WO2004030860A3 - Flow control system - Google Patents

Flow control system Download PDF

Info

Publication number
WO2004030860A3
WO2004030860A3 PCT/US2003/028397 US0328397W WO2004030860A3 WO 2004030860 A3 WO2004030860 A3 WO 2004030860A3 US 0328397 W US0328397 W US 0328397W WO 2004030860 A3 WO2004030860 A3 WO 2004030860A3
Authority
WO
WIPO (PCT)
Prior art keywords
process fluid
movable member
control system
outlet
flow control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2003/028397
Other languages
French (fr)
Other versions
WO2004030860A2 (en
Inventor
Matthew G Wheeler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Emerson Electric Co
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Priority to AU2003266022A priority Critical patent/AU2003266022B2/en
Priority to CA002500543A priority patent/CA2500543C/en
Priority to KR1020057005550A priority patent/KR100649468B1/en
Priority to MXPA05003444A priority patent/MXPA05003444A/en
Priority to DK03799281.5T priority patent/DK1545835T3/en
Priority to HK06106579.0A priority patent/HK1086523B/en
Priority to JP2004541523A priority patent/JP4372010B2/en
Priority to BR0314955A priority patent/BR0314955A/en
Priority to CNB038254808A priority patent/CN100528485C/en
Priority to EP20030799281 priority patent/EP1545835B1/en
Priority to DE60334712T priority patent/DE60334712D1/en
Priority to AT03799281T priority patent/ATE485919T1/en
Publication of WO2004030860A2 publication Critical patent/WO2004030860A2/en
Publication of WO2004030860A3 publication Critical patent/WO2004030860A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Reciprocating Pumps (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Flow Control (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Catching Or Destruction (AREA)

Abstract

A flow control system (100) includes a substantially rigid vessel (110) with a process fluid reservoir (112) situated in the rigid vessel (110) is in fluid communication with an outlet (116). A movable member (120) and/or a working fluid is situated in the rigid vessel (110) so as to selectively expel process fluid (122) from the outlet (116). Where a movable member (120) is employed, movement of the movable member (120) in a first direction causes process fluid (122) to be drawn into an inlet (114) and movement of the movable member (120) in a second direction causes process fluid (122) to be expelled from the outlet (116). In other implementations, the working fluid is metered into a working fluid reservoir (340) to compress a flexible process fluid reservoir (112) and expel process fluid (122) therefrom.
PCT/US2003/028397 2002-09-30 2003-09-10 Flow control system Ceased WO2004030860A2 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
AU2003266022A AU2003266022B2 (en) 2002-09-30 2003-09-10 Flow control system
CA002500543A CA2500543C (en) 2002-09-30 2003-09-10 Flow control system
KR1020057005550A KR100649468B1 (en) 2002-09-30 2003-09-10 Flow control apparatus and method thereof
MXPA05003444A MXPA05003444A (en) 2002-09-30 2003-09-10 FLOW CONTROL SYSTEM.
DK03799281.5T DK1545835T3 (en) 2002-09-30 2003-09-10 flow control system
HK06106579.0A HK1086523B (en) 2002-09-30 2003-09-10 Flow control system
JP2004541523A JP4372010B2 (en) 2002-09-30 2003-09-10 Flow regulation system
BR0314955A BR0314955A (en) 2002-09-30 2003-09-10 Flow control system
CNB038254808A CN100528485C (en) 2002-09-30 2003-09-10 Flow control system
EP20030799281 EP1545835B1 (en) 2002-09-30 2003-09-10 Flow control system
DE60334712T DE60334712D1 (en) 2002-09-30 2003-09-10 FLOW CONTROL SYSTEM
AT03799281T ATE485919T1 (en) 2002-09-30 2003-09-10 FLOW CONTROL SYSTEM

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/065,275 US7204679B2 (en) 2002-09-30 2002-09-30 Flow control system
US10/065,275 2002-09-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP20100012713 Previously-Filed-Application EP2343156B1 (en) 2002-09-30 2003-09-10 Flow control system

Publications (2)

Publication Number Publication Date
WO2004030860A2 WO2004030860A2 (en) 2004-04-15
WO2004030860A3 true WO2004030860A3 (en) 2004-09-30

Family

ID=32028515

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/028397 Ceased WO2004030860A2 (en) 2002-09-30 2003-09-10 Flow control system

Country Status (17)

Country Link
US (1) US7204679B2 (en)
EP (4) EP2108482A1 (en)
JP (1) JP4372010B2 (en)
KR (1) KR100649468B1 (en)
CN (2) CN101491889B (en)
AR (2) AR041382A1 (en)
AT (1) ATE485919T1 (en)
AU (1) AU2003266022B2 (en)
BR (1) BR0314955A (en)
CA (1) CA2500543C (en)
DE (1) DE60334712D1 (en)
DK (2) DK1545835T3 (en)
MX (1) MXPA05003444A (en)
MY (1) MY135346A (en)
PL (3) PL206361B1 (en)
RU (1) RU2313004C2 (en)
WO (1) WO2004030860A2 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7980919B2 (en) * 2005-01-18 2011-07-19 Zhengcai Zhou Blasting device for premixed abrasive slurry jet
US7735563B2 (en) * 2005-03-10 2010-06-15 Hydril Usa Manufacturing Llc Pressure driven pumping system
JP2008539146A (en) * 2005-04-25 2008-11-13 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド Apparatus and process for storing and distributing chemical reagents and compositions
KR100806841B1 (en) * 2006-09-11 2008-02-22 세메스 주식회사 Bubble Damper in Slurry Feeder
TW200916183A (en) * 2007-05-09 2009-04-16 Advanced Tech Materials Systems and methods for material blending and distribution
US8507382B2 (en) * 2007-12-06 2013-08-13 Foresight Processing, Llc Systems and methods for delivery of fluid-containing process material combinations
US20100243087A1 (en) * 2009-03-03 2010-09-30 Millipore Corporation System and pump apparatus for processing fluid samples
WO2010144439A2 (en) * 2009-06-10 2010-12-16 Advanced Technology Materials, Inc. Fluid processing systems and methods
US8308854B2 (en) * 2009-12-15 2012-11-13 Thermo Finnigan Llc Helium reclamation systems and methods for a gas chromatograph
RU2459978C1 (en) * 2011-07-26 2012-08-27 Общество с ограниченной ответственностью "Купер" Adjustable diaphragm pump unit
KR20130090209A (en) * 2012-02-03 2013-08-13 삼성전자주식회사 Apparatus and method for treating substrate
AU2014236334B2 (en) * 2013-03-14 2018-04-05 Bio-Rad Laboratories, Inc. Bottle pressurization delivery system
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US9695674B2 (en) * 2014-04-04 2017-07-04 Onesubsea Ip Uk Limited Subsea dosing pump
US9689529B2 (en) * 2014-05-08 2017-06-27 Baker Hughes Incorporated Oil injection unit
JP6622578B2 (en) * 2015-12-08 2019-12-18 不二越機械工業株式会社 Work processing apparatus and chemical solution storage bag used therefor
CN107096901A (en) * 2017-05-02 2017-08-29 重庆天运汽车配件有限公司 A kind of uniform feeding device of spun casting
US11251047B2 (en) * 2017-11-13 2022-02-15 Applied Materials, Inc. Clog detection in a multi-port fluid delivery system
JP7194996B2 (en) * 2019-03-13 2022-12-23 株式会社松井製作所 Fluid polisher
JP7407439B2 (en) * 2019-10-24 2024-01-04 兵神装備株式会社 Fluid pumping device
TWI742924B (en) * 2020-11-13 2021-10-11 國立勤益科技大學 Automatic-squeezing polishing tool holder
CN120244801B (en) * 2025-04-03 2026-05-01 北京航空航天大学 Aerodynamic control actuator, robot with aerodynamic control actuator and polishing method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR945469A (en) * 1946-03-22 1949-05-05 Passch & Larsen Petersen Process for removing a determined quantity of butter or other plastic material sucked into a tank and apparatus for carrying out this process
US3756456A (en) * 1972-05-22 1973-09-04 Graco Inc Apparatus and method for a metering system
US4863066A (en) * 1986-06-02 1989-09-05 Technicon Instruments Corporation System for dispensing precisely metered quantities of a fluid and method of utilizing the system
US5056036A (en) * 1989-10-20 1991-10-08 Pulsafeeder, Inc. Computer controlled metering pump
US5443180A (en) * 1993-06-25 1995-08-22 Sarl Dussau Distribution Method and apparatus for volume apportionment of and distributing a quality of pasty material
WO1998023932A1 (en) * 1996-11-28 1998-06-04 Beek Daniel Van Dosing apparatus

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU97285A1 (en) 1952-09-26 1953-11-30 В.В. Залесский Pump for pumping fluids with poor lubricating properties
SU125162A1 (en) 1959-06-15 1959-11-30 В.М. Данич Device for feeding abrasive pastes into the working area of a polishing machine
US3635607A (en) * 1970-04-20 1972-01-18 Novelty Tool Co Inc Vacuum pump
SU591609A1 (en) 1976-04-26 1978-02-05 Московское Научно-Производственное Объединение По Механизированному Строительному Инструменту И Отделочным Машинам (Объединение "Вниисми") Piston mortar pump
SU723215A2 (en) 1978-04-04 1980-03-25 Предприятие П/Я В-8662 Hydraulically or pneumatically driven pump
SU767528A1 (en) 1978-07-06 1980-09-30 Предприятие П/Я В-8644 Method of continuously metering liquid
US4488853A (en) * 1980-08-28 1984-12-18 New Process Industries, Inc. Fluid pressure ratio transformer system
FR2608225B1 (en) 1986-12-10 1989-02-17 Imaje Sa MULTIPLE FUNCTION CELL HAVING A VARIABLE VOLUME CHAMBER, AND FLUID SUPPLY CIRCUIT FOR AN INK JET PRINTHEAD PROVIDED THEREWITH
US4950134A (en) * 1988-12-27 1990-08-21 Cybor Corporation Precision liquid dispenser
US5753515A (en) * 1996-07-02 1998-05-19 Eastman Kodak Company Syringe pump apparatus for remote delivery of reactants
US5971722A (en) * 1997-09-05 1999-10-26 Baxter International Inc Electrochemical syringe pump having a sealed storage reservoir for a charge transfer medium
US6293849B1 (en) * 1997-10-31 2001-09-25 Ebara Corporation Polishing solution supply system
US5945346A (en) * 1997-11-03 1999-08-31 Motorola, Inc. Chemical mechanical planarization system and method therefor
US6107203A (en) * 1997-11-03 2000-08-22 Motorola, Inc. Chemical mechanical polishing system and method therefor
US6109881A (en) * 1998-01-09 2000-08-29 Snodgrass; Ocie T. Gas driven pump for the dispensing and filtering of process fluid
US6254453B1 (en) * 1999-09-30 2001-07-03 International Business Machines Corporation Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system
US6544109B1 (en) * 2000-08-31 2003-04-08 Micron Technology, Inc. Slurry delivery and planarization systems

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR945469A (en) * 1946-03-22 1949-05-05 Passch & Larsen Petersen Process for removing a determined quantity of butter or other plastic material sucked into a tank and apparatus for carrying out this process
US3756456A (en) * 1972-05-22 1973-09-04 Graco Inc Apparatus and method for a metering system
US4863066A (en) * 1986-06-02 1989-09-05 Technicon Instruments Corporation System for dispensing precisely metered quantities of a fluid and method of utilizing the system
US5056036A (en) * 1989-10-20 1991-10-08 Pulsafeeder, Inc. Computer controlled metering pump
US5443180A (en) * 1993-06-25 1995-08-22 Sarl Dussau Distribution Method and apparatus for volume apportionment of and distributing a quality of pasty material
WO1998023932A1 (en) * 1996-11-28 1998-06-04 Beek Daniel Van Dosing apparatus

Also Published As

Publication number Publication date
AR071409A2 (en) 2010-06-16
US20040060607A1 (en) 2004-04-01
EP1545835B1 (en) 2010-10-27
EP2347858A2 (en) 2011-07-27
EP2108482A1 (en) 2009-10-14
JP4372010B2 (en) 2009-11-25
DK2343156T3 (en) 2015-04-20
JP2006501075A (en) 2006-01-12
CA2500543A1 (en) 2004-04-15
KR100649468B1 (en) 2006-11-28
PL206362B1 (en) 2010-07-30
RU2313004C2 (en) 2007-12-20
BR0314955A (en) 2005-08-02
EP1545835A2 (en) 2005-06-29
EP2343156A2 (en) 2011-07-13
DE60334712D1 (en) 2010-12-09
EP2347858A3 (en) 2012-05-02
CN101491889A (en) 2009-07-29
HK1086523A1 (en) 2006-09-22
HK1129628A1 (en) 2009-12-04
US7204679B2 (en) 2007-04-17
CN100528485C (en) 2009-08-19
EP2343156A3 (en) 2012-05-02
CN1729082A (en) 2006-02-01
AU2003266022A1 (en) 2004-04-23
AU2003266022B2 (en) 2007-09-06
CN101491889B (en) 2011-03-23
ATE485919T1 (en) 2010-11-15
AR041382A1 (en) 2005-05-18
DK1545835T3 (en) 2011-01-31
MY135346A (en) 2008-03-31
MXPA05003444A (en) 2005-07-05
EP2343156B1 (en) 2015-01-28
PL206360B1 (en) 2010-07-30
KR20050055737A (en) 2005-06-13
CA2500543C (en) 2009-03-24
PL206361B1 (en) 2010-07-30
WO2004030860A2 (en) 2004-04-15
RU2005113299A (en) 2005-09-20
PL375436A1 (en) 2005-11-28

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