WO2008019937A1 - Interféromètre de michelson - Google Patents

Interféromètre de michelson Download PDF

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Publication number
WO2008019937A1
WO2008019937A1 PCT/EP2007/057794 EP2007057794W WO2008019937A1 WO 2008019937 A1 WO2008019937 A1 WO 2008019937A1 EP 2007057794 W EP2007057794 W EP 2007057794W WO 2008019937 A1 WO2008019937 A1 WO 2008019937A1
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WO
WIPO (PCT)
Prior art keywords
beam splitter
partial
beams
retroreflector
partial beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/057794
Other languages
German (de)
English (en)
Inventor
Christian Bauer
Kai-Uwe Pleban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200610037967 external-priority patent/DE102006037967B3/de
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of WO2008019937A1 publication Critical patent/WO2008019937A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Definitions

  • a Michelson interferometer is known, are generated in the optical path differences by means of a retroreflector (triple reflector) whose axis of rotation is laterally offset from its triple point.
  • a beam splitter divides a light beam coming from a radiation source into two partial beams, which are guided directly or with the aid of deflecting mirrors mirror-symmetrically to the axis of rotation of the retroreflector at the same angle into the retroreflector. From the retroreflector from the partial beams are reflected on them associated plano mirror, which reflect the partial beams back into the rotating retro-reflector.
  • the sub-beams From the retroreflector, the sub-beams, possibly via the deflecting mirrors, return to the beam splitter, which unites the sub-beams and causes them to interfere.
  • the interfering sub-beams are fed to a detector for generating an interference signal.
  • EP 0 034 325 B1 discloses a Michelson interferometer in which the optical path differences are generated by means of one or two retroreflectors which are oscillating and oscillate back and forth. With appropriate dimensioning of the beam splitter or sufficiently small pendulum motion can be dispensed with the arrangement of Wegreflek- ting angle-sensitive plane mirror; d. H. the guided by the beam splitter in the back and forth oscillating retroreflector partial beams are reflected by this directly in the direction of the beam splitter back.
  • the use of a rotating retroreflector has the advantage that the rotational movement can be easily realized with higher frequencies and thus higher measurement rates are possible. Furthermore, a rotational movement is less susceptible to vibration and vibration than a pendulum motion.
  • the invention has for its object to minimize the dependence of the interference signal of angular positions or tilting optical components in a Michelson interferometer with rotating retroreflector while achieving a high degree of modulation, ie a high coverage of the brought to interference partial beams.
  • the object is achieved by a Michelson interferometer with a beam splitter and a rotating retroreflector whose axis of rotation is laterally offset from its triple point,
  • the beam splitter divides a light beam coming from a radiation source into two partial beams which are mirror-symmetrical to a plane parallel to the axis of rotation Straight lines are guided at the same angle into the rotating retroreflector,
  • the rotating retroreflector reflects the partial beams guided in it either directly or after reflection at two stationary retroreflectors in the direction of the beam splitter, which reunites the partial beams for reception in a detector
  • At least one deflecting mirror is arranged in the course of at least one of the two partial beams between the rotating retroreflector and the Strahltei- ler and in the course of the other partial beam by an odd number of smaller number of deflecting mirrors is arranged, wherein the smaller number is greater than or equal to zero ,
  • the subjets falling into the rotating retroreflector describe an elliptical rotational movement on exiting the retroreflector, the width of the ellipse not being dependent on the angle of incidence but on the point of incidence.
  • This rotational movement of the partial beams is canceled again if the rotating partial beams are reflected back by means of plane mirrors into the retroreflector, as is known from DE 41 36 300 C1 or DE 197 56 936 C1.
  • these plane mirrors are not provided in the interferometer according to the invention because of their disturbing influence on the interference signal; instead, the partial beams guided into the rotating retroreflector are reflected back either directly or after reflection at two fixed retroreflectors in the direction of the beam splitter.
  • An essential advantage of the interferometer according to the invention is also that possible tilting of both the deflection mirror and the beam splitter have no effect on the degree of coverage of the partial beams combined by the beam splitter.
  • the rotating partial beams combined by the beam splitter can be focused onto the detector by means of focusing optics (eg mirror or lens), the focusing optics preferably including an opening through which a reference laser beam is directed onto the beam splitter which adjusts the reference beam.
  • Laser beam in two the Interferometer passing laser partial beams divides.
  • the further focusing optics includes an opening through which the light beam of the radiation source is directed to the beam splitter.
  • the light beam and the reference laser beam can also be introduced together on one side of the beam splitter into the interferometer instead of in each case different sides of the beam splitter.
  • the light beam is preferably introduced into the interferometer in such a way that it essentially meets the center of the rotating retroreflector; the reference laser beam is laterally of the Light beam with this non-overlapping coupled into the interferometer, and merging after passing through the interferometer of the beam splitter partial beams or partial laser beams are focused by means of a focusing optics on separate detectors. In this way, the aperture of the optical components of the interferometer is fully utilized for the light beam, while the deflection in the critical center of the retroreflector is avoided for the reference laser beam.
  • the rotational movement of the partial beams or laser partial beams combined by the beam splitter can be reversed in an advantageous manner by being directed into the rotating retroreflector via at least one additional mirror parallel to one of the partial beams coming from the rotating retroreflector and only after leaving the latter the number of additional mirrors is selected such that the sum of the reflections of each partial beam or partial laser beam on the way from the retroreflector on the optional deflection mirror, the beam splitter and the at least one additional mirror is odd.
  • the partial beams falling into the rotating retro-reflector describe an elliptical rotational movement on exiting the retro-reflector, the width of the ellipse being dependent on the angle of incidence but not on the point of incidence.
  • the combined partial beams or partial laser beams returned to the retroreflector are parallel to the partial beams coming from the rotating retroreflector, rotate in the same direction and have the same width of the rotary ellipse, they become a non-rotating light beam or laser beam from the rotating retroreflector united, which can then be detected without focusing optics of the detector or laser detector.
  • the combined partial beams or laser partial beams fed back into the retroreflector to rotate in the same direction as the partial beams coming from the rotating retroreflector, the sum of the reflections of each partial beam or partial laser beam must be removed from the retrograde reflector. reflector over the optional deflection mirror, the beam splitter and the at least one additional mirror be odd.
  • One of the additional mirrors directing the combined partial beams or partial laser beams into the rotating retroreflector lies in the radiation path between the beam splitter and the radiation source or the detector, for which reason the additional mirror in question must be designed as a beam splitter.
  • the straight line, with respect to which the two partial beams are guided mirror-symmetrically at the same angle in the rotating retroreflector is offset from the axis of rotation of the retroreflector perpendicular to the plane spanned by the partial beams.
  • the beam path in the interferometer is subdivided into two partial progressions which lie in two different planes.
  • the merged partial beams or partial laser beams coming from the beam splitter are then spatially separated from the radiation source to the beam splitter, for example, so that the additional mirror outside the light beam directed from the combined partial beams or partial laser beams into the rotating retroreflector Radiation source can lie to the beam splitter and therefore need not be transparent to this.
  • the spatial separation of the beams entering and exiting the interferometer can also be achieved by beam offset in one plane instead of in two planes, with the light beam and the reference laser beam striking the beam splitter at different locations within the plane.
  • the mirrors and / or the beam splitter of the interferometer according to the invention can each be formed in a manner known per se by prism surfaces of one or more prism bodies, wherein the beam splitter is preferably formed by prism surfaces of two prism bodies adjoining one another. Those prism surfaces through which rays enter or exit the prism body are preferred Aligned perpendicular to the respective beams, so that radiation refractions are avoided and dispersion effects are reduced.
  • Suitable retroreflectors are triple mirrors, cusp corners designed as full prisms, cat mirrors in the form of a mirror or lens, as well as roof-edge mirrors or prisms.
  • the deflection mirrors are arranged perpendicular to each other in the Generalstrahlenverinstitutn in such a way that in the course of a partial beam, a 2-mirror reflector with two mutually perpendicular deflecting mirrors and a planar deflecting mirror is arranged in the course of the other sub-beam, or that in the course of the one sub-beam a retro-reflector with three deflecting mirrors oriented at right angles to one another and in the course of the other sub-beam a two-mirror reflector with two deflecting mirrors oriented at right angles to one another is arranged.
  • FIGS. show in detail:
  • FIG. 1 shows a first embodiment of the Michelson interferometer according to the invention with a rotating retroreflector and a beam splitter, which divides a light beam into two partial beams and this after
  • FIG. 2 shows an example of the insensitivity of the combined partial beams with respect to tilting of the beam splitter
  • FIG. 3 shows an example of the arrangement of light beam and reference laser beam when into the interferometer and after passing through the interferometer
  • FIG. 4 shows a further exemplary embodiment with additional mirrors which guide the combined partial beams back into the retro-reflector
  • FIG. 5 shows the exemplary embodiment according to FIG. 4 in a top view and a side view, the beam path in the interferometer being subdivided into two partial progressions which lie in different planes,
  • FIG. 6 shows a further exemplary embodiment, the beam path in the interferometer being subdivided into two partial progressions which are offset from one another within a plane,
  • FIG. 7 shows a further exemplary embodiment with intersecting ray paths
  • FIGS. 8 to 12 show different embodiments with prism bodies for realizing mirrors and / or the beam splitter or for shortening optical path lengths.
  • FIGS 13 and 14 different embodiments with mutually perpendicular deflecting mirrors
  • FIG. 15 shows another embodiment with fixed retroreflectors
  • FIG. 1 shows a Michelson interferometer with a radiation source 1, from which a light beam 2 falls onto a beam splitter 3 at a predetermined angle.
  • the beam splitter 3 divides the light beam 2 in two equal amplitude Partial beams 4, 5, wherein the partial beam 4 reflected at the beam splitter 3 passes via two deflecting mirrors 6, 7 and the partial beam 5 transmitted by the beam splitter 3 via a deflecting mirror 8 into a retroreflector 9.
  • the retro-reflector 9 rotates eccentrically about an opposite to the triple point of the retroreflector 9 laterally offset axis of rotation 10.
  • the two partial beams 4 and 5 of the deflecting mirrors 6, 7, 8 mirror symmetry to the axis of rotation 10 and a parallel line 10 'under in each case the same angle of incidence ⁇ is introduced into the rotating retroreflector 9.
  • the deflecting mirrors 6, 7, 8 are furthermore arranged such that the optical path lengths of the partial beams 4, 5 from the beam splitter 3 to the retroreflector 9 are the same.
  • the retroreflector 9 reflects the partial beams 4, 5 at the same angle ⁇ , but with a parallel offset, so that the partial beams 4 ', 5' emerging from the rotating retroreflector 9 each describe an elliptical rotational movement.
  • the width of the ellipse of the rotational movement is dependent on the angle ⁇ , but not on the point of incidence.
  • the coming of the retroreflector 9 rotating partial beams 4 ', 5' are returned via the same deflection mirror 6, 7, 8 as the partial beams 4, 5 to the beam splitter 3.
  • the partial beams 11 united by the beam splitter 3 pass on the side facing away from the radiation source 1 to a focusing optics 12 in the form of a focusing mirror, which focuses the combined partial beams 11 onto a detector 13.
  • the eccentric rotational movement of the retroreflector 9 leads to an opposite change in the optical path lengths of the two partial beams 4 4 'and 5, 5' of the beam splitter 3 to the retroreflector 9 and back, so that in the union of the partial beams 4 4 'and 5, the fifth In the beam splitter 3 an interferogram is produced which represents the Fourier transform of the light beam 2 coming from the radiation source 1.
  • the Michelson interferometer shown is therefore useful for Fourier transform (FT) spectroscopy.
  • FT Fourier transform
  • the reference laser beam 16 is split in the same way as the light beam 2, but mirrored with respect to the beam splitter 3, into partial laser beams 17, 18 which run parallel or at least approximately congruent with the partial beams 4, 5.
  • the now rotating laser partial beams 17 ', 18' are again guided to the beam splitter 3 and combined there.
  • the combined laser partial beams 19 pass from the beam splitter 3 on the side facing away from the radiation source 1 side to a further focusing optics 20 in the form of a focusing mirror, which focuses the combined laser partial beams 19 on a laser detector 21.
  • the further focusing optics 20 likewise contains an opening 22 through which the radiation source 1 directs the light beam 2 onto the beam splitter 3.
  • the number of deflecting mirrors 6, 7 arranged in the course of the partial beam 4 '(partial laser beam 18') is larger or none by an odd number, in this case greater by one, than in the corresponding profile of the other partial beam 5 '.
  • the focusing mirrors 12, 20 shown other focusing optics, such as lenses, are also suitable.
  • Amplitude can be combined, the detector 13 and the
  • Laser partial beams 19 to the detector 13 ' which is arranged at the location of the laser detector 21, and vice versa.
  • An essential advantage of the interferometer according to the invention is also that possible tilting of both the deflecting mirrors 6, 7, 8 and of the beam splitter 3 has no effect on the partial beams 11, 11 'or laser partial beams 19, 19 combined by the beam splitter 3 ' to have. Since the incident in the rotating retroreflector 9 rays are reflected back from this in the same direction, angular errors that experience the rays on their way to the retroreflector 9 at the deflecting mirrors 6, 7, 8, in the return of the rays from the retroreflector 9 to the beam splitter 3 canceled again. In the case of an angular error of the beam splitter 3, as shown in FIG. 2, the combined partial beams 11 ' would maintain their direction, while the combined partial beams 11 would jointly experience the double angular error; the degree of coverage of the combined partial beams 11, 11' remains from the angular error of the beam splitter 3 unaffected.
  • the light beam 2 and the reference laser beam 16 can, as shown in FIG. 1, be introduced on respectively different sides of the beam splitter 3 into the interferometer. Alternatively, they can be introduced into the interferometer on one side of the beam splitter 3, wherein both beams 2 and 16 are non-overlapping and spatially separated from each other or wherein the laser beam 16 is coupled via a beam splitter in the beam path of the light beam 2 and after passing through the interferometer is decoupled again via another beam splitter.
  • the Light beam 2 is preferably guided so that it essentially hits the center of the rotating retroreflector 9 and also the other optical components (deflecting mirrors 6, 7, 8 and beam splitter 3) in the respective center, so that the aperture of the optical components is fully utilized becomes.
  • FIG. 3 shows, in this case, the light beam 2 and the reference laser beam 16, which is coupled laterally by the light beam 2 with this non-overlapping into the interferometer. Due to the decentralized position of the laser beam, the deflection in the critical center of the retroreflector 9 is avoided.
  • the partial beams 11, 11 'or partial laser beams 19, 19' combined after passing through the interferometer undergo a rotational movement along the dashed lines due to the rotating retroreflector 9.
  • the rotating beams 11 'and 19 can be focused separately on separate detectors.
  • the embodiment of the Michelson interferometer according to the invention shown in FIG. 4 differs from that according to FIG. 1 in that the combined rotating partial beams 11 are guided into the rotating retroreflector 9 parallel to the partial beam 5, 5 'via an additional mirror 23. Furthermore, the combined rotating laser partial beams 19 are guided via two further additional mirrors 24, 25 parallel to the partial laser beam 18, 18 'into the rotating retroreflector 9.
  • the number of additional mirrors 23 (or 24, 25) is selected such that the sum of the reflections of each partial beam or partial laser beam on the way from the retroreflector 9 via the (the) deflecting mirror 8 (6, 7) Beam splitter 3 and the (the) additional mirror 23 (24,25) is odd.
  • the combined sub-beams 11 (laser sub-beams 19) fed back into the retroreflector 9 via the additional mirror 23 (24, 25) are in the same direction as those of the rotating retro-reflector.
  • Reflector 9 coming partial beams 5 '(laser partial beams 18') rotate.
  • the partial beams 4, 5 or laser partial beams 17, 18 falling into the rotating retroreflector 9 describe an elliptical rotational movement on exiting the retro-reflector 9, the width of the ellipse not being dependent on the angle of incidence ⁇ Incidence is dependent.
  • the additional mirrors 23 and 24 are in the radiation path of the reference laser beam 16 and the light beam 2, they must be formed as a beam splitter.
  • FIG. 5 shows an exemplary embodiment of the interferometer according to the invention in plan view (top) and side view (bottom), wherein the beam path in the interferometer is subdivided into two partial progressions which lie in different planes. This is achieved in that the straight line 10 ', with respect to which the two partial beams 4, 5 are guided mirror-symmetrically at the same angle ⁇ into the retro-reflector 9, opposite to the axis of rotation 10 of the retroreflector 9 perpendicular to that of the partial beams 4, 5 spanned level is offset.
  • the combined sub-beams 11 or laser sub-beams 19 coming from the beam splitter 3 are then spatially separated from the light beam 2 and the reference laser beam 16, so that the additional mirrors 23 and 24 can lie outside the light beam 2 or reference laser beam 16 and therefore no longer need to be transparent to them.
  • the light beam (2) and the reference laser beam (16) run in a common plane and impinge on the beam splitter (3) at different locations, thereby creating a spatial beam Separation of the incoming into the interferometer beams 2, 16 and from this outgoing beams 11, 19 is achieved.
  • FIG. 7 shows an exemplary embodiment in which the beam path between the beam splitter 3 and the retroreflector 9 is guided over the deflecting mirrors 6, 7 in a crosswise manner to avoid too great angles of incidence at the deflecting mirrors 6 and 7.
  • the beam splitter 3 and the deflection mirror 6 are formed by prism faces of a prism body 28.
  • those prism surfaces through which rays enter or exit the prism body 28 are aligned perpendicular to the respective beams, so that radiation refraction is avoided and dispersion effects are reduced.
  • FIG. 9 shows an exemplary embodiment in which the beam splitter 3 and the deflecting mirrors 6 and 7 are each formed by prism faces of a prism body 29 and, in order to reduce the size of the interferometer, the beam path partially runs crosswise.
  • FIG. 10 shows an exemplary embodiment which, in contrast to the preceding exemplary embodiments, has only one single deflection mirror 30.
  • an element of an optically denser medium in this case a glass body 31 of predetermined length, is inserted so as to confound the optical path of the respective partial beam. longer and to adapt to the other of the other, guided over the deflection mirror 30 partial beam.
  • the embodiment shown in Figure 11 differs from that of Figure 10 in that the glass body 32 is formed as a prism body and one of its prism faces the beam splitter 3 forms.
  • the prism body 32 is designed in such a way that the beam coming from the retroreflector 9 undergoes the same refraction when it enters the prism body 32 as when exiting the prism body 32 at the prism area forming the beam splitter 3.
  • an additional prism body 33 is provided, which bears against the prism body 32, the adjoining prism faces of both prism bodies 32 and 33 forming the beam splitter 3. All prism surfaces through which rays enter or exit the prism bodies 32, 33 are aligned perpendicular to the respective beams.
  • FIG 13 differs from that of Figure 7 in that the deflecting mirrors 6 and 7 are aligned perpendicular to each other in the course of the partial beam 4 thereby form a 2-mirror reflector 36, its tilting about an axis perpendicular to the plane extending to no angle error in the course of the partial beam 4 leads. Only tilting the 2-mirror reflector 36 about an axis lying in the plane of the drawing leads to an angle error.
  • FIG. 15 shows an exemplary embodiment in which, in contrast to the preceding exemplary embodiments, in particular according to FIG. 1, the rotating retroreflector 9 does not direct the partial beams 4, 5 guided into it, but after prior reflection at two stationary retro-reflectors 34, 35 in the direction reflected back to the beam splitter 3.
  • the optical path length of the relevant sub-beam can be varied so as to be able to set equal path lengths in the interferometer for both sub-beams.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Pour minimiser sur un interféromètre de Michelson la dépendance du signal d'interférence des positions angulaires ou des basculements des composants optiques et atteindre ce faisant un haut degré de modulation, l'interféromètre comporte un diviseur de rayons (3), et un rétroréflecteur rotatif (9) dont l'axe de rotation (10) est décalé latéralement par rapport à son point triple, le diviseur de rayons (3) divisant un rayon lumineux (2) provenant d'une source de rayonnement (1) en deux rayons partiels (4, 5), qui sont dirigés dans le rétroréflecteur rotatif (9) de façon symétrique par rapport à un plan, sous le même angle (a) respectif, vers une droite (10') parallèle à l'axe de rotation (10), lors de quoi le rétroréflecteur rotatif (9) réfléchit les rayons partiels (4, 5) qui sont acheminés dedans dans le sens opposé, en direction du diviseur de rayons (3), soit directement, soit après réflexion sur deux rétroréflecteurs stationnaires, le diviseur de rayons réunissant de nouveau les rayons partiels (4', 5') pour la réception dans un détecteur (13), et sachant qu'au moins un miroir de renvoi (6, 7) est disposé dans le tracé d'au moins l'un des deux rayons partiels (4') entre le rétroréflecteur rotatif (9) et le diviseur de rayons (3) et qu'un nombre de miroirs de renvoi (8) plus petit d'un nombre impair est disposé dans le tracé de l'autre rayon partiel (5'), le nombre plus petit étant supérieur ou égal à zéro.
PCT/EP2007/057794 2006-08-14 2007-07-27 Interféromètre de michelson Ceased WO2008019937A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE200610037967 DE102006037967B3 (de) 2006-08-14 2006-08-14 Michelson-Interferometer
DE102006037967.5 2006-08-14
DE102007024414.4 2007-05-25
DE102007024414 2007-05-25

Publications (1)

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WO2008019937A1 true WO2008019937A1 (fr) 2008-02-21

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PCT/EP2007/057794 Ceased WO2008019937A1 (fr) 2006-08-14 2007-07-27 Interféromètre de michelson

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3495766A1 (fr) * 2017-12-06 2019-06-12 CTR Carinthian Tech Research AG Interféromètre de référence et procédé de détermination d'une modification de longueur d'un trajet optique
CN111770719A (zh) * 2018-01-26 2020-10-13 维视欧特科有限责任公司 通过迈克尔逊型自由光束干涉仪产生二维干涉图的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19756936C1 (de) * 1997-12-20 1999-03-11 Deutsch Zentr Luft & Raumfahrt Interferometer nach Michelson
DE10115911A1 (de) * 2001-01-31 2002-08-22 Deutsch Zentr Luft & Raumfahrt Einrichtung für ein Interferometer nach Michelson
US20030048441A1 (en) * 1997-10-28 2003-03-13 Manning Christopher J. Tilt-compensated interferometers
DE10308006A1 (de) * 2003-02-25 2004-09-09 Siemens Ag Michelson-Interferometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030048441A1 (en) * 1997-10-28 2003-03-13 Manning Christopher J. Tilt-compensated interferometers
DE19756936C1 (de) * 1997-12-20 1999-03-11 Deutsch Zentr Luft & Raumfahrt Interferometer nach Michelson
DE10115911A1 (de) * 2001-01-31 2002-08-22 Deutsch Zentr Luft & Raumfahrt Einrichtung für ein Interferometer nach Michelson
DE10308006A1 (de) * 2003-02-25 2004-09-09 Siemens Ag Michelson-Interferometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3495766A1 (fr) * 2017-12-06 2019-06-12 CTR Carinthian Tech Research AG Interféromètre de référence et procédé de détermination d'une modification de longueur d'un trajet optique
WO2019110166A1 (fr) * 2017-12-06 2019-06-13 Ctr Carinthian Tech Research Ag Interférometre de référence et procédé de détermination d'une variation de longueur de trajet optique
CN111770719A (zh) * 2018-01-26 2020-10-13 维视欧特科有限责任公司 通过迈克尔逊型自由光束干涉仪产生二维干涉图的方法

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