WO2009143522A3 - Preamplifying cantilever and applications thereof - Google Patents

Preamplifying cantilever and applications thereof Download PDF

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Publication number
WO2009143522A3
WO2009143522A3 PCT/US2009/045177 US2009045177W WO2009143522A3 WO 2009143522 A3 WO2009143522 A3 WO 2009143522A3 US 2009045177 W US2009045177 W US 2009045177W WO 2009143522 A3 WO2009143522 A3 WO 2009143522A3
Authority
WO
WIPO (PCT)
Prior art keywords
motion
resonant
contact point
preamplifying
cantilever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/045177
Other languages
French (fr)
Other versions
WO2009143522A2 (en
WO2009143522A4 (en
Inventor
Kumar Virwani
Bede Pittenger
Benedikt Zeyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Priority to CN2009801285138A priority Critical patent/CN103443631A/en
Priority to EP09751750A priority patent/EP2283486A2/en
Publication of WO2009143522A2 publication Critical patent/WO2009143522A2/en
Publication of WO2009143522A3 publication Critical patent/WO2009143522A3/en
Publication of WO2009143522A4 publication Critical patent/WO2009143522A4/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Aspects of the invention are directed to piezoresponse force analysis of a material. A stimulus signal including a first frequency component is applied to a contact point on the material such that the stimulus signal actuates a portion of the material to experience a motion as a result of a piezoelectric effect. A resonant device is coupled to the contact point such that the resonant device experiences a resonant motion at the first frequency component in response to the motion of the material, the resonant motion having a greater displacement than a displacement of the motion of the material, and is substantially unaffected by mechanical properties of the material at the contact point. The resonant motion of the resonant device is detected and processed to produce a measurement representing the piezoresponse of the material at the contact point.
PCT/US2009/045177 2008-05-23 2009-05-26 Preamplifying cantilever and applications thereof Ceased WO2009143522A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2009801285138A CN103443631A (en) 2008-05-23 2009-05-26 Preamplified Cantilever and Its Application
EP09751750A EP2283486A2 (en) 2008-05-23 2009-05-26 Preamplifying cantilever and applications thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5592508P 2008-05-23 2008-05-23
US61/055,925 2008-05-23

Publications (3)

Publication Number Publication Date
WO2009143522A2 WO2009143522A2 (en) 2009-11-26
WO2009143522A3 true WO2009143522A3 (en) 2010-03-04
WO2009143522A4 WO2009143522A4 (en) 2010-06-03

Family

ID=41340956

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/045177 Ceased WO2009143522A2 (en) 2008-05-23 2009-05-26 Preamplifying cantilever and applications thereof

Country Status (4)

Country Link
US (1) US7979916B2 (en)
EP (1) EP2283486A2 (en)
CN (1) CN103443631A (en)
WO (1) WO2009143522A2 (en)

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JP2007106745A (en) * 2005-09-16 2007-04-26 Bayer Cropscience Ag Utilization of sulfonanilide compounds as herbicide
US8646111B2 (en) * 2006-02-14 2014-02-04 The Regents Of The University Of California Coupled mass-spring systems and imaging methods for scanning probe microscopy
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US9977050B2 (en) * 2009-11-06 2018-05-22 Swisslitho Ag Wear-less operation of a material surface with a scanning probe microscope
US8689358B2 (en) * 2010-06-28 2014-04-01 International Business Machines Corporation Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
FR2983844B1 (en) * 2011-12-12 2014-08-08 Commissariat Energie Atomique PIVOT MECHANICAL BONDING FOR MEMS AND NEMS MECHANICAL STRUCTURES
US9316665B2 (en) * 2013-04-22 2016-04-19 Freescale Semicondcutor, Inc. Estimation of sidewall skew angles of a structure
US20150089693A1 (en) * 2013-09-24 2015-03-26 Ut-Battelle, Llc Multi-resonant detection system for atomic force microscopy
CN105510636B (en) * 2014-09-24 2018-06-26 中国科学院宁波材料技术与工程研究所 A kind of nano magnetic-electric-thermal many reference amounts coupling in-situ detecting system and its detection method
DE102015224938B4 (en) 2014-12-12 2021-09-23 Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e.V. (IFW Dresden e.V.) Method and device for determining force fields, force field gradients, material properties or masses with a system of coupled, vibratory, beam-like components
CN105137125B (en) * 2015-08-31 2018-11-13 电子科技大学 A kind of double frequency multi-channel synchronous detection method for electricdomain imaging
US10656175B2 (en) * 2017-02-14 2020-05-19 Ohio State Innovation Foundation Cantilever for atomic force microscopy
CN108802431B (en) * 2017-05-04 2021-04-30 中国科学院宁波材料技术与工程研究所 Detection method of scanning probe microscope with magnetic-electric signal detection function
EP3404424A1 (en) * 2017-05-15 2018-11-21 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample
CN109282750B (en) * 2017-07-21 2020-10-16 镱钛科技股份有限公司 Optical measurement system, optical measurement device and measurement method thereof
CN108072580A (en) * 2018-01-30 2018-05-25 吉林大学 Piezoelectric Driving impact indentation test device
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
US20250277809A1 (en) * 2024-02-29 2025-09-04 Bruker Nano, Inc. Probe-Based Instrument and Method Using Torsional Oscillation Sensing

Citations (4)

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US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5406832A (en) * 1993-07-02 1995-04-18 Topometrix Corporation Synchronous sampling scanning force microscope
US5625142A (en) * 1993-04-28 1997-04-29 Topometrix Corporation Resonance contact scanning force microscope
US6249000B1 (en) * 1997-08-04 2001-06-19 Seiko Instruments Inc. Scanning probe microscope

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JP3995819B2 (en) 1999-01-18 2007-10-24 エスアイアイ・ナノテクノロジー株式会社 Scanning probe microscope
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JP4510277B2 (en) * 2000-12-15 2010-07-21 エスアイアイ・ナノテクノロジー株式会社 Scanning probe microscope
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US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
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US7089787B2 (en) 2004-07-08 2006-08-15 Board Of Trustees Of The Leland Stanford Junior University Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
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US7420106B2 (en) * 2005-03-18 2008-09-02 The University Of Utah Research Foundation Scanning probe characterization of surfaces
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US8646111B2 (en) * 2006-02-14 2014-02-04 The Regents Of The University Of California Coupled mass-spring systems and imaging methods for scanning probe microscopy
TWI293682B (en) 2006-02-24 2008-02-21 Yuan Jay Wang Multipurpose micro cantilever sensing sensitivity control device
US7603891B2 (en) 2006-04-25 2009-10-20 Asylum Research Corporation Multiple frequency atomic force microscopy
US7775086B2 (en) 2006-09-01 2010-08-17 Ut-Battelle, Llc Band excitation method applicable to scanning probe microscopy
US8024963B2 (en) 2006-10-05 2011-09-27 Asylum Research Corporation Material property measurements using multiple frequency atomic force microscopy
US8001830B2 (en) 2007-05-15 2011-08-23 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
US7796493B2 (en) 2007-08-10 2010-09-14 Intel Corporation Cantilever on cantilever structure
US20090168636A1 (en) * 2007-12-31 2009-07-02 Tsung-Kuan Allen Chou Cantilever design with electrostatic-force-modulated piezoresponse force microscopy (pfm) sensing

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Publication number Priority date Publication date Assignee Title
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5625142A (en) * 1993-04-28 1997-04-29 Topometrix Corporation Resonance contact scanning force microscope
US5406832A (en) * 1993-07-02 1995-04-18 Topometrix Corporation Synchronous sampling scanning force microscope
US6249000B1 (en) * 1997-08-04 2001-06-19 Seiko Instruments Inc. Scanning probe microscope

Also Published As

Publication number Publication date
WO2009143522A2 (en) 2009-11-26
US20100017923A1 (en) 2010-01-21
US7979916B2 (en) 2011-07-12
EP2283486A2 (en) 2011-02-16
CN103443631A (en) 2013-12-11
WO2009143522A4 (en) 2010-06-03

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