WO2009145442A3 - Appareil de fabrication d'un mince film métallique et procédé de fabrication de ce film mince métallique au moyen dudit appareil - Google Patents

Appareil de fabrication d'un mince film métallique et procédé de fabrication de ce film mince métallique au moyen dudit appareil Download PDF

Info

Publication number
WO2009145442A3
WO2009145442A3 PCT/KR2009/001627 KR2009001627W WO2009145442A3 WO 2009145442 A3 WO2009145442 A3 WO 2009145442A3 KR 2009001627 W KR2009001627 W KR 2009001627W WO 2009145442 A3 WO2009145442 A3 WO 2009145442A3
Authority
WO
WIPO (PCT)
Prior art keywords
thin film
metal thin
metal
forming
microwaves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2009/001627
Other languages
English (en)
Korean (ko)
Other versions
WO2009145442A2 (fr
Inventor
정광춘
조현남
문대규
강민기
서원규
유지훈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InkTec Co Ltd
Original Assignee
InkTec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InkTec Co Ltd filed Critical InkTec Co Ltd
Priority to CN2009801119960A priority Critical patent/CN101983259B/zh
Publication of WO2009145442A2 publication Critical patent/WO2009145442A2/fr
Publication of WO2009145442A3 publication Critical patent/WO2009145442A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D17/00—Pigment pastes, e.g. for mixing in paints
    • C09D17/004—Pigment pastes, e.g. for mixing in paints containing an inorganic pigment
    • C09D17/006—Metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Appareil de fabrication d'un mince film métallique par frittage rapide d'une composition contenant un métal, formée sur un substrat ou analogue, par chauffage indirect aux micro-ondes, et procédé de fabrication d'un tel film au moyen dudit appareil. Cet appareil comprend les éléments constitutifs suivants: coque de protection; au moins une unité de production de micro-ondes disposée dans la coque de protection; et au moins une plaque d'absorption des micro-ondes disposée à l'écart de l'unité de production de micro-ondes et conçue pour chauffer indirectement par micro-ondes la composition contenant un métal. La plaque d'absorption des micro-ondes est constituée d'un corps principal recouvert d'un film transparent. Le procédé de fabrication de l'invention recouvre les opérations suivantes: déplacement du substrat à proximité ou contre la plaque d'absorption des micro-ondes; traitement thermique par frittage de la composition contenant un métal par chauffage indirect aux micro-ondes dans le but de former un mince film métallique ou un motif.
PCT/KR2009/001627 2008-03-31 2009-03-31 Appareil de fabrication d'un mince film métallique et procédé de fabrication de ce film mince métallique au moyen dudit appareil Ceased WO2009145442A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009801119960A CN101983259B (zh) 2008-03-31 2009-03-31 金属薄膜形成装置和使用该装置的金属薄膜形成方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080029654A KR100976264B1 (ko) 2008-03-31 2008-03-31 금속 박막 형성 장치 및 이를 이용한 금속 박막 형성 방법
KR10-2008-0029654 2008-03-31

Publications (2)

Publication Number Publication Date
WO2009145442A2 WO2009145442A2 (fr) 2009-12-03
WO2009145442A3 true WO2009145442A3 (fr) 2010-01-21

Family

ID=41377707

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/001627 Ceased WO2009145442A2 (fr) 2008-03-31 2009-03-31 Appareil de fabrication d'un mince film métallique et procédé de fabrication de ce film mince métallique au moyen dudit appareil

Country Status (3)

Country Link
KR (1) KR100976264B1 (fr)
CN (1) CN101983259B (fr)
WO (1) WO2009145442A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101154335B1 (ko) * 2010-06-09 2012-06-13 강원대학교산학협력단 급속열처리 공정을 이용한 결정질 산화 주석 분말의 제조 방법
KR101831378B1 (ko) 2011-05-24 2018-02-23 삼성전자 주식회사 반도체 제조 장치
CN102641823B (zh) * 2012-05-14 2015-10-28 中国科学院微电子研究所 一种微波匀胶装置及匀胶方法
JP6945120B2 (ja) * 2014-08-29 2021-10-06 株式会社Flosfia 金属膜形成方法
CN109167161B (zh) * 2018-08-27 2021-05-14 深圳市嘉姆特通信电子有限公司 无线通信天线制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920005624B1 (en) * 1987-09-30 1992-07-10 Sumitomo Metal Ind Thin film forming apparatus
JPH09148308A (ja) * 1995-11-22 1997-06-06 Hitachi Ltd 半導体製造装置
JP2007084896A (ja) * 2005-09-26 2007-04-05 Tohoku Univ 窒化物コーティング法
KR20080029822A (ko) * 2006-09-29 2008-04-03 도와 일렉트로닉스 가부시키가이샤 투명 도전막 및 그 제조 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100727434B1 (ko) * 2005-03-04 2007-06-13 주식회사 잉크테크 투명 은 잉크 조성물 및 이를 이용한 박막 형성방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920005624B1 (en) * 1987-09-30 1992-07-10 Sumitomo Metal Ind Thin film forming apparatus
JPH09148308A (ja) * 1995-11-22 1997-06-06 Hitachi Ltd 半導体製造装置
JP2007084896A (ja) * 2005-09-26 2007-04-05 Tohoku Univ 窒化物コーティング法
KR20080029822A (ko) * 2006-09-29 2008-04-03 도와 일렉트로닉스 가부시키가이샤 투명 도전막 및 그 제조 방법

Also Published As

Publication number Publication date
KR100976264B1 (ko) 2010-08-18
CN101983259A (zh) 2011-03-02
CN101983259B (zh) 2013-05-01
WO2009145442A2 (fr) 2009-12-03
KR20090104296A (ko) 2009-10-06

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