WO2009005222A1 - Système d'inspection optique pour dispositifs à semiconducteurs - Google Patents

Système d'inspection optique pour dispositifs à semiconducteurs Download PDF

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Publication number
WO2009005222A1
WO2009005222A1 PCT/KR2008/003100 KR2008003100W WO2009005222A1 WO 2009005222 A1 WO2009005222 A1 WO 2009005222A1 KR 2008003100 W KR2008003100 W KR 2008003100W WO 2009005222 A1 WO2009005222 A1 WO 2009005222A1
Authority
WO
WIPO (PCT)
Prior art keywords
magazine
tray
vision inspection
alignment
inspection system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2008/003100
Other languages
English (en)
Inventor
Ssang-Gun Lim
Sang-Yun Lee
Dong-Kyu Son
Sung-Min Jang
Ju-Hun An
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intekplus Co Ltd
Original Assignee
Intekplus Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intekplus Co Ltd filed Critical Intekplus Co Ltd
Publication of WO2009005222A1 publication Critical patent/WO2009005222A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
    • G01N35/04—Details of the conveyor system
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

Definitions

  • the present invention relates to a vision inspection system for semiconductor devices, and, more particularly, to a vision inspection system for semiconductor devices that is capable of easily achieving the alignment of a semiconductor tray on a magazine, on which the tray is loaded.
  • Korean Patent Registration No. 0663385 has problems in that a loading region where trays having semiconductor devices to be visually inspected received therein are stacked, a sorting region where the semiconductor devices are sorted into defective semiconductor devices and good-quality semiconductor devices according to results of the vision inspection, and a recycling region where empty trays are transferred to a buffer region occupy the front part or the rear part of a system body of the vision inspection system, i.e., work spaces, whereby the efficient use of the installation space is not expected.
  • a tray to be visually inspected and an unloading tray to receive semiconductor devices sorted as good-quality products according to the results of the vision inspection are simultaneously received in one loader, and semiconductor devices sorted as good-quality products are supplied to a tray stacked in the same loader or a tray stacked in the other loader.
  • This structure needs no unloaders, and therefore, the reduction in size of equipment is achieved.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a vision inspection system for semiconductor devices that is capable of easily achieving the alignment of a tray loaded on a magazine depending upon the size of the tray through the use of a tray alignment unit configured to be movable from side to side in a sliding fashion for aligning the tray in the side-to-side direction by a touch.
  • a vision inspection system for semiconductor devices including a pair of loaders installed at opposite sides of the front of a system body, respectively, each loader being constructed to allow a plurality of magazines, on each of which a tray having a plurality of semiconductor devices received therein is loaded, to be staked therein, the magazines being movable upward or downward, a pair of indexers disposed at the rear of the respective loaders for transferring trays to a sorting region and a vision inspection region, a vision inspection unit for photographing semiconductor devices, a transfer picker for picking up and transferring semiconductor devices to be visually inspected, and a sorting unit for sorting the visually inspected semiconductor devices, wherein each magazine includes a magazine body having rotary wheels mounted at opposite sides thereof for moving the magazine, the magazine body being constructed in a structure in which a tray is loaded on the magazine body, and a tray alignment unit disposed at one side of the magazine body, such that the tray alignment unit can be moved from
  • the tray alignment unit includes an alignment bar configured to come into tight contact with one side of the tray loaded on the magazine body, a latch for allowing the movement of the alignment bar in one direction while restricting the movement of the alignment bar in the opposite direction, and alignment bar guides for guiding the side-to-side movement of the alignment bar.
  • the tray alignment unit further includes a tension member disposed at the inside of the alignment bar for correcting errors in aligning the tray depending upon the size of the tray through the use of the alignment bar.
  • the tray alignment unit further includes a locking member connected to the alignment bar for restricting the movement of the alignment bar along the latch in one direction.
  • the side-to-side movement of the alignment bar is automatically controlled based on the operation of a motor.
  • each magazine is constructed to be movable on the corresponding indexer by the operation of a motor such that the magazine transfers a tray to the sorting region and the vision inspection region while the tray is loaded on the magazine.
  • Each indexer includes a pair of left- and right-side guides having guide parts for guiding the movement of the opposite rotary wheels of the magazine 4 while the rotary wheels of the magazine are placed on the respective guide parts, the guides having a predetermined height, and a magazine moving unit disposed between the guides, such that the magazine moving unit is coupled to the rear of the magazine, for moving the magazine in the frontward-and-backward direction.
  • the magazine moving unit includes a first magazine moving unit and a second magazine moving unit coupled to the opposite sides of the magazine, respectively, such that the first magazine moving unit and the second magazine moving unit are alternately operated depending upon the movement distance of the magazine, whereby the magazine moving unit is operated in a dual mode.
  • each of the first and second magazine moving units includes an auxiliary alignment unit for aligning the tray loaded on the magazine in the frontward- and-backward direction.
  • the auxiliary alignment unit includes an alignment bar configured to be rotated by the operation of a cylinder and an alignment bar moving member for moving the alignment bar in the frontward-and-backward direction according to the operation of the motor.
  • the one-side guide is provided at the guide part thereof with a groove, in which the one-side rotary wheels are engaged, to secure the straight movability of the magazine during the movement of the magazine in the frontward-and-backward direction.
  • the groove of the guide part of the one-side guide is formed in the shape of V, and the one-side rotary wheels of the magazine are inclined outward from the middle of the bottom planes of the wheels such that the one- side rotary wheels can be fitted in the V-shaped groove.
  • FIG. 1 is a front perspective view illustrating a vision inspection system for semiconductor devices according to the present invention
  • FIG. 2 is a rear perspective view of the vision inspection system for semiconductor devices according to the present invention.
  • FIG. 3 is a plan view of the vision inspection system for semiconductor devices according to the present invention.
  • FIG. 4 is a detailed perspective view illustrating a magazine of FIG. 1 ;
  • FIG. 5 is a plan view of FIG. 4;
  • FIG. 6 is a perspective view illustrating another embodiment of the magazine of FIG. l;
  • FIG. 7 is a plan view of FIG. 6
  • FIG. 8 is a front perspective view illustrating an indexer of FIG. 1 ;
  • FIG. 9 is a rear perspective view of the indexer of FIG. 1. Best Mode for Carrying Out the Invention
  • FIG. 1 is a front perspective view illustrating a vision inspection system for semiconductor devices according to the present invention
  • FIG. 2 is a rear perspective view of the vision inspection system for semiconductor devices according to the present invention
  • FIG. 3 is a plan view of the vision inspection system for semiconductor devices according to the present invention.
  • the vision inspection system for semiconductor devices includes a pair of loaders 1, a pair of indexers 2, a vision inspection unit 3, a transfer picker (not shown), and a sorting unit (not shown).
  • the loaders 1 are installed at opposite sides of the front of a system body, respectively.
  • each loader 1 are stacked a plurality of magazines 4,on each of which a tray having a plurality of semiconductor devices received therein is loaded, such that the magazines 4 can be moved upward or downward.
  • a technology for moving the magazines 4 upward or downward in the respective loaders 1 according to the operation of an elevator is well known in the art to which the present invention pertains, and therefore, a detailed description thereof will not be given.
  • the indexers 2 are disposed at the rear of the respective loaders for transferring trays to a sorting region and a vision inspection region.
  • the vision inspection unit 3 serves to photograph semiconductor devices
  • the transfer picker (not shown) serves to pick up and transfer semiconductor devices to be visually inspected
  • the sorting unit (not shown) serves to sort the visually inspected semiconductor devices.
  • the transfer picker (not shown) and the sorting unit (not shown) are installed at a frame above the vision inspection unit 3, which is obvious to those skilled in the art to which the present invention pertains. For this reason, the transfer picker and the sorting unit are omitted from the drawings.
  • FIG. 4 is a detailed perspective view illustrating one of the magazines 4 shown in
  • FIG. 1, and FIG. 5 is a plan view of FIG. 4.
  • each magazine 4 includes a tray alignment unit 42 for aligning opposite sides of a tray loaded on the magazine 4 depending upon the size of the tray.
  • the magazine 4 includes a magazine body 41 having rotary wheels 411 (411a and 41 Ib) mounted at opposite sides thereof for moving the magazine 4, the magazine body 41 being constructed in a structure in which a tray is loaded on the magazine body 41, the magazine body 41 having alignment points marked thereon, and a tray alignment unit 42 disposed at one side of the magazine body 41, such that the tray alignment unit 42 can be moved from side to side in a sliding fashion, for aligning a tray loaded on the magazine body 41 depending upon the size of the tray.
  • the tray alignment unit 42 includes an alignment bar 421 configured to come into tight contact with one side of the tray loaded on the magazine body 41, a latch 422 for allowing the movement of the alignment bar 421 in one direction while restricting the movement of the alignment bar 421 in the opposite direction, and alignment bar guides 423 for guiding the side-to-side movement of the alignment bar 421.
  • the tray alignment unit 42 may further include a tension member 424 disposed inside the alignment bar 421 for correcting errors in aligning the tray depending upon the size of the tray through the use of the alignment bar 421.
  • FIG. 6 is a perspective view illustrating another embodiment of the magazine of FIG.
  • FIG. 7 is a plan view of FIG. 6. A detailed description of the same components as those of FIG. 4 will not be given.
  • the magazine is characterized in that the tray alignment unit 42 further includes a locking member425 connected to the alignment bar 421 for restricting the movement of the alignment bar 421 along the latch 422 in one direction.
  • the alignment bar 421 After the alignment bar 421 is moved along the latch 422 in one direction to align the tray, the alignment bar 421 may be unintentionally further moved by a worker. For this reason, the locking member 425 is preferably provided to restrict the movement of the alignment bar 421.
  • the alignment bar is moved in the latch-based structure to align the tray depending upon the size of the tray.
  • the side-to-side movement of the alignment bar may be automatically controlled based on the operation of a motor.
  • the alignment bar is held by the motor, and therefore, no additional locking member is needed.
  • the magazine 4 is constructed to be movable on the corresponding indexer 2 by the operation of the motor such that the magazine 4 transfers the tray loaded thereon to the sorting region (not shown) and the vision inspection region (not shown). That is, not the magazine but the tray is moved on the corresponding indexer in the conventional art, whereas the magazine is moved on the corresponding indexer in the present invention.
  • each indexer 2 includes a pair of left- and right-side guides 21 (21a and 21b) and a magazine moving unit 22 (22a and 22b).
  • the guides 21 have guide parts 211 for guiding the movement of the opposite rotary wheels 411 (411a and 41 Ib) of the magazine 4 while the rotary wheels 411 (411a and 41 Ib) of the magazine 4 are placed on the respective guide parts 211.
  • the guides 21 have a predetermined height.
  • the magazine moving unit 22 (22a and 22b) is disposed between the left- and right- side guides 21 (21a and 21b).
  • the magazine moving unit 22 (22a and 22b) is coupled to the rear of the magazine 4 to move the magazine 4 in the frontward-and-backward direction.
  • the magazine moving unit 22 (22a and 22b) includes a first magazine moving unit
  • the first magazine moving unit 22a and the second magazine moving unit 22b are alternately operated depending upon the movement distance of the magazine 4. That is, the magazine moving unit 22 (22a and 22b) is operated in a dual mode.
  • Each of the first and second magazine moving units 22a and 22b may include an auxiliary alignment unit 221 for aligning the tray loaded on the magazine 4 in the frontward-and-backward direction.
  • the auxiliary alignment unit 221 includes an alignment bar 221a configured to be rotated by the operation of a cylinder and an alignment bar moving member 221b for moving the alignment bar 221a in the frontward-and-backward direction according to the operation of the motor.
  • the cylinder is driven to rotate the alignment bar 221a, which is parallel to the bottom plane, such that the alignment bar 221a is perpendicular to the bottom plane, and the alignment bar moving member 221b is driven to move the alignment bar 221a backward, whereby the tray is aligned in the frontward-and-backward direction.
  • the movement of the alignment bar moving member 221b may be accurately controlled by the operation of the motor, whereby it is possible to prevent the alignment bar 221a from excessively pushing the tray.
  • a groove 212 is formed at the guide part 211 of the one-side guide 21, and the one-side rotary wheels 41 Ia are engaged in the groove 212.
  • the groove 212 of the guide part 211 is formed in the shape of V.
  • the one-side rotary wheels 41 Ia of the magazine 4 are inclined outward from the middle of the bottom planes of the wheels 411a such that the one-side rotary wheels 411a can be fitted in the V-shaped groove 212. Consequently, the side-to-side movement of the wheels is prevented, during the movement of the magazine 4 in the frontward- and-backward direction, and therefore, the straight movability of the magazine 4 is secured during the movement of the magazine in the frontward-and-backward direction.
  • the other-side rotary wheels 41 Ib are preferably constructed in a structure in which the bottom planes of the wheels 41 Ib are flat such that the contact area between the wheels 41 Ib and the corresponding guide part 211 for safe movement.
  • the latch 422 is manipulated, depending upon the size of a tray to be received, to move the alignment bar 421. After the movement of the alignment bar 421 is completed, the alignment bar 421 is locked by the locking member 425.
  • the coupled state of the alignment bar which is achieved through the use of bolts, is released, the alignment position of the alignment bar is adjusted to be located at a predetermined alignment point, and then the bolt coupling process is performed, in the conventional art.
  • the above-mentioned processes are manually carried out, and therefore, the alignment time is long and the alignment procedure is complicated and troublesome.
  • the latch is simply touched such that the alignment position of the alignment bar is located at a predetermined alignment point, and then the alignment bar is locked by the locking member.
  • the alignment bar is automatically moved by the operation of the motor. Consequently, it is possible to easily and conveniently carry out the alignment procedure within a short time.
  • the tension member 424 is provided to correct alignment errors. Consequently, the present invention is advantageous in that the tray alignment is successfully achieved even when the alignment position of the alignment bar is exactly located at a desired alignment point according to the size of the tray.
  • the magazine 4 stacked in the loader 1 is moved to the sorting region by the operation of the first magazine moving unit 22a and to the vision inspection region by the operation of the second magazine moving unit 22b.
  • the frontward-and-backward alignment state of the tray may be released due to vibration generated during the movement of the magazine 4.
  • the frontward-and-backward alignment of the tray is carried out by the auxiliary alignment unit 221.
  • the cylinder is driven to rotate the alignment bar 221a, such that the alignment bar 221a is perpendicular to the bottom plane, and the alignment bar moving member 221b is driven to move the alignment bar 221a backward, whereby the tray is aligned in the frontward-and-backward direction.
  • the vision inspection system for semiconductor devices is constructed in a structure in which the tray alignment unit is configured to be moved from side to side in a sliding fashion for aligning the tray in the side-to-side direction, and the tray alignment unit includes the latch-type alignment bar configured to be moved from side to side by a touch. Consequently, the present invention has the effect of easily achieving the alignment of the tray loaded on the magazine depending upon the size of the tray, thereby simplifying alignment procedure and reducing alignment time, and therefore, increasing inspection speed.
  • the vision inspection system for semiconductor devices is constructed in a structure in which the guide part of one of the guides for guiding the movement of the magazine on the indexer has the groove formed in the left and right sectional shape of V, and the one-side rotary wheels of the magazine are inclined outward from the middle of the bottom planes of the wheels such that the one-side rotary wheels can be easily moved along the guide part having the V-shaped groove while the one- side rotary wheels are fitted in the V-shaped groove of the guide part. Consequently, the present invention has the effect of achieving the alignment of the magazine by means of the one-side guide part, thereby securing the straight movability of the magazine during the movement of the magazine in the frontward-and-backward direction.
  • the vision inspection system for semiconductor devices is constructed in a structure in which the magazine is configured to be moved on the indexer such that the magazine transfers the tray while the tray is loaded on the magazine, and the indexer is provided with the auxiliary alignment unit for performing the alignment of the tray in the frontward-and-backward direction. Consequently, the present invention has the effect of achieving the alignment of the tray in the frontward-and-backward direction, thereby improving the reliability of inspection.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

L'invention concerne un système d'inspection optique pour dispositifs à semiconducteurs, qui comprend deux chargeurs, respectivement; chaque chargeur étant conçu pour loger plusieurs magasins chargeant chacun un plateau pour recevoir en piquets plusieurs dispositifs à semiconducteurs, lesdits magasins pouvant être déplacés vers le haut ou vers le bas. Le système comprend également: une paire d'indexeurs disposés à l'arrière de chargeurs respectifs pour transférer des plateaux vers une zone de tri et une zone d'inspection optique; un module d'inspection optique; un dispositif de ramassage et de transfert pour ramasser et transférer des dispositifs à semiconducteurs devant être soumis à une inspection visuelle; et un module de tri pour trier les dispositifs à semiconducteurs ayant subi une inspection visuelle. Chaque magasin comprend un corps de magasin et un module d'alignement de plateau disposé sur un côté du corps de magasin pour aligner le plateau chargé dans le corps de magasin en fonction de la taille du plateau.
PCT/KR2008/003100 2007-06-29 2008-06-03 Système d'inspection optique pour dispositifs à semiconducteurs Ceased WO2009005222A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2007-0065709 2007-06-29
KR1020070065709A KR100867386B1 (ko) 2007-06-29 2007-06-29 반도체 소자 비전 검사 시스템

Publications (1)

Publication Number Publication Date
WO2009005222A1 true WO2009005222A1 (fr) 2009-01-08

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PCT/KR2008/003100 Ceased WO2009005222A1 (fr) 2007-06-29 2008-06-03 Système d'inspection optique pour dispositifs à semiconducteurs

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KR (1) KR100867386B1 (fr)
TW (1) TWI368255B (fr)
WO (1) WO2009005222A1 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US20130287537A1 (en) * 2012-03-27 2013-10-31 Glp Systems Gmbh Specimen archive

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KR101134985B1 (ko) * 2009-03-05 2012-04-09 (주)제이티 비전검사장치
US10076815B2 (en) 2015-04-07 2018-09-18 Canon Kabushiki Kaisha Parts supply apparatus, parts supply method and robot system
JP6679375B2 (ja) * 2015-04-07 2020-04-15 キヤノン株式会社 部品供給装置、ロボットシステム及び部品供給方法
KR102899220B1 (ko) * 2024-02-26 2025-12-11 (주) 루리텍 카메라 모듈 검사를 위한 카메라 모듈 이송 및 고정 장치
KR20250130904A (ko) * 2024-02-26 2025-09-02 (주) 루리텍 카메라 모듈 검사를 위한 카메라 모듈 이송 및 고정 장치
TWI897548B (zh) * 2024-07-23 2025-09-11 鏵友益科技股份有限公司 半導體產線料盒的偵測裝置及其方法

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JPH07187332A (ja) * 1993-12-27 1995-07-25 Ezaki Glico Co Ltd 高速トレーローディング装置
JP2003255636A (ja) * 2001-06-07 2003-09-10 Ricoh Co Ltd 給紙装置及び画像形成装置
KR20060087850A (ko) * 2005-01-31 2006-08-03 (주) 인텍플러스 반도체 소자 검사장치

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KR20010028963A (ko) * 1999-09-28 2001-04-06 윤종용 리드 프레임 걸림 감지부를 갖는 리드 프레임 이송 장치
KR100596505B1 (ko) * 2004-09-08 2006-07-05 삼성전자주식회사 소잉/소팅 시스템

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07187332A (ja) * 1993-12-27 1995-07-25 Ezaki Glico Co Ltd 高速トレーローディング装置
JP2003255636A (ja) * 2001-06-07 2003-09-10 Ricoh Co Ltd 給紙装置及び画像形成装置
KR20060087850A (ko) * 2005-01-31 2006-08-03 (주) 인텍플러스 반도체 소자 검사장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130287537A1 (en) * 2012-03-27 2013-10-31 Glp Systems Gmbh Specimen archive
US9371182B2 (en) * 2012-03-27 2016-06-21 Glp Systems Gmbh Specimen archive

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Publication number Publication date
KR100867386B1 (ko) 2008-11-06
TWI368255B (en) 2012-07-11
TW200908078A (en) 2009-02-16

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