WO2008142980A1 - ２方向性形状記憶合金薄膜アクチュエータとそれに使用される形状記憶合金薄膜の製造方法 - Google Patents

２方向性形状記憶合金薄膜アクチュエータとそれに使用される形状記憶合金薄膜の製造方法 Download PDF

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Publication number
WO2008142980A1
WO2008142980A1 PCT/JP2008/058392 JP2008058392W WO2008142980A1 WO 2008142980 A1 WO2008142980 A1 WO 2008142980A1 JP 2008058392 W JP2008058392 W JP 2008058392W WO 2008142980 A1 WO2008142980 A1 WO 2008142980A1
Authority
WO
WIPO (PCT)
Prior art keywords
thin film
memory alloy
alloy thin
actuator
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/058392
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English (en)
French (fr)
Inventor
Akira Ishida
Morio Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Materials Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Materials Science filed Critical National Institute for Materials Science
Priority to EP08752297.5A priority Critical patent/EP2149704A4/en
Priority to JP2009515133A priority patent/JPWO2008142980A1/ja
Priority to US12/451,390 priority patent/US20100219931A1/en
Publication of WO2008142980A1 publication Critical patent/WO2008142980A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C14/00—Alloys based on titanium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/061—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element
    • F03G7/0613—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element using layers of different materials joined together, e.g. bimetals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/061—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element
    • F03G7/0614—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element using shape memory elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/061—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element
    • F03G7/0616—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element characterised by the material or the manufacturing process, e.g. the assembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/064—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by its use
    • F03G7/0645—Clamping, fixing or crimping parts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

　２方向性形状記憶合金薄膜アクチュエータは、結晶性の形状記憶合金薄膜からなり、成膜時の残留応力を有したまま実質的に単層化されて形成され、室温以上の温度で作動し、特段のバイアス力付与が不要である。
PCT/JP2008/058392 2007-05-11 2008-05-01 ２方向性形状記憶合金薄膜アクチュエータとそれに使用される形状記憶合金薄膜の製造方法 Ceased WO2008142980A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08752297.5A EP2149704A4 (en) 2007-05-11 2008-05-01 BIDIRECTIONAL THIN-LAYER ACTIVATING SHAPER AND METHOD FOR PRODUCING THE THIN-FILM USED FOR THE ACTUATOR FROM A FORMED MEMBRANE ALLOY
JP2009515133A JPWO2008142980A1 (ja) 2007-05-11 2008-05-01 ２方向性形状記憶合金薄膜アクチュエータとそれに使用される形状記憶合金薄膜の製造方法
US12/451,390 US20100219931A1 (en) 2007-05-11 2008-05-01 Bidirectional shape memory alloy thin film actuator and method for manufacturing shape memory alloy thin film used therefor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-126330 2007-05-11
JP2007126330 2007-05-11
JP2007169236 2007-06-27
JP2007-169236 2007-06-27

Publications (1)

Publication Number Publication Date
WO2008142980A1 true WO2008142980A1 (ja) 2008-11-27

Family

ID=40031695

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058392 Ceased WO2008142980A1 (ja) 2007-05-11 2008-05-01 ２方向性形状記憶合金薄膜アクチュエータとそれに使用される形状記憶合金薄膜の製造方法

Country Status (4)

Country Link
US (1) US20100219931A1 (ja)
EP (1) EP2149704A4 (ja)
JP (2) JPWO2008142980A1 (ja)
WO (1) WO2008142980A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012096348A1 (ja) * 2011-01-13 2012-07-19 独立行政法人物質・材料研究機構 薄膜アクチュエータの製造方法
RU2458002C2 (ru) * 2010-08-05 2012-08-10 Российская Федерация, От Имени Которой Выступает Министерство Образования И Науки Российской Федерации Микромеханическое устройство, способ его изготовления и система манипулирования микро- и нанообъектами

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160237537A1 (en) * 2012-04-25 2016-08-18 Crucible Intellectual Property, Llc Articles containing shape retaining wire therein
KR20150046644A (ko) * 2013-10-22 2015-04-30 삼성전자주식회사 나노 임프린트용 레진 디스펜서
CN104164578B (zh) * 2014-08-30 2016-08-17 海安南京大学高新技术研究院 一种低模量、高抗腐蚀三元Ni-Ti-Cu合金及其制备方法
RU2678699C1 (ru) * 2018-04-06 2019-01-31 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский ядерный университет "МИФИ" Устройство для манипулирования микро- и нанообъектами с функцией хранения
RU2713527C2 (ru) * 2018-04-06 2020-02-05 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский ядерный университет "МИФИ" Устройство для манипулирования микро- и нанообъектами

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JPH06340963A (ja) * 1993-06-02 1994-12-13 Mitsubishi Cable Ind Ltd 形状記憶素材
JPH0988804A (ja) * 1995-09-25 1997-03-31 Olympus Optical Co Ltd 二方向性形状記憶アクチュエータ、その製法及び３次元アクチュエータ
JPH09126116A (ja) * 1995-10-30 1997-05-13 Terumo Corp アクチュエータおよび蠕動アクチュエータ
JPH09170071A (ja) * 1995-12-19 1997-06-30 Toyama Pref Gov 形状記憶合金素子とその製造方法
JPH10173306A (ja) * 1996-12-06 1998-06-26 Olympus Optical Co Ltd 形状記憶合金薄膜アクチュエータの製造方法
JPH10250077A (ja) * 1997-03-10 1998-09-22 Samsung Electro Mech Co Ltd プリンタヘッドの記録液噴射装置及びその方法
JP2000054122A (ja) 1998-08-03 2000-02-22 Agency Of Ind Science & Technol 基板加熱によるＴｉＮｉ形状記憶合金薄膜の製造方法
JP2001234846A (ja) * 2000-02-24 2001-08-31 National Institute For Materials Science 全方位屈曲型の形状記憶合金薄膜アクチュエータ単位体とその製造方法および光ファイバー
JP2002294371A (ja) * 2001-03-28 2002-10-09 Japan Science & Technology Corp Ｔｉ−Ｎｉ−Ｃｕ系形状記憶合金
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JP2005172939A (ja) 2003-12-08 2005-06-30 Ube Nitto Kasei Co Ltd ドロップ光ファイバケーブル用ｆｒｐ製抗張力体
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JPH06340963A (ja) * 1993-06-02 1994-12-13 Mitsubishi Cable Ind Ltd 形状記憶素材
JPH0988804A (ja) * 1995-09-25 1997-03-31 Olympus Optical Co Ltd 二方向性形状記憶アクチュエータ、その製法及び３次元アクチュエータ
JPH09126116A (ja) * 1995-10-30 1997-05-13 Terumo Corp アクチュエータおよび蠕動アクチュエータ
JPH09170071A (ja) * 1995-12-19 1997-06-30 Toyama Pref Gov 形状記憶合金素子とその製造方法
JPH10173306A (ja) * 1996-12-06 1998-06-26 Olympus Optical Co Ltd 形状記憶合金薄膜アクチュエータの製造方法
JPH10250077A (ja) * 1997-03-10 1998-09-22 Samsung Electro Mech Co Ltd プリンタヘッドの記録液噴射装置及びその方法
JP2000054122A (ja) 1998-08-03 2000-02-22 Agency Of Ind Science & Technol 基板加熱によるＴｉＮｉ形状記憶合金薄膜の製造方法
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See also references of EP2149704A4

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2458002C2 (ru) * 2010-08-05 2012-08-10 Российская Федерация, От Имени Которой Выступает Министерство Образования И Науки Российской Федерации Микромеханическое устройство, способ его изготовления и система манипулирования микро- и нанообъектами
WO2012096348A1 (ja) * 2011-01-13 2012-07-19 独立行政法人物質・材料研究機構 薄膜アクチュエータの製造方法
JP2012145055A (ja) * 2011-01-13 2012-08-02 National Institute For Materials Science 薄膜アクチュエータの製造方法

Also Published As

Publication number Publication date
JP2012184777A (ja) 2012-09-27
EP2149704A1 (en) 2010-02-03
EP2149704A4 (en) 2016-06-08
JPWO2008142980A1 (ja) 2010-08-05
US20100219931A1 (en) 2010-09-02
JP5757531B2 (ja) 2015-07-29

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