WO2008148917A2 - Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique - Google Patents

Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique Download PDF

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Publication number
WO2008148917A2
WO2008148917A2 PCT/ES2008/000413 ES2008000413W WO2008148917A2 WO 2008148917 A2 WO2008148917 A2 WO 2008148917A2 ES 2008000413 W ES2008000413 W ES 2008000413W WO 2008148917 A2 WO2008148917 A2 WO 2008148917A2
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
fluid
focusing
focused
photolithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/ES2008/000413
Other languages
English (en)
Spanish (es)
Other versions
WO2008148917A3 (fr
Inventor
Antonio Luque Estepa
José Manuel QUERO REBOUL
Francisco Antonio PERDIGONES SÁNCHEZ
Alfonso Miguel GAÑÁN CALVO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universidad de Sevilla
Original Assignee
Universidad de Sevilla
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidad de Sevilla filed Critical Universidad de Sevilla
Publication of WO2008148917A2 publication Critical patent/WO2008148917A2/fr
Publication of WO2008148917A3 publication Critical patent/WO2008148917A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0433—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of gas surrounded by an external conduit of liquid upstream the mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/301—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
    • B01F33/3011—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions using a sheathing stream of a fluid surrounding a central stream of a different fluid, e.g. for reducing the cross-section of the central stream or to produce droplets from the central stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0884—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being aligned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502776—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for focusing or laminating flows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Definitions

  • SUBSTITUTE SHEET (RULE 26) The drops generated can vary between hundreds of microns and tens of nanometers.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Cette invention concerne un procédé permettant de fabriquer un dispositif conçu pour disperser ou 'focaliser' un fluide de manière précise et régulée à l'échelle du micromètre, au moyen d'une technique de focalisation de flux et des dispositifs produits selon un tel procédé. Le procédé décrit dans cette invention permet la fabrication simple d'un dispositif pouvant produire des flux coaxiaux de fluides (encapsulation en trois dimensions). Le procédé de fabrication, qui est fondé sur des techniques classiques utilisées dans les technologies de micro-systèmes (systèmes microélectromécaniques ou MEMS), permet la fabrication de masse bon marché de dispositifs de dispersions présentant une précision de l'ordre du micromètre et une taille extrêmement réduite. Le dispositif ainsi fabriqué peut être aisément intégré dans des matrices bidimensionnelles et des flux coaxiaux peuvent être créés perpendiculairement à la matrice de dispositifs.
PCT/ES2008/000413 2007-06-06 2008-06-05 Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique Ceased WO2008148917A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ES200701626A ES2310967B2 (es) 2007-06-06 2007-06-06 Metodo de fabricacion para dispositivo enfocador de fluido a escala m icrometrica.
ESP200701626 2007-06-06

Publications (2)

Publication Number Publication Date
WO2008148917A2 true WO2008148917A2 (fr) 2008-12-11
WO2008148917A3 WO2008148917A3 (fr) 2009-01-29

Family

ID=40094229

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES2008/000413 Ceased WO2008148917A2 (fr) 2007-06-06 2008-06-05 Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique

Country Status (2)

Country Link
ES (1) ES2310967B2 (fr)
WO (1) WO2008148917A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9091434B2 (en) 2008-04-18 2015-07-28 The Board Of Trustees Of The University Of Alabama Meso-scaled combustion system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104865002B (zh) * 2015-05-05 2017-04-12 苏州曼普拉斯传感科技有限公司 一种mems压力传感器装置及封装方法
US10369579B1 (en) 2018-09-04 2019-08-06 Zyxogen, Llc Multi-orifice nozzle for droplet atomization

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2199048B1 (es) * 2002-02-04 2005-06-01 Universidad De Sevilla Dispositivo multidispositivo y procedimiento para la produccion de chorros capilares y particulas micro y nanometricos.
TW577855B (en) * 2003-05-21 2004-03-01 Univ Nat Cheng Kung Chip-type micro-fluid particle 3-D focusing and detection device
US7115230B2 (en) * 2003-06-26 2006-10-03 Intel Corporation Hydrodynamic focusing devices
US20070054119A1 (en) * 2005-03-04 2007-03-08 Piotr Garstecki Systems and methods of forming particles
ES2273572B1 (es) * 2005-05-04 2008-04-01 Universidad De Sevilla Procedimiento de preparacion de particulas de tamaño micro y nanometrico con productos labiles y particulas obtenidas.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9091434B2 (en) 2008-04-18 2015-07-28 The Board Of Trustees Of The University Of Alabama Meso-scaled combustion system

Also Published As

Publication number Publication date
WO2008148917A3 (fr) 2009-01-29
ES2310967B2 (es) 2009-07-21
ES2310967A1 (es) 2009-01-16

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