)

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Publication number Priority date Publication date Assignee Title
US5774219A (en) * 1996-01-23 1998-06-30 Mitutoyo Corporation Reflection-type optical encoder with light receiving array
US6172753B1 (en) * 1994-09-15 2001-01-09 Jean-Jacques Wagner Movement and position measuring device and method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2056660B (en) 1979-08-03 1983-05-11 Stanley Tools Ltd Displacement encoder for measuring rule
US4837588A (en) * 1987-05-08 1989-06-06 Ricoh Company, Ltd. Synchronizing signal generating system for laser scanner
NL8802988A (nl) * 1988-12-05 1990-07-02 Philips Nv Inrichting voor het met optische straling aftasten van een informatievlak.
US5148322A (en) * 1989-11-09 1992-09-15 Omron Tateisi Electronics Co. Micro aspherical lens and fabricating method therefor and optical device
DE59101604D1 (de) 1990-08-09 1994-06-16 Hohner Elektrotechnik Kg Optoelektronische Abtasteinrichtung.
US5360970A (en) * 1992-12-29 1994-11-01 Eastman Kodak Company Apparatus and method for a single return path signal sensor system
US5659420A (en) * 1993-09-30 1997-08-19 Kabushiki Kaisha Komatsu Seisakusho Confocal optical apparatus
DE19726935B4 (de) * 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
DE59806597D1 (de) * 1997-08-07 2003-01-23 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE10022619A1 (de) 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6172753B1 (en) * 1994-09-15 2001-01-09 Jean-Jacques Wagner Movement and position measuring device and method
US5774219A (en) * 1996-01-23 1998-06-30 Mitutoyo Corporation Reflection-type optical encoder with light receiving array

Also Published As

Publication number Publication date
JP4266834B2 (ja) 2009-05-20
ES2307959T3 (es) 2008-12-01
DE50310006D1 (de) 2008-07-31
CN1646883A (zh) 2005-07-27
EP1497609B1 (de) 2008-06-18
JP2005522682A (ja) 2005-07-28
US20050168757A1 (en) 2005-08-04
CN1313804C (zh) 2007-05-02
EP1497609A2 (de) 2005-01-19
DE10217726A1 (de) 2003-11-27
ATE398760T1 (de) 2008-07-15
US6963409B2 (en) 2005-11-08
WO2003087706A2 (de) 2003-10-23

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