WO2009103277A3 - Verfahren und vorrichtung zum befördern und drehen stossempfindlicher platten in reinsträumen - Google Patents

Verfahren und vorrichtung zum befördern und drehen stossempfindlicher platten in reinsträumen Download PDF

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Publication number
WO2009103277A3
WO2009103277A3 PCT/DE2009/000227 DE2009000227W WO2009103277A3 WO 2009103277 A3 WO2009103277 A3 WO 2009103277A3 DE 2009000227 W DE2009000227 W DE 2009000227W WO 2009103277 A3 WO2009103277 A3 WO 2009103277A3
Authority
WO
WIPO (PCT)
Prior art keywords
rollers
roller conveyor
conveying
glass panel
clean rooms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2009/000227
Other languages
English (en)
French (fr)
Other versions
WO2009103277A2 (de
Inventor
Roland Franz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grenzebach Maschinenbau GmbH
Original Assignee
Grenzebach Maschinenbau GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grenzebach Maschinenbau GmbH filed Critical Grenzebach Maschinenbau GmbH
Priority to US12/918,147 priority Critical patent/US8312981B2/en
Priority to KR1020107020678A priority patent/KR101253829B1/ko
Priority to CN2009801059584A priority patent/CN101946314B/zh
Priority to JP2010547041A priority patent/JP5334999B2/ja
Priority to DE112009000937T priority patent/DE112009000937A5/de
Publication of WO2009103277A2 publication Critical patent/WO2009103277A2/de
Publication of WO2009103277A3 publication Critical patent/WO2009103277A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3208—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Relays Between Conveyors (AREA)

Abstract

Verfahren und Vorrichtung zum kontaminationsfreien, bahngenauen Befördern und Drehen in einer Ebene von dünnen, stoßempfindlichen, kristallinen Platten, insbesondere Glasplatten, mit den folgenden Merkmalen: a) eine Glasplatte (6) wird über parallel gelagerte, Laufachsen (9) eines Rollenförderers befördert, wobei sich auf der Oberfläche der Laufrollen einem Gewinde ähnliche Strukturen befinden, b) für eine Laufrichtungsänderung einer Glasplatte (6) sind im entsprechenden Bereich des Rollenförderers im Freiraum zwischen den Rollen (8) zusätzliche, weitere Rollen (7) vorgesehen, die mittels einer Hebevorrichtung über das Niveau des Rollenförderers gehoben werden, c) für eine laufrichtungsunabhängige Drehung einer Glasplatte (6) sind im entsprechenden Bereich des Rollenförderers im Freiraum zwischen den Rollen (8) zusätzliche weitere Rollen (10) vorgesehen.
PCT/DE2009/000227 2008-02-21 2009-02-18 Verfahren und vorrichtung zum befördern und drehen stossempfindlicher platten in reinsträumen Ceased WO2009103277A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US12/918,147 US8312981B2 (en) 2008-02-21 2009-02-18 Method and device for conveying and rotating impact-sensitive panels in ultra clean rooms
KR1020107020678A KR101253829B1 (ko) 2008-02-21 2009-02-18 극청정실에서 충격 민감성 패널을 이송 및 회전시키기 위한 장치 및 방법
CN2009801059584A CN101946314B (zh) 2008-02-21 2009-02-18 无污染且精密路径地传送和旋转薄型压敏晶体面板的方法和设备
JP2010547041A JP5334999B2 (ja) 2008-02-21 2009-02-18 超クリーンルーム内において弱衝撃性の板を運搬及び回転するための方法及び装置
DE112009000937T DE112009000937A5 (de) 2008-02-21 2009-02-18 Verfahren und Vorrichtung zum Befördern und Drehen stossempfinglicher Platten in Reinsträumen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008010317.9 2008-02-21
DE102008010317A DE102008010317A1 (de) 2008-02-21 2008-02-21 Verfahren und Vorrichtung zum Befördern und Drehen stoßempfindlicher Platten in Reinsträumen

Publications (2)

Publication Number Publication Date
WO2009103277A2 WO2009103277A2 (de) 2009-08-27
WO2009103277A3 true WO2009103277A3 (de) 2009-12-03

Family

ID=40911194

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2009/000227 Ceased WO2009103277A2 (de) 2008-02-21 2009-02-18 Verfahren und vorrichtung zum befördern und drehen stossempfindlicher platten in reinsträumen

Country Status (6)

Country Link
US (1) US8312981B2 (de)
JP (1) JP5334999B2 (de)
KR (1) KR101253829B1 (de)
CN (1) CN101946314B (de)
DE (2) DE102008010317A1 (de)
WO (1) WO2009103277A2 (de)

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DE202010002285U1 (de) * 2010-02-12 2011-08-23 Ligmatech Automationssysteme Gmbh Vorrichtung zum Rückführen von bearbeiteten Werkstücken
CN101966911A (zh) * 2010-07-30 2011-02-09 天润曲轴股份有限公司 一种输送辊道
US8899407B2 (en) * 2010-08-03 2014-12-02 J&L Group International, Llc System and method for orienting bundles
CN102442767B (zh) * 2011-08-19 2014-03-19 深圳市华星光电技术有限公司 切割机及其对面板进行对位的方法
CN102583050B (zh) * 2012-02-07 2014-05-21 深圳市华星光电技术有限公司 液晶面板基材的运输控制设备及其控制方法
CN102730401B (zh) * 2012-06-26 2014-04-02 深圳市华星光电技术有限公司 基板中转装置及基板搬运系统
ITRM20120452A1 (it) * 2012-09-20 2014-03-21 Artecon Sagl D Sistema convogliatore a rulli.
JP6187469B2 (ja) * 2012-10-12 2017-08-30 旭硝子株式会社 ガラス板搬送装置及びガラス板搬送方法
US9205995B2 (en) 2013-10-21 2015-12-08 International Business Machines Corporation Sorting, swapping, and organizing objects on transfer ball grids
EP3064455A4 (de) * 2013-10-28 2017-06-21 Murata Machinery, Ltd. Fördervorrichtung
KR101962787B1 (ko) * 2013-12-23 2019-03-27 어플라이드 머티어리얼스, 인코포레이티드 진공 프로세스 동안 기판을 유지하기 위한 유지 배열체, 기판 상에 층을 증착시키기 위한 장치, 및 유지 배열체를 컨베잉하기 위한 방법
US9669886B2 (en) 2015-02-02 2017-06-06 Caterpillar Inc. Wear sensing device for a carrier roller
JP6706745B2 (ja) * 2015-02-06 2020-06-10 伊東電機株式会社 移載装置
CN106044143A (zh) * 2016-08-24 2016-10-26 天能电池集团（安徽）有限公司 一种蓄电池自动翻转装置
CN109302798A (zh) * 2017-07-25 2019-02-01 深圳市欧亚建设工程有限公司 薄板支撑结构
KR101892114B1 (ko) * 2018-03-28 2018-09-28 주식회사 에이치비테크놀러지 패널 반송 장치
KR101909861B1 (ko) * 2018-05-31 2018-10-18 윤남수 판유리 이송장치
US10941004B2 (en) * 2018-12-13 2021-03-09 Cornerstone Automation Systems, Llc Level right angle transfer module
CN110861899A (zh) * 2019-12-11 2020-03-06 浙江亚厦装饰股份有限公司 一种板材传送加工系统和板材传送及加工方法
CN114084574B (zh) * 2020-05-27 2024-05-03 广东原点智能技术有限公司 托盘和工件的类型识别结构及配对判定方法
CN113636311A (zh) * 2021-07-12 2021-11-12 广东邦普循环科技有限公司 用于输送机的转向装置
CN116092995B (zh) * 2023-01-17 2026-07-03 苏州桔云科技有限公司 一种晶圆传输装置
CN116424818A (zh) * 2023-03-31 2023-07-14 武汉华工激光工程有限责任公司 一种对中装置、物料转移装置和解包机
CN116727266B (zh) * 2023-08-11 2023-10-20 达州市雅森环保建材有限公司 一种玻璃深加工分选设备及分选方法

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US3680677A (en) * 1969-09-19 1972-08-01 Pilkington Brothers Ltd Conveying of glass sheets
FR2156855A1 (de) * 1971-10-21 1973-06-01 Reuter Maschinen
US4312444A (en) * 1979-10-12 1982-01-26 Mushovic John N Conveyor roller
EP0546424A1 (de) * 1991-12-13 1993-06-16 Bobst S.A. Einrichtung zum Handhaben und Ausrichten von gebündelten flachen Gegenständen
DE19620493A1 (de) * 1996-05-21 1997-11-27 Holzma Maschinenbau Gmbh Hubvorrichtung für Rollenschienen von Rollentischen
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
DE102004012043A1 (de) * 2004-03-11 2005-09-29 Siemens Ag Vorrichtung und Verfahren zum lagegerechten Übergeben von quaderförmigen Waren
DE69827983T2 (de) * 1997-02-14 2005-11-24 Noritsu Koki Co., Ltd. Transportrolle und Verfahren zu deren Herstellung
DE202007015168U1 (de) * 2007-10-31 2007-12-27 Grenzebach Maschinenbau Gmbh Vorrichtung zur kontaminationsfreien Behandlung stoßempfindlicher Glasplatten in Reinsträumen

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JP4784416B2 (ja) 2006-07-11 2011-10-05 株式会社ダイフク 板状体整列設備
DE102007052027B3 (de) 2007-10-31 2009-04-16 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur kontaminationsfreien Behandlung stoßempfindlicher Glasplatten in Reinsträumen

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3680677A (en) * 1969-09-19 1972-08-01 Pilkington Brothers Ltd Conveying of glass sheets
FR2156855A1 (de) * 1971-10-21 1973-06-01 Reuter Maschinen
US4312444A (en) * 1979-10-12 1982-01-26 Mushovic John N Conveyor roller
EP0546424A1 (de) * 1991-12-13 1993-06-16 Bobst S.A. Einrichtung zum Handhaben und Ausrichten von gebündelten flachen Gegenständen
DE19620493A1 (de) * 1996-05-21 1997-11-27 Holzma Maschinenbau Gmbh Hubvorrichtung für Rollenschienen von Rollentischen
DE69827983T2 (de) * 1997-02-14 2005-11-24 Noritsu Koki Co., Ltd. Transportrolle und Verfahren zu deren Herstellung
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
DE102004012043A1 (de) * 2004-03-11 2005-09-29 Siemens Ag Vorrichtung und Verfahren zum lagegerechten Übergeben von quaderförmigen Waren
DE202007015168U1 (de) * 2007-10-31 2007-12-27 Grenzebach Maschinenbau Gmbh Vorrichtung zur kontaminationsfreien Behandlung stoßempfindlicher Glasplatten in Reinsträumen

Also Published As

Publication number Publication date
US20100326792A1 (en) 2010-12-30
KR101253829B1 (ko) 2013-04-12
WO2009103277A2 (de) 2009-08-27
US8312981B2 (en) 2012-11-20
KR20100113640A (ko) 2010-10-21
JP5334999B2 (ja) 2013-11-06
DE112009000937A5 (de) 2011-01-20
DE102008010317A1 (de) 2009-09-03
CN101946314B (zh) 2012-07-18
CN101946314A (zh) 2011-01-12
JP2011512310A (ja) 2011-04-21

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