WO2008090950A1 - 封止用フィルム、及びそれを用いた半導体装置 - Google Patents

封止用フィルム、及びそれを用いた半導体装置 Download PDF

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Publication number
WO2008090950A1
WO2008090950A1 PCT/JP2008/050978 JP2008050978W WO2008090950A1 WO 2008090950 A1 WO2008090950 A1 WO 2008090950A1 JP 2008050978 W JP2008050978 W JP 2008050978W WO 2008090950 A1 WO2008090950 A1 WO 2008090950A1
Authority
WO
WIPO (PCT)
Prior art keywords
sealing film
component
disclosed
film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050978
Other languages
English (en)
French (fr)
Inventor
Hiroyuki Kawakami
Katsuyasu Niijima
Naoki Tomori
Daichi Takemori
Takuya Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007016891A external-priority patent/JP2008060523A/ja
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to US12/299,714 priority Critical patent/US8771828B2/en
Priority to EP20080703806 priority patent/EP2110851A4/en
Publication of WO2008090950A1 publication Critical patent/WO2008090950A1/ja
Anticipated expiration legal-status Critical
Priority to US13/619,314 priority patent/US8715454B2/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/62—Alcohols or phenols
    • C08G59/621—Phenols
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/38—Layered products comprising a layer of synthetic resin comprising epoxy resins
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
    • C08K3/013—Fillers, pigments or reinforcing additives
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • H10W74/473—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins containing a filler
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/54—Inorganic substances
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/66—Substances characterised by their function in the composition
    • C08L2666/72—Fillers; Inorganic pigments; Reinforcing additives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Laminated Bodies (AREA)

Abstract

　下記（Ａ）、（Ｂ）及び（Ｃ）を含有し、８０°Cでのフロー量が１５０～１８００μｍである樹脂層を有する封止フィルムとして、充填性及び密着性に優れる封止フィルム、その製造方法及びそれを用いた半導体装置を提供する。 （Ａ）架橋性官能基を含み、重量平均分子量が１０万以上でかつＴｇが－５０～５０°Cである高分子量成分（ａ１）と、エポキシ樹脂を主成分とする熱硬化性成分（ａ２）と、を含む（Ａ）樹脂成分、 （Ｂ）平均粒径が１～３０μｍのフィラー、 （Ｃ）着色剤。 　または、上記（Ａ）、上記（Ｂ）及び（Ｃ）を含有し、Ｂステージ状態のフィルムの熱硬化粘弾性測定における５０～１００°Cの粘度が１００００～１０００００Ｐａ．ｓである樹脂層を有する封止用フィルムとして、密着性、形状維持性に優れる封止用フィルム、及びそれを用いた半導体装置を提供する。
PCT/JP2008/050978 2007-01-26 2008-01-24 封止用フィルム、及びそれを用いた半導体装置 Ceased WO2008090950A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/299,714 US8771828B2 (en) 2007-01-26 2008-01-24 Sealing film and a semiconductor device using the same
EP20080703806 EP2110851A4 (en) 2007-01-26 2008-01-24 SEALING FILM AND SEMICONDUCTOR ELEMENT FOR THIS
US13/619,314 US8715454B2 (en) 2007-01-26 2012-09-14 Sealing film and a semiconductor device using the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-016891 2007-01-26
JP2007016891A JP2008060523A (ja) 2006-08-01 2007-01-26 封止フィルム及びそれを用いた半導体装置
JP2007-109316 2007-04-18
JP2007109316 2007-04-18

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/299,714 A-371-Of-International US8771828B2 (en) 2007-01-26 2008-01-24 Sealing film and a semiconductor device using the same
US13/619,314 Division US8715454B2 (en) 2007-01-26 2012-09-14 Sealing film and a semiconductor device using the same

Publications (1)

Publication Number Publication Date
WO2008090950A1 true WO2008090950A1 (ja) 2008-07-31

Family

ID=39644524

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050978 Ceased WO2008090950A1 (ja) 2007-01-26 2008-01-24 封止用フィルム、及びそれを用いた半導体装置

Country Status (5)

Country Link
US (2) US8771828B2 (ja)
EP (1) EP2110851A4 (ja)
KR (1) KR20090027612A (ja)
TW (1) TW200837137A (ja)
WO (1) WO2008090950A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022022562A (ja) * 2020-06-26 2022-02-07 太陽インキ製造株式会社 硬化性樹脂組成物、ドライフィルム、硬化物、電子部品

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102227308B (zh) * 2008-11-26 2016-01-06 3M创新有限公司 复合结构的表面膜
JP5768023B2 (ja) * 2012-08-29 2015-08-26 日東電工株式会社 電子部品封止用熱硬化性樹脂シート、樹脂封止型半導体装置、及び樹脂封止型半導体装置の製造方法
JP2015103572A (ja) * 2013-11-21 2015-06-04 日東電工株式会社 両面セパレータ付き封止用シート、及び、半導体装置の製造方法
CN104091790B (zh) * 2014-07-25 2017-11-14 华进半导体封装先导技术研发中心有限公司 一种半导体封装基板结构及其制作方法
KR102394174B1 (ko) 2015-06-09 2022-05-04 주식회사 케이씨씨 반도체 소자용 봉지 필름
JP6904112B2 (ja) * 2017-06-30 2021-07-14 株式会社オートネットワーク技術研究所 車両用シール部材および車両用電気中継部品
USD962882S1 (en) * 2019-11-14 2022-09-06 Showa Denko Materials Co., Ltd. Temporary protective film for manufacturing semiconductor devices
KR102843445B1 (ko) * 2020-03-26 2025-08-06 가부시끼가이샤 레조낙 반도체 봉지용 마킹 필름, 반도체 봉지용 이형 필름, 반도체 패키지 및 반도체 패키지의 제조 방법
USD962883S1 (en) * 2020-11-02 2022-09-06 Showa Denko Materials Co., Ltd. Temporary protective film for manufacturing semiconductor devices

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190697A (ja) 1992-01-10 1993-07-30 Nitto Denko Corp 半導体部品の製造方法
JPH05283456A (ja) 1992-03-31 1993-10-29 Toshiba Corp 封止用シート、樹脂封止装置および樹脂封止型半導体装置の製造方法
JPH0873621A (ja) 1994-09-07 1996-03-19 Toshiba Corp 樹脂シート
JP2004043761A (ja) * 2001-08-27 2004-02-12 Hitachi Chem Co Ltd 接着シート並びに半導体装置及びその製造方法
JP2005060584A (ja) 2003-08-18 2005-03-10 Hitachi Chem Co Ltd 封止用フィルム

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JPS62270617A (ja) 1986-05-20 1987-11-25 Mitsui Toatsu Chem Inc 半導体封止用樹脂組成物
DE69533393T2 (de) 1995-01-05 2005-09-01 Sumitomo Bakelite Co. Ltd. Epoxyharzzusammensetzung
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EP1586615B1 (en) * 1999-06-18 2007-08-15 Hitachi Chemical Company, Ltd. Adhesive, adhesive member, interconnecting substrate for semiconductor mounting having adhesive member, and semiconductor device containing the same
JP3632558B2 (ja) * 1999-09-17 2005-03-23 日立化成工業株式会社 封止用エポキシ樹脂組成物及び電子部品装置
KR100815314B1 (ko) 2000-03-31 2008-03-19 히다치 가세고교 가부시끼가이샤 접착제 조성물, 그의 제조 방법, 이것을 사용한 접착필름, 반도체 탑재용 기판 및 반도체 장치
JP3876965B2 (ja) * 2000-11-17 2007-02-07 信越化学工業株式会社 液状エポキシ樹脂組成物及び半導体装置
JP4075801B2 (ja) 2001-08-27 2008-04-16 日立化成工業株式会社 接着シートならびに半導体装置およびその製造法
JP4816871B2 (ja) 2004-04-20 2011-11-16 日立化成工業株式会社 接着シート、半導体装置、及び半導体装置の製造方法
JP4682796B2 (ja) * 2005-04-19 2011-05-11 日立化成工業株式会社 封止用シート

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190697A (ja) 1992-01-10 1993-07-30 Nitto Denko Corp 半導体部品の製造方法
JPH05283456A (ja) 1992-03-31 1993-10-29 Toshiba Corp 封止用シート、樹脂封止装置および樹脂封止型半導体装置の製造方法
JPH0873621A (ja) 1994-09-07 1996-03-19 Toshiba Corp 樹脂シート
JP2004043761A (ja) * 2001-08-27 2004-02-12 Hitachi Chem Co Ltd 接着シート並びに半導体装置及びその製造方法
JP2005060584A (ja) 2003-08-18 2005-03-10 Hitachi Chem Co Ltd 封止用フィルム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2110851A4

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022022562A (ja) * 2020-06-26 2022-02-07 太陽インキ製造株式会社 硬化性樹脂組成物、ドライフィルム、硬化物、電子部品
JP7511399B2 (ja) 2020-06-26 2024-07-05 太陽ホールディングス株式会社 硬化性樹脂組成物、ドライフィルム、硬化物、電子部品

Also Published As

Publication number Publication date
KR20090027612A (ko) 2009-03-17
US8771828B2 (en) 2014-07-08
US8715454B2 (en) 2014-05-06
TW200837137A (en) 2008-09-16
EP2110851A1 (en) 2009-10-21
US20130093105A1 (en) 2013-04-18
EP2110851A4 (en) 2013-09-04
US20090189300A1 (en) 2009-07-30

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