WO2008129929A1 - ガス分析計 - Google Patents

ガス分析計 Download PDF

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Publication number
WO2008129929A1
WO2008129929A1 PCT/JP2008/056591 JP2008056591W WO2008129929A1 WO 2008129929 A1 WO2008129929 A1 WO 2008129929A1 JP 2008056591 W JP2008056591 W JP 2008056591W WO 2008129929 A1 WO2008129929 A1 WO 2008129929A1
Authority
WO
WIPO (PCT)
Prior art keywords
ion detection
ionization
detection part
gas analyzer
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/056591
Other languages
English (en)
French (fr)
Inventor
Junji Aoki
Hirokazu Kitaura
Boumsellek Said
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Priority to JP2009510815A priority Critical patent/JP5087079B2/ja
Priority to US12/595,821 priority patent/US8296090B2/en
Priority to CN2008800068810A priority patent/CN101627302B/zh
Priority to EP08739702A priority patent/EP2141494A4/en
Publication of WO2008129929A1 publication Critical patent/WO2008129929A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0009—Calibration of the apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/10—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas of particle spectrometer type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

　試料ガスをイオン化するイオン化部２１１と、前記イオン化部２１１からの距離が互いに異なるように、前記イオン化部２１１を挟んで設けられ、前記イオン化部２１１からのイオンを検出する第１イオン検出部２１２及び第２イオン検出部２１３と、前記イオン化部２１１及び前記第１イオン検出部２１２の間に設けられ、前記イオン化部２１１からのイオンを選択的に通過させるフィルタ部２１４と、前記第１イオン検出部２１２により得られる試料ガスの第１の全圧ＴＰ１、及び前記第２イオン検出部２１３により得られる試料ガスの第２の全圧ＴＰ２を用いて、前記第１イオン検出部２１２により得られる前記フィルタ極部２１４により選択された特定成分の分圧ＰＰ１を補正する演算装置３と、を備え、四重極質量分析法等を用いたガス分析計において、分解能を維持しながら、測定値が雰囲気圧力の変化に追従しなくなった領域においても補正可能にする。
PCT/JP2008/056591 2007-04-13 2008-04-02 ガス分析計 Ceased WO2008129929A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009510815A JP5087079B2 (ja) 2007-04-13 2008-04-02 ガス分析計
US12/595,821 US8296090B2 (en) 2007-04-13 2008-04-02 Gas analyzer
CN2008800068810A CN101627302B (zh) 2007-04-13 2008-04-02 气体分析器
EP08739702A EP2141494A4 (en) 2007-04-13 2008-04-02 GAS ANALYZER

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-105648 2007-04-13
JP2007105648 2007-04-13

Publications (1)

Publication Number Publication Date
WO2008129929A1 true WO2008129929A1 (ja) 2008-10-30

Family

ID=39875457

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056591 Ceased WO2008129929A1 (ja) 2007-04-13 2008-04-02 ガス分析計

Country Status (6)

Country Link
US (1) US8296090B2 (ja)
EP (1) EP2141494A4 (ja)
JP (1) JP5087079B2 (ja)
CN (1) CN101627302B (ja)
TW (1) TWI442041B (ja)
WO (1) WO2008129929A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011080959A1 (ja) * 2009-12-28 2011-07-07 キヤノンアネルバ株式会社 質量分析装置、質量分析装置の制御装置、および質量分析方法
WO2014103100A1 (ja) * 2012-12-27 2014-07-03 キヤノンアネルバ株式会社 質量分析装置
WO2015029449A1 (ja) 2013-08-30 2015-03-05 アトナープ株式会社 分析装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2413346B1 (en) * 2009-03-27 2022-05-04 Osaka University Ion source, and mass spectroscope provided with same
KR101296275B1 (ko) * 2009-09-15 2013-08-14 캐논 아네르바 가부시키가이샤 평균 자유 경로를 측정하는 장치, 진공계 및 평균 자유 경로를 측정하는 방법
CN101975818B (zh) * 2010-04-29 2012-12-26 中国计量科学研究院 特征物质的检测系统及方法
JP5422485B2 (ja) * 2010-05-27 2014-02-19 株式会社堀場エステック ガス分析計
CN103048377B (zh) * 2011-10-17 2015-06-10 中国科学院化学研究所 极紫外(euv)光刻胶超高真空热处理检测装置与方法
US9534938B1 (en) 2015-01-30 2017-01-03 Squadle, Inc. System and method for automatic measurement and recording
JP6730140B2 (ja) * 2015-11-20 2020-07-29 株式会社日立ハイテクサイエンス 発生ガス分析方法及び発生ガス分析装置
US10541122B2 (en) 2017-06-13 2020-01-21 Mks Instruments, Inc. Robust ion source

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128139A (ja) * 1984-11-27 1986-06-16 Anelva Corp 圧力計
JPH1131473A (ja) 1997-03-21 1999-02-02 Leybold Inficon Inc 質量分光計において分圧の測定を訂正する方法
JP2000097910A (ja) * 1998-09-18 2000-04-07 Ulvac Japan Ltd ガス分析方法
JP2001165907A (ja) * 1999-12-13 2001-06-22 Anelva Corp ガス分析装置
JP2001351568A (ja) * 2000-06-06 2001-12-21 Anelva Corp イオン付着質量分析の方法および装置
JP2006266854A (ja) * 2005-03-23 2006-10-05 Shinku Jikkenshitsu:Kk 全圧測定電極付き四重極質量分析計及びこれを用いる真空装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5834770A (en) * 1997-03-21 1998-11-10 Leybold Inficon, Inc. Ion collecting electrode for total pressure collector
US6870170B1 (en) * 2004-03-04 2005-03-22 Applied Materials, Inc. Ion implant dose control

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128139A (ja) * 1984-11-27 1986-06-16 Anelva Corp 圧力計
JPH1131473A (ja) 1997-03-21 1999-02-02 Leybold Inficon Inc 質量分光計において分圧の測定を訂正する方法
JP2000097910A (ja) * 1998-09-18 2000-04-07 Ulvac Japan Ltd ガス分析方法
JP2001165907A (ja) * 1999-12-13 2001-06-22 Anelva Corp ガス分析装置
JP2001351568A (ja) * 2000-06-06 2001-12-21 Anelva Corp イオン付着質量分析の方法および装置
JP2006266854A (ja) * 2005-03-23 2006-10-05 Shinku Jikkenshitsu:Kk 全圧測定電極付き四重極質量分析計及びこれを用いる真空装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
See also references of EP2141494A4 *
TORU IKEDA: "Horiba Technical Reports", vol. 28, March 2004, HORIBA, LTD., article "Feature article: Microminiaturized residual gas analyzer, PressureMaster RGA series", pages: 12 - 15

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011080959A1 (ja) * 2009-12-28 2011-07-07 キヤノンアネルバ株式会社 質量分析装置、質量分析装置の制御装置、および質量分析方法
JPWO2011080959A1 (ja) * 2009-12-28 2013-05-09 キヤノンアネルバ株式会社 質量分析装置、質量分析装置の制御装置、および質量分析方法
WO2014103100A1 (ja) * 2012-12-27 2014-07-03 キヤノンアネルバ株式会社 質量分析装置
JP5922256B2 (ja) * 2012-12-27 2016-05-24 キヤノンアネルバ株式会社 質量分析装置
US9373491B2 (en) 2012-12-27 2016-06-21 Canon Anelva Corporation Mass spectrometer
WO2015029449A1 (ja) 2013-08-30 2015-03-05 アトナープ株式会社 分析装置
US9666422B2 (en) 2013-08-30 2017-05-30 Atonarp Inc. Analyzer
US10366871B2 (en) 2013-08-30 2019-07-30 Atonarp Inc. Analyzer

Also Published As

Publication number Publication date
US8296090B2 (en) 2012-10-23
US20100076712A1 (en) 2010-03-25
CN101627302B (zh) 2013-10-09
TWI442041B (zh) 2014-06-21
EP2141494A1 (en) 2010-01-06
JP5087079B2 (ja) 2012-11-28
EP2141494A4 (en) 2012-10-24
JPWO2008129929A1 (ja) 2010-07-22
TW200916755A (en) 2009-04-16
CN101627302A (zh) 2010-01-13

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