WO2006126880A2 - Microscope electronique de transmission par balayage - Google Patents

Microscope electronique de transmission par balayage Download PDF

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Publication number
WO2006126880A2
WO2006126880A2 PCT/NL2006/050120 NL2006050120W WO2006126880A2 WO 2006126880 A2 WO2006126880 A2 WO 2006126880A2 NL 2006050120 W NL2006050120 W NL 2006050120W WO 2006126880 A2 WO2006126880 A2 WO 2006126880A2
Authority
WO
WIPO (PCT)
Prior art keywords
electron
detector
examined
electron microscope
beamlets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/NL2006/050120
Other languages
English (en)
Other versions
WO2006126880A3 (fr
Inventor
Pieter Kruit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universiteit Delft
Original Assignee
Technische Universiteit Delft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of WO2006126880A2 publication Critical patent/WO2006126880A2/fr
Publication of WO2006126880A3 publication Critical patent/WO2006126880A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Definitions

  • the invention relates to a scanning transmission electron microscope comprising an electron source, an electron accelerator and deflection means for directing electrons emitted by the electron source at an object to be examined, and in addition a detector for detecting electrons coming from the object and, connected to the detector, a device for processing the detected electrons so as to form an object image.
  • An object of the invention is to provide an electron microscope that facilitates faster imaging, or with which it is possible to determine more quickly the different materials of which an object to be examined is composed.
  • the electron microscope is characterized in that a beam splitter is provided for dividing the electron beam from the electron source into beamlets to be directed at the object to be examined, and in that the detector is designed for the detection of separate electron patterns that correspond to said beamlets.
  • the electron microscope according to the invention is suitably embodied such that during operation an adjustable diaphragm plate is provided between the object to be examined and the detector.
  • the electron microscope is preferably characterized in that during operation an organ with dispersive properties is placed between the object to be examined and the detector.
  • the drawing shows: - in Figure 1, a first embodiment of an electron microscope according to the invention and
  • the electron microscope comprises first an electron source 1 and, viewed in the direction of the object 2 to be examined, successively a beam splitter 3, an electron accelerator 4 which may be equipped with lenses, and deflection means 5 for directing the electron beamlets from the electron source 1 and beam splitter 3 at the object to be examined 2.
  • a processing device for example a computer system, is connected to the detector 7 with which the electrons detected by the detector 7 can be visualised in the form of an object image to be displayed on a monitor.
  • the just referred to detector 7 is embodied as a multispot detector, i.e. it is designed for detecting separate electron spots corresponding to the above-mentioned beamlets of the electron beams, and representing the illumination of the object 2 to be examined.
  • Figure 1 shows the embodiment in which an adjustable diaphragm plate 8 is placed between the object 2 to be examined and the detector 7, making the apparatus suitable for dark-field imaging or bright-field imaging. How this works in practice is well known to those skilled in the art so that a further explanation is superfluous.
  • a lens system 9 may be provided for the controlled illumination of the multipixel detector 7.
  • Figure 2 shows that following the objective lens 6 and the deflection means and lens system 9, an organ 10 having dispersive properties may be placed for the differentiation in the spectral lines, which are indicative for the materials of which the object 2 to be examined is composed.
  • the dispersive organ 10 may be followed in the usual manner by a lens system 11.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

L'invention concerne un microscope électronique de transmission par balayage comprenant une source d'électrons, un accélérateur d'électrons et un moyen de déflexion destiné à diriger les électrons émis par la source d'électrons vers un objet à examiner, et un détecteur destiné à détecter les électrons provenant de l'objet et, connecté au détecteur, un dispositif de traitement des électrons détectés de manière à former une image de l'objet. Un diviseur de faisceau est destiné à diviser le faisceau d'électrons de la source d'électrons en sous-faisceaux destinés à être dirigés vers l'objet à examiner, le détecteur étant destiné à détecter des motifs d'électrons séparés correspondant auxdits sous-faisceaux.
PCT/NL2006/050120 2005-05-25 2006-05-19 Microscope electronique de transmission par balayage Ceased WO2006126880A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1029129 2005-05-25
NL1029129A NL1029129C2 (nl) 2005-05-25 2005-05-25 Scanningtransmissie-elektronenmicroscoop.

Publications (2)

Publication Number Publication Date
WO2006126880A2 true WO2006126880A2 (fr) 2006-11-30
WO2006126880A3 WO2006126880A3 (fr) 2007-03-29

Family

ID=35512017

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2006/050120 Ceased WO2006126880A2 (fr) 2005-05-25 2006-05-19 Microscope electronique de transmission par balayage

Country Status (2)

Country Link
NL (1) NL1029129C2 (fr)
WO (1) WO2006126880A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2854153A3 (fr) * 2013-09-09 2015-07-15 Carl Zeiss Microscopy GmbH Système optique à faisceaux multiples des particules pour inspection d'un échantillon en transmission

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209698A (en) * 1971-12-28 1980-06-24 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Transmission-type charged particle beam apparatus
JP2966438B2 (ja) * 1989-08-25 1999-10-25 株式会社日立製作所 走査干渉電子顕微鏡
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
US6184524B1 (en) * 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
WO2001039243A1 (fr) * 1999-11-23 2001-05-31 Ion Diagnostics, Inc. Optique electronique destinee a un outil lithographique faisceau electronique multi-faisceaux

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2854153A3 (fr) * 2013-09-09 2015-07-15 Carl Zeiss Microscopy GmbH Système optique à faisceaux multiples des particules pour inspection d'un échantillon en transmission
US9349571B2 (en) 2013-09-09 2016-05-24 Carl Zeiss Microscopy Gmbh Particle optical system

Also Published As

Publication number Publication date
WO2006126880A3 (fr) 2007-03-29
NL1029129C2 (nl) 2006-11-28

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