WO2005019654A1 - Entrainement combine a palier - Google Patents

Entrainement combine a palier Download PDF

Info

Publication number
WO2005019654A1
WO2005019654A1 PCT/EP2004/008320 EP2004008320W WO2005019654A1 WO 2005019654 A1 WO2005019654 A1 WO 2005019654A1 EP 2004008320 W EP2004008320 W EP 2004008320W WO 2005019654 A1 WO2005019654 A1 WO 2005019654A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
drive
pump
stator
combined drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2004/008320
Other languages
German (de)
English (en)
Inventor
Gerhard Voss
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of WO2005019654A1 publication Critical patent/WO2005019654A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/0563—Bearings cartridges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0493—Active magnetic bearings for rotary movement integrated in an electrodynamic machine, e.g. self-bearing motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a combined drive with storage, in particular a pump drive with a stator and a rotor, which have interacting drive components with permanent magnets or electromagnets, and in particular a turbomolecular pump serving as a high vacuum pump.
  • the invention has for its object to provide a pump drive in which the drive components and the storage are simplified.
  • the combined drive according to the invention has the features of claim 1. According to this, one of the drive components forms a web running transversely to the axial direction and the other forms a surround encompassing the web from two axially opposite sides.
  • the drive component provided with electromagnets generates a rotating magnetic field, with both drive components forming a contactless magnetic bearing for the rotor.
  • a disc rotor drive is provided from an electromagnetic drive component and a permanent magnetic drive component, which at the same time forms a magnetic bearing for the axial and radial contactless magnetic bearing of the rotor.
  • a rotating magnetic field generated by the electromagnets forms a rotating rotary drive which the permanent magnets follow.
  • the magnetic components form a magnetic bearing in which the rotor is kept floating in relation to the stator.
  • the invention leads to a considerable structural simplification of the drive, which now no longer requires a shaft.
  • the drive motor is integrated as a linear motor in the stator or the rotor. This also significantly shortens the overall length of the pump drive. Because there is no shaft, the rotor mass is reduced, which also reduces the tendency to oscillate.
  • the invention is particularly suitable for high-speed pump drives, such as, for example, turbomolecular pumps, turbo radial blowers, turbostream blowers or high-speed pumps for fuel cells.
  • stator carries the electromagnets and the rotor carries the permanent magnets. This avoids slip rings and similar current transmission devices on the rotor. It is also preferably provided that the stator has the web and the rotor has the enclosure, although these conditions can also be reversed.
  • the enclosure surrounds the web from three sides in a U-shape. This includes a V-shaped shape of the webs or the enclosure.
  • the invention creates a drive that is combined with a magnetic bearing, the same magnetic arrangement is used.
  • the pump drive can be made so short that the extension in the direction of the virtual longitudinal axis is shorter than the extension in the transverse direction, i.e. the width.
  • FIG. 1 shows a schematic longitudinal section through a first embodiment of the pump drive
  • FIG. 4 shows a turbomolecular pump with a tubular rotor which contains a compression mechanism
  • Fig. 5 shows a pump with two coaxial drives that act on the same pump impeller
  • FIG. 6 shows an embodiment with two pump impellers driven in opposite directions.
  • the drive for a radial pump shown in FIG. 1 drives a pump impeller 10 in rotation.
  • the pump drive has a stator 11 and a rotor 12.
  • the pump impeller 10 is attached to the rotor 12.
  • the rotor 12 consists of a disk 13 carrying the pump impeller 10, which has a virtual axis A, which forms the longitudinal axis of the pump drive.
  • the radially extending disk 13 also forms a surround 14 with a peripheral wall 15 and an end wall 16 running parallel to the disk 13.
  • the surround 14 thus forms a circumferential U-shaped boundary of a web space 17 which is only open radially inwards.
  • the three walls of the web space 17 are formed by magnets 18, 19, 20.
  • the magnets 18 are located on the disk 13, the magnets 19 on the peripheral wall 15 and the magnets 20 on the end wall 16. All three types of magnets are oriented such that the same poles (e.g. north poles) point into the interior of the web space 17.
  • the stator 11 has a hollow tube 25 which extends coaxially to the axis A and ends at a short distance in front of the disk 13. At the end of the tube 25 is a radially outwardly projecting web 26 or flange.
  • the web 26 contains various electromagnets 28, 29, 30, which interact with the magnets 18, 19, 20 of the rotor.
  • the magnets of the magnet pairs 18, 28 and 19, 29 and 20, 30 repel each other, so that contact-free mounting of the rotor 12 in the axial direction as well as in the radial direction to the axis A is achieved.
  • At least some of the electromagnets 28, 29, 30 of the stator 11 are controlled in such a way that they. generate a traveling magnetic field revolving around the circumference of the rotor. The rotor follows this magnetic field, causing it to rotate.
  • the pump drive is shaftless in this embodiment, i.e. it has no axis or shaft connected to the rotor 12.
  • the tube 25 only serves to connect the web 26 to a housing structure. It is hollow and essentially empty, but inside the tube 25 wires and other components for distributing the supply currents to the electromagnets 28, 29, 30 can be accommodated.
  • FIG. 2 shows a modified embodiment of the pump drive in a turbomolecular pump to generate high vacuum.
  • the enclosure 14 and the web 26 are designed in a V-shape, which represents a lower shape of a U-shape. Only two permanent magnets 18, 20 and two electromagnets 28, 30 are required to effect the magnetic bearing and the rotary drive.
  • the turbomolecular pump has a pump impeller 10 a, which is part of the rotor 12.
  • the high vacuum connection 40 forms the pump inlet.
  • the rotor has numerous rotor blades 41 which alternate with stator blades 42.
  • the pump forms a molecular friction pump.
  • the high vacuum part of the pump is followed by a further pump part 43 which contains a helical coil 44 which projects from the inside of a stator ring 45.
  • the outlet of the high vacuum pump is formed by a forevacuum connection 46, which is connected to the suction connection of a forevacuum pump.
  • the entire pump is housed in a housing 47, on the bottom wall 48 of which the pipe 25 is attached.
  • At least one cable 49 passes through the tube 25 to supply and control the electromagnets with energy.
  • FIG. 3 largely corresponds to that of FIG. 2.
  • a pump impeller 10a instead of the pump impeller 10a, a pump impeller 10, as shown in FIG. 1, can also be used.
  • both the stator 11 and the rotor 12 are tubular.
  • the pump impeller 10a in Figure 4 includes a compression mechanism.
  • FIG. 5 shows the combination of a pump impeller 10a with two pump drives 50 and 51, each of which has a fixed stator 11 and 11a and drives the same pump impeller with its rotor.
  • FIG. 6 shows an exemplary embodiment of a turbomolecular pump in which two pump parts 52, 53 are provided which rotate relative to one another.
  • the outer pump part 52 is connected to the rotor 12 and the inner pump part 53 is connected to a further rotor 12a which drives a shaft 55 on which the pump part 53 sits.
  • the two pump parts 52 and 53 are driven in opposite directions to one another, as indicated by the arrows.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne un entraînement présentant un stator (11) et un rotor (12). Le rotor présente un enveloppement (14) entourant une entretoise (26) faisant saillie du stator (11). Des aimants permanents (18, 19, 20) du rotor coopèrent avec des électroaimants (28, 29, 30) du stator (11) pour induire l'entraînement d'une pompe et former, dans un même temps, un palier magnétique.
PCT/EP2004/008320 2003-08-20 2004-07-24 Entrainement combine a palier Ceased WO2005019654A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10338222.4 2003-08-20
DE10338222A DE10338222A1 (de) 2003-08-20 2003-08-20 Kombinierter Antrieb mit Lagerung

Publications (1)

Publication Number Publication Date
WO2005019654A1 true WO2005019654A1 (fr) 2005-03-03

Family

ID=34177706

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/008320 Ceased WO2005019654A1 (fr) 2003-08-20 2004-07-24 Entrainement combine a palier

Country Status (2)

Country Link
DE (1) DE10338222A1 (fr)
WO (1) WO2005019654A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007048273A1 (fr) 2005-10-24 2007-05-03 Chuy-Nan Chio Palier a suspension electromagnetique
WO2009021721A3 (fr) * 2007-08-14 2009-07-09 Rothe Erde Gmbh Procédé et palier de montage d'appareils rotatifs, notamment d'un scanner médical
WO2012028181A1 (fr) * 2010-09-01 2012-03-08 Levitronix Gmbh Pompe rotative
GB2491825A (en) * 2011-06-10 2012-12-19 William Brian Turner A permanent magnet combined journal and thrust bearing for a large shaft
CN107134881A (zh) * 2017-04-26 2017-09-05 江苏大学 一种五自由度混合励磁磁悬浮开关磁阻电机
DE102016214696A1 (de) * 2016-08-08 2018-02-08 Efficient Energy Gmbh Elektrischer Scheibenmotor mit Medientrennung im Motorspalt
US20230323890A1 (en) * 2020-08-21 2023-10-12 Edwards Japan Limited Vacuum pump, stator blade, and spacer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001203A1 (de) * 2008-04-16 2009-10-22 Zf Friedrichshafen Ag Vorrichtung zum Betätigen einer Hydraulikpumpe
CN106949143B (zh) * 2017-04-06 2018-11-02 北京石油化工学院 一种v形聚磁效应的隐式洛伦兹力轴向磁轴承

Citations (5)

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US3845995A (en) * 1972-03-08 1974-11-05 Teldix Gmbh Magnetically mounted rotor
FR2294430A2 (fr) * 1974-12-10 1976-07-09 Aerospatiale Volant d'inertie pour satellite
US4370004A (en) * 1979-04-28 1983-01-25 Mitsubishi Precision Co., Ltd. Magnetically suspended type momentum ring assembly
DE3523343C1 (en) * 1985-06-29 1987-01-15 Hartmut Prof Dr Griepentrog Turbo-machine with a radial rotor wheel
US4688998A (en) * 1981-03-18 1987-08-25 Olsen Don B Magnetically suspended and rotated impellor pump apparatus and method

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DE2631199C3 (de) * 1976-07-10 1979-11-29 Daimler-Benz Ag, 7000 Stuttgart Vorrichtung zum Messen von Dehnungen
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FR2659396B1 (fr) * 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide pour vide moleculaire propre.
FR2715201B1 (fr) * 1994-01-19 1996-02-09 Inst Nat Polytech Grenoble Palier magnétique et ensemble comportant une partie statorique et une partie rotorique suspendue par un tel palier.
DE19509628A1 (de) * 1995-03-21 1996-10-10 Teldix Gmbh Magnetisch gelagertes, lagestabilisierbares Schwungrad
US5731645A (en) * 1996-02-05 1998-03-24 Magnetic Bearing Technologies, Inc. Integrated motor/generator/flywheel utilizing a solid steel rotor
KR100403857B1 (ko) * 2000-01-05 2003-11-01 가부시기가이샤 산교세이기 세이사꾸쇼 자기부상모터
US6707200B2 (en) * 2000-11-14 2004-03-16 Airex Corporation Integrated magnetic bearing
DE10129160A1 (de) * 2001-06-16 2002-12-19 W I T Wiemers Innovative Techn Magnetlager

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845995A (en) * 1972-03-08 1974-11-05 Teldix Gmbh Magnetically mounted rotor
FR2294430A2 (fr) * 1974-12-10 1976-07-09 Aerospatiale Volant d'inertie pour satellite
US4370004A (en) * 1979-04-28 1983-01-25 Mitsubishi Precision Co., Ltd. Magnetically suspended type momentum ring assembly
US4688998A (en) * 1981-03-18 1987-08-25 Olsen Don B Magnetically suspended and rotated impellor pump apparatus and method
DE3523343C1 (en) * 1985-06-29 1987-01-15 Hartmut Prof Dr Griepentrog Turbo-machine with a radial rotor wheel

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1980765A4 (fr) * 2005-10-24 2009-09-16 Chuy-Nan Chio Palier a suspension electromagnetique
WO2007048273A1 (fr) 2005-10-24 2007-05-03 Chuy-Nan Chio Palier a suspension electromagnetique
US8319385B2 (en) 2007-08-14 2012-11-27 Rothe Erde Gmbh Method and bearing for supporting rotatable devices, particularly a medical scanner
WO2009021721A3 (fr) * 2007-08-14 2009-07-09 Rothe Erde Gmbh Procédé et palier de montage d'appareils rotatifs, notamment d'un scanner médical
CN103189655A (zh) * 2010-09-01 2013-07-03 莱维特朗尼克斯有限责任公司 旋转泵
WO2012028181A1 (fr) * 2010-09-01 2012-03-08 Levitronix Gmbh Pompe rotative
CN103189655B (zh) * 2010-09-01 2016-12-21 莱维特朗尼克斯有限责任公司 旋转泵
US9835158B2 (en) 2010-09-01 2017-12-05 Levitronix Gmbh Rotary pump
US10920781B2 (en) 2010-09-01 2021-02-16 Levitronix Gmbh Rotary pump
GB2491825A (en) * 2011-06-10 2012-12-19 William Brian Turner A permanent magnet combined journal and thrust bearing for a large shaft
DE102016214696A1 (de) * 2016-08-08 2018-02-08 Efficient Energy Gmbh Elektrischer Scheibenmotor mit Medientrennung im Motorspalt
CN107134881A (zh) * 2017-04-26 2017-09-05 江苏大学 一种五自由度混合励磁磁悬浮开关磁阻电机
CN107134881B (zh) * 2017-04-26 2019-04-30 江苏大学 一种五自由度混合励磁磁悬浮开关磁阻电机
US20230323890A1 (en) * 2020-08-21 2023-10-12 Edwards Japan Limited Vacuum pump, stator blade, and spacer

Also Published As

Publication number Publication date
DE10338222A1 (de) 2005-03-10

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