WO2004019424A3 - Piezoaktor - Google Patents

Piezoaktor Download PDF

Info

Publication number
WO2004019424A3
WO2004019424A3 PCT/DE2003/001799 DE0301799W WO2004019424A3 WO 2004019424 A3 WO2004019424 A3 WO 2004019424A3 DE 0301799 W DE0301799 W DE 0301799W WO 2004019424 A3 WO2004019424 A3 WO 2004019424A3
Authority
WO
WIPO (PCT)
Prior art keywords
corners
piezoelectric actuator
inner electrodes
rounded
multilayer structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2003/001799
Other languages
English (en)
French (fr)
Other versions
WO2004019424A2 (de
Inventor
Friedrich Boecking
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to JP2004529689A priority Critical patent/JP2005536066A/ja
Priority to EP03740053A priority patent/EP1530806A2/de
Priority to US10/524,789 priority patent/US20060132002A1/en
Publication of WO2004019424A2 publication Critical patent/WO2004019424A2/de
Publication of WO2004019424A3 publication Critical patent/WO2004019424A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Impact Printers (AREA)

Abstract

Es wird ein Piezoaktor, beispielsweise zur Betätigung eines mechanischen Bauteils, vorgeschlagen, bei dem mit einem Mehrschichtaufbau von Piezolagen (2) und dazwischen angeordneten Innenelektroden (3,4;10,13) eine wechselseitige seitlichen Kontaktierung der Innenelektroden (3,4;10,13) mit Außenelektroden (9;19,20) möglich ist. Die einzelnen Innenelektroden (10,13) sind vor dem Zusammenbau zu dem Mehrschichtaufbau an den durch die Schnittkanten gebildeten Ecken (11) gerundet. Wenn die Ecken (11) jeweils eine Fase (16) aufweisen, so können die Ecken der Fasen jeweils auch gerundet sein.
PCT/DE2003/001799 2002-08-16 2003-06-02 Piezoaktor Ceased WO2004019424A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004529689A JP2005536066A (ja) 2002-08-16 2003-06-02 圧電アクチュエータ
EP03740053A EP1530806A2 (de) 2002-08-16 2003-06-02 Piezoaktor
US10/524,789 US20060132002A1 (en) 2002-08-16 2003-06-02 Piezoelectric actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10237588A DE10237588A1 (de) 2002-08-16 2002-08-16 Piezoaktor
DE10237588.7 2002-08-16

Publications (2)

Publication Number Publication Date
WO2004019424A2 WO2004019424A2 (de) 2004-03-04
WO2004019424A3 true WO2004019424A3 (de) 2004-07-08

Family

ID=30775347

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/001799 Ceased WO2004019424A2 (de) 2002-08-16 2003-06-02 Piezoaktor

Country Status (6)

Country Link
US (1) US20060132002A1 (de)
EP (1) EP1530806A2 (de)
JP (1) JP2005536066A (de)
KR (1) KR20050032116A (de)
DE (1) DE10237588A1 (de)
WO (1) WO2004019424A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107887500A (zh) * 2016-09-29 2018-04-06 Tdk株式会社 压电元件

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK1811582T3 (da) * 2006-01-20 2009-04-06 Delphi Tech Inc Piezoelektrisk aktuator
DE102006062076A1 (de) * 2006-12-29 2008-07-10 Siemens Ag Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung
WO2012132660A1 (ja) * 2011-03-28 2012-10-04 日本碍子株式会社 圧電デバイス、及び、その焼成前の成形体であるグリーン成形体の製造方法
JP7396858B2 (ja) * 2019-11-01 2023-12-12 日本電波工業株式会社 圧電デバイス及びその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252883A (en) * 1991-01-30 1993-10-12 Nec Corporation Laminated type piezoelectric actuator
EP0584842A2 (de) * 1989-04-07 1994-03-02 Mitsui Petrochemical Industries, Ltd. Geschichtete Keramikanordnung und Verfahren zur deren Herstellung
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
DE19946837A1 (de) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezoaktor
JP2001339105A (ja) * 2000-05-30 2001-12-07 Tokin Ceramics Corp 積層型圧電セラミックス及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3262076B2 (ja) * 1997-10-03 2002-03-04 株式会社村田製作所 圧電共振子、圧電共振子の周波数調整方法および通信機器
US6787975B2 (en) * 2000-05-31 2004-09-07 Denso Corporation Piezoelectric device for injector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0584842A2 (de) * 1989-04-07 1994-03-02 Mitsui Petrochemical Industries, Ltd. Geschichtete Keramikanordnung und Verfahren zur deren Herstellung
US5252883A (en) * 1991-01-30 1993-10-12 Nec Corporation Laminated type piezoelectric actuator
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
DE19946837A1 (de) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezoaktor
JP2001339105A (ja) * 2000-05-30 2001-12-07 Tokin Ceramics Corp 積層型圧電セラミックス及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 04 4 August 2002 (2002-08-04) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107887500A (zh) * 2016-09-29 2018-04-06 Tdk株式会社 压电元件
CN107887500B (zh) * 2016-09-29 2020-12-18 Tdk株式会社 压电元件

Also Published As

Publication number Publication date
JP2005536066A (ja) 2005-11-24
WO2004019424A2 (de) 2004-03-04
DE10237588A1 (de) 2004-02-26
KR20050032116A (ko) 2005-04-06
US20060132002A1 (en) 2006-06-22
EP1530806A2 (de) 2005-05-18

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