WO2007121175A2 - Dispositif d'imagerie optique haute résolution - Google Patents

Dispositif d'imagerie optique haute résolution Download PDF

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Publication number
WO2007121175A2
WO2007121175A2 PCT/US2007/066326 US2007066326W WO2007121175A2 WO 2007121175 A2 WO2007121175 A2 WO 2007121175A2 US 2007066326 W US2007066326 W US 2007066326W WO 2007121175 A2 WO2007121175 A2 WO 2007121175A2
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Prior art keywords
image
optical
phase
images
imager according
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WO2007121175A3 (fr
Inventor
Araz Yacoubian
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Ler Technologies Inc
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Ler Technologies Inc
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Definitions

  • Optical imaging is itnitted by the wavelength of light aod by the numerical aperture of the collection optics.
  • the resolution is limited by the wavelength of the illumination and by the numerical aperture (NA) of the objective lens.
  • NA numerical aperture
  • Some improvement of resolution is possible using liquid immersion, objective lens, but the increase is not in orders of magnitude.
  • the standard microscopic imaging depth of focus is limited by the objective lens. £0002] " Technologies other than microscopic imaging can result in high magnification images of a surface, such as scanning electron microscope (SEM) or atomic force microscope (AFM), However these methods have limitations. For example, SEM requires a large apparatus to generate and focus electron beams, is limited to a small sample area, and is relatively slow and expensive. AFM. utilizes a scanning tip that wears out. and needs replacement, and is relatively slow and limited to small sample sizes.
  • an optical onager comprises an interferometer, microscopic optics operative in combination with the interferometer to generate a reference image and an object image, and an image capture device configured to capture an interferon! etric- image with a phase di (Terence between the reference image and the object image.
  • the optical imager further comprises a phase shifter operative to selective!) control the phase difference and a controller operative to capture a plurality of interferometric images at a selected plurality of phase differences and combine the plurality of interferomotric images into a processed image with in- plane resolution that is increased over optical wavelength and numerical aperture characteristics.
  • FIGURE 1 is a schematic pictorial and block diagram illustrating an embodiment of an 5 optical imager that enables high-resolution imaging
  • FICURE 2 is a pictorial diagram that depicts a sample mounted at an angle according to an embodiment of an optical imager
  • FKJURE 3 is a pictorial diagram showing changes in the interference pattern induced by phase shift of various types that can be implemented in various embodiments of an optica! ! 0 imager;
  • FIGURE 4 are pictorial diagrams illustrating a comparison ot o microscope patterns that result from standard microscope imaging and high-resolution imaging using an embodiment of an illustrative optical imager;
  • FIGURE 5 is a schematic pictorial view showing an embodiment of an optical imager ! 5 that can generate a phase shifted interference pattern by changing the physical position of the sample;
  • FIG URE 6 is a schematic pictorial view depicting examples of mirror motion that can be implemented in an embodiment of an optical imager
  • FIGURE 7 is a schematic pictorial diagram illustrating an embodiment of an optical 0 imager which can generate a phase shifted interference pattern by adding a phase shifter to the reference beam;
  • FIGURE S is a pictorial view depicting an embodiment of an optical imager in which a difference image is generated using an interferometric microscope objective;
  • FIGURE 9 is a combined pictorial and block diagram depicting a high-resolution imager 5 with the microscope objective outside the interferometer;
  • FIGURE JO shows pictorial views respectively depicting an example of an image produced by a standard microscope and an embodiment of an illustrative high-resolution optical imager;
  • FIGURE 12 is a schematic pictorial and block diagram that depicts an embodiment of a high -resolution optical imager for a fully or partially transparent sample;
  • FIGURE 13 is a schematic pictorial and block diagram showing another embodiment of a high-resolution optical imager for a fully or partially transparent sample:
  • FlGUREs J4A through 14G are multiple pictorial diagrams depicting various phase delay methods to shift the fringes which can be used for embodiments of optical imagers such as those shown in FIGURE M and FIGURE 13;
  • FIGURE J5 is a schematic pictorial and block diagram illustrating an embodiment of a speckle reduction device and associated speckle reduction method using a rotating diffuser via a rotating motor;
  • FJGORE 16 is a schematic pictorial and block diagram depicting an embodiment of a speckle reduction device and associated speckle reduction method using a. scattering medium embedded between two transparent or semitransparent electrodes;
  • FIGURE 17 is a schematic pictorial and block diagram showing an embodiment of a speckle reduction device and associated speckle reduction method using a flowing scattering medium;
  • FIGURE 18 is a schematic pictorial and block diagram illustrating an embodiment of a speckle reduction device and associated speckle reduction method using a linearly moving diffuser
  • FIGURE 19 is a pictorial view showing an embodiment of a speckle reduction device and associated speckle reduction method using a partially coherent light source:
  • FIGURE 20 is a. schematic pictorial and block diagram illustrating an embodiment of a coherent or partially coherent light source coupled to an optical fiber via a lens or combination of Senses that can be used in an optical imager.
  • Illustrative structures and methods can include and use an. interferometer coupled to microscopic optics, image processing apparatus and phase shift control electronics to produce high resolution images of a sample surface.
  • the illustrative optical imagers and associated methods can be non-contact, relatively fast, and image the sample at resolution much higher than is possible to achieve using standard microscopes
  • the structures and methods also increase the depth of focus arid image contrast.
  • the embodiments, configurations, and associated techniques disclosed hereinafter overcome the optical resolution of the microscope by utilizes interference, phase shifting and image capture and computation methods, and produce images that are higher resolution than limited by the optical wavelength of the light source and the numerical aperture of the optical system. Additionally, the images have higher contrast than a conventional microscope image, and have much longer depth of focus than using a microscope with a similar objective lens.
  • the fringe shift in an interference image of a sample obtained with ao iinerferoffietrie microscope is mainly- due to time delay of light, for instance the optical path length difference, between one point and another on the sample
  • the interference image contains shifted fringes wherever a variation in height exists.
  • the wavelength and NA of the optical system limit the in-plane (x.v direction) resolution of the image, which is limited bv the diffraction of light at edges of the topographic variation in the sample. Edges that have much smaller dimension than the optical wavelength look rounded due to the diffraction limit.
  • Fringe shift at various points on the topographic pattern is due to time delay between one point of the sample and the other, which is an out-of-plane (z direction) phenomenon.
  • Illustrative optical imagers and associated methods make use of the key difference between the in-plane and out-of plane phenomenon to overcome the optical limit.
  • FIGlJ RE J a schematic pictorial and block diagram illustrates an embodiment of an optical imager 100 that enables high-resolution imaging.
  • the illustrative optical imager 100 comprises an interferometer 1.20.. microscopic optics 1.22 operative in combination with the interferometer 1.20 to generate a reference image 107 and an object image JOS, and an image capture device UO configured to capture an i ⁇ terferometrie image with a phase difference between die reference image .107 and the object image 108.
  • the optical imager 100 further comprises a phase shifter operati ve to selectively control the phase difference and a controller 116 operative to capture a plurality of interferometric images at a selected plurality of phase differences and combine the plurality of interferometric images into a processed image with 5 in-plane resolution that is increased over optical wavelength and numerical aperture characteristics.
  • FIGURE 1 depicts the apparatus 1.00 used to generate high-resolution images.
  • the apparatus 100 is an interferometer 120 coupled to microscopic objective 106 and eyepiece lenses 111. " The image of the sample is captured by a camera 110, The image displayed on a video
  • 1.0 screen 112 contains the microscopic image, and overlapping interference fringes 114 and 115. Jf the reference beam ⁇ 07 is blocked, the image will he a standard optical image, with resolution limited by the wavelength of light and microscope objective numerical aperture. To increase resolution, the phase difference between the reference beam 107 and the object beam 108 are changed by various methods described throughout the description, and the image is captured at
  • the interference image is denoted as / " ⁇ x.y, ⁇ ., - ⁇ - ⁇ O or /(x,y, ⁇ :> + ⁇ ,), respectively
  • the i.nterferonietric 0 images with reference to object phase difference ⁇ c ⁇ , and ⁇ ,, -s ⁇ ⁇ , : ⁇ . are shown in FIGURE 3.
  • FIGURE 3 depicts changes in the interference pattern, where fringes 314, 315 shift in the direction of the arrows 319 if phase is induced either by using a phase shifter in the reference beam path 1.07, by moving the reference mirror 104 or by moving the sample 105 using the sample translation stage 109 and 209, as depicted in FIGURES 1 and 2, to form resulting shifted
  • the illustrative optical imager 100 can perform a method for generating an increased- resolution image comprising illuminating an object with at least partially coherent light, forming a reference image and an object image, and capturing an interferometric image with a phase difference between the reference image and the object image.
  • the optical imager 100 selectively 30 controls the phase difference and captures multiple interferometric images at selected phase differences.
  • the multiple interferometric images are combined into a processed image with in- plane resolution that is increased over optical wavelength and numerical aperture characteristics
  • the controller 1.16 can be operative to selectively control capture of an image at a first phase and a second phase and determine a difference interferometric image as a difference of 35 interferometric images captured at the first and second phases.
  • the optical imager 100 can operate by capturing an image at a first phase and a second phase and determining a difference interferometrie image as a difference of interferoinetric images captured at the first arid second phases.
  • the controller 116 is operative to acquire ratcrferomctric images at multiple of the first and second phases and summing multiple of the difference interferometric images.
  • Each image AJ 1 carries spatial information higher than achievable using standard microscope, since the spatial information is obtained interfer ⁇ metricaUy.
  • the new image ⁇ l is added to the non-interferonietric image obtained by blocking the reference beam 107 to enhance the resolution of the image, or a number of the images ⁇ l, can be added to produce an average image which results in an image that is higher resolution than a standard microscope image, according to equation (4):
  • the optical imager 100 can acquire non-interferometric images and average the non-interferometric image with a sum of the plurality of difference i ⁇ terferometric images, (0021]
  • the controller 116 can be operative to acquire i ⁇ terferometric images at a plurality of first and second phases, multiplying a plurality of difference interfer ⁇ metric images by a factor smaller than one that is selected to avoid over-saturation, and summing the plurality of difference interfer ⁇ metric images.
  • each difference image ⁇ l, in equation (4) can be multipl ied by a factor smaller than 1.
  • the controller 116 can be configured to be operative to acquire a non-interferornetric image and average the non-mterferometrie image with a sum of the plurality of difference interteromet ⁇ c images.
  • the controller 116 can be operative to select phase change increments between successive images to produce a fraction of fringe movement and summing multiple successive images to cover a full fringe cycle.
  • the phase change between each consecutive image can be selected to produce a fraction of frmge movement. For example, if each phase-shift moves the fringes by one-tenth of fringe, ten shifts produce a complete set that covers one full fringe cycle. Repeating the process using multiple fringe cycles results in a better averaged image than using one fringe cycle oniv .
  • the controller 1 f 6 can be operati ve to selectively control capture an image at a first phase and a second phase and determine a ratio interferometric image as a ratio of mterferomctric images captured at the first and second phases.
  • Tlie controller 116 can be operative to acquire interferometric images at a plurality of first and second phases and summing a plurality of ratio interferometric images.
  • the optical imager 100 can capture an image at a first phase and a second phase, and determine a ratio interferometric image as a ratio of interferomet ⁇ c images captured at the first and second phases.
  • ⁇ nterferonietric images ca.n be acquired at multiple first and second phases and multiple ratio imterferometric images can be summed.
  • the optical imager 100 can further comprise a light source 101 that is operative to generate at least partially coherent light a reference mirror 104, an 5 objective lens 106. and a beam splitter 103 that is configured to direct the at least partially coherent light to the reference mirror MM for reflecting the light onto a reference beam path 107 and to an object 105 through the objective Jens 1.06 for reflecting the light onto ait object beam path 108.
  • the illustrative optical imager 100 further comprises an imaging lens 111 arranged to pass reflected light along the reference beam path S07 and the object beam path 108 to the image It) capture device HO.
  • FIGURE 1 depicts a high-resolution optical imager 100.
  • an apparatus that contains coherent light source 101 such as a laser, a laser diode, or a partially coherent light source.
  • the light source 101 is expanded 102 either via a no ⁇ -eoliirnated laser diode, from a cleaved fiber end. or is expanded using a refractive or a diffractive optica! component placed in the beam path of a
  • ⁇ S coHimated laser Light passes through a beam splitter 103 Part of the light is directed toward a reference mirror 104. and the other part is directed towards the sample 105 after passing through an objective ie ⁇ s 106.
  • the reference beam path is depicted in dashed lines 107, and the object beam path is depicted m solid lines 108.
  • Sample is mounted on a translation stage ⁇ . ⁇ 9 which provides x, y, z control as well as rotation and tilt of the sample with respect to the object beam
  • 25 image is captured and processed through processing software and processing and control electronics ⁇ 16, the resulting image is displayed on a second video screen ⁇ 17, and the sample pattern is revealed 118 at much higher resolution than the unprocessed image 113, Phase shifting either via a pha.se shifting or moving the fringes is achieved by moving the sample as illustrated in FTGIsRE 5, by moving the reference mirror, or by incorporating a phase shifter in the reference
  • An optional lens 162 can be used to better match the reference 10? and object 108 beam divergence, orto adjust the fringes from circular to linear or vise versa. Phase shifting can be controlled by the processing and control electronics 116
  • the light source 101 in FIGURE 1 may be switched to a non- 35 coherent source, or a second beam splitter may be replaced between the light source 101 and the beam splitter 1.03, which directs light towards the sample.
  • An image can be taken using the nort- coherent illumination 4v which does not contain any speckles.
  • the averaged imerfer ⁇ metric image ⁇ irif , and the ⁇ o ⁇ -i ⁇ terferometric image 4-? can be added or multiplied together to produce a high-resolution, yet clean image with low -noise and speckle-free.
  • FIGURE 4 depicts a standard microscope pattern 422 of the sample which is limited by the optical resolution.
  • the processed image 418 of the high-resolution imaging apparatus reveals more detail than the microscope image, and edges of the image appear sharper than standard microscope ir ⁇ age.
  • FIGURE ! shows a sample 205 that is placed at normal incidence to the optical axis and the object beam 10$.
  • the sample 205 can be placed at aa angle as illustrated in FfGURE 2.
  • the illustrative optical imagers and associated techniques can be implemented to enable sampling the object at norma! incidence or a selected angle of incidence.
  • FICURE 2 depicts a sample 205 mounted at an angle with respect to the object beam 208 on a translation stage 209 which holds the sample 205. The stage is placed in the apparatus 300 shown in FIGURE J .
  • ⁇ he phase shifter can comprise a device that controllabiy moves the object.
  • the phase shifter can move the object in selected space increments or other suitable technique.
  • a difference image can be generated by moving the sample.
  • One possible method to produce high-resolution images is to move, tilt or rotate the sample as shown m FIGURE 5, record the images, and subtract the images as described in equation (2) and ⁇ 3 ⁇ ⁇ n this case, when averaging multiple difference images as described in equation (3), each difference image should be reset by shifting or rotating. Af 1 to the original image location (i.e. Xo,y «) before performing the averaging operation described in equation (4).
  • FIG URE 5 a schematic pictorial view shows an embodiment of an optical imager that can generate a phase shifted interference pattern by changing the physical position of the sample at small increments.
  • the original position of the sample 505 is shifted to a new location 523, for example by either a linear movement 524, 525, 526, ttit 527, rotation 528, or combination of motions of the sample 505.
  • Phase shifting by movement of the sample holder is controlled by the processing and control electronics J 16 which controls the mechanical movement of the sample holder stage 509.
  • 510, Sl I. and 562 are similar or equivalent to set 101., 102. 103, 104. 106, 107. 108, 110. 111 , and 162.
  • the phase shifter can comprise a device that co ⁇ troilablv moves the reference mirror.
  • the reference mirror can he moved in selected space increments or other suitable arrangement.
  • a difference image can be generated by moving the reference mirror.
  • the phase difference between the reference beam 1.07, 607 and object beam iO8, 60S can be achieved by moving the reference mirror 104, 604 as shown in FiGURE 6.
  • Two 5 methods of movement produce a phase shift, specifically by moving 630 the reference mirror 604 to a new location 629. or by tilting 632 the minor to a new location 631 Tilting can be in the vertical or horizontal direction, or at any selected direction.
  • FIGURE 6 a schematic pictorial view depicting examples of mirror motion that can be implemented in an embodiment of an optical imager.
  • FIGURE 6 depicts a It) method for shifting the phase in the interferometer illustrated in FIGURE I by changing the physical position of the reference mirror 604 at small increments.
  • the original position of the mirror 604 is shifted to a new location 629 by linear movement 630, tilting 632 the reference mirror 604 to a new position 631, or a combination of motions.
  • Phase shifting by moving the reference mirror can be controlled by the processing and control electronics 1 ⁇ .6.
  • the phase shifter can he positioned in the reference team path.
  • Suitable types of phase shifters can be selected including a liquid crystal device that changes the optical path length (OPL) of the reference beam with phase shift controlled b> an external voltage controller, a retro-reflecting prism in an optical beam path comprising a plurality of mirrors or a mirror-coated prism that changes OPL when translated
  • a difference image can be generated using a phase shifter. Hie phase difference between the reference beam
  • phase shifter 733 changes the optical path length of the reference beam 707. thus changing the phase difference between the reference beam 707 and the object beam 70S.
  • the phase shifter 733 can be a liquid cr ⁇ stal device that changes the optica! path length (OPI..) of the reference beam 707, where phase shift is controlled by an external
  • phase shifter 734 can be an optical wedge which can changes the OPL when translated linearly or rotated, can be an optical fiat glass which is titled to change the OPL. or can be any suitable selected type of optical phase shifting device, such as an electro-optic phase shifter, a polarization phase shifter, or a fiber optic phase shifter. Additional phase shifting methods arc
  • FIGURE 7 a schematic pictorial diagram illustrates an embodiment of an optical imager 700 which can generate a phase shifted interference pattern by adding a phase shifter 733 to the reference beam 707.
  • the phase shifter 733 can be a liquid crystal device that changes the optica! path length (OPL) of the reference beam 707, where phase shift is controlled 5 by an external voltage controller 734.
  • the phase shifter 733 can also be an optica! prism which can changes the OPL when translated linearly as illustrated i « FIGURE 14(A) 5 can be an optical flat glass which is titled to change the OPL as illustrated in FIGURE !4(B), a translated optical wedge as illustrated in FIGURE 14(D). or can be an arbitrary' type of optical phase shifter device, such as an eieetro-optic phase shifter, or a polarization phase shifter, or a fiber optic phase shifter.
  • the output signals from the camera 710 are scot to a screen and processing and control electronics, as illustrated in FIGURE ! , Phase shifting is controlled by the processing and control electronics 116.
  • 709 , 710, 71 I 5 and 762, arc similar or equivalent to set HH . 102, 103. 104, 105. 106, J 07, 108, 109, UO, 111. and
  • the optical imager can comprise aa iot ⁇ feratnetrie objective which is operative to generate an interference pattern and shift phase by moving, tilting or rotating in a selected direction
  • FIGURE S_ a pictorial view illustrates an embodiment of an optical imager SOO in which a difference image is generated using an interierometric microscope 0 objective.
  • L interference fringes arc generating by using a beam splitter 103 that directs Ught to a reference mirror 104, which reflects light toward the camera 110. and the reference 107 and object 108 beams are added coherently at the camera ⁇ .10.
  • Another approach can use an interferot ⁇ etric microscope objective 835 is shown in FlGl)RE 8, where partially reflective mirrors 836 and 837 produce a reference beam, which interferes with 5 the object beam
  • Phase shift can be achieved either by moving the mterferometric objective 835 or by moving 824, 825, 826, tilting 827. or rotating 828 the sample, as shown in FIGURE 8. or by a combination of motions.
  • Hie calculations according to the illustrative equations herein can be performed to produce difference interference images and result in a high-resolution image.
  • FIGURE 8 depicts an apparatus using interferometric objective 835, which contains 0 partially reflective mirrors 836 and 837.
  • Mirror 836 is the reference mirror, which is either partially reflective, or is transparent optical flat glass with the center region coated with a high reflective coating.
  • the interferortietrie objective 835 is used to generate the interference pattern.
  • the interference pattern shown in FIGURE 3 is shifted either by moving the sample as described in FIGURE 5, or by moving, tilting or rotating the ioterfero ⁇ ietrie objective 835 in an arbitrary >5 direction 838,
  • the apparatus contains a coherent or a partialis coherent light source 801 , a beam splitter 803, an imaging lens 811, and a camera SlO.
  • the output of the camera 810 is sent to a screen and processing and control electronics, as illustrated in FIGl)RE 1.
  • Phase shifting by moving the interfer ⁇ metrie objective can be controlled by the processing and control electronics 116.
  • Element set 802, 80S, and 809 can be similar or equivalent to set 102, 105. and 109.
  • Element set 823, 824, 825. 826, 827. 828, and 838 can be similar or equivalent to set 523, 524, 525, 526, 527, 528, and 538.
  • an optical imager can be implemented to increase or enhance depth of focus.
  • the structures and methods described herein can also produce longer depth of focus, hi a standard microscope, the best focus is achieved at a specific distance z,, between the objective lens and the sample. As distance deviates from z,-,, the image becomes blurred. Increasing depth of focus is particular! ⁇ ' useful when viewing samples at an angle.
  • the structures and methods described herein can operate by determining the difference between interference patterns to sharpen the image. Even in areas of the sample that fall away from z.,., the blurred image interference pattern can be compared with a shifted -phase version of the sample, resulting in a self-referencing image.
  • High-resolutioo reflection imaging can be performed with a microscope objective positioned outside the interferometer.
  • the beam splitter and the reference mirror can be positioned between the objective lens and the object.
  • a mirror configured whereby the object is positioned between the objective lens and the mirror,
  • FIGURE 9 is a combined pictorial and block diagram depicting a high -resolution imager 900 with the microscope objective 906 outside the interferometer, an apparatus is similar to that shown in FIGURE 1 with some differences.
  • An advantage of the imager 900 in comparison to the optical imager 100 shown in FIGURE 1 in some conditions and applications is easier accommodation of a partially coherent source, such as a light emitting diode (LED).
  • a partially coherent source has coherence length much shorter than a coherent source such as a laser.
  • the optical -path -length (OPL) difference of the reference arm 107, 907, and the object arm 108, 90S must be less than the coherence length.
  • optical imager 900 An associated disadvantage of the optical imager 900 is that since the beam splitter is placed between the objective leas 906 and the sample 905, the working distance of the objective lens must be sufficiently long to accommodate the beam splitter 903. Therefore either a. low-power objective lens or a long working distance objective lens is to be used.
  • FIGURE 9 depicts a high-resolution imager with beam splitter 907 and reference mirror 904 placed between the microscope objective 906 and the sample 905, A coherent or partially coherent light source 901 and eoJlimati ⁇ g. focusing or expanding optics 94i direct light toward the sample 905 and the reference mirror 904, thus producing interference fringes.
  • the interference fringes 914 and 91 S, also shown in FIGURE 3, are shifted either bv moving the
  • the apparatus contains a coherent an imaging lens 911, and a camera 910, The output image of the camera 910 is sent to a screen and processing and control electronics, as illustrated in FIGURE 1.
  • FIGURE 10 An optical imager can be implemented to determine line edge shape.
  • FIGURE 10 pictorial views respectively show an example of an image produced by a standard microscope and an embodiment of an illustrative high-resolution optical imager
  • FIGURE 10 depicts a standard microscope image 1039 of a sample viewed at an angle. The image is limited 20 by the optical resolution.
  • the processed image 1040 of the high-resolution imaging apparatus reveals more detail than the microscope image, revealing edge structure.
  • an optical imager can comprise one or more beam shaping elements configured for shaping a beam from a coherent or partially coherent light source, the beam shaping element comprising a positive lens that coi ⁇ imates. diverges, converges a beam, or the like.
  • Ae optical source 101 can be coherent, noncoherent, or partially coherent.
  • the optica! source 1 14 can be selected to generate illumination at a selected wavelength m a range of visible, infrared, ultraviolet, a selected part of light spectra, and X-ray.
  • FIGlIREs 11A through 1 several pictorial diagrams illustrate examples of light source optic, configurations that can be implemented in various embodiments of an optical imager. Since the schemes are implemented using a general coherent or partially coherent light source, optical components can be used to generate coilimated 11-42, 20 diverging 11-43 or converging 11-44 Sight input to the optical system by implementing one or more refractive components, reflective components such as concave or convex mirrors, or diffraetive components such as diffraetne optical elements or holographic optical elements.
  • FIG UREs 1 IA through I JC Light shaping for an expanding beam such as from an LED or a laser diode is depicted in FIG UREs 1 IA through I JC. .Light shaping for a pre-coilimated beam such as a laser beam is 25 shown in FlGUREs i I D through 1 II .
  • a combination of circular and cylindrical optical components can be used to shape non-circular beams, such as from laser diodes.
  • FIGOREs 1 IA, 1 IB, and 11C illustrate configurations with a coherent or a partially coherent light source 1101 with a diverging beam 1102 and can be shaped by a positive lens 1141 so that the final output light is coilimated 1142, diverging at a different angle than 1143 than the beam before going through the lens 1102, or converging beam 1144 Beam shaping is achieved by the lens focal length and position from the light origin.
  • FIGUREs HD, I IE, and HF, configurations include examples in which the light source is pre- collimated such as in a. laser beam, and a combination of two or more positive lenses 114 ⁇ . and 1.146 arc used to generate an expanded collimated beam 1142, a diverging 1143 or converging beam 1 J 44.
  • I I H, and ill configurations include example of a pre-collimated light source such as a laser beam, and a combination of a positive Sens ⁇ 14!. and negative fens 1147 to generate an expanded collimated beam 1142, a diverging beam f S 43, or a converging 5 beam 1144.
  • tine optical imager can comprise a modified Mach- Zehnder interferometer arranged with the object positioned in one ami of the interferometer through the object beam path and a phase shifter positioned in the reference beam path.
  • the optica! imager can have the objective lens positioned H) i nside the interfe r ⁇ mete r.
  • the high-resolution imaging structures and method described in association with FIGURE J are suitable for reflective samples.
  • the sample is transparent or semi- i 5 transparent, topographic variations as well as variations in refractive index of the material can be imaged.
  • Variations in materia! refractive index include densitv variations in the materia], or image transparent biological materials
  • the technique can also be used to obtain high-resolution images.
  • Methods for imaging through transparent or semi-transparent samples can be 0 performed using the techniques illustrated in association with Fi(JlJREs i . S, 7, 8. or 9 with a reflective object placed in back of the sample.
  • FIGURE ! 2 is a schematic pictorial and block diagram that depicts a high-resolution optical imager 1200 for a fully or partialis- transparent sample and includes a coherent light source 1201 such as a laser, a laser diode, or a partially coherent light source.
  • a coherent light source 1201 such as a laser, a laser diode, or a partially coherent light source.
  • the light expansion is controlled using either a single lens 1241 , or a combination of lenses as depicted in FlGUREs HA through J.
  • S 1 The apparatus is a modified Maeh-Zehnder interferometer with the sample 0 1205 placed in one arm of the interferometer through the object beam path .1208. and a phase shifter 1233 placed in the reference beam path 1207.
  • a set of imaging optics J 206 and 1211 are used to image the sample onto the camera 121.0.
  • An optional lens 1249 can be used to control the interference fringes (circular, elliptical or linear) by matching the beam expansion of the reference and object beams.
  • the apparatus contains beam splitters 1203 and mirrors 1204.
  • the raw image is displayed on a video screen 12.12 contains the optical image of the sample pattern 1213 and overlapping fringes 1214, Due to topographic variations of the sample pattern, the fringes are shifted 1215.
  • Hie image 1213 is limited by the optica! resolution, and at very high magnifications, sharp edges are rounded.
  • phase shifting is achieved by moving one of the mirrors 1204. fay a phase shifter
  • phase shifting is controlled bv processing and control electronics 121.6.
  • the objective 1.0 lens 1206 is placed inside the interferometer.
  • the objective lens can be positioned outside the interferometer.
  • FIGURE 1.3 a schematic pictorial and block diagram depicts a high- resolution optical imager 1300 for a fully or partially transparent sample similar to the imager show n in FIGURE 12. with the main difference that the objective tens J 306 is placed outside fee 15 interferometer Element set 1301. 1303, 1304, 1305. 1306, 1307, 1308. 1309, 1310, 1311. 1312, 1313, 1314, 1.3.15, 1316, .1317. 018 , 1333, 134.1 , and 1348 are similar or equivalent to set 120 J . 1203, 1204. 1205. 1206, 1207. 120S. 1209, 1210. 121 J , 1212, 1213, 12 ⁇ 4, 1215, 1216. 1217,
  • FIGURE 12 The difference between architectures shown in FIGURE 12 and f 3 is feat in 0 FIGURE 12 the objective lens 1206 is placed inside the reference arm of the interferometer. In FIGURE 13. the objective lens 1306 is placed outside the interferometer. In FIGURE .12. an additional lens 1249 may be used to match the reference and object beams and can be omitted in the FIGURE 13 scheme.
  • the FIGURE 13 method may 5 be more suitable for light sources 1301. with very small coherence distance, facilitating matching of the optical path length (OPL) of the reference 1307 and object J 308 amis.
  • OPL optical path length
  • a disadvantage of the FIGURE 13 configuration is that fee objective lens 1306 has a longer working distance than the FIGURE 12 setup due to the beam splitter 1303 between the objective lens 1306 and the sample 1305, either limiting the objective to low magnification, or calling for a relatively 0 expensive long working distance objective lens,
  • an optical imager can comprise a lens configured to control circular, elliptical, or linear interference fringes by matching beam expansion of reference and object beams.
  • the phase shifter can comprise a retro-reflecting prism placed in an optical beam path comprising a set of two mirrors or a mirror-coated prism, and a Unear translator that moves the retro-reflecting prism,
  • the phase shifter can comprise an optical flat, and a rotating device that rotates angle of incidence of the optical flat,
  • the phase shifter can comprise a liquid crystal light valve including transparent or semitranspar ⁇ it electrodes and a liquid crystal material, driven by an electrical source .
  • Some implements may include a phase shifter comprising an optica! wedge and a linear translator for translating the optical wedge.
  • FIGURES 14A through 14F multiple pictorial diagrams depict various phase delay methods to shift the fringes which can be used for the optical imagers such as those shown in FIGURE 12 and FIGL 1 RE 13. Arrangements in FIG UREs 14A through HD can also be used in place of the phase shifters 733 and 933 shown in FlGIiREs 7 and 9, respectively, when placed in the reference beam paths ⁇ .407.
  • FlGIiRE 14A shows phase delay by linear translation 1430 of a retro-reflecting prism .1450 placed in the optical beam path 1407 by using a set of two mirrors 1404 or a mirror-coated prism, which is not shown to promote clarity.
  • FIGURE 14B depicts phase delay b ⁇ rotating 1.427 the angle of incidence of an optical flat 14Sl .
  • FIGURE 14C illustrates phase delay using a liquid crystal light valve, including transparent or semitranspare ⁇ t electrodes 1452, and a liquid crystal material J 433 driven by an electrical source ⁇ 434.
  • FIGURE 14D shows phase delay by linearly translating 1430 an optical wedge S452.
  • FfGVSRE ⁇ 4E depicts phase delay by linearly shifting 1430 one of the minors ⁇ 404 in the apparatus of FIGURE 12 or 13, shown as mirrors 1204 and 1304 in the corresponding figures, to a new position is 1429
  • FIGURE 1.4F shows phase delay by tilting 1.432 one of the mirrors 1404 in die apparatus of FIGURE 1.2 or 13 shown as minors 1204 and 1.304 in the corresponding Figures, to a new position is 1431.
  • the phase delay is controlled by the processing and control electronics 1 16, 916. 1216 and 1316 in the respective figures.
  • an optical imager max' implement a suitable speckle reduction method, if desired.
  • a. coherent source such as a laser is used as the input light source to the high- iesolntion imaging schemes described herein throughout the interference pattern can contain a speckle.
  • the speckle pattern can be a source of noise.
  • various speckle reduction methods can be used.
  • One method involves passing light through a moving random media, such as a rotating difitiser as depicted in FIGURE 15, a linearly moving diffuser as depicted in FK)IiRE IS, a moving random media such as a liquid crystal type material mixed with a scattering medium as depicted in FIGURE 16. or a flowing scattering medium circulated with a pump as depicted in FIGURE 17.
  • a moving random media such as a rotating difitiser as depicted in FIGURE 15, a linearly moving diffuser as depicted in FK)IiRE IS
  • a moving random media such as a liquid crystal type material mixed with a scattering medium as depicted in FIGURE 16. or a flowing scattering medium circulated with a pump as depicted in FIGURE 17.
  • speckle is reduced by moving the random media such that
  • a randomizing apparatus is generally placed at the input terminal of the interferometer but may also be placed throughout the optical path of the optical system.
  • at least two lenses or equivalent optica! components one before the random media and one after, may be desired.
  • One lens controls the spot size of the light
  • An optical imager can include a speckle reduction device configured for usage with a coherent source comprising first and second lenses configured to receive and pass illumination from the coherent source, a rotating diffuser positioned between the first and second lenses, arid a rotating motor.
  • FIGURE 15 a schematic pictorial and block diagram illustrates an embodiment of a speckle reduction device I SOO and associated speckle reduction method using a rotating diffuser 1553 via a rotating motor 1554 when using a coherent source 150 ⁇ as the light source to the high-resolution imaging apparatus described herein throughout.
  • the diffuser (553 rotates, the speckle pattern generated by the coherent source 0 1501 also moves.
  • the captured image is a time-averaged image of the moving speckle patterns, thus the interference image is smoothed and speckle noise is greatly reduces or eliminated.
  • the spatial coherence is directly proportional to the speckle size.
  • a lens 1555 is used to adjust the spot size incident on the rotating diffuser ⁇ 553. thus controlling the spatial 5 coherence of light.
  • Another lens 1541. or combination of lenses as depicted in FlGIiREs 11 A through Ui is used to control the light divergence/convergence or coilima ⁇ on.
  • An optional stationary diffuser 1563 may he placed after the moving diffuser 1553 such that speckle movement is in random orientation rather than in directional of the diffuser movement,
  • an optica] imager can include a speckle reduction device configured for usage with a coherent source comprising first and second lenses configured to 5 receive and pass illumination from the coherent source, and an electrically-motile scattering medium embedded between two transparent or semitransparerrt. electrodes positioned between the first im ⁇ second lenses whereby a captured image is a time average of speckle patterns moved by application of voltage across the electrodes, an interference image is smoothed, and speckle noise is reduced or eliminated.
  • FIGURE 16 a schematic pictorial and block diagram
  • FIG. 16 It depicts an embodiment of a speckle reduction device 1600 and associated speckle reduction method using a scattering medium 1653 embedded between two transparent or semitranspareiit electrodes 1652 when using a coherent source 1601 as the light source to the high-resolution imaging apparatus described herein throughout.
  • the medium can be a liquid crystal type material mixed with a scattering medium, or any type of medium that can be moved electrically.
  • the random medium By applying a voltage 1634 across the electrodes 1652, the random medium is moved, thus moving the speckles generated by the coherent source 1601.
  • the interference images captured by the apparatus discussed herein throughout contain speckle noise if a highly coherent light source is used.
  • the speckles move much foster than the image capture rate of the camera 110, the captured image is a time averaged image of the moving speckle patterns, thus the interference
  • a lens !.65S is used to adjust the spot size incident on the random medium 1653, thus controlling the spatial coherence of light.
  • Another lens 164 J or a combination of lenses as depicted in FIGl)REs I IA through 111 is used to control the light divergence/convergence or collimation.
  • an optical imager can include a speckle reduction device configured for usage with a coherent source comprising first and second Senses configured to receive and pass illumination from the coherent source, a liquid pump, and a scattering medium circulated by the liquid pump.
  • a captured image is a time average of moving speckle patterns, an interference image is smoothed, and speckle noise is reduced or eliminated.
  • FIGURE 17 a schematic pictorial and block diagram illustrates an embodiment of a speckle reduction device 1700 and associated speckle reduction method using a flowing scattering medium 1753 when using a coherent source 1701 as the light source to the high-resolution imaging apparatus described herein throughout.
  • the scattering liquid medium 1753 is circulated by a liquid pump 1754, thus moving the scattering medium.
  • Light from the source 1701 is
  • a lens 1755 is used to adjust the spot size incident on the random medium 1753. thus controlling the 5 spatial coherence of light.
  • Another lens 1741 or a combination of lenses as shown in FlGUREs HA through.
  • Il l is used to control the light divergence/convergence or collimation
  • a « optical imager can include a speckle reduction device configured for usage with a coherent source comprising first and second lenses configured to receive and pass illumination from the coherent source, a motion device, and a scattering medium
  • the motion device can be a translation stage, a motorized stage, a solenoid- based moving apparatus, a piezoelectric moving stage, and a. linear translation driver.
  • FIGURE 1.8 a schematic pictorial and block diagram illustrates an embodiment of a speckle i 5 reduction device J 800 and associated speckle reduction method using a linearly moving diffuser 1853 with a coherent source 1801 as the light source to the high-resolution imaging apparatus described herein throughout. Movement is achieved using moving apparatus J 857 such as a translation stage, a motorized stage, a solenoid based moving apparatus such as an audio speaker, a piezoelectric moving stage, or any other means of producing a linear translation
  • moving apparatus J 857 such as a translation stage, a motorized stage, a solenoid based moving apparatus such as an audio speaker, a piezoelectric moving stage, or any other means of producing a linear translation
  • the moving apparatus J 857 such as a translation stage, a motorized stage, a solenoid based moving
  • the apparatus 1857 is translated linearly back and forth 1840, thus producing movement of the speckle pattern generated by the coherent source 1801.
  • the moving apparatus ⁇ 857 is either controlled by an electrical source iS34 or by the control electronics 116
  • the captured image is a time averaged image of the moving speckle patterns, thus the interference image is smoothed and 5 speckle noise is greatly reduces or eliminated.
  • the spatial coherence is directly proportional to the speckle size.
  • a lens 1.855 is used to adjust the spot size incident on the rotating diffuser !8SJ. thus controlling the spatial coherence of light.
  • Another lens 184H or a combination of lenses as depicted in FIO IJREs J IA through 1.1 ⁇ is used to control the light divergence/convergence or collimation.
  • An optional stationary diffuser 1863 may be placed after
  • the moving diffuser 1853 such that speckle movement is in random orientation rather than in the direction of the diffuser movement.
  • Another approach to reduce speckles is to use a low-coherence optical source, such a light emitting diode (LED), a halogen Sight, or any available low-coherence light source, as depicted in FIGURE 19.
  • a set of lenses can be used to optimize light throughput to the optical >5 system, also as depicted in FlGlJREs ! IA through 111.
  • an iris 1958 or a spatial filter 1958 mav be inserted between the lenses 194 ⁇ . to filter out intensitv variations of the source 1901.
  • An optional wavelength filter 1959 may he used to tune a wide-band optical source to a desirable narrow-band wavelength range.
  • FIGURE J 9 a pictorial view shows an embodiment of a speckle reduction device 1900 and associated speckle reduction method using a partially coherent light 5 source 1901.
  • a partially coherent light 5 source 1901 such as a halogen lamp.
  • Lenses 1941 or a combination of lenses as depicted in FIGURES HA through S H is used to control the light divergence/convergence or collu ⁇ ation.
  • An optional iris 1958 or a spatial filter 1958 may be inserted between the lenses 1941 to filter out intensity variations of the source 1901.
  • An optional wavelength filter 1959 may be used to time a It) wide-band optical source to a desirable narrow-band wavelength range,
  • a further method to reduce speckles involves addition of an non-interference image (A 7 ) with the processed imaged.
  • ⁇ l ar ⁇ , of equation (4) or (5) can be added or multiplied with to produce a high-resolution, yet clean (low-noise, speckle-free) image.
  • the non-interference image can be obtained either by blocking the reference beam paths depicted in ! 5 the figures herein throughout, or to use an additional beam splitter in. the apparatus and illuminate the sample with a no.n ⁇ cohere.nt light source
  • fiber-optic, spectroscopic, and/or pokuimetric components can be added to an optical imager.
  • FlGl)REs ⁇ .. 5, 7, 8. 9 J 2. and S 3 depict architectures containing bulk optical 20 components.
  • the structures are not limited for usage with bulk optical components, which can be replaced by fiber-optic components.
  • a fiber-optic phase shifter can be implemented instead of the bulk optic phase-shifter shown in FIGURE 7, whereby fiber optic components such as fiber-couplers, fiber optic phase-shifter or a fiber-coupled electro-optic modulator can be placed in the path of the reference beam 707.
  • the mirror 704 can also be 25 replaced by a fiber reflector.
  • Fiber-optic components and bulk-optic components can be combined to utilize the advantage of both systems, oamelv the massive parallel detection capability of the bulk optic, and the high-speed phase modulation capability of the fiber optics.
  • the light source 101 , 701 can be a tunable laser, a multiple wavelength switching laser or a coherent light source of different. 30 wavelengths. Wavelength filters can be placed in front of the camera 110, 710 to tune the detection wavelength. So addition, the camera 110, 710 may replaced with a spectroscopic imaging camera, and the light source can be replaced by a broad-band partially -coherent light source. Combining the hybrid system with the computational capabilities described in equations (2) to (4) can result in high-resolution spectroscopic microscopic images. [0088] In addition, further information can be obtained by using polarization optics, which are particularly useful for interrogation of patterned optical thin films and birefringent films.
  • the devices shown in FlGIiREs 1. 5, ?, 8, 9. 12, and 13 can be combined with polarization optics, such as replacing the beam splitter with a polarization beam sputter, adding optical wave plates 5 and polarizers in the paths of the reference and object beams, and using polarization controlling phase shifters in the reference beam path as shown in FIGURE 7. Combining the hybrid system with the computational capabilities described iu equations (2) to (4). (5) or (6) result in high- resoiution polarimetric microscopic images.
  • BuJk optical fiber-optic, polarization-optic and spectroscopic and ⁇ vavelength-tumng- It) optics can be partly or completely combined to form a robust, high-resolution microscopic, spectroscopic and polarimetric imaging system.
  • an optical imager can further comprise a fiber- coupled optical source.
  • input light can be delivered via a optical-fiber 2060 as depicted in FJGIiRE 20 for a more flexibility, and to be able for a more remote operation.
  • 005> 11 Referring to FIGURE 20 : a schematic pictorial and block diagram illustrates an embodiment of a coherent or partially coherent light source 2001 coupled to an optical fiber 2060 via a lens or combination of lenses 2061. that can be used in an optical imager.
  • Light at the output end of the fiber is either left expanding while entering the high-resolution imaging apparatus described herein throughout or diverged, converged or collimated using a lens 2 ( Mi. or a 0 combination of lenses as depicted in FIGUREs 1 IA through 1 1 ⁇
  • the optical imager 100 can be configured to image an object such as surface structures, sub-surface structures and features in a transparent media, sub-surface structures and features in a semi-transparent media, phase objects, and other suitable objects or samples.
  • the illustrative optical imagers and techniques can increase image contrast.
  • the optical imagers and techniques can facilitate imas>ina of c ⁇ e& structures.

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Abstract

L'invention concerne un dispositif d'imagerie optique comprenant un interféromètre, des optiques microscopiques fonctionnant de façon conjointe avec l'interféromètre pour produire une image de référence et une image d'un objet, ainsi qu'un dispositif de saisie d'image conçu pour saisir une image interférométrique avec un déphasage entre l'image de référence et l'image de l'objet. Le dispositif d'imagerie optique comprend également un déphaseur conçu pour réguler de manière sélective le déphasage et un contrôleur conçu pour saisir une pluralité d'images interférométriques à une pluralité de déphasages sélectionnés et pour combiner ces images interférométriques afin d'obtenir une image traitée avec une résolution dans le plan qui est supérieure en termes de caractéristiques de longueur d'onde optique et d'ouverture numérique.
PCT/US2007/066326 2006-04-11 2007-04-10 Dispositif d'imagerie optique haute résolution Ceased WO2007121175A2 (fr)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007054734A1 (de) * 2007-11-16 2009-05-20 GFE Gesellschaft für Fertigungstechnik u. Entwicklung Schmalkalden e.V. Verfahren und Einrichtung zum Erfassen eines Oberflächenprofils
WO2010087794A1 (fr) * 2009-01-29 2010-08-05 Thomson Licensing Caméra unique pour capture d'image en 3d stéréoscopique
WO2020198016A1 (fr) * 2019-03-22 2020-10-01 Corning Incorporated Systèmes et procédés hybrides de caractérisation d'une contrainte dans des substrats transparents chimiquement renforcés
CN112858345A (zh) * 2021-01-22 2021-05-28 中国工程物理研究院激光聚变研究中心 一种随机移相的光学元件缺陷快速超分辨检测装置及检测方法
US11846546B1 (en) 2022-07-25 2023-12-19 Topcon Corporation Enhanced full range optical coherence tomography

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US4957367A (en) * 1988-05-31 1990-09-18 Lev Dulman Inteferometric imaging system

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007054734A1 (de) * 2007-11-16 2009-05-20 GFE Gesellschaft für Fertigungstechnik u. Entwicklung Schmalkalden e.V. Verfahren und Einrichtung zum Erfassen eines Oberflächenprofils
DE102007054734B4 (de) * 2007-11-16 2009-12-24 GFE Gesellschaft für Fertigungstechnik u. Entwicklung Schmalkalden e.V. Verfahren zum Erfassen eines Oberflächenprofils
WO2010087794A1 (fr) * 2009-01-29 2010-08-05 Thomson Licensing Caméra unique pour capture d'image en 3d stéréoscopique
US9057942B2 (en) 2009-01-29 2015-06-16 Thomson Licensing Single camera for stereoscopic 3-D capture
WO2020198016A1 (fr) * 2019-03-22 2020-10-01 Corning Incorporated Systèmes et procédés hybrides de caractérisation d'une contrainte dans des substrats transparents chimiquement renforcés
US11105612B2 (en) 2019-03-22 2021-08-31 Corning Incorporated Hybrid systems and methods for characterizing stress in chemically strengthened transparent substrates
CN112858345A (zh) * 2021-01-22 2021-05-28 中国工程物理研究院激光聚变研究中心 一种随机移相的光学元件缺陷快速超分辨检测装置及检测方法
US11846546B1 (en) 2022-07-25 2023-12-19 Topcon Corporation Enhanced full range optical coherence tomography
EP4311473A1 (fr) * 2022-07-25 2024-01-31 Topcon Corporation Tomographie par cohérence optique de pleine gamme améliorée
US12146792B2 (en) 2022-07-25 2024-11-19 Topcon Corporation Enhanced full range optical coherence tomography

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