WO2008078680A1 - 光電気混載基板およびその製造方法 - Google Patents

光電気混載基板およびその製造方法 Download PDF

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Publication number
WO2008078680A1
WO2008078680A1 PCT/JP2007/074651 JP2007074651W WO2008078680A1 WO 2008078680 A1 WO2008078680 A1 WO 2008078680A1 JP 2007074651 W JP2007074651 W JP 2007074651W WO 2008078680 A1 WO2008078680 A1 WO 2008078680A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrical
optical
mounting board
optical waveguide
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/074651
Other languages
English (en)
French (fr)
Inventor
Tsuyoshi Shioda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Priority to JP2008551080A priority Critical patent/JP5512131B2/ja
Priority to KR1020097006610A priority patent/KR101084407B1/ko
Priority to CN2007800479368A priority patent/CN101568867B/zh
Priority to EP07859931A priority patent/EP2096473B1/en
Priority to US12/516,214 priority patent/US8175424B2/en
Publication of WO2008078680A1 publication Critical patent/WO2008078680A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09781—Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/0989—Coating free areas, e.g. areas other than pads or lands free of solder resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10106—Light emitting diode [LED]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Integrated Circuits (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

　本発明は、片方の面に光導波路、他方の面に電気配線パターン等を有する光電気混載基板において、光導波路のコアパターンと電気配線パターン等が、所望の位置に精度よく配置された光電気混載基板およびその製造方法を提供する。 　具体的に本発明は、電気配線板の上にコア層２１かつクラッド層２０が積層された積層体４を準備する工程；前記電気配線板の積層体４が形成される面とは反対の面に、光導波路のコアパターンを設けるための位置決め標識１２と、電気配線パターン１３または外部と接続するための電気的接続部を同時に形成する工程；前記位置決め標識１２に基づき、フォトマスクを用いることなく光導波路のコアパターンを形成する工程を含む、光電気混載基板の製造方法に関する。
PCT/JP2007/074651 2006-12-26 2007-12-21 光電気混載基板およびその製造方法 Ceased WO2008078680A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008551080A JP5512131B2 (ja) 2006-12-26 2007-12-21 光電気混載基板およびその製造方法
KR1020097006610A KR101084407B1 (ko) 2006-12-26 2007-12-21 광 전기 혼재 기판 및 그의 제조 방법
CN2007800479368A CN101568867B (zh) 2006-12-26 2007-12-21 光电混载基板及其制造方法
EP07859931A EP2096473B1 (en) 2006-12-26 2007-12-21 Optical / electrical hybrid circuit board and manufacturing method of the same
US12/516,214 US8175424B2 (en) 2006-12-26 2007-12-21 Electrical and optical hybrid board and manufacturing method of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006350440 2006-12-26
JP2006-350440 2006-12-26

Publications (1)

Publication Number Publication Date
WO2008078680A1 true WO2008078680A1 (ja) 2008-07-03

Family

ID=39562470

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074651 Ceased WO2008078680A1 (ja) 2006-12-26 2007-12-21 光電気混載基板およびその製造方法

Country Status (6)

Country Link
US (1) US8175424B2 (ja)
EP (1) EP2096473B1 (ja)
JP (1) JP5512131B2 (ja)
KR (1) KR101084407B1 (ja)
CN (1) CN101568867B (ja)
WO (1) WO2008078680A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011095293A (ja) * 2009-10-27 2011-05-12 Sumitomo Bakelite Co Ltd 光導波路の製造方法、光導波路、光配線、光電気混載基板および電子機器。
JP2011095385A (ja) * 2009-10-28 2011-05-12 Kyocera Corp 光電気配線基板の製造方法、および光電気配線基板
JP2022003670A (ja) * 2020-06-23 2022-01-11 Ｎｉｓｓｈａ株式会社 光電変換素子とその製造方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5313849B2 (ja) * 2009-11-30 2013-10-09 新光電気工業株式会社 光導波路装置及びその製造方法
CN102262266A (zh) * 2010-05-27 2011-11-30 欣兴电子股份有限公司 光电基板的制作方法
JP6080155B2 (ja) * 2012-11-08 2017-02-15 日東電工株式会社 光電気混載基板
JP6202566B2 (ja) * 2013-10-29 2017-09-27 日東電工株式会社 光電気混載基板およびその製法
KR102052596B1 (ko) * 2014-06-25 2019-12-06 삼성전기주식회사 칩형 코일 부품 및 그 제조방법
JP6525240B2 (ja) * 2014-10-24 2019-06-05 日東電工株式会社 光電気混載基板およびその製法
JP6898066B2 (ja) * 2016-05-09 2021-07-07 日東電工株式会社 光回路基板シートおよびそれを備えた光電気混載基板シート
JP2022056616A (ja) * 2020-09-30 2022-04-11 太陽誘電株式会社 コイル部品
JP7551790B2 (ja) * 2021-01-29 2024-09-17 京セラ株式会社 光回路基板およびそれを用いた電子部品実装構造体

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63253305A (ja) 1987-04-09 1988-10-20 Ricoh Co Ltd 光合分波器の作成方法
JPH06118256A (ja) * 1992-10-09 1994-04-28 Furukawa Electric Co Ltd:The 石英系光導波路部品およびその製造方法
JPH08286064A (ja) 1995-04-19 1996-11-01 Nippon Telegr & Teleph Corp <Ntt> 高分子光導波路の作製方法
JP2004535070A (ja) 2001-07-06 2004-11-18 ヴァイアシステムズ グループ インコーポレイテッド インターボード通信用ｐｃｂに光学層を一体化するためのシステムおよび方法
JP2004341454A (ja) 2002-05-28 2004-12-02 Matsushita Electric Works Ltd 光電気混載基板の製造方法
US20050094922A1 (en) 2003-10-29 2005-05-05 Sang-Won Ha Printed circuit board including waveguide and method of producing the same
JP2006189483A (ja) 2004-12-28 2006-07-20 Sumitomo Bakelite Co Ltd 光導波路形成基板の製造方法および光導波路形成基板
JP2007093747A (ja) * 2005-09-27 2007-04-12 Mitsumi Electric Co Ltd 光導波路フィルム及び光導波路フィルムの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002107560A (ja) * 2000-09-29 2002-04-10 Dainippon Printing Co Ltd 実装用基板
JP3846284B2 (ja) * 2001-11-26 2006-11-15 株式会社トッパンＮｅｃサーキットソリューションズ 光導波路の製造方法
US6956997B2 (en) * 2002-11-25 2005-10-18 Emcore Corporation Methods for fabricating an aligned optoelectronic waveguide circuit
AT413891B (de) * 2003-12-29 2006-07-15 Austria Tech & System Tech Leiterplattenelement mit wenigstens einem licht-wellenleiter sowie verfahren zur herstellung eines solchen leiterplattenelements
JP2005258311A (ja) * 2004-03-15 2005-09-22 Showa Electric Wire & Cable Co Ltd 有機材料系光導波路型配線板の製造方法
JP2006091241A (ja) * 2004-09-22 2006-04-06 Hitachi Cable Ltd 光電気複合配線部品及びこれを用いた電子機器
JP4760126B2 (ja) * 2005-05-20 2011-08-31 住友ベークライト株式会社 光導波路構造体
TWI300141B (en) * 2005-06-30 2008-08-21 Mitsui Chemicals Inc Optical waveguide film and optoelectrical hybrid film
KR20090127614A (ko) * 2008-06-09 2009-12-14 삼성전기주식회사 광도파로, 이를 구비한 광 인쇄회로기판 및 그들의 제조방법

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63253305A (ja) 1987-04-09 1988-10-20 Ricoh Co Ltd 光合分波器の作成方法
JPH06118256A (ja) * 1992-10-09 1994-04-28 Furukawa Electric Co Ltd:The 石英系光導波路部品およびその製造方法
JPH08286064A (ja) 1995-04-19 1996-11-01 Nippon Telegr & Teleph Corp <Ntt> 高分子光導波路の作製方法
JP2004535070A (ja) 2001-07-06 2004-11-18 ヴァイアシステムズ グループ インコーポレイテッド インターボード通信用ｐｃｂに光学層を一体化するためのシステムおよび方法
US20060165345A1 (en) 2001-07-06 2006-07-27 Tourne Joseph A System and method for integrating optical layers in a PCB for inter-board communications
JP2004341454A (ja) 2002-05-28 2004-12-02 Matsushita Electric Works Ltd 光電気混載基板の製造方法
US20050094922A1 (en) 2003-10-29 2005-05-05 Sang-Won Ha Printed circuit board including waveguide and method of producing the same
JP2005134862A (ja) * 2003-10-29 2005-05-26 Samsung Electro Mech Co Ltd 光導波路が形成されたプリント回路基板およびその製造方法
JP2006189483A (ja) 2004-12-28 2006-07-20 Sumitomo Bakelite Co Ltd 光導波路形成基板の製造方法および光導波路形成基板
JP2007093747A (ja) * 2005-09-27 2007-04-12 Mitsumi Electric Co Ltd 光導波路フィルム及び光導波路フィルムの製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2096473A4

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011095293A (ja) * 2009-10-27 2011-05-12 Sumitomo Bakelite Co Ltd 光導波路の製造方法、光導波路、光配線、光電気混載基板および電子機器。
JP2011095385A (ja) * 2009-10-28 2011-05-12 Kyocera Corp 光電気配線基板の製造方法、および光電気配線基板
JP2022003670A (ja) * 2020-06-23 2022-01-11 Ｎｉｓｓｈａ株式会社 光電変換素子とその製造方法
JP7511395B2 (ja) 2020-06-23 2024-07-05 Ｎｉｓｓｈａ株式会社 光電変換素子とその製造方法

Also Published As

Publication number Publication date
EP2096473A1 (en) 2009-09-02
CN101568867B (zh) 2011-04-20
EP2096473A4 (en) 2010-07-21
EP2096473B1 (en) 2012-08-08
KR20090049618A (ko) 2009-05-18
KR101084407B1 (ko) 2011-11-18
US20100065309A1 (en) 2010-03-18
CN101568867A (zh) 2009-10-28
US8175424B2 (en) 2012-05-08
JP5512131B2 (ja) 2014-06-04
JPWO2008078680A1 (ja) 2010-04-22

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