WO2009041307A1 - 光学系のアライメント装置および方法 - Google Patents

光学系のアライメント装置および方法 Download PDF

Info

Publication number
WO2009041307A1
WO2009041307A1 PCT/JP2008/066649 JP2008066649W WO2009041307A1 WO 2009041307 A1 WO2009041307 A1 WO 2009041307A1 JP 2008066649 W JP2008066649 W JP 2008066649W WO 2009041307 A1 WO2009041307 A1 WO 2009041307A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
sub
optical system
alignment device
rear side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/066649
Other languages
English (en)
French (fr)
Inventor
Kenta Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007246440A external-priority patent/JP5170521B2/ja
Priority claimed from JP2007296306A external-priority patent/JP5170525B2/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to EP08834606A priority Critical patent/EP2192433B1/en
Publication of WO2009041307A1 publication Critical patent/WO2009041307A1/ja
Priority to US12/730,673 priority patent/US8085400B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782—Systems for determining direction or deviation from predetermined direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
    • G02B23/06—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors having a focussing action, e.g. parabolic mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment
    • G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optics & Photonics (AREA)
  • Astronomy & Astrophysics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

光軸（ＡＸ）に沿って対向するように配置された主鏡（２１）と副鏡（２２）とを有する光学系において主鏡と副鏡とを位置合わせするためのアライメント装置。副鏡の表側の面に形成されて光学系の使用光を反射し且つアライメント光を透過させるダイクロイック膜（４）と、副鏡の裏側に形成されてアライメント光を反射する裏側反射面（５）と、ダイクロイック膜（４）、裏側反射面（５）、及び主鏡（２１）の反射面を介したアライメント光に基づいて主鏡と副鏡との位置ずれを検出する検出系（６，７，８）とを備えている。
PCT/JP2008/066649 2007-09-25 2008-09-16 光学系のアライメント装置および方法 Ceased WO2009041307A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08834606A EP2192433B1 (en) 2007-09-25 2008-09-16 Alignment device and method for optical system
US12/730,673 US8085400B2 (en) 2007-09-25 2010-03-24 Alignment device and method for optical system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-246440 2007-09-25
JP2007246440A JP5170521B2 (ja) 2007-09-25 2007-09-25 光学系のアライメント装置および方法
JP2007296306A JP5170525B2 (ja) 2007-11-15 2007-11-15 光学系のアライメント装置および方法
JP2007-296306 2007-11-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/730,673 Continuation US8085400B2 (en) 2007-09-25 2010-03-24 Alignment device and method for optical system

Publications (1)

Publication Number Publication Date
WO2009041307A1 true WO2009041307A1 (ja) 2009-04-02

Family

ID=40511194

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066649 Ceased WO2009041307A1 (ja) 2007-09-25 2008-09-16 光学系のアライメント装置および方法

Country Status (3)

Country Link
US (1) US8085400B2 (ja)
EP (1) EP2192433B1 (ja)
WO (1) WO2009041307A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472893B (zh) * 2011-07-27 2015-02-11 Nat Applied Res Laboratories 光學控制系統及其方法
US10145944B1 (en) 2014-05-02 2018-12-04 Kla-Tencor Corporation System and method for LADAR-based optic alignment and characterization
US10133043B1 (en) * 2016-09-05 2018-11-20 Telelens LLC. Compact telephoto lens camera suitable for use in smart phones and similar devices, and methods of using same
FR3074306B1 (fr) * 2017-11-28 2020-06-12 Thales Instrument d'observation comportant un autocollimateur a miroir monte sur viseur d'etoiles
US10725157B1 (en) * 2019-04-05 2020-07-28 Rockwell Automation Technologies, Inc. Industrial safety sensor
CN110989128A (zh) * 2019-11-26 2020-04-10 天津津航技术物理研究所 一种基于光学自定心技术的反射镜装调工装及装调方法
CN112596257B (zh) * 2020-12-30 2021-09-10 中国科学院长春光学精密机械与物理研究所 离轴反射式光学镜头的光轴校准方法
CN113125124A (zh) * 2021-04-22 2021-07-16 中国电子科技集团公司第十一研究所 一种大口径便携式光轴标定装置及光电系统
CN114739640B (zh) * 2022-04-12 2022-12-30 中国科学院光电技术研究所 一种望远镜主次镜实时对准检测系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06337355A (ja) * 1993-05-31 1994-12-06 Canon Inc 光通信光学装置
JP2000121724A (ja) 1998-10-16 2000-04-28 Mitsubishi Electric Corp レーザレーダ装置
JP2002318157A (ja) * 2001-04-24 2002-10-31 Nec Corp 電磁波検出装置
WO2003027621A2 (en) * 2001-09-28 2003-04-03 Raytheon Company High-power beam control with wavefront correction utilizing phase conjugation and adaptive optics
US20060279838A1 (en) 2004-08-11 2006-12-14 Agency For Defense Development Large telescopic optical system with null alignment optics

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2401706A (en) * 1943-03-13 1946-06-04 Eastman Kodak Co Range finder
US3326619A (en) * 1963-10-07 1967-06-20 Philco Ford Corp Gyro stabilized sight system utilizing a mirror with front and back reflecting surfaces
US3471237A (en) * 1966-02-15 1969-10-07 Barnes Eng Co Method of alignment of concave parabolic reflective optics
US4146329A (en) * 1977-09-14 1979-03-27 The United States Of America As Represented By The Secretary Of The Navy Autoalignment system for high power laser
JP3120885B2 (ja) * 1991-01-22 2000-12-25 旭光学工業株式会社 鏡面の測定装置
US5347387A (en) * 1992-03-24 1994-09-13 Rice Robert C Self-aligning optical transceiver
US5198653A (en) * 1992-05-04 1993-03-30 Hughes Aircraft Company Wide FOV retro-null outgoing wavefront sensor
US5710652A (en) * 1992-08-27 1998-01-20 Trex Communications Laser communication transceiver and system
JPH0820510B2 (ja) * 1993-01-19 1996-03-04 株式会社エイ・ティ・アール光電波通信研究所 光通信機光学系のアライメント調整システム
US5513000A (en) * 1993-07-26 1996-04-30 Princeton Scientific Instruments Inc. Autocollimator
JP3947455B2 (ja) * 2002-11-11 2007-07-18 ペンタックス株式会社 自動視準機能と測距機能を有する測量機
US7277223B2 (en) * 2004-07-26 2007-10-02 Meade Instruments Corporation Apparatus and methods for focusing and collimating telescopes
US7595942B2 (en) * 2007-03-02 2009-09-29 Koenig Dean B Light collimating system for schmidt-cassegrain telescope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06337355A (ja) * 1993-05-31 1994-12-06 Canon Inc 光通信光学装置
JP2000121724A (ja) 1998-10-16 2000-04-28 Mitsubishi Electric Corp レーザレーダ装置
JP2002318157A (ja) * 2001-04-24 2002-10-31 Nec Corp 電磁波検出装置
WO2003027621A2 (en) * 2001-09-28 2003-04-03 Raytheon Company High-power beam control with wavefront correction utilizing phase conjugation and adaptive optics
US20060279838A1 (en) 2004-08-11 2006-12-14 Agency For Defense Development Large telescopic optical system with null alignment optics

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2192433A4 *

Also Published As

Publication number Publication date
EP2192433A1 (en) 2010-06-02
EP2192433A4 (en) 2011-03-23
US8085400B2 (en) 2011-12-27
US20100177315A1 (en) 2010-07-15
EP2192433B1 (en) 2012-12-26

Similar Documents

Publication Publication Date Title
WO2009041307A1 (ja) 光学系のアライメント装置および方法
TW200801611A (en) Reflective polarizer with polarization splitting microstructure
WO2008063528A3 (en) Control of stray light in camera systems employing an optics stack and associated methods
WO2007093983A3 (en) Substrate-guided imaging lens
WO2013019371A8 (en) Method and apparatus for a near-to-eye display
WO2008156163A1 (ja) 実鏡映像結像光学系
WO2009074638A3 (fr) Guide optique et systeme optique de vision oculaire
WO2010027593A3 (en) Optical relay for compact head up display
WO2006102415A3 (en) Optical camera alignment
WO2007016199A3 (en) Polarizing beam splitter with lens function
WO2008079578A3 (en) Stereoscopic endoscope
WO2008129539A3 (en) A collimating optical device and system
WO2010006102A3 (en) Retroreflective articles and devices having viscoelastic lightguide
US20090034069A1 (en) Polarization conversion device and projector using same
WO2006091873A3 (en) Manufacturing methods for embedded optical system
EP2103980A3 (en) Projection optical system and image display device
EP2733535A3 (en) Surface position detection apparatus, exposure apparatus, and exposure method
WO2008084584A1 (ja) 光導波路素子および偏光分離方法
WO2008108423A1 (ja) 位置計測モジュール、位置計測装置、ステージ装置、露光装置及びデバイス製造方法
WO2009082171A3 (en) Optical member
WO2007014125A3 (en) Optical wavelength division coupler and associated methods
WO2008090945A1 (ja) 光学シートならびにそれを用いた実装方法および光学モジュール
WO2009048100A1 (ja) 光学ユニットおよび投写型表示装置
JP2009199065A5 (ja)
WO2006127886A3 (en) Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08834606

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2008834606

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE