WO2009019006A3 - Dispositif et procédé de réduction de taches dans le domaine des applications laser - Google Patents

Dispositif et procédé de réduction de taches dans le domaine des applications laser Download PDF

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Publication number
WO2009019006A3
WO2009019006A3 PCT/EP2008/006472 EP2008006472W WO2009019006A3 WO 2009019006 A3 WO2009019006 A3 WO 2009019006A3 EP 2008006472 W EP2008006472 W EP 2008006472W WO 2009019006 A3 WO2009019006 A3 WO 2009019006A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser
field
laser applications
reducing speckle
beam axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/006472
Other languages
German (de)
English (en)
Other versions
WO2009019006A2 (fr
Inventor
Dieter Grebner
Rico Fuchs
Alexander Kalies
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Meditec AG
Original Assignee
Carl Zeiss Meditec AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Meditec AG filed Critical Carl Zeiss Meditec AG
Publication of WO2009019006A2 publication Critical patent/WO2009019006A2/fr
Publication of WO2009019006A3 publication Critical patent/WO2009019006A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00804—Refractive treatments
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00814—Laser features or special beam parameters therefor
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00817—Beam shaping with masks
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00804—Refractive treatments
    • A61F9/00806—Correction of higher orders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/0804—Transverse or lateral modes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Surgery (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)

Abstract

La présente invention concerne un dispositif d'amélioration de la qualité de rayons laser pour les applications de retrait, comprenant un laser (1) avec un profil de rayonnement asymétrique, comprenant un premier axe de rayonnement court (20), un deuxième axe de rayonnement long (30), et comprenant au moins un élément optique (10) et/ou un miroir résonateur (11) avec une surface de miroir cylindrique (13) pour la réduction de la cohérence spatiale et/ou l'accroissement de la divergence dans l'axe de rayonnement court.
PCT/EP2008/006472 2007-08-06 2008-08-06 Dispositif et procédé de réduction de taches dans le domaine des applications laser Ceased WO2009019006A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007036988.5 2007-08-06
DE102007036988 2007-08-06
DE102008035898A DE102008035898A1 (de) 2007-08-06 2008-07-31 Vorrichtung und Verfahren zur Specklereduktion im Bereich der Laseranwendungen
DE102008035898.3 2008-07-31

Publications (2)

Publication Number Publication Date
WO2009019006A2 WO2009019006A2 (fr) 2009-02-12
WO2009019006A3 true WO2009019006A3 (fr) 2009-04-16

Family

ID=40227130

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/006472 Ceased WO2009019006A2 (fr) 2007-08-06 2008-08-06 Dispositif et procédé de réduction de taches dans le domaine des applications laser

Country Status (2)

Country Link
DE (1) DE102008035898A1 (fr)
WO (1) WO2009019006A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10667949B2 (en) 2015-10-21 2020-06-02 Amo Development, Llc Laser beam calibration and beam quality measurement in laser surgery systems

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011102166A1 (de) * 2011-05-20 2012-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zu Homogenisierung des Laserstrahlprofils bei Prozessen unter Einsatz eines flüssigkeitsstrahlgeführten Lasers und entsprechende Vorrichtung
CN107851955A (zh) * 2015-08-19 2018-03-27 极光先进雷射株式会社 激光装置
DE102022103899B4 (de) 2022-02-18 2025-03-20 Schwind Eye-Tech-Solutions Gmbh Behandlungsvorrichtung für eine Augenbehandlung, Verfahren, Computerprogramm und computerlesbares Medium
DE102022107633B3 (de) 2022-03-30 2023-06-15 Carl Zeiss Smt Gmbh Optisches System, insbesondere für die Mikrolithographie, sowie Verfahren zum Betreiben eines optischen Systems

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472727A1 (fr) * 1989-05-18 1992-03-04 Kabushiki Kaisha Komatsu Seisakusho Laser excimer a oscillation a bande etroite
DE4225781A1 (de) * 1992-08-04 1994-02-10 Lambda Physik Gmbh Laser mit einem instabilen Resonator
JPH10106927A (ja) * 1996-10-01 1998-04-24 Canon Inc 露光装置及びデバイス製造方法
WO1999001915A1 (fr) * 1997-07-01 1999-01-14 Cymer, Inc. Laser a bande tres etroite
EP1722450A1 (fr) * 2005-05-12 2006-11-15 Innovavent GmbH Laser anamorphotique à disque à l'état solide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684822A (en) 1994-11-17 1997-11-04 Cymer, Inc. Laser system with anamorphic confocal unstable resonator
US5946337A (en) 1998-04-29 1999-08-31 Lambda Physik Gmbh Hybrid laser resonator with special line narrowing
SE0202584D0 (sv) 2002-09-02 2002-09-02 Micronic Laser Systems Ab A Method and device for coherence reduction

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472727A1 (fr) * 1989-05-18 1992-03-04 Kabushiki Kaisha Komatsu Seisakusho Laser excimer a oscillation a bande etroite
DE4225781A1 (de) * 1992-08-04 1994-02-10 Lambda Physik Gmbh Laser mit einem instabilen Resonator
JPH10106927A (ja) * 1996-10-01 1998-04-24 Canon Inc 露光装置及びデバイス製造方法
WO1999001915A1 (fr) * 1997-07-01 1999-01-14 Cymer, Inc. Laser a bande tres etroite
EP1722450A1 (fr) * 2005-05-12 2006-11-15 Innovavent GmbH Laser anamorphotique à disque à l'état solide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10667949B2 (en) 2015-10-21 2020-06-02 Amo Development, Llc Laser beam calibration and beam quality measurement in laser surgery systems
US11896526B2 (en) 2015-10-21 2024-02-13 Amo Development, Llc Laser beam calibration and beam quality measurement in laser surgery systems

Also Published As

Publication number Publication date
DE102008035898A1 (de) 2009-02-12
WO2009019006A2 (fr) 2009-02-12

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