WO2007119653A1 - セラミック粉末、及びセラミック粉末の製造方法 - Google Patents
セラミック粉末、及びセラミック粉末の製造方法 Download PDFInfo
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- WO2007119653A1 WO2007119653A1 PCT/JP2007/057441 JP2007057441W WO2007119653A1 WO 2007119653 A1 WO2007119653 A1 WO 2007119653A1 JP 2007057441 W JP2007057441 W JP 2007057441W WO 2007119653 A1 WO2007119653 A1 WO 2007119653A1
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- C01G33/00—Compounds of niobium
- C01G33/006—Compounds containing niobium, with or without oxygen or hydrogen, and containing two or more other elements
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
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Definitions
- the present invention relates to a ceramic powder and a method for producing the ceramic powder, and more particularly to a ceramic powder mainly composed of a niobic acid compound and a method for producing the same.
- niobate compounds especially alkali niobates, are considered promising as ceramic materials for piezoelectric parts because of their high cues and high electromechanical coupling coefficient. ing.
- this alkali niobate usually has deliquescence, and thus has a drawback that it is difficult to store and manage.
- Patent Document 1 a piezoelectric ceramic composition containing an alkali niobate as a main component and containing Bi has been proposed.
- Patent Document 1 by adding Bi to an alkali niobate, the deliquescence of the piezoelectric ceramic composition can be suppressed, thereby improving the storage stability of the piezoelectric ceramic composition.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2005-281013
- Patent Document 1 Although deliquescence can be eliminated in the state of the piezoelectric ceramic composition that is the final product by adding Bi to the alkali niobate, the present invention is disclosed. As a result of experiments, when K is included as the A-site component, it still has deliquescence at the stage of the intermediate product ceramic powder (calcined powder), which hinders mass production. Has occurred.
- the piezoelectric ceramic composition is prepared by weighing ceramic raw materials, mixing and pulverizing them, and then calcining them.
- a ceramic powder is produced by (heat treatment), and thereafter a binder or the like is added to the ceramic powder to form a slurry in an organic solvent, which is subjected to a forming process and then subjected to a firing treatment.
- Patent Document 1 since the ceramic powder has deliquescence, it is difficult to store and manage it, resulting in problems in mass production.
- alkali niobate containing K in the A site component is considered difficult to obtain a high degree of synthesis, and unreacted alkali metal that does not contribute to the synthesis reaction tends to remain.
- unreacted alkali metals are water-soluble, it is necessary to pulverize them in an organic solvent after synthesis and to use an organic binder during molding.
- an explosion-proof facility is required, which increases the manufacturing cost.
- alkali niobate since alkali niobate has a low degree of synthesis, unreacted alkali metal evaporates at the time of firing, and thus there is a risk that the composition may be shifted and a desired composition cannot be obtained. There is.
- the present invention has been made in view of such circumstances, and provides an alkali niobate-based ceramic powder and a method for producing the ceramic powder without high deliquescence having a high degree of synthesis. For the purpose.
- Niobic acid compounds particularly alkali niobates, are promising as lead-free piezoelectric ceramic materials because of their high Curie point and high electromechanical coupling coefficient.
- lithium niobate KNbO is known to have exceptionally good piezoelectric properties.
- the synthesis ratio can be improved and a ceramic powder having no deliquescence can be obtained. Obtained knowledge.
- the present invention has been made based on such knowledge, and the ceramic powder according to the present invention has a general formula ANbO (A is one or more elements selected from alkali metal elements).
- the perovskite-type complex oxide represented by the following formula is selected as the main component, and at least selected from the medium forces of Yb ⁇ Y ⁇ In, Nd ⁇ Eu ⁇ Gd ⁇ Dy ⁇ Sm ⁇ Ho, Er ⁇ Tb ⁇ and Lu
- One kind of elemental force is contained in an amount of 0.0001 mol or more with respect to 1 mol of the main component.
- the ceramic powder of the present invention is characterized in that it further contains at least one element selected from Ti, Zr, and Sn.
- the method for producing a ceramic powder according to the present invention includes an A compound containing an alkali metal A containing at least 10 mol% or more of K, an Nb compound, In, Yb, Y, Nd, Eu, Gd, Dy, Sm, Ho, Er, Tb, and Lu.
- the first compound containing at least one selected element Ml is mixed with A: Nb: Ml in a molar ratio of l: 1. : x (where X is 0.0001 or more), mixing step of mixing and mixing, and a ceramic powder preparation step of producing a ceramic powder by heat-treating the mixture mixed in the mixing step Including!
- the mixing step further includes the step of adding the second compound containing at least one element M2 selected from the medium strengths of Ti, Zr, and Sn to the A
- the compound is characterized by being weighed and mixed together with the first compound.
- the general formula ANbO (A is selected from alkali metal elements)
- the ceramic powder has almost no water-soluble alkali remaining after the synthesis, it is not necessary to use an organic solvent in the production process of the porcelain composition after the synthesis of the ceramic powder. Therefore, an aqueous process can be used, and manufacturing costs can be reduced. Furthermore, there is no compositional deviation caused by the evaporation of alkali metal during the firing process during the production of the porcelain composition! /.
- the ceramic powder contains a tetravalent specific element (Ti, Zr, Sn), the degree of synthesis can be improved and the deliquescence is not present as described above.
- a tetravalent specific element Ti, Zr, Sn
- an A compound containing an alkali metal A containing at least 10 mol% or more of K, an Nb compound, and a specific trivalent element Ml In, Yb, A first compound containing Y, Nd, Eu, Gd, Dy, Sm, Ho, Er, Tb, and Lu
- An alkali niobate-based ceramic powder that does not have high deliquescence can be produced at low cost.
- the mixing step further includes the second compound containing a specific tetravalent element M2 (Ti, Zr, Sn), the A compound, and the first compound. Since the ceramic raw material weighed in the ceramic raw material mixing step is mixed with at least one metal element M2 selected from among Ti, Zr, and Sn. Since the contained second metal compound is included, an alkali niobate-based ceramic powder having the same effect as described above can be produced at low cost.
- a specific tetravalent element M2 Ti, Zr, Sn
- FIG. 1 is a three-dimensional view schematically showing an oxygen octahedral structure of perovskite.
- FIG. 2 is a diagram showing an X-ray diffraction spectrum as an index of synthesis degree.
- FIG. 3 is a diagram showing the X-ray diffraction spectrum of sample number 3 in comparison with sample number 15.
- Ceramic powder according to an embodiment of the present invention is a perovum represented by the general formula ANbO.
- the main component is a skite-type complex oxide, and the trivalent specific element Ml is 0.
- A also has an alkali metal power containing at least 10 mol% of K (potassium).
- K potassium
- the reason for containing at least 10 mol% or more of K in the A site is as follows.
- Alkali elements dissolved in the A site include Li, Na, Rb, Cs, and Fr as described above in addition to K.
- Li and Na are preferably used.
- K is less than 10 mole 0/0
- either they do not exhibit deliquescence or deliquescence This is because there is no problem of the present invention that is very low.
- the trivalent specific element Ml a metal element having an ionic radius as shown in Table 1 can be used.
- the trivalent specific element Ml is added to ANbO (A is at least 10 mol 0 /.
- the degree of synthesis can be improved. As a result, almost no unreacted alkali metal that does not contribute to the synthesis reaction is generated, and an alkali niobate-based ceramic powder having no deliquescence can be obtained.
- ANbO has a perovskite structure.
- the perovskite structure is shown in Fig. 1.
- the oxygen octahedron structure centered on the B site ion is a framework, and the A site ion is coordinated in the space in the framework.
- Q indicates the oxygen octahedral structure
- oblique sphere indicates A site ion
- white sphere indicates O 2 — ion.
- the A-site ion, K + is in a selfish position in the framework space of an oxygen octahedron structure centered on some Nb 5+ .
- La 3+ and Bi 3+ both have an ionic radius of 0.117 nm, and the ionic radius is smaller than K +, but the space inside the framework formed only of Nb 5+ is narrow, so the The ion radius is not small enough to enter easily. Therefore, even if La or Bi is added, the effect of the specific element Ml shown in Table 1 cannot be obtained, and the degree of synthesis cannot be improved.
- the content of the trivalent specific element Ml needs to be 0.0001 mol or more per 1 mol of the main component. This is because if the content of the specific element Ml is less than 0.001 mol with respect to 1 mol of the main component, the added amount is too small, and the desired effect cannot be obtained.
- the upper limit of the content of the specific element Ml is not particularly limited, but when the content is excessive, the specific element Ml that is not consumed for substitution with the alkali metal remains as an impurity. Specifically If the content of the specific element Ml is 0.1 mol or more with respect to 1 mol of the main component, the amount of the specific element Ml remaining as an impurity may be excessive. Therefore, the content of the specific element Ml is preferably less than 0.1 mol with respect to 1 mol of the main component.
- the degree of synthesis is determined by measuring the X-ray diffraction spectrum using characteristic X-rays (for example, CuKa line) and calculating the maximum peak intensity I of the different phase with respect to the maximum peak intensity I of ANbO.
- characteristic X-rays for example, CuKa line
- FIG. 2 is a diagram showing an example of the X-ray spectrum of the ceramic powder, in which the horizontal axis represents the diffraction angle (°) and the vertical axis represents the X-ray intensity (a.u.).
- the presence or absence of deliquescence can be determined by using H test paper.
- alkali metal reacts with CO in the air to form carbonate (A CO).
- the alkali metal carbonate reacts with water to generate hydroxide ions, and exhibits alkalinity.
- Alkali metal carbonate has deliquescence, as is well known.
- the ceramic powder of the present embodiment has the general formula ANbO (A is at least 10 mol).
- the trivalent specific element Ml is contained in an amount of 0.0001 mol or more with respect to 1 mol of the main component represented by an alkali metal containing K or more of K), a water-soluble acid is added after the synthesis with a high degree of synthesis. It can be avoided that almost all of the potash remains. This prevents the ceramic powder from having deliquescence and facilitates storage management.
- composition deviation due to evaporation of the alkali metal does not occur in the firing process in the production process of the porcelain composition.
- an alkali metal compound containing an alkali metal A containing at least 10 mol% of K and a first compound containing a trivalent specific element M1 are prepared.
- the ceramic element is prepared so that the composition of the ceramic powder is A: Nb: Ml in a molar ratio of l: l: x (x is not less than 0.0001, but preferably less than 0.1).
- these weighed materials are put into a ball mill together with an organic solvent such as ethanol and a grinding medium such as PSZ (partially stable Zircoyu), and wet-mixed in the organic solvent.
- an organic solvent such as ethanol and a grinding medium such as PSZ (partially stable Zircoyu)
- PSZ partially stable Zircoyu
- the ceramic raw materials are weighed so that the alkali metals A, Nb, and the trivalent specific element Ml are 1: 1: x (X is 0.0001 mol or more). Thereafter, these weighed materials are mixed and calcined to obtain ceramic powder.
- the ceramic powder of the second embodiment contains a tetravalent specific element M2, and this also makes the first embodiment.
- the degree of synthesis can be improved, and a ceramic powder having no deliquescence can be obtained.
- the tetravalent specific element M2 is an ion that approximates the ion radius (0.078 nm) of Nb 5+.
- the metal elements shown in Table 2 having on-radius, ie, Ti, Zr, and Sn can be used. [0063] [Table 2]
- the tetravalent specific element M2 is added to ANbO.
- the degree of synthesis of the ceramic powder can be improved and the deliquescence can be reduced.
- the ion radius of K + (0.152 nm) and the ion radius of In 3+ (0.094 nm) are small.
- the space at the A site other than the In coordinated location is expanded.
- K with a large ion radius is easily coordinated and dissolved in the A site, and unreacted K does not remain, improving the degree of synthesis as in the first embodiment.
- the content of the tetravalent specific element M2 is not particularly limited.
- the content of the tetravalent specific element M2 is not particularly limited.
- the tetravalent specific element M2 when the tetravalent specific element M2 is excessive, the specific element M2 remains as an impurity without being consumed for substitution with Nb. Specifically, when the content of the tetravalent specific element M2 is 0.1 mol or more with respect to 1 mol of the main component, the amount of the specific element M2 remaining as an impurity may be excessive. Therefore, the content of the specific element M2 is preferably less than 0.1 mol with respect to 1 mol of the main component.
- the manufacturing method can be performed in substantially the same manner as in the first embodiment.
- the ceramic raw material in addition to an alkali metal compound containing an alkali metal A containing at least 10 mol% or more of K, a first compound containing a trivalent specific element M1, Prepare a second compound containing the specific element M2.
- the composition of the ceramic powder is such that A: Nb: Ml: M2 is a molar ratio of l: l: x: y (x is 0.0001 or more, y is an arbitrary molar amount, but preferably 0.00.
- the ceramic raw material is weighed so that it is less than 1). Then, these weighed materials are put into a ball mill together with an organic solvent such as ethanol and a grinding medium such as PSZ, and wet mixed in the organic solvent. After the obtained mixture is dried, it is subjected to a calcining treatment (heat treatment) at a temperature of 700 to 1000 ° C. for 1 to 10 hours, whereby a ceramic powder can be produced.
- the second embodiment has a high degree of synthesis, no deliquescent properties! / ⁇ Desired alkali niobate ceramic powder excellent in storage stability Can be obtained at low cost Therefore, an alkali niobate-based ceramic powder having various yarns depending on the application can be realized.
- the present invention is not limited to the above embodiment.
- the addition form of alkaline compound, trivalent specific element Ml or tetravalent specific element M2 is not particularly limited, and it goes without saying that carbonates, acids, etc. can be used. Nor.
- the CuKa line was measured as an X-ray source, and the maximum of the different phase relative to the maximum peak intensity I of KNbO
- the intensity ratio X of the large peak intensity I was calculated and the degree of synthesis was evaluated.
- each sample immediately after calcination and each sample after 1000 hours after calcination were collected 3 g each, put into 500 cc pure water, stirred, and then used pH test paper Then, pH was measured and deliquescence was evaluated.
- Table 3 shows the compositions and measurement results of the samples Nos. 1 to 20.
- Sample Nos. 1 to 12 contain the specific element Ml within the scope of the present invention, so the strength ratio is 0%, no heterogeneous phase is produced, and the pH is 1000 immediately after calcining and after calcining. It was 7 at any time, indicating neutrality and having no deliquescence. This is because the ionic radius of these specific elements Ml is 0.094 to 0.1123 nm, which is larger than the ionic radius of Nb 5+ (0.078 nm), but compared to the ionic radius of K + (0.152 nm).
- these specific elements Ml are sufficiently small, these specific elements Ml are dissolved in the A site with respect to the B site framework composed only of Nb 5+ , and a part of them is distributed to the B site as an acceptor for charge compensation. Place To be dissolved.
- the specific element Ml is coordinated to the B site, and the space between the oxygen octahedron frameworks is expanded.
- K + is coordinated to the A site and forms a solid solution. As a result, unreacted K that does not contribute to the synthesis reaction. Is almost eliminated, and the degree of synthesis is considered to be improved.
- the strength ratio becomes 0.3% and almost no heterogeneous phase is formed, and the pH immediately after calcination becomes 7 and becomes neutral. Even after 1000 hours after calcination, the pH is 7 It was divided by 5 to be almost neutral.
- sample number 13 uses La which is outside the scope of the present invention as element Ml, the strength ratio X was 14.1%, a heterogeneous phase was generated, and the degree of synthesis was low. .
- the pH was 12 immediately after calcination, and 13 after 1000 hours after calcination, both showing alkaline and deliquescent properties. This is because the ionic radius of La 3+ is as large as 0.117 nm, so it is difficult for La to enter the A site against the framework formed of Nb 5+ alone. It seems that the effect could not be obtained, therefore the degree of synthesis could not be increased, and it was impossible to avoid the occurrence of deliquescence.
- Sample No. 14 uses Bi outside the scope of the present invention as element Ml, so the strength ratio X is 14.1%, a heterogeneous phase is generated, and the degree of synthesis is low. I got it.
- the pH was 12 immediately after calcination, and 13 after 1000 hours after calcination, both showing alkaline and deliquescent properties. This is because the ionic radius of Bi 3+ is also the same as La 3+, and for the same reason as Sample No. 13, which is as large as 0.117 nm, it is not possible to obtain the addition effect as a specific element within the scope of the present invention. It seems that the degree of synthesis could not be increased and it was impossible to avoid the occurrence of deliquescence.
- sample number 15 is KNbO alone, the strength ratio X was 14.1%, and a heterogeneous phase was generated.
- FIG. 3 shows X-ray diffraction spectra of Sample No. 3 and Sample No. 15, where the solid line indicates Sample No. 3 and the broken line indicates Sample No. 15.
- the horizontal axis represents the diffraction angle (°), and the vertical axis represents the X-ray intensity.
- sample number 15 had a heterogeneous peak, and the peak of KNbO
- Sample No. 3 does not generate a heterogeneous phase, and the KNbO peak P has a large intensity ratio.
- X is 0%, which shows that the degree of synthesis is improving.
- Table 4 shows the compositions and measurement results of the samples Nos. 21 to 42.
- composition (— a Na a ) Nb0 3 + xM10 3/2
- Sample Nos. 21 to 32 contain the element Ml in the range of the present invention, the strength ratio is 0% and no heterogeneous phase is generated as in Sample Nos. 1 to 12 in [Example 1].
- the pH was 7 at both immediately after calcination and 1000 hours after calcination, indicating neutrality and having no deliquescence.
- the strength ratio becomes 0.3% and almost no heterogeneous phase is generated.
- the pH immediately after calcination was 7, and even after 1000 hours after calcination, the pH was 7.6, and it was possible to maintain a neutrality.
- the strength ratio was 0%, no heterogeneous phase was formed, and the pH was 7 immediately after calcination and 1000 hours after calcination. Therefore, it was confirmed that the degree of synthesis was improved and there was no deliquescence.
- sample number 33 uses La outside the scope of the present invention as element Ml, the strength ratio X is 14 for the same reason as described in sample number 13 of [Example 1]. 4%, a heterogeneous phase was generated, and the degree of synthesis was low. The pH was 12 immediately after calcination, and 13 when 1000 hours had elapsed after calcination, both of which showed alkalinity and deliquescence.
- Sample No. 34 also uses Bi outside the scope of the present invention as the element Ml. Therefore, for the same reason as described in Sample No. 14 of [Example 1], the intensity ratio X is 14. A heterogeneous phase was generated at 3%, and the degree of synthesis was low. The pH was 12 immediately after calcination, and 13 when 1000 hours had elapsed after calcination, both of which showed alkalinity and deliquescence.
- Sample No. 35 is (K Na) NbO alone, and no specific element Ml is added.
- Sample No. 42 is (K Na) NbO alone, and the specific element Ml is not added at all.
- the strength ratio X was 12.2%, a heterogeneous phase was generated, and the degree of synthesis was It became low.
- the pH was 11 immediately after calcination, and 13 after 1000 hours of calcination, and the V-deviation was also alkaline and deliquescent.
- Ceramic raw materials KCO, NaCO, NbO, YbO, TiO, ZrO, and Sn
- samples (ceramic powders) of sample numbers 51 to 56 were prepared by the same method and procedure as in [Example 1].
- Table 5 shows the compositions and measurement results of the samples Nos. 51 to 56.
- samples (ceramic powder) of sample numbers 61 to 70 were prepared by the same method and procedure as in [Example 1].
- Table 6 shows the compositions and measurement results of the samples Nos. 61 to 70.
- the amount of Ti sword is 0.0001 to 0.1 mol per 1 mol of ANbO.
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Abstract
Description
Claims
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| EP07740877A EP2006263A4 (en) | 2006-04-13 | 2007-04-03 | CERAMIC POWDER AND MANUFACTURING METHOD THEREFOR |
| JP2008510916A JP5365986B2 (ja) | 2006-04-13 | 2007-04-03 | セラミック粉末、及びセラミック粉末の製造方法 |
| US12/245,129 US7838453B2 (en) | 2006-04-13 | 2008-10-03 | Ceramic powder and method for producing ceramic powder |
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| US12/245,129 Continuation US7838453B2 (en) | 2006-04-13 | 2008-10-03 | Ceramic powder and method for producing ceramic powder |
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| JP2008254961A (ja) * | 2007-04-04 | 2008-10-23 | Nec Tokin Corp | 圧電組成物 |
| JP2014166942A (ja) * | 2013-01-29 | 2014-09-11 | Canon Inc | 圧電材料、圧電素子、および電子機器 |
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| CN103119002B (zh) * | 2010-12-24 | 2014-09-17 | 太阳诱电株式会社 | 压电陶瓷、压电陶瓷部件及使用该压电陶瓷部件的压电装置 |
| KR102069989B1 (ko) * | 2011-07-05 | 2020-01-23 | 캐논 가부시끼가이샤 | 압전 엘리먼트, 적층 압전 엘리먼트, 액체 토출 헤드, 액체 토출 장치, 초음파 모터, 광학 장치 및 전자 장치 |
| CN104178152A (zh) * | 2013-05-22 | 2014-12-03 | 海洋王照明科技股份有限公司 | 镝掺杂碱钽酸盐上转换发光材料、制备方法及其应用 |
| US9837596B2 (en) | 2014-06-13 | 2017-12-05 | Tdk Corporation | Piezoelectric device, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer apparatus |
| CN104446400B (zh) * | 2014-12-23 | 2017-01-04 | 苏州宽温电子科技有限公司 | 一种耐酸碱的复合陶瓷材料及其制备方法 |
| DE102021201568A1 (de) * | 2021-02-18 | 2022-08-18 | Taniobis Gmbh | Alkaliniobat für piezoelektrische Anwendungen |
| KR102860621B1 (ko) * | 2021-09-13 | 2025-09-15 | 삼성전자주식회사 | 유전체, 이를 포함하는 장치, 및 상기 유전체의 제조방법 |
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| JP2002255641A (ja) * | 2001-02-27 | 2002-09-11 | Kyocera Corp | 圧電磁器および圧電素子 |
| JP2004359539A (ja) * | 2003-05-09 | 2004-12-24 | Nagoya Industrial Science Research Inst | ニオブ酸カリウム焼結体の製造方法 |
| JP2005281013A (ja) | 2004-03-26 | 2005-10-13 | Tdk Corp | 圧電組成物及びその製造方法 |
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| JP3362473B2 (ja) | 1993-09-08 | 2003-01-07 | 株式会社村田製作所 | 圧電磁器組成物 |
| TW563265B (en) | 1998-02-18 | 2003-11-21 | Murata Manufacturing Co | Piezoelectric ceramic composition |
| JP2001114560A (ja) * | 1999-10-18 | 2001-04-24 | Matsushita Electric Ind Co Ltd | 圧電磁器組成物 |
| JP4929522B2 (ja) | 2000-08-25 | 2012-05-09 | 株式会社豊田中央研究所 | 圧電磁器組成物 |
| JP2004091310A (ja) | 2002-07-12 | 2004-03-25 | Yamajiyu Ceramics:Kk | ニオブ酸リチウム薄膜作製用ニオブ酸リチウム前駆体粒子、その製造方法、ニオブ酸リチウム薄膜作製用ニオブ酸リチウム前駆体溶液、およびニオブ酸リチウム薄膜の作製方法 |
| JP2004244300A (ja) * | 2003-01-23 | 2004-09-02 | Denso Corp | 圧電磁器組成物及びその製造方法,並びに圧電素子及び誘電素子 |
| WO2005021461A1 (ja) * | 2003-08-28 | 2005-03-10 | National Institute Of Advanced Industrial Science And Technology | ペロブスカイト固溶体組成物およびこのものから得られる圧電セラミックス |
| JP4578176B2 (ja) | 2004-08-20 | 2010-11-10 | 京セラ株式会社 | 圧電共振子及びフイルタ |
| EP1876155B1 (en) * | 2005-04-28 | 2016-03-09 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain composition and piezoelectric ceramic electronic component |
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| JP2002255641A (ja) * | 2001-02-27 | 2002-09-11 | Kyocera Corp | 圧電磁器および圧電素子 |
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| JP2014166942A (ja) * | 2013-01-29 | 2014-09-11 | Canon Inc | 圧電材料、圧電素子、および電子機器 |
| US9932273B2 (en) | 2013-01-29 | 2018-04-03 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic equipment |
Also Published As
| Publication number | Publication date |
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| EP2006263A1 (en) | 2008-12-24 |
| EP2006263A4 (en) | 2012-02-22 |
| US7838453B2 (en) | 2010-11-23 |
| CN101421202A (zh) | 2009-04-29 |
| US20090023578A1 (en) | 2009-01-22 |
| JPWO2007119653A1 (ja) | 2009-08-27 |
| JP5365986B2 (ja) | 2013-12-11 |
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