WO2007149705A3 - Dispositif et procédé de modification de bord - Google Patents

Dispositif et procédé de modification de bord Download PDF

Info

Publication number
WO2007149705A3
WO2007149705A3 PCT/US2007/070617 US2007070617W WO2007149705A3 WO 2007149705 A3 WO2007149705 A3 WO 2007149705A3 US 2007070617 W US2007070617 W US 2007070617W WO 2007149705 A3 WO2007149705 A3 WO 2007149705A3
Authority
WO
WIPO (PCT)
Prior art keywords
edge
modifying
disc
apparatuses
abrasive article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/070617
Other languages
English (en)
Other versions
WO2007149705A2 (fr
Inventor
Feben T Gobena
William D Joseph
Gary M Palmgren
Daniel B Pendergrass Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of WO2007149705A2 publication Critical patent/WO2007149705A2/fr
Publication of WO2007149705A3 publication Critical patent/WO2007149705A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

L'invention concerne des dispositifs de modification de bord comprenant un porte-disque, une unité de modification de bord de disque comprenant un support d'article abrasif, et un moteur d'entraînement à oscillation linéaire et à vitesse uniforme couplé au porte-disque et/ou au support d'article abrasif. Le moteur d'entraînement à oscillation linéaire et à vitesse uniforme présente une vitesse sensiblement constante pendant au moins 80% de chaque demi-cycle d'oscillation. L'invention concerne également des procédés pour modifier le bord d'un disque au moyen de ces dispositifs.
PCT/US2007/070617 2006-06-22 2007-06-07 Dispositif et procédé de modification de bord Ceased WO2007149705A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/425,957 US20070298687A1 (en) 2006-06-22 2006-06-22 Apparatus and method for modifying an edge
US11/425,957 2006-06-22

Publications (2)

Publication Number Publication Date
WO2007149705A2 WO2007149705A2 (fr) 2007-12-27
WO2007149705A3 true WO2007149705A3 (fr) 2008-02-14

Family

ID=38834231

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/070617 Ceased WO2007149705A2 (fr) 2006-06-22 2007-06-07 Dispositif et procédé de modification de bord

Country Status (3)

Country Link
US (1) US20070298687A1 (fr)
TW (1) TW200808492A (fr)
WO (1) WO2007149705A2 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10328989A (ja) * 1997-06-02 1998-12-15 Speedfam Co Ltd ウエハエッジの鏡面研磨方法及び装置
US5868605A (en) * 1995-06-02 1999-02-09 Speedfam Corporation In-situ polishing pad flatness control
JPH1148109A (ja) * 1997-06-04 1999-02-23 Speedfam Co Ltd ワークエッジの鏡面研磨方法及び装置
JPH11104942A (ja) * 1997-10-02 1999-04-20 Speedfam Co Ltd ワークエッジの研磨方法及び装置
US6283837B1 (en) * 1998-08-20 2001-09-04 WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG Grinding machine

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1287900A (fr) * 1969-08-29 1972-09-06
US3986433A (en) * 1974-10-29 1976-10-19 R. Howard Strasbaugh, Inc. Lap milling machine
US4067701A (en) * 1975-12-03 1978-01-10 Neway Manufacturing, Inc. Grinding machine for carbide cutting elements
US4038783A (en) * 1976-09-03 1977-08-02 Leon Rosenthal Method and apparatus for generating optic lenses
US4294042A (en) * 1979-09-05 1981-10-13 Johns-Manville Corporation Apparatus and method for grinding a helical surface on a flat blade
US4365444A (en) * 1980-06-24 1982-12-28 Chwae John C Drill point grinding machine
US4517769A (en) * 1981-05-20 1985-05-21 Tokyo Shibaura Denki Kabushiki Kaisha Method and apparatus for forming oblique groove in semiconductor device
JPS60197394A (ja) * 1984-03-15 1985-10-05 日本たばこ産業株式会社 回転ドラム形カツタ−のナイフ研磨装置
WO1993009397A1 (fr) * 1991-10-28 1993-05-13 A.E. Bishop & Associates Pty Limited Appareil destine a la fabrication de soupapes pour des organes de direction assistee hydraulique_______________________________
JPH06190709A (ja) * 1992-12-28 1994-07-12 Ryobi Ltd 研磨盤
JPH0815718B2 (ja) * 1993-08-20 1996-02-21 株式会社島精機製作所 裁断刃の刃幅測定装置
US5749769A (en) * 1994-12-16 1998-05-12 International Business Machines Corporation Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface
US6159081A (en) * 1997-09-09 2000-12-12 Hakomori; Shunji Method and apparatus for mirror-polishing of workpiece edges
JP3632489B2 (ja) * 1999-03-02 2005-03-23 日本精工株式会社 内面研削方法および内面研削盤
JP2005305586A (ja) * 2004-04-20 2005-11-04 Nihon Micro Coating Co Ltd 研磨装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5868605A (en) * 1995-06-02 1999-02-09 Speedfam Corporation In-situ polishing pad flatness control
JPH10328989A (ja) * 1997-06-02 1998-12-15 Speedfam Co Ltd ウエハエッジの鏡面研磨方法及び装置
JPH1148109A (ja) * 1997-06-04 1999-02-23 Speedfam Co Ltd ワークエッジの鏡面研磨方法及び装置
JPH11104942A (ja) * 1997-10-02 1999-04-20 Speedfam Co Ltd ワークエッジの研磨方法及び装置
US6283837B1 (en) * 1998-08-20 2001-09-04 WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG Grinding machine

Also Published As

Publication number Publication date
WO2007149705A2 (fr) 2007-12-27
US20070298687A1 (en) 2007-12-27
TW200808492A (en) 2008-02-16

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