WO2004072754A3 - Leistungszufuhrregeleinheit - Google Patents

Leistungszufuhrregeleinheit Download PDF

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Publication number
WO2004072754A3
WO2004072754A3 PCT/EP2004/001293 EP2004001293W WO2004072754A3 WO 2004072754 A3 WO2004072754 A3 WO 2004072754A3 EP 2004001293 W EP2004001293 W EP 2004001293W WO 2004072754 A3 WO2004072754 A3 WO 2004072754A3
Authority
WO
WIPO (PCT)
Prior art keywords
power supply
control unit
power
consumers
supply control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2004/001293
Other languages
English (en)
French (fr)
Other versions
WO2004072754A2 (de
Inventor
Peter Wiedemuth
Alfred Trusch
Dieter Meier
Gerhard Zaehringer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Huettinger GmbH and Co KG
Original Assignee
Huettinger Elektronik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Elektronik GmbH and Co KG filed Critical Huettinger Elektronik GmbH and Co KG
Priority to CN2004800042460A priority Critical patent/CN1751376B/zh
Priority to EP04710352A priority patent/EP1593143B1/de
Priority to AT04710352T priority patent/ATE451713T1/de
Priority to DE200450010489 priority patent/DE502004010489D1/de
Priority to JP2006501814A priority patent/JP2006517718A/ja
Publication of WO2004072754A2 publication Critical patent/WO2004072754A2/de
Publication of WO2004072754A3 publication Critical patent/WO2004072754A3/de
Priority to US11/203,433 priority patent/US7586210B2/en
Anticipated expiration legal-status Critical
Priority to US11/748,792 priority patent/US20080048498A1/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current 
    • G05F1/12—Regulating voltage or current  wherein the variable actually regulated by the final control device is AC

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Supply And Distribution Of Alternating Current (AREA)
  • Air Bags (AREA)
  • Prostheses (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Physical Vapour Deposition (AREA)
  • Ac-Ac Conversion (AREA)

Abstract

Leistungszufuhrregeleinheit (1) und Verfahren zur Regelung der Leistungszufuhr der von einer Wechselstromquelle (2) gelieferten Leistung auf mindestens zwei Verbraucher (4a, 4b), insbesondere auf Verbraucher in einem Plasmaprozess, wobei die Ist-Leistungszufuhr auf die Verbraucher erfasst wird, mit einer vorgegebenen Soll-Leistungszufuhr verglichen wird, und bei einer Abweichung durch Zufuhr und/oder Abfuhr von Leistung zwischen der Wechselstromquelle (2) und mindestens einem der Verbraucher (4a, 4b) die Leistungszufuhr für jeden Verbraucher angepasst wird. Mit dem Verfahren und der Regeleinheit (1) ist es bei einem Plasmaprozess möglich, die in die Elektroden (4a, 4b) gelieferte Leistung unabhängig von der Art der Wechselstromquelle so zu regeln, dass sie einer vorgegebenen Leistungszufuhr entspricht.
PCT/EP2004/001293 2003-02-15 2004-02-12 Leistungszufuhrregeleinheit Ceased WO2004072754A2 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN2004800042460A CN1751376B (zh) 2003-02-15 2004-02-12 供电控制单元
EP04710352A EP1593143B1 (de) 2003-02-15 2004-02-12 Leistungszufuhrregeleinheit
AT04710352T ATE451713T1 (de) 2003-02-15 2004-02-12 Leistungszufuhrregeleinheit
DE200450010489 DE502004010489D1 (de) 2003-02-15 2004-02-12 Leistungszufuhrregeleinheit
JP2006501814A JP2006517718A (ja) 2003-02-15 2004-02-12 電力供給調整装置
US11/203,433 US7586210B2 (en) 2003-02-15 2005-08-15 Power delivery control and balancing between multiple loads
US11/748,792 US20080048498A1 (en) 2003-02-15 2007-05-15 Power Delivery Control and Balancing Between Multiple Loads

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10306347.1 2003-02-15
DE2003106347 DE10306347A1 (de) 2003-02-15 2003-02-15 Leistungszufuhrregeleinheit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/203,433 Continuation US7586210B2 (en) 2003-02-15 2005-08-15 Power delivery control and balancing between multiple loads

Publications (2)

Publication Number Publication Date
WO2004072754A2 WO2004072754A2 (de) 2004-08-26
WO2004072754A3 true WO2004072754A3 (de) 2005-06-09

Family

ID=32747881

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/001293 Ceased WO2004072754A2 (de) 2003-02-15 2004-02-12 Leistungszufuhrregeleinheit

Country Status (7)

Country Link
US (2) US7586210B2 (de)
EP (1) EP1593143B1 (de)
JP (1) JP2006517718A (de)
CN (1) CN1751376B (de)
AT (1) ATE451713T1 (de)
DE (2) DE10306347A1 (de)
WO (1) WO2004072754A2 (de)

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JP5646398B2 (ja) * 2011-06-17 2014-12-24 住友重機械工業株式会社 成膜装置
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EP2905802B1 (de) * 2014-02-07 2019-05-22 TRUMPF Huettinger Sp. Z o. o. Verfahren zur Lichtbogenerkennung in einem Plasmaprozess und Stromversorgung zur Bereitstellung einer Ausgangsmenge in einem Plasmaprozess
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US11462389B2 (en) 2020-07-31 2022-10-04 Applied Materials, Inc. Pulsed-voltage hardware assembly for use in a plasma processing system
US11901157B2 (en) 2020-11-16 2024-02-13 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11798790B2 (en) 2020-11-16 2023-10-24 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11495470B1 (en) 2021-04-16 2022-11-08 Applied Materials, Inc. Method of enhancing etching selectivity using a pulsed plasma
US11791138B2 (en) 2021-05-12 2023-10-17 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11948780B2 (en) 2021-05-12 2024-04-02 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
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US12525433B2 (en) 2021-06-09 2026-01-13 Applied Materials, Inc. Method and apparatus to reduce feature charging in plasma processing chamber
US12394596B2 (en) 2021-06-09 2025-08-19 Applied Materials, Inc. Plasma uniformity control in pulsed DC plasma chamber
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US11810760B2 (en) 2021-06-16 2023-11-07 Applied Materials, Inc. Apparatus and method of ion current compensation
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US12586768B2 (en) 2022-08-10 2026-03-24 Applied Materials, Inc. Pulsed voltage compensation for plasma processing applications
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US12111341B2 (en) 2022-10-05 2024-10-08 Applied Materials, Inc. In-situ electric field detection method and apparatus

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Also Published As

Publication number Publication date
WO2004072754A2 (de) 2004-08-26
DE502004010489D1 (de) 2010-01-21
DE10306347A1 (de) 2004-08-26
CN1751376B (zh) 2011-01-19
US20080048498A1 (en) 2008-02-28
JP2006517718A (ja) 2006-07-27
US7586210B2 (en) 2009-09-08
EP1593143A2 (de) 2005-11-09
EP1593143B1 (de) 2009-12-09
CN1751376A (zh) 2006-03-22
US20060032738A1 (en) 2006-02-16
ATE451713T1 (de) 2009-12-15

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