WO2008047049A3 - Couche de titane comprenant des atomes d ' azote inseres, procede d ' implantation associe - Google Patents

Couche de titane comprenant des atomes d ' azote inseres, procede d ' implantation associe Download PDF

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Publication number
WO2008047049A3
WO2008047049A3 PCT/FR2007/052184 FR2007052184W WO2008047049A3 WO 2008047049 A3 WO2008047049 A3 WO 2008047049A3 FR 2007052184 W FR2007052184 W FR 2007052184W WO 2008047049 A3 WO2008047049 A3 WO 2008047049A3
Authority
WO
WIPO (PCT)
Prior art keywords
equal
nitrogen atoms
implantation method
titanium layer
associated implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2007/052184
Other languages
English (en)
Other versions
WO2008047049A2 (fr
Inventor
Denis Busardo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ionics France SA
Original Assignee
Quertech Ingenierie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quertech Ingenierie SA filed Critical Quertech Ingenierie SA
Publication of WO2008047049A2 publication Critical patent/WO2008047049A2/fr
Publication of WO2008047049A3 publication Critical patent/WO2008047049A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Materials For Medical Uses (AREA)

Abstract

Couche de titane ou d' alliage de titane comprenant des atomes d' azote insérés sur une épaisseur supérieure ou égale à 0, 05 mum, par exemple supérieure ou égale à 0, 1 mum, même par exemple supérieure ou égale à 0, 2 mum, voire supérieure ou égale à 0, 5 mum, ou le prof il de concentration de l ' azote en fonction, de l ' épaisseur de la couche est une courbe résultant de la somme d' au moins deux courbes sensiblement gaussiennes et dont la nanodureté de surface est supérieure ou égale à 10 GPa, et /ou la dureté Vickers est supérieure ou égale à 1 000, pour une charge de 5 g, voire de 50 g. Procédé d' implantation associé.
PCT/FR2007/052184 2006-10-18 2007-10-17 Couche de titane comprenant des atomes d ' azote inseres, procede d ' implantation associe Ceased WO2008047049A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0609104A FR2907469B1 (fr) 2006-10-18 2006-10-18 Dispositif de nitruration par implantation ionique d'une piece en alliage de titane et procede mettant en oeuvre un tel dispositif.
FR0609104 2006-10-18

Publications (2)

Publication Number Publication Date
WO2008047049A2 WO2008047049A2 (fr) 2008-04-24
WO2008047049A3 true WO2008047049A3 (fr) 2008-07-03

Family

ID=39167536

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2007/052184 Ceased WO2008047049A2 (fr) 2006-10-18 2007-10-17 Couche de titane comprenant des atomes d ' azote inseres, procede d ' implantation associe

Country Status (2)

Country Link
FR (1) FR2907469B1 (fr)
WO (1) WO2008047049A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2939150B1 (fr) * 2008-12-01 2011-10-21 Quertech Ingenierie Procede de traitement d'une partie metallique par un faisceau d'ions
FR2942801B1 (fr) * 2009-03-05 2012-03-23 Quertech Ingenierie Procede de traitement d'une piece en elastomere par des ions multi-energies he+ et he2+ pour diminuer le frottement
FR2949236B1 (fr) 2009-08-19 2011-10-28 Aircelle Sa Procede d'implantation ionique pour la realisation d'une surface hydrophobe
EP3425085A1 (fr) 2017-07-07 2019-01-09 The Swatch Group Research and Development Ltd Procede de traitement de surface de particules d'une poudre metallique et particules de poudre metallique obtenues grace a ce procede

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001011623A (ja) * 1999-06-29 2001-01-16 Univ Kansai 窒化チタン薄膜形成方法及び該方法に従って形成した窒化チタン薄膜
WO2005085491A2 (fr) * 2004-02-04 2005-09-15 Societe Quertech Ingenierie (Qi) Dispositif et procede d'implantation ionique d'une piece en alliage d'aluminium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001011623A (ja) * 1999-06-29 2001-01-16 Univ Kansai 窒化チタン薄膜形成方法及び該方法に従って形成した窒化チタン薄膜
WO2005085491A2 (fr) * 2004-02-04 2005-09-15 Societe Quertech Ingenierie (Qi) Dispositif et procede d'implantation ionique d'une piece en alliage d'aluminium

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FUKUMOTO S ET AL: "Corrosion resistance of nitrogen ion implanted titanium alloy for medical implants in physiological saline solution", ION IMPLANTATION TECHNOLOGY, 2000. CONFERENCE ON SEP. 17-22, 2000, PISCATAWAY, NJ, USA,IEEE, 17 September 2000 (2000-09-17), pages 777 - 780, XP010543189, ISBN: 0-7803-6462-7 *
SARKISSIAN A H ET AL: "Characterization of diffused ECR plasma-application to pulsed plasma ion implantation of nitrogen in titanium", SURFACE AND COATINGS TECHNOLOGY ELSEVIER SWITZERLAND, vol. 98, no. 1-3, January 1998 (1998-01-01), pages 1336 - 1340, XP002478335, ISSN: 0257-8972 *

Also Published As

Publication number Publication date
FR2907469A1 (fr) 2008-04-25
FR2907469B1 (fr) 2010-02-26
WO2008047049A2 (fr) 2008-04-24

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