WO2007104528A1 - Dispositif de commutateurs avec une pluralité de commutateurs disposés sous forme matricielle et procédé de commutation de commutateurs disposés sous forme matricielle - Google Patents

Dispositif de commutateurs avec une pluralité de commutateurs disposés sous forme matricielle et procédé de commutation de commutateurs disposés sous forme matricielle Download PDF

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Publication number
WO2007104528A1
WO2007104528A1 PCT/EP2007/002185 EP2007002185W WO2007104528A1 WO 2007104528 A1 WO2007104528 A1 WO 2007104528A1 EP 2007002185 W EP2007002185 W EP 2007002185W WO 2007104528 A1 WO2007104528 A1 WO 2007104528A1
Authority
WO
WIPO (PCT)
Prior art keywords
switch
circuit arrangement
coils
arrangement according
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/002185
Other languages
German (de)
English (en)
Inventor
Steffen Kurth
Jörg FRÖMEL
Sebastian Voigt
Stefan Leidich
Jörg Nestler
Alexej Shaporin
Wolfram DÖTZEL
Thomas Gessner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Chemnitz
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Technische Universitaet Chemnitz
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102006029024A external-priority patent/DE102006029024B3/de
Application filed by Technische Universitaet Chemnitz, Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Technische Universitaet Chemnitz
Publication of WO2007104528A1 publication Critical patent/WO2007104528A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/06—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using single-aperture storage elements, e.g. ring core; using multi-aperture plates in which each individual aperture forms a storage element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/02—Non-polarised relays
    • H01H51/04—Non-polarised relays with single armature; with single set of ganged armatures
    • H01H51/06—Armature is movable between two limit positions of rest and is moved in one direction due to energisation of an electromagnet and after the electromagnet is de-energised is returned by energy stored during the movement in the first direction, e.g. by using a spring, by using a permanent magnet, by gravity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers
    • H01H67/24—Co-ordinate-type relay switches having an individual electromagnet at each cross-point
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • Switch arrangement with a plurality of switches arranged in matrix form and method for switching switches arranged in matrix form
  • the invention relates to a switch arrangement with a plurality of switches arranged in rows and columns according to the preamble of the main claim and a method for actuating switches arranged in matrix form.
  • reconfigurable antennas which can be realized here, for example by interconnecting smaller individual antenna elements to so-called patch antennas of different geometries. For this purpose, a larger number of separately controllable switches is necessary. However, the cost of such intelligent antennas should not significantly exceed that of currently used non-controllable antennas. From the- For this reason, a technology for mass production of reconfigurable antennas, including the switches, is required in a cost-effective manner.
  • a bistable, magnetically actuated switch in a single version wherein the bistable arrangement allows each of the two switching states remain stable without continuous energy supply.
  • a plurality of structured layers is provided, which include at least one structured layer with a movable element.
  • the structured layers are arranged one above the other and each layer is connected to the adjacent layer.
  • One of the layers has an electromagnet or a coil.
  • the known solutions are used for the realization of individual or few switches on technically relevant surfaces, such as a chip area, since in such configurations, the cost of interconnection and addressing of the coils with the number of actuators increases massively. Geometrically dense arrays can not be realized so far. In order to integrate a very large number of such switches in a small area, it is necessary to make the actuation and addressing compact and efficient.
  • EP 0 856 866 B1 discloses magnetically actuated switches organized in a regular grid, which have a layered arrangement of a movable contact, a coil plate arranged at a distance therefrom, a contact plate with an iron core and an insulating layer.
  • the known configuration requires the connection of the coil arranged on the coil plate with orthogonally arranged address lines.
  • the connection of the conductors which are otherwise insulated from one another, requires a production technology with a high lateral resolution with the possibility of reliably producing these connection points.
  • it has to be prevented by inserting diodes that flow paths form over non-addressed coils. This in turn prevents a switching of the switching contact by changing the current directions and represents a further increase in the Heinrichsaufwands.
  • the invention has for its object to realize an array with geometrically tight, preferably bistable magnetically actuated switches Sieren, which provides low technological requirements for addressing and wiring, thereby enabling cost-effective production.
  • the frequencies are in a range in the state of the art configurable by switching arrays antennas because of the specific size, the use of conventional relay not permit and a monolithic integration into the antenna is also not possible.
  • a suitable robustness continues to be required.
  • the invention relates to a micromechanical switch terarray with preferably bistable, magnetically actuated switches.
  • the force required for switching is generated electromagnetically.
  • the holding force in the final states is applied by springs or permanent magnets.
  • the arrangement with two separate coil layers allows by superposition of magnetic forces from a technological point of view significant reduction in the driving complexity of arranged in a grid individual switch.
  • the possibility of using inexpensive production technologies makes it possible to open up new fields of application.
  • the stated object is achieved according to the invention by further developing the interconnection of coils known from ferrite core memories by superposition of the magnetic flux.
  • the field overlay is not used to magnetize a memory bit, but used to superimpose the force between two current flowing through coil and a permanent magnet to cause a change in the switching state of each of a bistable, magnetically actuated switch.
  • the addition of the magnetic fields or the superposition of the force of the two superimposed coils has the advantage that not all actuator coils must be connected locally with addressing lines, but that each coil of a row or a column of a continuous, insulated conductor, eg a insulated wire, can be made.
  • microwinning technology derived from conventional macroscopic coil production and thus multilayer metallizations with laterally high structural resolution. avoidance.
  • substrate materials such as high-resistance semiconductor wafers or non-conductors, such as glass, sapphire or alumina ceramic for the production of MEMS elements is determined less by the advantageous material properties, as to meet the customary for microtechnological processes high demands on material flatness and reproducibility .
  • the combination of modern microstructuring according to the invention such as, for example, microembossing and modified conventional methods, such as, for example, micro coil winding, constitutes an essential development step for the realization of comparatively large, mechanically complex, reconfigurable components.
  • the invention thus opens up completely new possibilities in many areas of information technology. and communication technology in which functional elements can not be downsized for physical reasons. It is considered essential to significantly improve the component quality in terms of functionality and flexibility under the conditions of a market-limiting cost limit.
  • the switch arrangement according to the invention can be hermetized simply due to the two closed material layers, namely the carrier substrate and the actuator substrate, and thereby satisfies the technical requirements of mobile communication technology.
  • the movable contact of each switch and optionally also the permanent magnet associated with each switch is attached to a foil membrane, the required mechanical robustness being given for mobile applications due to the suspension designed as a foil membrane and the low mass of the moving parts.
  • the two coil layers of the switch array provided in different planes can be designed so that only one elongate narrow coil is provided for each row or each column, which encloses the various coil cores. However, it can be arranged around each bobbin associated with him coil of the corresponding row and the corresponding column.
  • Fig. 1 is a plan view of the invention
  • Fig. 2 is a partial section through the switch array according to the invention.
  • the switch arrangement according to the invention has a carrier substrate 4 and an actuator substrate 3 lying above in the drawing, both substrates in the exemplary embodiment consisting of a material suitable for the use of high frequency technology, such as liquid crystal polymers, polyamide, Kapton and like.
  • a carrier substrate 4 On the carrier germaterial 4 is shown in FIG. 1, a field of individual antenna elements 14 in rows and columns applied at a distance from each other. Each antenna element is connected in rows and columns by way of switches 20 to the respectively adjacent antenna element 14, so that the switches 20 likewise form a matrix field.
  • Fig. 2 4 wells 5 are provided in the carrier substrate, which are structured for example by molding and in which by deposition of suitable material layers contact surfaces are provided as fixed contacts 6. These contact surfaces are connected to the individual antenna elements 14.
  • a foil membrane 7 is applied to the carrier substrate 4 or to the antenna element layer, contact elements 8 being structured opposite to the fixed contacts 6 on the foil membrane 7.
  • the film membrane 7 is attached to the carrier 4 so that a bias is applied to the contact elements 8, such that they are pressed onto the fixed contacts 6. In the region of the trough 5, the membrane film 7 is free to move. With the help of the bias the functionally important membrane rigidity is achieved.
  • the permanent magnet can also be embodied as magnetic nano- or microparticles introduced into the film.
  • the Foil membrane 7 for a switch 20 in the closed state 10 already deflected, due to the bias, the necessary contact force is generated.
  • Structured elements of a magnetic material are also applied as spool cores 11 to the actuator substrate 3 opposite to the permanent magnets 9 applied to the film membrane 7.
  • the actuator substrate 3 which may also be structured by molding, two separate layers each column in series connected coils 1 and series-connected in series coils 2, which are superimposed in different planes.
  • the coils 1, 2 and the coil cores 11 are embedded in total in an insulating material 15, which is connected as an insulating layer with the actuator substrate and also serves for mechanically fixing the coil.
  • each core two superposed coils 1, 2 are assigned.
  • a long coil can be formed for each row or each column, which then encloses all the coil cores 11 of the respective row or column.
  • the coils of each column or each row of both embodiments can be wound from a continuous wire and it is locally on the switch no change between the levels or no contact needed.
  • terminals 17 are provided for each row and terminals 17 for each column.
  • the Switches In the de-energized state of the coils 1, 2, the Switches have two states, as shown in Fig. 2, namely the closed state 10 of the switch 20 and the opened state 12.
  • the stable holding state with the switch 12 is opened is achieved by the respective coil core 11 in connection with the permanent magnet 9.
  • the holding force generated between the permanent magnet 9 and the coil core 11 is greater than the restoring force or spring force of the film membrane 7.
  • the closed state 10 of the switch 20, left in FIG. 2 is also stable, since the magnetic force between the coil core 11 and permanent magnet 10 is no longer sufficient through the larger gap portion to pull the film membrane 7 upwards.
  • the carrier substrate 4, optionally also the actuator substrate 3, can have the function of a chip housing or an outer wall of a device. Such a chip housing can be easily hermetized due to the two closed material layers.
  • the radiation is preferably carried out by the carrier substrate 4.
  • the carrier substrate is made of liquid crystal polymer and is patterned by hot stamping.
  • the individual antenna elements 14 and the contact regions 6 are defined by means of sputtering technology and lithography and subsequently galvanically reinforced.
  • the film membrane 7 has a Mylar film which carries on the side facing the carrier substrate 4 electroplated contact elements 8 and on the other side applied by screen printing and subsequently magnetized NdFeB permanent magnets 9. The film membrane 7 is stretched and by means of an adhesive with the
  • Carrier substrate 4 connected.
  • the processing of the actuator substrate 3 begins with the printing and curing of the coil cores 11 of MnZn ferrite.
  • the columns and rows organized coils 1, 2 are made by winding a thin copper enamel wire.
  • the standing out of the plane coil core serves each as a winding mandrel.
  • the winding of the individual coils 1, 2 is carried out sequentially, starting one above the other, optionally with the row or column.
  • the insulating layer 15 is applied.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un dispositif de circuit avec une pluralité de commutateurs disposés en lignes et en colonnes qui comportent chacun au moins un contact mobile précontraint élastique et au moins un contact fixe et auxquels est relié un dispositif de bobines, un commutateur respectif pouvant être actionné indépendamment d'un champ magnétique généré par le dispositif de bobines. Au moins une bobine (2) est affectée à chaque ligne de commutateurs (20) dans un premier plan avec des connexions d'excitation (16) et au moins une bobine (1) est affectée à chaque colonne de commutateurs (20) dans un second plan avec des connexions d'excitation (17), la force magnétique nécessaire pour actionner un commutateur situé à un point nodal (13) d'une ligne et d'une colonne pouvant être générée par activation dans le même sens des connexions de la ligne et de la colonne respectives et par addition des champs magnétiques de la première et de la deuxième bobines (1, 2) du commutateur (20) respectif.
PCT/EP2007/002185 2006-03-10 2007-03-08 Dispositif de commutateurs avec une pluralité de commutateurs disposés sous forme matricielle et procédé de commutation de commutateurs disposés sous forme matricielle Ceased WO2007104528A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102006011199 2006-03-10
DE102006011199.0 2006-03-10
DE102006029024A DE102006029024B3 (de) 2006-03-10 2006-06-14 Schalteranordnung zur Ansteuerung einer Antennenanordnung mit einzelnen Antennenelementen mit einer Mehrzahl von matrixförmig angeordneten Schaltern und Verfahren zum Schalten von matrixförmig angeordneten Schaltern
DE102006029024.0 2006-06-14

Publications (1)

Publication Number Publication Date
WO2007104528A1 true WO2007104528A1 (fr) 2007-09-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/002185 Ceased WO2007104528A1 (fr) 2006-03-10 2007-03-08 Dispositif de commutateurs avec une pluralité de commutateurs disposés sous forme matricielle et procédé de commutation de commutateurs disposés sous forme matricielle

Country Status (1)

Country Link
WO (1) WO2007104528A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2854151A1 (fr) * 2013-09-26 2015-04-01 Niko NV Relais électromécanique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1081059B (de) * 1958-07-23 1960-05-05 Siemens Ag Koordinatenwaehler mit aus Schutzrohrkontakten aufgebauten Kontaktsaetzen
DE2526030A1 (de) * 1974-06-14 1976-01-02 Nippon Electric Co Elektromagnetische schaltervorrichtung
EP0856866A1 (fr) * 1995-10-20 1998-08-05 Omron Corporation Relais et relais matriciel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1081059B (de) * 1958-07-23 1960-05-05 Siemens Ag Koordinatenwaehler mit aus Schutzrohrkontakten aufgebauten Kontaktsaetzen
DE2526030A1 (de) * 1974-06-14 1976-01-02 Nippon Electric Co Elektromagnetische schaltervorrichtung
EP0856866A1 (fr) * 1995-10-20 1998-08-05 Omron Corporation Relais et relais matriciel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2854151A1 (fr) * 2013-09-26 2015-04-01 Niko NV Relais électromécanique
BE1021760B1 (nl) * 2013-09-26 2016-01-15 Niko Nv Elektromechanisch relais

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