WO2009021202A3 - Apparatus and method for wafer edge defects detection - Google Patents

Apparatus and method for wafer edge defects detection Download PDF

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Publication number
WO2009021202A3
WO2009021202A3 PCT/US2008/072673 US2008072673W WO2009021202A3 WO 2009021202 A3 WO2009021202 A3 WO 2009021202A3 US 2008072673 W US2008072673 W US 2008072673W WO 2009021202 A3 WO2009021202 A3 WO 2009021202A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer edge
defects detection
edge defects
substrate
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2008/072673
Other languages
French (fr)
Other versions
WO2009021202A2 (en
Inventor
Ju Jin
Satish Sadam
Vishal Verma
Zhiyan Huang
Siming Lin
Michael D Robbins
Paul F Forderhase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Accretech USA Inc
Original Assignee
Accretech USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/891,657 external-priority patent/US7508504B2/en
Application filed by Accretech USA Inc filed Critical Accretech USA Inc
Publication of WO2009021202A2 publication Critical patent/WO2009021202A2/en
Publication of WO2009021202A3 publication Critical patent/WO2009021202A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9503—Wafer edge inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system a image processor to automatically detect and characterize defects on the wafer's edge.
PCT/US2008/072673 2007-08-09 2008-08-08 Apparatus and method for wafer edge defects detection Ceased WO2009021202A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US96416307P 2007-08-09 2007-08-09
US11/891,657 US7508504B2 (en) 2006-05-02 2007-08-09 Automatic wafer edge inspection and review system
US11/891,657 2007-08-09
US60/964,163 2007-08-09

Publications (2)

Publication Number Publication Date
WO2009021202A2 WO2009021202A2 (en) 2009-02-12
WO2009021202A3 true WO2009021202A3 (en) 2009-04-09

Family

ID=40342065

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/072673 Ceased WO2009021202A2 (en) 2007-08-09 2008-08-08 Apparatus and method for wafer edge defects detection

Country Status (1)

Country Link
WO (1) WO2009021202A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9239295B2 (en) 2012-04-09 2016-01-19 Kla-Tencor Corp. Variable polarization wafer inspection
CN109001228B (en) * 2018-09-18 2024-02-27 华侨大学 Rotary workbench with backlight illumination for detecting substrate defects
CN111307819B (en) * 2020-03-16 2024-03-08 上海华力微电子有限公司 Wafer edge defect detection system and method
US11921054B2 (en) * 2020-09-16 2024-03-05 Globalwafers Co., Ltd. Cleaved semiconductor wafer camera system
CN114088724B (en) * 2021-11-20 2023-08-18 深圳市北科检测科技有限公司 Display screen edge defect detection device
CN119672426B (en) * 2024-12-02 2025-06-20 苏州新川智能装备有限公司 RFID chip image anomaly detection method and system based on intelligent learning

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5859698A (en) * 1997-05-07 1999-01-12 Nikon Corporation Method and apparatus for macro defect detection using scattered light
US6432800B2 (en) * 2000-02-03 2002-08-13 Selight Co., Ltd. Inspection of defects on the circumference of semiconductor wafers
US6629292B1 (en) * 2000-10-06 2003-09-30 International Business Machines Corporation Method for forming graphical images in semiconductor devices
US20050013474A1 (en) * 2003-07-14 2005-01-20 August Technology Corp. Edge normal process
KR20050024922A (en) * 2003-09-05 2005-03-11 김광렬 Apparatus for detecting a defect on edge area of a wafer and method therefor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5859698A (en) * 1997-05-07 1999-01-12 Nikon Corporation Method and apparatus for macro defect detection using scattered light
US6432800B2 (en) * 2000-02-03 2002-08-13 Selight Co., Ltd. Inspection of defects on the circumference of semiconductor wafers
US6629292B1 (en) * 2000-10-06 2003-09-30 International Business Machines Corporation Method for forming graphical images in semiconductor devices
US20050013474A1 (en) * 2003-07-14 2005-01-20 August Technology Corp. Edge normal process
KR20050024922A (en) * 2003-09-05 2005-03-11 김광렬 Apparatus for detecting a defect on edge area of a wafer and method therefor

Also Published As

Publication number Publication date
WO2009021202A2 (en) 2009-02-12

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